JP2005533174A5 - - Google Patents
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- Publication number
- JP2005533174A5 JP2005533174A5 JP2003566273A JP2003566273A JP2005533174A5 JP 2005533174 A5 JP2005533174 A5 JP 2005533174A5 JP 2003566273 A JP2003566273 A JP 2003566273A JP 2003566273 A JP2003566273 A JP 2003566273A JP 2005533174 A5 JP2005533174 A5 JP 2005533174A5
- Authority
- JP
- Japan
- Prior art keywords
- gas
- support
- electrode
- less
- working gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims 17
- 238000000034 method Methods 0.000 claims 10
- 239000011248 coating agent Substances 0.000 claims 6
- 238000000576 coating method Methods 0.000 claims 6
- 239000000203 mixture Substances 0.000 claims 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 239000012159 carrier gas Substances 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims 1
- 239000003570 air Substances 0.000 claims 1
- 229910052786 argon Inorganic materials 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 230000004888 barrier function Effects 0.000 claims 1
- 238000011437 continuous method Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 239000001307 helium Substances 0.000 claims 1
- 229910052734 helium Inorganic materials 0.000 claims 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 1
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims 1
- 125000005375 organosiloxane group Chemical group 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 238000006116 polymerization reaction Methods 0.000 claims 1
- UHUUYVZLXJHWDV-UHFFFAOYSA-N trimethyl(methylsilyloxy)silane Chemical compound C[SiH2]O[Si](C)(C)C UHUUYVZLXJHWDV-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US35490502P | 2002-02-05 | 2002-02-05 | |
| US40864002P | 2002-09-06 | 2002-09-06 | |
| PCT/US2003/003057 WO2003066932A1 (en) | 2002-02-05 | 2003-02-03 | Corona-generated chemical vapor deposition on a substrate |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005533174A JP2005533174A (ja) | 2005-11-04 |
| JP2005533174A5 true JP2005533174A5 (enExample) | 2005-12-22 |
| JP4494792B2 JP4494792B2 (ja) | 2010-06-30 |
Family
ID=27737478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003566273A Expired - Lifetime JP4494792B2 (ja) | 2002-02-05 | 2003-02-03 | 支持体上へのコロナによる化学蒸着 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US6815014B2 (enExample) |
| EP (1) | EP1472387B1 (enExample) |
| JP (1) | JP4494792B2 (enExample) |
| CN (1) | CN100432289C (enExample) |
| AT (1) | ATE402277T1 (enExample) |
| AU (1) | AU2003207794A1 (enExample) |
| DE (1) | DE60322347D1 (enExample) |
| WO (1) | WO2003066932A1 (enExample) |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8586149B2 (en) | 2003-06-18 | 2013-11-19 | Ford Global Technologies, Llc | Environmentally friendly reactive fixture to allow localized surface engineering for improved adhesion to coated and non-coated substrates |
| WO2005049228A2 (en) * | 2003-09-09 | 2005-06-02 | Dow Global Technologies Inc. | Glow discharge-generated chemical vapor deposition |
| DE102004029466A1 (de) * | 2004-06-18 | 2006-01-05 | Leybold Optics Gmbh | Medieninjektor |
| KR20070057200A (ko) * | 2004-09-27 | 2007-06-04 | 다우 글로벌 테크놀로지스 인크. | 플라즈마 강화 화학 기상 증착에 의한 다층 코팅 |
| EP1807548A2 (en) * | 2004-10-29 | 2007-07-18 | Dow Gloval Technologies Inc. | Abrasion resistant coatings by plasma enhanced chemical vapor deposition |
| CA2582302A1 (en) * | 2004-10-29 | 2006-05-11 | Dow Global Technologies Inc. | Improved deposition rate plasma enhanced chemical vapor process |
| US20080268252A1 (en) * | 2005-09-20 | 2008-10-30 | Juan Garces | Process for Plasma Coating a Nanocomposite Object |
| US7517561B2 (en) * | 2005-09-21 | 2009-04-14 | Ford Global Technologies, Llc | Method of coating a substrate for adhesive bonding |
| TW200814170A (en) * | 2006-09-13 | 2008-03-16 | Ind Tech Res Inst | Method of adjusting surface characteristic of a substrate |
| TWI275658B (en) * | 2006-09-13 | 2007-03-11 | Ind Tech Res Inst | Method of improving surface frame resistance of a substrate |
| CN101772588A (zh) * | 2007-07-30 | 2010-07-07 | 陶氏环球技术公司 | 大气压等离子体增强化学气相沉积方法 |
| KR100962044B1 (ko) * | 2007-12-06 | 2010-06-08 | 성균관대학교산학협력단 | 저유전 플라즈마 중합체 박막 및 그 제조 방법 |
| JP2012517529A (ja) * | 2009-02-12 | 2012-08-02 | フジフィルム・マニュファクチュアリング・ヨーロッパ・ベスローテン・フエンノートシャップ | ポリマー基材上の２層バリヤー |
| US7985188B2 (en) | 2009-05-13 | 2011-07-26 | Cv Holdings Llc | Vessel, coating, inspection and processing apparatus |
| DK2251454T3 (da) | 2009-05-13 | 2014-10-13 | Sio2 Medical Products Inc | Coating og inspektion af beholder |
| DE102009030303A1 (de) * | 2009-06-24 | 2010-12-30 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung von Antireflexschicht-bildenden Beschichtungen sowie Antireflexbeschichtungen |
| US9458536B2 (en) | 2009-07-02 | 2016-10-04 | Sio2 Medical Products, Inc. | PECVD coating methods for capped syringes, cartridges and other articles |
| US9488927B2 (en) | 2010-04-30 | 2016-11-08 | Hewlett-Packard Development Company, L.P. | Printing systems and methods of using such printing systems |
| US11624115B2 (en) | 2010-05-12 | 2023-04-11 | Sio2 Medical Products, Inc. | Syringe with PECVD lubrication |
| US9878101B2 (en) | 2010-11-12 | 2018-01-30 | Sio2 Medical Products, Inc. | Cyclic olefin polymer vessels and vessel coating methods |
| US9272095B2 (en) | 2011-04-01 | 2016-03-01 | Sio2 Medical Products, Inc. | Vessels, contact surfaces, and coating and inspection apparatus and methods |
| EP2589366A1 (de) * | 2011-11-07 | 2013-05-08 | IDT Biologika GmbH | Biologisch abbaubare Folienverpackung für orale Biologika |
| AU2012318242A1 (en) | 2011-11-11 | 2013-05-30 | Sio2 Medical Products, Inc. | Passivation, pH protective or lubricity coating for pharmaceutical package, coating process and apparatus |
| US11116695B2 (en) | 2011-11-11 | 2021-09-14 | Sio2 Medical Products, Inc. | Blood sample collection tube |
| US8945418B2 (en) * | 2011-11-16 | 2015-02-03 | The United States Of America, As Represented By The Secretary Of The Navy | Melt stabilization and vapor-phase synthesis of cesium germanium halides |
| EP2846755A1 (en) | 2012-05-09 | 2015-03-18 | SiO2 Medical Products, Inc. | Saccharide protective coating for pharmaceutical package |
| US20150297800A1 (en) | 2012-07-03 | 2015-10-22 | Sio2 Medical Products, Inc. | SiOx BARRIER FOR PHARMACEUTICAL PACKAGE AND COATING PROCESS |
| CA2890066C (en) | 2012-11-01 | 2021-11-09 | Sio2 Medical Products, Inc. | Coating inspection method |
| WO2014078666A1 (en) | 2012-11-16 | 2014-05-22 | Sio2 Medical Products, Inc. | Method and apparatus for detecting rapid barrier coating integrity characteristics |
| US9764093B2 (en) | 2012-11-30 | 2017-09-19 | Sio2 Medical Products, Inc. | Controlling the uniformity of PECVD deposition |
| EP2925903B1 (en) | 2012-11-30 | 2022-04-13 | Si02 Medical Products, Inc. | Controlling the uniformity of pecvd deposition on medical syringes, cartridges, and the like |
| EP2961858B1 (en) | 2013-03-01 | 2022-09-07 | Si02 Medical Products, Inc. | Coated syringe. |
| US9937099B2 (en) | 2013-03-11 | 2018-04-10 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging with low oxygen transmission rate |
| CN105392916B (zh) | 2013-03-11 | 2019-03-08 | Sio2医药产品公司 | 涂布包装材料 |
| EP2971227B1 (en) | 2013-03-15 | 2017-11-15 | Si02 Medical Products, Inc. | Coating method. |
| EP2896502B1 (en) * | 2014-01-16 | 2017-03-08 | ThyssenKrupp Steel Europe AG | Composite sheet and method of manufacturing |
| EP3693493A1 (en) | 2014-03-28 | 2020-08-12 | SiO2 Medical Products, Inc. | Antistatic coatings for plastic vessels |
| US11077233B2 (en) | 2015-08-18 | 2021-08-03 | Sio2 Medical Products, Inc. | Pharmaceutical and other packaging with low oxygen transmission rate |
| DE102019124489B3 (de) * | 2019-09-12 | 2020-11-12 | VON ARDENNE Asset GmbH & Co. KG | Vakuumanordnungen, Verfahren und Verwendung einer Elektrode im Vakuum |
| US12129078B2 (en) * | 2021-03-04 | 2024-10-29 | Yeti Coolers, Llc | Surface coating of drinkware |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US424103A (en) * | 1890-03-25 | Steam-generator | ||
| DE3705482A1 (de) * | 1987-02-20 | 1988-09-01 | Hoechst Ag | Verfahren und anordnung zur oberflaechenvorbehandlung von kunststoff mittels einer elektrischen koronaentladung |
| GB8713986D0 (en) * | 1987-06-16 | 1987-07-22 | Shell Int Research | Apparatus for plasma surface treating |
| NL8701530A (nl) * | 1987-06-30 | 1989-01-16 | Stichting Fund Ond Material | Werkwijze voor het behandelen van oppervlakken van substraten met behulp van een plasma en reactor voor het uitvoeren van die werkwijze. |
| US4894352A (en) | 1988-10-26 | 1990-01-16 | Texas Instruments Inc. | Deposition of silicon-containing films using organosilicon compounds and nitrogen trifluoride |
| US5176938A (en) * | 1988-11-23 | 1993-01-05 | Plasmacarb Inc. | Process for surface treatment of pulverulent material |
| US5194291A (en) * | 1991-04-22 | 1993-03-16 | General Atomics | Corona discharge treatment |
| DE4225106C2 (de) * | 1992-07-30 | 1995-10-05 | Heraeus Kulzer Gmbh | Verfahren und Vorrichtung zur Herstellung eines Metall-Kunststoff-Verbundes |
| KR960000190B1 (ko) | 1992-11-09 | 1996-01-03 | 엘지전자주식회사 | 반도체 제조방법 및 그 장치 |
| FR2704558B1 (fr) * | 1993-04-29 | 1995-06-23 | Air Liquide | Procede et dispositif pour creer un depot d'oxyde de silicium sur un substrat solide en defilement. |
| US5456972A (en) * | 1993-05-28 | 1995-10-10 | The University Of Tennessee Research Corporation | Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure |
| US6083355A (en) * | 1997-07-14 | 2000-07-04 | The University Of Tennessee Research Corporation | Electrodes for plasma treater systems |
| US6106659A (en) * | 1997-07-14 | 2000-08-22 | The University Of Tennessee Research Corporation | Treater systems and methods for generating moderate-to-high-pressure plasma discharges for treating materials and related treated materials |
| EP0995218A1 (en) * | 1997-07-14 | 2000-04-26 | The University Of Tennessee Research Corporation | Plasma treater systems and treatment methods |
| US6082292A (en) * | 1999-01-05 | 2000-07-04 | Wisconsin Alumni Research Foundation | Sealing roller system for surface treatment gas reactors |
| US6118218A (en) * | 1999-02-01 | 2000-09-12 | Sigma Technologies International, Inc. | Steady-state glow-discharge plasma at atmospheric pressure |
| WO2000070117A1 (en) * | 1999-05-14 | 2000-11-23 | The Regents Of The University Of California | Low-temperature compatible wide-pressure-range plasma flow device |
-
2003
- 2003-02-03 AT AT03706031T patent/ATE402277T1/de not_active IP Right Cessation
- 2003-02-03 US US10/357,019 patent/US6815014B2/en not_active Expired - Lifetime
- 2003-02-03 EP EP03706031A patent/EP1472387B1/en not_active Expired - Lifetime
- 2003-02-03 WO PCT/US2003/003057 patent/WO2003066932A1/en not_active Ceased
- 2003-02-03 AU AU2003207794A patent/AU2003207794A1/en not_active Abandoned
- 2003-02-03 JP JP2003566273A patent/JP4494792B2/ja not_active Expired - Lifetime
- 2003-02-03 CN CNB038033178A patent/CN100432289C/zh not_active Expired - Fee Related
- 2003-02-03 DE DE60322347T patent/DE60322347D1/de not_active Expired - Lifetime
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