JP2005530144A5 - - Google Patents

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Publication number
JP2005530144A5
JP2005530144A5 JP2004513691A JP2004513691A JP2005530144A5 JP 2005530144 A5 JP2005530144 A5 JP 2005530144A5 JP 2004513691 A JP2004513691 A JP 2004513691A JP 2004513691 A JP2004513691 A JP 2004513691A JP 2005530144 A5 JP2005530144 A5 JP 2005530144A5
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JP
Japan
Prior art keywords
single structure
optical signal
profile
simulated optical
light beam
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Pending
Application number
JP2004513691A
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English (en)
Japanese (ja)
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JP2005530144A (ja
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Publication date
Priority claimed from US10/175,207 external-priority patent/US6775015B2/en
Application filed filed Critical
Publication of JP2005530144A publication Critical patent/JP2005530144A/ja
Publication of JP2005530144A5 publication Critical patent/JP2005530144A5/ja
Pending legal-status Critical Current

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JP2004513691A 2002-06-18 2003-06-09 単一構造の光学測定法 Pending JP2005530144A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/175,207 US6775015B2 (en) 2002-06-18 2002-06-18 Optical metrology of single features
PCT/US2003/018186 WO2003106916A2 (en) 2002-06-18 2003-06-09 Optical metrology of single features

Publications (2)

Publication Number Publication Date
JP2005530144A JP2005530144A (ja) 2005-10-06
JP2005530144A5 true JP2005530144A5 (enExample) 2006-07-27

Family

ID=29733802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004513691A Pending JP2005530144A (ja) 2002-06-18 2003-06-09 単一構造の光学測定法

Country Status (7)

Country Link
US (4) US6775015B2 (enExample)
JP (1) JP2005530144A (enExample)
KR (1) KR100796112B1 (enExample)
CN (1) CN1308651C (enExample)
AU (1) AU2003248651A1 (enExample)
TW (1) TW587158B (enExample)
WO (1) WO2003106916A2 (enExample)

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TWI628730B (zh) 2011-11-10 2018-07-01 應用材料股份有限公司 透過雷射繞射測量3d半導體結構之溫度的設備及方法
KR20170092522A (ko) 2014-09-08 2017-08-11 더 리서치 파운데이션 포 더 스테이트 유니버시티 오브 뉴욕 금속 격자 및 이의 측정 방법
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