JP2005528593A - 画像化方法および装置 - Google Patents

画像化方法および装置 Download PDF

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Publication number
JP2005528593A
JP2005528593A JP2003582529A JP2003582529A JP2005528593A JP 2005528593 A JP2005528593 A JP 2005528593A JP 2003582529 A JP2003582529 A JP 2003582529A JP 2003582529 A JP2003582529 A JP 2003582529A JP 2005528593 A JP2005528593 A JP 2005528593A
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JP
Japan
Prior art keywords
transparent medium
light
image
lens
defect
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JP2003582529A
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English (en)
Japanese (ja)
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JP2005528593A5 (enExample
Inventor
ピー. フローダー,スティーブン
エー. マスターマン,ジェイムズ
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3M Innovative Properties Co
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3M Innovative Properties Co
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Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of JP2005528593A publication Critical patent/JP2005528593A/ja
Publication of JP2005528593A5 publication Critical patent/JP2005528593A5/ja
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles

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  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2003582529A 2002-04-03 2003-01-31 画像化方法および装置 Pending JP2005528593A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/115,533 US7023542B2 (en) 2002-04-03 2002-04-03 Imaging method and apparatus
PCT/US2003/002979 WO2003085389A1 (en) 2002-04-03 2003-01-31 Imaging method and apparatus

Publications (2)

Publication Number Publication Date
JP2005528593A true JP2005528593A (ja) 2005-09-22
JP2005528593A5 JP2005528593A5 (enExample) 2006-12-21

Family

ID=28673792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003582529A Pending JP2005528593A (ja) 2002-04-03 2003-01-31 画像化方法および装置

Country Status (7)

Country Link
US (1) US7023542B2 (enExample)
EP (1) EP1493022A1 (enExample)
JP (1) JP2005528593A (enExample)
KR (1) KR20040105831A (enExample)
CN (1) CN1646895A (enExample)
AU (1) AU2003210779A1 (enExample)
WO (1) WO2003085389A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014032101A (ja) * 2012-08-03 2014-02-20 Hitachi High-Technologies Corp 免疫分析方法及び免疫分析装置
JP2023530429A (ja) * 2020-06-17 2023-07-18 コーニング インコーポレイテッド ガラス系基板の特徴を測定するための方法及び装置

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7623699B2 (en) 2004-04-19 2009-11-24 3M Innovative Properties Company Apparatus and method for the automated marking of defects on webs of material
GB0503184D0 (en) * 2005-02-16 2005-03-23 Greenbank Terotech Ltd A method and a device for generating data relating to particles in a particulate material
FR2892191B1 (fr) * 2005-10-17 2008-04-04 Vai Clecim Soc Par Actions Sim Dispositif compact et procede d'inspection d'un produit en defilement, pour la detection automatique de defauts.
KR101442871B1 (ko) * 2007-02-16 2014-09-19 쓰리엠 이노베이티브 프로퍼티즈 컴파니 시트 재료 조명 시스템 및 방법
US7542821B2 (en) * 2007-07-26 2009-06-02 3M Innovative Properties Company Multi-unit process spatial synchronization of image inspection systems
US8175739B2 (en) * 2007-07-26 2012-05-08 3M Innovative Properties Company Multi-unit process spatial synchronization
US7797133B2 (en) * 2008-09-10 2010-09-14 3M Innovative Properties Company Multi-roller registered repeat defect detection of a web process line
CN102081047B (zh) * 2009-11-27 2015-04-08 法国圣-戈班玻璃公司 用于对基板的缺陷进行区分的方法和系统
CN107688248A (zh) * 2016-08-05 2018-02-13 豪威科技股份有限公司 硅基液晶测试平台
TW201818065A (zh) * 2016-09-01 2018-05-16 美商3M新設資產公司 機器方向線膜檢測
JP2018147579A (ja) * 2017-03-01 2018-09-20 オムロン株式会社 光電センサ

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL272308A (enExample) * 1960-12-13
GB1008769A (en) * 1962-07-31 1965-11-03 Ernest Arthur Timson Apparatus for checking the pitch of uniformly spaced visible effects in the course of being formed in a travelling strip or web
DE2220373A1 (de) * 1972-04-26 1973-11-15 Wernicke & Co Kg Vorrichtung zum zentrieren von brillenglaesern, insbesondere von brillenglaesern mit nahteil, und zum anbringen eines halteteils auf dem brillenglas
US3788750A (en) * 1972-12-06 1974-01-29 Libbey Owens Ford Co Inspecting glass
SU840712A1 (ru) 1978-02-09 1981-06-23 Предприятие П/Я Р-6681 Устройство дл исследовани опти-чЕСКиХ НЕОдНОРОдНОСТЕй
US4310242A (en) * 1980-04-01 1982-01-12 The United States Of America As Represented By The Secretary Of The Air Force Field test unit for windscreen optical evaluation
DE3338802A1 (de) * 1983-10-26 1985-05-09 Feldmühle AG, 4000 Düsseldorf Vorrichtung und verfahren zum pruefen von materialbahnen
GB8424084D0 (en) * 1984-09-24 1984-10-31 Sira Ltd Inspection apparatus
DE3534019A1 (de) * 1985-09-24 1987-04-02 Sick Optik Elektronik Erwin Optische bahnueberwachungsvorrichtung
GB8610305D0 (en) * 1986-04-28 1986-06-04 Sira Ltd Inspection apparatus
WO1987007383A1 (en) 1986-05-30 1987-12-03 Diffracto, Ltd. Index-sight
JPH0827443B2 (ja) * 1986-10-16 1996-03-21 オリンパス光学工業株式会社 シユリ−レン光学装置
GB2202627A (en) * 1987-03-23 1988-09-28 Sick Optik Elektronik Erwin Optical arrangement in web monitoring device
EP0379281A3 (en) * 1989-01-19 1991-03-20 Cosmopolitan Textile Company Limited Web inspecting method and apparatus
DE3926349A1 (de) 1989-08-09 1991-02-14 Sick Optik Elektronik Erwin Optische fehlerinspektionsvorrichtung
DE4139094A1 (de) 1991-11-28 1993-06-03 Wolf & Beck Gmbh Dr Messverfahren und messgeraet zur erkennung von stoerstellen bei flachglaesern
JP2795595B2 (ja) * 1992-06-26 1998-09-10 セントラル硝子株式会社 透明板状体の欠点検出方法
JPH07151706A (ja) * 1993-09-03 1995-06-16 Minnesota Mining & Mfg Co <3M> 物品の欠陥検知装置及びその使用方法
US5515158A (en) * 1994-02-01 1996-05-07 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Retroreflection focusing schlieren system
JP3385442B2 (ja) * 1994-05-31 2003-03-10 株式会社ニュークリエイション 検査用光学系および検査装置
JP3178644B2 (ja) * 1995-02-10 2001-06-25 セントラル硝子株式会社 透明板状体の欠点検出方法
US5642198A (en) * 1995-04-03 1997-06-24 Long; William R. Method of inspecting moving material
JPH08327561A (ja) 1995-06-05 1996-12-13 Nippon Sheet Glass Co Ltd 連続シート状物体の欠点検査装置
JPH10115871A (ja) * 1996-10-14 1998-05-06 Canon Inc 画像投射装置
IL119850A (en) * 1996-12-17 2000-11-21 Prolaser Ltd Optical method and apparatus for detecting low frequency defects
US6181416B1 (en) * 1998-04-14 2001-01-30 Optometrix, Inc. Schlieren method for imaging semiconductor device properties
US6633377B1 (en) 2000-04-20 2003-10-14 Image Processing Systems Inc. Dark view inspection system for transparent media
AU2000274686A1 (en) 2000-08-09 2002-02-18 Turkiye Sise Ve Cam Fabrikalari A.S. Method and apparatus for imaging inhomogeneity in a transparent solid medium

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014032101A (ja) * 2012-08-03 2014-02-20 Hitachi High-Technologies Corp 免疫分析方法及び免疫分析装置
JP2023530429A (ja) * 2020-06-17 2023-07-18 コーニング インコーポレイテッド ガラス系基板の特徴を測定するための方法及び装置

Also Published As

Publication number Publication date
AU2003210779A1 (en) 2003-10-20
US7023542B2 (en) 2006-04-04
WO2003085389A1 (en) 2003-10-16
EP1493022A1 (en) 2005-01-05
CN1646895A (zh) 2005-07-27
KR20040105831A (ko) 2004-12-16
US20030189704A1 (en) 2003-10-09

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