JP2005528234A5 - - Google Patents
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- Publication number
- JP2005528234A5 JP2005528234A5 JP2004509589A JP2004509589A JP2005528234A5 JP 2005528234 A5 JP2005528234 A5 JP 2005528234A5 JP 2004509589 A JP2004509589 A JP 2004509589A JP 2004509589 A JP2004509589 A JP 2004509589A JP 2005528234 A5 JP2005528234 A5 JP 2005528234A5
- Authority
- JP
- Japan
- Prior art keywords
- silicon substrate
- integer
- composition
- providing
- formula
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 11
- 229910052710 silicon Inorganic materials 0.000 claims 11
- 239000010703 silicon Substances 0.000 claims 8
- 150000001336 alkenes Chemical class 0.000 claims 4
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 claims 4
- 125000000962 organic group Chemical group 0.000 claims 4
- 125000005647 linker group Chemical group 0.000 claims 3
- 150000003376 silicon Chemical class 0.000 claims 3
- 238000000034 method Methods 0.000 claims 2
- 239000002904 solvent Substances 0.000 claims 2
- 238000005530 etching Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/160,738 US6841079B2 (en) | 2002-05-31 | 2002-05-31 | Fluorochemical treatment for silicon articles |
| PCT/US2003/009894 WO2003101888A2 (en) | 2002-05-31 | 2003-04-01 | Fluorochemical treatment for silicon articles |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005528234A JP2005528234A (ja) | 2005-09-22 |
| JP2005528234A5 true JP2005528234A5 (https=) | 2006-05-25 |
Family
ID=29709726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004509589A Pending JP2005528234A (ja) | 2002-05-31 | 2003-04-01 | シリコン物品のフルオロケミカル処理 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6841079B2 (https=) |
| EP (1) | EP1513763A2 (https=) |
| JP (1) | JP2005528234A (https=) |
| CN (1) | CN1314693C (https=) |
| AU (1) | AU2003226168A1 (https=) |
| CA (1) | CA2487715A1 (https=) |
| WO (1) | WO2003101888A2 (https=) |
Families Citing this family (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1997691B (zh) * | 2003-09-23 | 2011-07-20 | 北卡罗来纳大学查珀尔希尔分校 | 光固化的全氟聚醚用作微流体器件中的新材料 |
| CN101189271A (zh) * | 2004-02-13 | 2008-05-28 | 北卡罗来纳大学查珀尔希尔分校 | 制造微流体设备的功能材料和新型方法 |
| US7101618B2 (en) * | 2004-05-07 | 2006-09-05 | 3M Innovative Properties Company | Article comprising fluorochemical surface layer |
| US7173778B2 (en) * | 2004-05-07 | 2007-02-06 | 3M Innovative Properties Company | Stain repellent optical hard coating |
| US20050249940A1 (en) * | 2004-05-07 | 2005-11-10 | 3M Innovative Properties Company | Fluoropolyether poly(meth)acryl compounds |
| US20050249956A1 (en) * | 2004-05-07 | 2005-11-10 | Naiyong Jing | Stain repellent optical hard coating |
| US7342080B2 (en) * | 2004-05-07 | 2008-03-11 | 3M Innovative Properties Company | Polymerizable compositions, methods of making the same, and composite articles therefrom |
| US7288619B2 (en) * | 2004-05-07 | 2007-10-30 | 3M Innovative Properties Company | Fluorinated polyether polyamine and method of making the same |
| US20050272599A1 (en) * | 2004-06-04 | 2005-12-08 | Kenneth Kramer | Mold release layer |
| US7682771B2 (en) * | 2004-12-29 | 2010-03-23 | 3M Innovative Properties Company | Compositions containing photosensitive fluorochemical and uses thereof |
| US7580174B2 (en) | 2005-11-23 | 2009-08-25 | Miradia, Inc. | Anti-stiction gas-phase lubricant for micromechanical systems |
| US7471439B2 (en) * | 2005-11-23 | 2008-12-30 | Miradia, Inc. | Process of forming a micromechanical system containing an anti-stiction gas-phase lubricant |
| US7463404B2 (en) * | 2005-11-23 | 2008-12-09 | Miradia, Inc. | Method of using a preferentially deposited lubricant to prevent anti-stiction in micromechanical systems |
| US7723812B2 (en) | 2005-11-23 | 2010-05-25 | Miradia, Inc. | Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems |
| US7616370B2 (en) * | 2005-11-23 | 2009-11-10 | Miradia, Inc. | Preferentially deposited lubricant to prevent anti-stiction in micromechanical systems |
| US7618682B2 (en) * | 2006-09-25 | 2009-11-17 | Hewlett-Packard Development Company, L.P. | Method for providing an anti-stiction coating on a metal surface |
| US8096665B2 (en) * | 2006-10-11 | 2012-01-17 | Miradia, Inc. | Spatially offset multi-imager-panel architecture for projecting an image |
| EP2356082B1 (en) * | 2008-10-17 | 2021-03-17 | Surfix BV | Photochemical modification of solid materials |
| WO2012064646A1 (en) | 2010-11-10 | 2012-05-18 | 3M Innovative Properties Company | Hydrophobic fluorinated coatings |
| US9527041B2 (en) | 2011-05-04 | 2016-12-27 | Cornell University | Multiblock copolymer films, methods of making same, and uses thereof |
| JP6306013B2 (ja) | 2012-08-21 | 2018-04-04 | クラトス・エル・エル・シー | 官能化iva族粒子およびその使用方法 |
| US9290380B2 (en) | 2012-12-18 | 2016-03-22 | Freescale Semiconductor, Inc. | Reducing MEMS stiction by deposition of nanoclusters |
| FR3000069B1 (fr) * | 2012-12-21 | 2015-02-06 | Bluestar Silicones France | Procede d'hydrosilylation d'un siloxane photocatalyse par un compose polyoxometallate |
| CN105814139B (zh) * | 2013-12-13 | 2017-10-17 | 旭硝子株式会社 | 含氟醚组合物、其制造方法、涂布液、具有表面处理层的基材及其制造方法 |
| KR20160125441A (ko) * | 2014-02-21 | 2016-10-31 | 크라토스 엘엘씨 | 관능화된 iva족 입자 골격을 위한 나노규소 물질 제조 |
| KR101719340B1 (ko) | 2016-01-27 | 2017-03-23 | 제이에스아이실리콘주식회사 | 지문 돋보임 방지 피막용 친수성 및 친유성 기 실리콘 결합제 및 이의 제조 방법 |
| EP3448551B1 (en) | 2016-04-28 | 2024-07-17 | Terapore Technologies, Inc. | Charged isoporous materials for electrostatic separations |
| CA3029244A1 (en) | 2016-07-05 | 2018-01-11 | Kratos LLC | Passivated pre-lithiated micron and sub-micron group iva particles and methods of preparation thereof |
| CN110475602B (zh) | 2016-11-17 | 2022-05-03 | 特拉波雷技术有限公司 | 含有高分子量亲水性添加剂的均孔自组装嵌段共聚物膜及其制备方法 |
| KR102308806B1 (ko) | 2017-02-22 | 2021-10-07 | 테라포어 테크놀로지스, 인코포레이티드 | 리간드 결합 mbp 멤브레인, 사용 및 제조방법 |
| WO2018183909A1 (en) | 2017-03-31 | 2018-10-04 | Kratos LLC | Precharged negative electrode material for secondary battery |
| JP2020519734A (ja) * | 2017-05-12 | 2020-07-02 | テラポア テクノロジーズ,インコーポレイテッド | 耐薬品性フッ素化マルチブロック重合体構造物、製造方法及びその使用 |
| MX2020003098A (es) | 2017-09-19 | 2020-07-28 | Terapore Tech Inc | Estructura entrelazada isoporosa de copolimero de bloques quimicamente resistente. |
| KR20200130387A (ko) | 2018-03-12 | 2020-11-18 | 테라포어 테크놀로지스, 인코포레이티드 | 마크로보이드들을 갖는 이소포러스 메조포러스 비대칭 블록 코폴리머 재료들 및 이의 제조 방법 |
| US10626013B2 (en) * | 2018-04-04 | 2020-04-21 | Canon Kabushiki Kaisha | Anti-wetting coating for Si-based MEMS fluidic device, and method of application of same |
| KR20180099609A (ko) | 2018-08-29 | 2018-09-05 | 제이에스아이실리콘주식회사 | 플루오로알킬기 또는 퍼플루오로알킬 이더기 치환 비스(실릴)알칸 실리콘 결합제 및 그의 제조방법 |
| CN111074349A (zh) * | 2019-07-12 | 2020-04-28 | 杭州师范大学 | 一种光催化含氟单体修饰制备超疏水多孔硅的方法 |
| CN117800801B (zh) * | 2023-12-19 | 2026-03-27 | 河南师范大学 | 一种合成单氟烯烃类化合物的方法 |
Family Cites Families (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2559628A (en) * | 1944-04-22 | 1951-07-10 | Du Pont | Fluorine-containing alcohols and process for preparing the same |
| US2666797A (en) * | 1950-05-26 | 1954-01-19 | Minnesota Mining & Mfg | Fluorinated alcohols and acetate esters |
| US2809990A (en) * | 1955-12-29 | 1957-10-15 | Minnesota Mining & Mfg | Fluorocarbon acids and derivatives |
| US3293306A (en) * | 1963-06-14 | 1966-12-20 | Du Pont | Perfluorinated ether alcohols |
| US3574770A (en) * | 1968-10-24 | 1971-04-13 | Nasa | Hydroxy terminated perfluoro ethers |
| US4094911A (en) * | 1969-03-10 | 1978-06-13 | Minnesota Mining And Manufacturing Company | Poly(perfluoroalkylene oxide) derivatives |
| US4156791A (en) * | 1976-06-11 | 1979-05-29 | Phillips Petroleum Company | Preparation of alcohols by treating esters with alkali metal borohydride |
| US4530879A (en) * | 1983-03-04 | 1985-07-23 | Minnesota Mining And Manufacturing Company | Radiation activated addition reaction |
| US4510094A (en) * | 1983-12-06 | 1985-04-09 | Minnesota Mining And Manufacturing Company | Platinum complex |
| US4603215A (en) * | 1984-08-20 | 1986-07-29 | Dow Corning Corporation | Platinum (O) alkyne complexes |
| US4670531A (en) * | 1986-01-21 | 1987-06-02 | General Electric Company | Inhibited precious metal catalyzed organopolysiloxane compositions |
| US5011963A (en) * | 1988-02-09 | 1991-04-30 | Matsushita Electric Ind., Co., Ltd. | Terminal perfluoroalkylsilane compounds |
| US5145886A (en) * | 1988-05-19 | 1992-09-08 | Minnesota Mining And Manufacturing Company | Radiation activated hydrosilation reaction |
| US4916169A (en) * | 1988-09-09 | 1990-04-10 | Minnesota Mining And Manufacturing Company | Visible radiation activated hydrosilation reaction |
| US5017540A (en) * | 1989-09-15 | 1991-05-21 | Sandoval Junior E | Silicon hydride surface intermediates for chemical separations apparatus |
| US5266650A (en) * | 1990-10-11 | 1993-11-30 | Minnesota Mining And Manufacturing Company | Curing fluorocarbon elastomers |
| US6046250A (en) * | 1990-12-13 | 2000-04-04 | 3M Innovative Properties Company | Hydrosilation reaction utilizing a free radical photoinitiator |
| US5384374A (en) * | 1991-01-11 | 1995-01-24 | Minnesota Mining And Manufacturing Company | Curing fluorocarbon elastomers |
| US5233071A (en) * | 1992-03-17 | 1993-08-03 | E. I. Du Pont De Nemours And Company | Hydrosilation of fluorinated olefins with cobalt catalysts |
| US5262082A (en) * | 1992-04-28 | 1993-11-16 | Minnesota Mining And Manufacturing Company | Ferroelectric liquid crystal compounds having perfluoroether terminal portions |
| DE4300857A1 (de) | 1993-01-15 | 1994-07-21 | Basf Magnetics Gmbh | Magnetisches Aufzeichnungsmedium |
| US5488142A (en) * | 1993-10-04 | 1996-01-30 | Minnesota Mining And Manufacturing Company | Fluorination in tubular reactor system |
| US5429708A (en) * | 1993-12-22 | 1995-07-04 | The Board Of Trustees Of The Leland Stanford Junior University | Molecular layers covalently bonded to silicon surfaces |
| US5468815A (en) * | 1994-01-12 | 1995-11-21 | Minnesota Mining And Manufacturing | Low coefficient of friction silicone release formulations incorporating higher alkenyl-functional silicone gums |
| US5512374A (en) * | 1994-05-09 | 1996-04-30 | Texas Instruments Incorporated | PFPE coatings for micro-mechanical devices |
| US5476974A (en) * | 1994-05-20 | 1995-12-19 | Minnesota Mining And Manufacturing Company | Omega-hydrofluoroalkyl ethers, precursor carboxylic acids and derivatives thereof, and their preparation and application |
| US5482564A (en) | 1994-06-21 | 1996-01-09 | Texas Instruments Incorporated | Method of unsticking components of micro-mechanical devices |
| US5958794A (en) | 1995-09-22 | 1999-09-28 | Minnesota Mining And Manufacturing Company | Method of modifying an exposed surface of a semiconductor wafer |
| US5908692A (en) * | 1997-01-23 | 1999-06-01 | Wisconsin Alumni Research Foundation | Ordered organic monolayers and methods of preparation thereof |
| US6132801A (en) * | 1997-02-28 | 2000-10-17 | The Board Of Trustees Of The Leland Stanford Junior University | Producing coated particles by grinding in the presence of reactive species |
| US6114044A (en) * | 1997-05-30 | 2000-09-05 | Regents Of The University Of California | Method of drying passivated micromachines by dewetting from a liquid-based process |
| US5851674A (en) * | 1997-07-30 | 1998-12-22 | Minnesota Mining And Manufacturing Company | Antisoiling coatings for antireflective surfaces and methods of preparation |
| JP2002501001A (ja) | 1998-01-22 | 2002-01-15 | パーデュー・リサーチ・ファウンデーション | 官能性多孔性珪素表面 |
| US6277485B1 (en) * | 1998-01-27 | 2001-08-21 | 3M Innovative Properties Company | Antisoiling coatings for antireflective surfaces and methods of preparation |
| US6284317B1 (en) * | 1998-04-17 | 2001-09-04 | Massachusetts Institute Of Technology | Derivatization of silicon surfaces |
| WO2000033976A1 (en) | 1998-12-08 | 2000-06-15 | Gene Logic Inc. | Process for attaching organic molecules to silicon |
| EP1246856B1 (en) | 1999-10-27 | 2009-07-15 | 3M Innovative Properties Company | Fluorochemical sulfonamide surfactants |
| US6310018B1 (en) * | 2000-03-31 | 2001-10-30 | 3M Innovative Properties Company | Fluorinated solvent compositions containing hydrogen fluoride |
| ATE500051T1 (de) * | 2001-04-06 | 2011-03-15 | Fluidigm Corp | Polymeroberflächenmodifikation |
| US6576489B2 (en) * | 2001-05-07 | 2003-06-10 | Applied Materials, Inc. | Methods of forming microstructure devices |
-
2002
- 2002-05-31 US US10/160,738 patent/US6841079B2/en not_active Expired - Lifetime
-
2003
- 2003-04-01 CA CA002487715A patent/CA2487715A1/en not_active Abandoned
- 2003-04-01 AU AU2003226168A patent/AU2003226168A1/en not_active Abandoned
- 2003-04-01 JP JP2004509589A patent/JP2005528234A/ja active Pending
- 2003-04-01 WO PCT/US2003/009894 patent/WO2003101888A2/en not_active Ceased
- 2003-04-01 EP EP03756154A patent/EP1513763A2/en not_active Withdrawn
- 2003-04-01 CN CNB038164051A patent/CN1314693C/zh not_active Expired - Fee Related
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