JP2005527977A - 量子井戸混合素子における接触抵抗の制御 - Google Patents
量子井戸混合素子における接触抵抗の制御 Download PDFInfo
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- 238000000034 method Methods 0.000 claims abstract description 65
- 230000008569 process Effects 0.000 claims abstract description 35
- 239000004065 semiconductor Substances 0.000 claims abstract description 27
- 239000000463 material Substances 0.000 claims description 22
- 238000005253 cladding Methods 0.000 claims description 19
- 238000005530 etching Methods 0.000 claims description 17
- 238000002156 mixing Methods 0.000 claims description 17
- 239000002019 doping agent Substances 0.000 claims description 12
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 claims description 4
- FGUUSXIOTUKUDN-IBGZPJMESA-N C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 Chemical compound C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 FGUUSXIOTUKUDN-IBGZPJMESA-N 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 123
- 239000012535 impurity Substances 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 230000007547 defect Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000011701 zinc Substances 0.000 description 5
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000006731 degradation reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000001451 molecular beam epitaxy Methods 0.000 description 3
- 238000004151 rapid thermal annealing Methods 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 238000004943 liquid phase epitaxy Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000000927 vapour-phase epitaxy Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical group [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000010955 robust manufacturing process Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/182—Intermixing or interdiffusion or disordering of III-V heterostructures, e.g. IILD
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/3413—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers comprising partially disordered wells or barriers
- H01S5/3414—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers comprising partially disordered wells or barriers by vacancy induced interdiffusion
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34313—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer having only As as V-compound, e.g. AlGaAs, InGaAs
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Abstract
を含む。
Description
a)ドープされたキャップ層を含む層状量子井戸構造を形成する工程と、
b)前記キャップ層の上にエッチング停止層を形成する工程と、
c)前記エッチング停止層の上に犠牲層を形成する工程であって、所定のエッチング条件に曝された時に前記エッチング停止層は前記犠牲層よりも実質的に低いエッチング速度を有する工程と、
d)前記素子構造に量子井戸混合処理を実行し、前記処理は前記犠牲層の少なくとも一部分に著しい損傷を与える工程と、
e)前記素子の少なくとも接触領域において前記犠牲層を除去する工程であって、前記接触領域における前記エッチング停止層を曝すために、前記エッチング停止層に作用しない選択性を有するエッチング処置を使用する工程と、
f)少なくとも前記接触領域において前記層状量子井戸構造の上に接触部を形成する工程と、
を有する方法を提供する。
Claims (16)
- 半導体素子構造において量子井戸混合を行う方法であって、
a)ドープされたキャップ層を含む層状量子井戸構造を形成する工程と、
b)前記キャップ層の上にエッチング停止層を形成する工程と、
c)前記エッチング停止層の上に犠牲層を形成する工程であって、所定のエッチング条件に曝された時に前記エッチング停止層は前記犠牲層よりも実質的に低いエッチング速度を有する工程と、
d)前記素子構造に量子井戸混合処理を実行し、前記処理は前記犠牲層の少なくとも一部分に著しい損傷を与える工程と、
e)前記素子の少なくとも接触領域において前記犠牲層を除去する工程であって、前記接触領域における前記エッチング停止層を曝すために、前記エッチング停止層に作用しない選択性を有するエッチング処置を使用する工程と、
f)少なくとも前記接触領域において前記層状量子井戸構造の上に接触部を形成する工程と、
を有する方法。 - 工程e)は更に、少なくとも前記接触領域において前記ドープされたキャップ層を曝すために前記ドープされたキャップ層に作用しない選択性を有するエッチング処置を使用して前記エッチング停止層を除去する工程を含む請求項1に記載の方法。
- 工程d)は熱処理工程を有する、請求項1に記載の方法。
- 工程d)は、前記量子井戸混合処理の間に前記犠牲層の少なくとも一部分の上に誘電体層を形成する工程を含む不純物無添加空孔無秩序化技術を有する、請求項1に記載の方法。
- 工程f)は、金属層を前記エッチング停止層上に被着して前記接触を形成する工程を含む、請求項1に記載の方法。
- 工程f)は、金属層を前記ドープされたキャップ層上に被着して前記接触を形成する工程を含む、請求項2に記載の方法。
- 前記犠牲層は、前記ドープされたキャップ層と同様のドーピングレベル、同様の電気的性質及び/又は同様の拡散係数のうち1以上を有する、請求項1に記載の方法。
- 前記犠牲層は前記ドープされたキャップ層と同一の半導体材料から形成される請求項7に記載の方法。
- 前記層状量子井戸構造は、第1のドーピングレベルを有する第1のドーパント型の基板と、第2のドーピングレベルを有する前記基板のような前記第1のドーパント型の第1のクラッド層と、実質的に真性型の光学上活性層と、第3のドーピングレベルを有する第2のドーパント型の第2のクラッド層と、第4のドーピングレベルを有する第2のドーパント型のキャップ層と、を有する、請求項1に記載の方法。
- 前記第1のドーパント型がn型であり前記第2のドーパント型がp型である請求項9に記載の方法。
- 前記層の少なくとも1は複数の異なる副層から形成される請求項9に記載に記載の方法。
- 前記ドープされたキャップ層はGaAsを有し、前記エッチング停止層はGaInPを有し、前記犠牲層はGaAsを有する請求項1に記載の方法。
- 前記ドープされたキャップ層はGaAsを有し、前記エッチング停止層はAlAsを有し、前記犠牲層はGaAsを有する請求項1に記載の方法。
- 前記半導体素子構造からフォトニックデバイスを形成する工程を更に含む請求項1に記載の方法。
- 請求項1から14の何れか一項に記載の工程を使用して形成される半導体素子構造。
- 添付図面を参照して本明細書に記述されているような方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0212072.3A GB0212072D0 (en) | 2002-05-25 | 2002-05-25 | Control of contact resistance in quantum well intermixed devices |
PCT/GB2003/002186 WO2003100823A2 (en) | 2002-05-25 | 2003-05-21 | Control of contact resistance in quantum well intermixed devices |
Publications (1)
Publication Number | Publication Date |
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JP2005527977A true JP2005527977A (ja) | 2005-09-15 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2004508381A Pending JP2005527977A (ja) | 2002-05-25 | 2003-05-21 | 量子井戸混合素子における接触抵抗の制御 |
Country Status (10)
Country | Link |
---|---|
US (1) | US7138285B2 (ja) |
EP (1) | EP1508163B1 (ja) |
JP (1) | JP2005527977A (ja) |
CN (1) | CN100353501C (ja) |
AT (1) | ATE527682T1 (ja) |
AU (1) | AU2003232340A1 (ja) |
CA (1) | CA2486219A1 (ja) |
GB (1) | GB0212072D0 (ja) |
RU (1) | RU2324999C2 (ja) |
WO (1) | WO2003100823A2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010541277A (ja) * | 2007-10-01 | 2010-12-24 | コーニング インコーポレイテッド | 量子井戸無秩序化 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008042131A (ja) * | 2006-08-10 | 2008-02-21 | Opnext Japan Inc | 半導体光素子およびその製造方法 |
Citations (6)
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JPH0950946A (ja) * | 1995-08-04 | 1997-02-18 | Furukawa Electric Co Ltd:The | 半導体装置の作製方法 |
JPH104241A (ja) * | 1996-06-17 | 1998-01-06 | Furukawa Electric Co Ltd:The | 面型半導体光デバイス及びその作製方法 |
JP2001015859A (ja) * | 1999-07-01 | 2001-01-19 | Sharp Corp | 半導体レーザ素子およびその製造方法 |
JP2001053381A (ja) * | 1999-08-05 | 2001-02-23 | Fuji Photo Film Co Ltd | 半導体レーザ装置およびその製造方法 |
JP2001210907A (ja) * | 1999-11-17 | 2001-08-03 | Matsushita Electric Ind Co Ltd | 半導体素子の製造方法および半導体素子 |
JP2001257425A (ja) * | 2000-03-13 | 2001-09-21 | Matsushita Electric Ind Co Ltd | 半導体レーザ素子及びその製造方法 |
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US5762706A (en) * | 1993-11-09 | 1998-06-09 | Fujitsu Limited | Method of forming compound semiconductor device |
US5708674A (en) * | 1995-01-03 | 1998-01-13 | Xerox Corporation | Semiconductor laser or array formed by layer intermixing |
US5739557A (en) * | 1995-02-06 | 1998-04-14 | Motorola, Inc. | Refractory gate heterostructure field effect transistor |
US6797533B2 (en) * | 2000-05-19 | 2004-09-28 | Mcmaster University | Quantum well intermixing in InGaAsP structures induced by low temperature grown InP |
GB0018576D0 (en) * | 2000-07-27 | 2000-09-13 | Univ Glasgow | Improved semiconductor laser |
US6878562B2 (en) * | 2000-10-20 | 2005-04-12 | Phosistor Technologies, Incorporated | Method for shifting the bandgap energy of a quantum well layer |
-
2002
- 2002-05-25 GB GBGB0212072.3A patent/GB0212072D0/en not_active Ceased
-
2003
- 2003-05-21 AU AU2003232340A patent/AU2003232340A1/en not_active Abandoned
- 2003-05-21 AT AT03755224T patent/ATE527682T1/de not_active IP Right Cessation
- 2003-05-21 RU RU2004137805/28A patent/RU2324999C2/ru not_active IP Right Cessation
- 2003-05-21 WO PCT/GB2003/002186 patent/WO2003100823A2/en active Application Filing
- 2003-05-21 EP EP03755224A patent/EP1508163B1/en not_active Expired - Lifetime
- 2003-05-21 CA CA002486219A patent/CA2486219A1/en not_active Abandoned
- 2003-05-21 JP JP2004508381A patent/JP2005527977A/ja active Pending
- 2003-05-21 CN CNB03816230XA patent/CN100353501C/zh not_active Expired - Fee Related
- 2003-05-21 US US10/515,198 patent/US7138285B2/en not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0950946A (ja) * | 1995-08-04 | 1997-02-18 | Furukawa Electric Co Ltd:The | 半導体装置の作製方法 |
JPH104241A (ja) * | 1996-06-17 | 1998-01-06 | Furukawa Electric Co Ltd:The | 面型半導体光デバイス及びその作製方法 |
JP2001015859A (ja) * | 1999-07-01 | 2001-01-19 | Sharp Corp | 半導体レーザ素子およびその製造方法 |
JP2001053381A (ja) * | 1999-08-05 | 2001-02-23 | Fuji Photo Film Co Ltd | 半導体レーザ装置およびその製造方法 |
JP2001210907A (ja) * | 1999-11-17 | 2001-08-03 | Matsushita Electric Ind Co Ltd | 半導体素子の製造方法および半導体素子 |
JP2001257425A (ja) * | 2000-03-13 | 2001-09-21 | Matsushita Electric Ind Co Ltd | 半導体レーザ素子及びその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010541277A (ja) * | 2007-10-01 | 2010-12-24 | コーニング インコーポレイテッド | 量子井戸無秩序化 |
Also Published As
Publication number | Publication date |
---|---|
CN1685480A (zh) | 2005-10-19 |
WO2003100823A2 (en) | 2003-12-04 |
EP1508163B1 (en) | 2011-10-05 |
US7138285B2 (en) | 2006-11-21 |
EP1508163A2 (en) | 2005-02-23 |
CN100353501C (zh) | 2007-12-05 |
AU2003232340A8 (en) | 2003-12-12 |
CA2486219A1 (en) | 2003-12-04 |
RU2324999C2 (ru) | 2008-05-20 |
GB0212072D0 (en) | 2002-07-03 |
WO2003100823A3 (en) | 2004-05-27 |
RU2004137805A (ru) | 2005-06-27 |
AU2003232340A1 (en) | 2003-12-12 |
ATE527682T1 (de) | 2011-10-15 |
US20060057748A1 (en) | 2006-03-16 |
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