JP2005526911A - 工作物のプラズマ処理方法および装置 - Google Patents
工作物のプラズマ処理方法および装置 Download PDFInfo
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Abstract
Description
さらに本発明は、工作物を受容するための少なくとも1つの真空化可能なプラズマチャンバーを有し、プラズマチャンバーが処理ステーションの領域に配置され、該プラズマチャンバーがチャンバー底部とチャンバーカバーと側部のチャンバー壁とによって画成され、工作物を位置決めするための少なくとも1つの保持要素が設けられている、工作物をプラズマ処理するための装置にも関わる。
図1はプラズマモジュール(1)を示している。プラズマモジュール(1)は回転するプラズマホイール(2)を備えている。プラズマホイール(2)の周囲に沿って多数のプラズマステーション(3)が配置されている。プラズマステーション(3)は処理対象である工作物(5)を受容するためのキャビティ(4)またはプラズマチャンバー(17)を備えている。
Claims (59)
- 工作物を処理ステーションの少なくとも部分的に真空化可能なチャンバーのなかへ挿入し、工作物を処理ステーションの内部で保持要素により位置決めするようにした工作物をプラズマ処理するための方法において、
工作物(5)の内部空間を密封するため、スリーブ状の密封要素(28)をチャンバー底部(29)に対し相対的に位置決めすることを特徴とする方法。 - 位置決めを鉛直方向において行なうことを特徴とする、請求項1に記載の方法。
- 円環状の横断面を有する密封要素(28)を位置決めすることを特徴とする、請求項1または2に記載の方法。
- プラズマステーション(3)のキャビティ(4)の真空化をチャンバー底部(29)を通じて行なうことを特徴とする、請求項1から3までのいずれか一つに記載の方法。
- チャンバー底部(29)を通じて処理ガスを供給することを特徴とする、請求項1から4までのいずれか一つに記載の方法。
- 処理ガスを長棒(36)を通じて工作物(5)の内部空間のなかへ供給することを特徴とする、請求項1から5までのいずれか一つに記載の方法。
- 工作物(5)を密封要素(28)の嵌め込みフランジ(60)により側方から支持することを特徴とする、請求項1から6までのいずれか一つに記載の方法。
- 工作物(5)の開口領域を嵌め込みフランジ(60)により支持することを特徴とする、請求項7に記載の方法。
- 密封要素(28)を圧縮ばね(43)によりプラズマチャンバー(17)とは逆の側の方向へ押圧することを特徴とする、請求項1から8までのいずれか一つに記載の方法。
- 密封要素(28)のストローク範囲を少なくとも2つのストッパーにより制限することを特徴とする、請求項1から9までのいずれか一つに記載の方法。
- 密封要素(28)を機械的に位置決めすることを特徴とする、請求項1から10までのいずれか一つに記載の方法。
- 密封要素(28)を空気圧で位置決めすることを特徴とする、請求項1から10までのいずれか一つに記載の方法。
- チャンバーカバー(31)の領域でマイクロ波発生器(19)により発生させたマイクロ波をキャビティ(4)内へ導入させることを特徴とする、請求項1から12までのいずれか一つに記載の方法。
- 熱可塑性プラスチックから成る工作物(5)を処理することを特徴とする、請求項1から13までのいずれか一つに記載の方法。
- 中空体状の工作物(5)の内部空間を処理することを特徴とする、請求項1から14までのいずれか一つに記載の方法。
- 工作物(5)として容器を処理することを特徴とする、請求項1から15までのいずれか一つに記載の方法。
- 工作物(5)として飲料物のボトルを処理することを特徴とする、請求項1から16までのいずれか一つに記載の方法。
- 少なくとも1つのプラズマステーション(3)を回転するプラズマホイール(2)により供給位置から排出位置へ移送することを特徴とする、請求項1から17までのいずれか一つに記載の方法。
- プラズマステーション(3)により複数のキャビティ(4)を準備することを特徴とする、請求項1から18までのいずれか一つに記載の方法。
- 密封要素(28)が工作物(5)の内部空間とプラズマチャンバー(17)の他の内部空間とを制御可能に連通させ切り離す弁機能を行使することを特徴とする、請求項1から19までのいずれか一つに記載の方法。
- プラズマ処理としてプラズマコーティングを実施することを特徴とする、請求項1から20までのいずれか一つに記載の方法。
- プラズマ処理を低圧プラズマを利用して実施することを特徴とする、請求項1から21までのいずれか一つに記載の方法。
- プラズマ重合処理を実施することを特徴とする、請求項1から22までのいずれか一つに記載の方法。
- プラズマにより少なくとも部分的に有機物質を析出させることを特徴とする、請求項1から23までのいずれか一つに記載の方法。
- プラズマにより少なくとも部分的に非有機物質を析出させることを特徴とする、請求項1から23までのいずれか一つに記載の方法。
- プラズマにより工作物(5)のバリヤー特性を改善させる物質を析出させることを特徴とする、請求項1から25までのいずれか一つに記載の方法。
- 工作物(5)の表面上での物質の付着力を改善させる結合剤を付加的に析出させることを特徴とする、請求項26に記載の方法。
- 1つの共通のキャビティ(4)で少なくとも2つの工作物(5)を同時に処理することを特徴とする、請求項1から27までのいずれか一つに記載の方法。
- プラズマ処理としてプラズマ殺菌を実施することを特徴とする、請求項1から20までのいずれか一つに記載の方法。
- プラズマ処理として工作物(5)の表面活性処理を実施することを特徴とする、請求項1から20までのいずれか一つに記載の方法。
- 工作物を受容するための少なくとも1つの真空化可能なプラズマチャンバーを有し、プラズマチャンバーが処理ステーションの領域に配置され、該プラズマチャンバーがチャンバー底部とチャンバーカバーと側部のチャンバー壁とによって画成され、且つ工作物を位置決めするための少なくとも1つの保持要素を有している、工作物をプラズマ処理するための装置において、
チャンバー底部(29)の領域に、該チャンバー底部(29)に対し相対的に可動に配置されるスリーブ状の密封要素(29)が設けられていることを特徴とする装置。 - 密封要素(28)が鉛直方向に位置決め可能であることを特徴とする、請求項31に記載の装置。
- 密封要素(28)が円環状の横断面を有していることを特徴とする、請求項31または32に記載の装置。
- プラズマステーション(3)のキャビティ(4)を真空にするため、チャンバー底部(29)に少なくとも1つの真空管路が配置されていることを特徴とする、請求項31から33までのいずれか一つに記載の装置。
- チャンバー底部(29)に処理ガスを供給するための少なくとも1つの管路が配置されていることを特徴とする、請求項31から34までのいずれか一つに記載の装置。
- 処理ガスを工作物(5)の内部空間内へ供給するため、長棒(36)がチャンバー底部(29)に対し相対的に位置決め可能に配置されていることを特徴とする、請求項31から35までのいずれか一つに記載の装置。
- 密封要素(28)がプラズマチャンバー(17)側に配置される嵌め込みフランジ(60)を備えていることを特徴とする、請求項31から36までのいずれか一つに記載の装置。
- 嵌め込みフランジ(60)が工作物(5)の開口領域の少なくとも一部分を側方から取り囲むために形成されていることを特徴とする、請求項37に記載の装置。
- 嵌め込みフランジ(60)が内面に挿入傾斜部(61)を備えていることを特徴とする、請求項37または38に記載の装置。
- 密封要素(28)がプラズマチャンバー側に配置されるリングパッキン(57)を有していることを特徴とする、請求項31から39までのいずれか一つに記載の装置。
- 密封要素(28)が圧縮ばね(43)により外側のガイドスリーブ(41)に対し相対的に緊張固定されていることを特徴とする、請求項31から40までのいずれか一つに記載の装置。
- 密封要素(28)の位置決め経路が少なくとも2つのストッパーにより制限されていることを特徴とする、請求項31から41までのいずれか一つに記載の装置。
- チャンバーカバー(31)の領域にマイクロ波発生器(19)が配置されていることを特徴とする、請求項31から42までのいずれか一つに記載の装置。
- 工作物(5)をコーティングするため、プラズマステーション(3)が熱可塑性プラスチックから形成されていることを特徴とする、請求項31から43までのいずれか一つに記載の装置。
- プラズマステーション(3)が容器状の工作物(5)をコーティングするために構成されていることを特徴とする、請求項31から44までのいずれか一つに記載の装置。
- プラズマステーション(3)が中空体状の工作物(5)の内部空間をコーティングするために構成されていることを特徴とする、請求項31から45までのいずれか一つに記載の装置。
- プラズマステーション(3)が飲料物のボトルの形態の工作物(5)をコーティングするために構成されていることを特徴とする、請求項31から46までのいずれか一つに記載の装置。
- 少なくとも1つのプラズマステーション(3)が回転するプラズマホイール(2)によって担持されていることを特徴とする、請求項31から47までのいずれか一つに記載の装置。
- プラズマステーション(3)の領域に複数個のキャビティ(4)が配置されていることを特徴とする、請求項31から48までのいずれか一つに記載の装置。
- 少なくとも2つのキャビティ(4)を提供するために設けられるチャンバー壁(18)が位置決め可能に配置されていることを特徴とする、請求項31から49までのいずれか一つに記載の装置。
- 密封要素(28)が機械的な位置決め装置と連結されていることを特徴とする、請求項31から50までのいずれか一つに記載の装置。
- 密封要素(28)が長棒送り台(37)と連結されていることを特徴とする、請求項51に記載の装置。
- 密封要素(28)が処理ガス供給用の長棒(36)と連結されていることを特徴とする、請求項51に記載の装置。
- 長棒(36)が密封要素(28)を位置決めするため送りディスク(45)を備えていることを特徴とする、請求項53に記載の装置。
- 密封要素(28)が空気圧式位置決め装置と連結されていることを特徴とする、請求項31から50までのいずれか一つに記載の装置。
- 空気圧式位置決め装置が過圧制御部を有していることを特徴とする、請求項55に記載の装置。
- 空気圧式位置決め装置が負圧制御部を有していることを特徴とする、請求項55に記載の装置。
- 密封要素(28)が工作物(5)の内部空間とプラズマチャンバー(17)の他の内部空間とを制御可能に連通、切り離しするために構成されていることを特徴とする、請求項31から57までのいずれか一つに記載の装置。
- 密封要素(28)がプラズマチャンバー(17)の内部空間と負圧源とを制御可能に連通、切り離しするために構成されていることを特徴とする、請求項31から58までのいずれか一つに記載の装置。
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DE10224546A DE10224546A1 (de) | 2002-05-24 | 2002-05-31 | Verfahren und Vorrichtung zur Plasmabehandlung von Werkstücken |
PCT/DE2003/001502 WO2003100116A1 (de) | 2002-05-24 | 2003-05-09 | Verfahren und vorrichtung zur plasmabehandlung von werkstücken |
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JPH0853117A (ja) * | 1994-08-11 | 1996-02-27 | Kirin Brewery Co Ltd | 炭素膜コーティングプラスチック容器の製造装置および製造方法 |
JPH10258825A (ja) * | 1997-03-14 | 1998-09-29 | Kirin Brewery Co Ltd | 炭素膜コーティングプラスチック容器の製造装置および製造方法 |
WO2001040072A1 (de) * | 1999-12-01 | 2001-06-07 | Tetra Laval Holdings & Finance S.A. | Vorrichtung zum abdichten des stirnrandes eines behälterhalses |
WO2001054164A1 (de) * | 2000-01-19 | 2001-07-26 | Tetra Laval Holding & Finance S.A. | Einkoppelanordnung für mikrowellenenergie mit impedanzanpassung |
JP2001518685A (ja) * | 1997-09-30 | 2001-10-16 | テトラ ラヴァル ホールディングズ アンド ファイナンス エス.アー. | プラズマ強化処理におけるプラスチック製ボトルの内面処理方法および装置 |
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ATE179914T1 (de) | 1994-02-16 | 1999-05-15 | Coca Cola Co | Hohler behälter mit inerter oder undurchlässiger innerer oberfläche durch plasmaunterstütze oberflächereaktion oder in situ polymerisation |
US6294226B1 (en) | 1997-02-19 | 2001-09-25 | Kirin Beer Kabushiki Kaisha | Method and apparatus for producing plastic container having carbon film coating |
FR2791598B1 (fr) | 1999-03-30 | 2001-06-22 | Sidel Sa | Machine a carrousel pour le traitement de corps creux comportant un circuit de distribution de pression perfectionne et distributeur pour une telle machine |
FR2799994B1 (fr) | 1999-10-25 | 2002-06-07 | Sidel Sa | Dispositif pour le traitement d'un recipient a l'aide d'un plasma a basse pression comportant un circuit de vide perfectionne |
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US5232717A (en) * | 1988-07-13 | 1993-08-03 | Nissei Asb Machine Co., Ltd. | Preform carrying apparatus |
JPH0853117A (ja) * | 1994-08-11 | 1996-02-27 | Kirin Brewery Co Ltd | 炭素膜コーティングプラスチック容器の製造装置および製造方法 |
JPH10258825A (ja) * | 1997-03-14 | 1998-09-29 | Kirin Brewery Co Ltd | 炭素膜コーティングプラスチック容器の製造装置および製造方法 |
JP2001518685A (ja) * | 1997-09-30 | 2001-10-16 | テトラ ラヴァル ホールディングズ アンド ファイナンス エス.アー. | プラズマ強化処理におけるプラスチック製ボトルの内面処理方法および装置 |
WO2001040072A1 (de) * | 1999-12-01 | 2001-06-07 | Tetra Laval Holdings & Finance S.A. | Vorrichtung zum abdichten des stirnrandes eines behälterhalses |
WO2001054164A1 (de) * | 2000-01-19 | 2001-07-26 | Tetra Laval Holding & Finance S.A. | Einkoppelanordnung für mikrowellenenergie mit impedanzanpassung |
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EP1507884A1 (de) | 2005-02-23 |
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