JP2005525688A5 - - Google Patents

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Publication number
JP2005525688A5
JP2005525688A5 JP2003522990A JP2003522990A JP2005525688A5 JP 2005525688 A5 JP2005525688 A5 JP 2005525688A5 JP 2003522990 A JP2003522990 A JP 2003522990A JP 2003522990 A JP2003522990 A JP 2003522990A JP 2005525688 A5 JP2005525688 A5 JP 2005525688A5
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JP
Japan
Prior art keywords
frame
port door
mounting surface
fixed
vertical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003522990A
Other languages
English (en)
Japanese (ja)
Other versions
JP4309263B2 (ja
JP2005525688A (ja
Filing date
Publication date
Priority claimed from US10/087,638 external-priority patent/US7100340B2/en
Application filed filed Critical
Publication of JP2005525688A publication Critical patent/JP2005525688A/ja
Publication of JP2005525688A5 publication Critical patent/JP2005525688A5/ja
Application granted granted Critical
Publication of JP4309263B2 publication Critical patent/JP4309263B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2003522990A 2001-08-31 2002-08-30 半導体ツールインターフェースのフレーム Expired - Lifetime JP4309263B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US31672201P 2001-08-31 2001-08-31
US10/087,638 US7100340B2 (en) 2001-08-31 2002-03-01 Unified frame for semiconductor material handling system
PCT/US2002/030297 WO2003019630A2 (en) 2001-08-31 2002-08-30 Unified frame for semiconductor material handling system

Publications (3)

Publication Number Publication Date
JP2005525688A JP2005525688A (ja) 2005-08-25
JP2005525688A5 true JP2005525688A5 (enExample) 2006-02-02
JP4309263B2 JP4309263B2 (ja) 2009-08-05

Family

ID=26777219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003522990A Expired - Lifetime JP4309263B2 (ja) 2001-08-31 2002-08-30 半導体ツールインターフェースのフレーム

Country Status (6)

Country Link
US (2) US7100340B2 (enExample)
JP (1) JP4309263B2 (enExample)
KR (1) KR100809107B1 (enExample)
CN (1) CN100359634C (enExample)
DE (1) DE10297170T5 (enExample)
WO (1) WO2003019630A2 (enExample)

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WO2006009723A2 (en) * 2004-06-15 2006-01-26 Brooks Automation, Inc. Substrate processing apparatus with removable component module
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US7578650B2 (en) * 2004-07-29 2009-08-25 Kla-Tencor Technologies Corporation Quick swap load port
US7622884B2 (en) * 2004-09-14 2009-11-24 Siemens Industry, Inc. Methods for managing electrical power
US7375490B2 (en) * 2004-09-14 2008-05-20 Siemens Energy & Automation, Inc. Methods for managing electrical power
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US9457442B2 (en) * 2005-06-18 2016-10-04 Futrfab, Inc. Method and apparatus to support process tool modules in a cleanspace fabricator
US7604449B1 (en) * 2005-06-27 2009-10-20 Kla-Tencor Technologies Corporation Equipment front end module
US8821099B2 (en) 2005-07-11 2014-09-02 Brooks Automation, Inc. Load port module
US7637708B2 (en) * 2006-01-09 2009-12-29 Sumco Corporation Production system for wafer
KR100832772B1 (ko) * 2006-05-22 2008-05-27 주식회사 나온테크 반도체이송장비
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US8021513B2 (en) * 2006-08-23 2011-09-20 Tokyo Electron Limited Substrate carrying apparatus and substrate carrying method
US7690881B2 (en) * 2006-08-30 2010-04-06 Asm Japan K.K. Substrate-processing apparatus with buffer mechanism and substrate-transferring apparatus
US9117859B2 (en) 2006-08-31 2015-08-25 Brooks Automation, Inc. Compact processing apparatus
US7934898B2 (en) * 2007-07-16 2011-05-03 Semitool, Inc. High throughput semiconductor wafer processing
WO2009014647A1 (en) * 2007-07-20 2009-01-29 Applied Materials, Inc. Dual-mode robot systems and methods for electronic device manufacturing
JP5185853B2 (ja) * 2009-02-16 2013-04-17 アテル株式会社 基板搬送装置
JP5603030B2 (ja) * 2009-06-23 2014-10-08 Ｄｍｇ森精機株式会社 加工機械の温度制御装置
JP5445015B2 (ja) 2009-10-14 2014-03-19 シンフォニアテクノロジー株式会社 キャリア移載促進装置
JP5952526B2 (ja) * 2011-02-04 2016-07-13 株式会社ダイヘン ワーク搬送システム
US9545724B2 (en) * 2013-03-14 2017-01-17 Brooks Automation, Inc. Tray engine with slide attached to an end effector base
CN103824794B (zh) * 2014-03-07 2016-09-28 上海华虹宏力半导体制造有限公司 用于控制smif和机台的控制装置、运输装置
KR101593386B1 (ko) 2014-09-01 2016-02-15 로체 시스템즈(주) 퍼지 모듈 및 이를 포함하는 로드 포트
EP3016136B1 (en) * 2014-10-27 2021-07-21 Robert Bosch GmbH Transport system with magnetically driven transport elements and according transportation method
US10177020B2 (en) 2015-02-07 2019-01-08 Kla-Tencor Corporation System and method for high throughput work-in-process buffer
KR101852323B1 (ko) * 2016-07-05 2018-04-26 로체 시스템즈(주) 퍼지 모듈 지그 및 이를 포함한 퍼지 모듈
US10541165B2 (en) 2016-11-10 2020-01-21 Applied Materials, Inc. Systems, apparatus, and methods for an improved load port backplane
CN109065470B (zh) * 2018-06-20 2024-03-19 常州瑞赛环保科技有限公司 光伏板研磨分离装置
US10784136B2 (en) 2018-07-27 2020-09-22 Onto Innovation Inc. FOUP purge shield
US10533852B1 (en) 2018-09-27 2020-01-14 Taiwan Semiconductor Manufacturing Company, Ltd. Leveling sensor, load port including the same, and method of leveling a load port
CN109212703B (zh) * 2018-11-06 2023-04-18 中国工程物理研究院激光聚变研究中心 用于光学元件离线精密装校的自洁净型自动化夹具库
US11527425B2 (en) * 2019-12-31 2022-12-13 Taiwan Semiconductor Manufacturing Co., Ltd. Systems and methods for tray cassette warehousing
TWI705516B (zh) * 2020-01-22 2020-09-21 迅得機械股份有限公司 晶圓盒移載裝置
CN114242632A (zh) * 2020-06-28 2022-03-25 上海果纳半导体技术有限公司 半导体设备的载入装置以及半导体设备
US12076854B2 (en) * 2021-03-18 2024-09-03 Applied Materials, Inc. Increased number of load ports on factory interface with robot that moves on track
JP2023082554A (ja) * 2021-12-02 2023-06-14 株式会社東京精密 筐体及びプローバ

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