JP2005525688A5 - - Google Patents

Download PDF

Info

Publication number
JP2005525688A5
JP2005525688A5 JP2003522990A JP2003522990A JP2005525688A5 JP 2005525688 A5 JP2005525688 A5 JP 2005525688A5 JP 2003522990 A JP2003522990 A JP 2003522990A JP 2003522990 A JP2003522990 A JP 2003522990A JP 2005525688 A5 JP2005525688 A5 JP 2005525688A5
Authority
JP
Japan
Prior art keywords
frame
port door
mounting surface
fixed
vertical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003522990A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005525688A (ja
JP4309263B2 (ja
Filing date
Publication date
Priority claimed from US10/087,638 external-priority patent/US7100340B2/en
Application filed filed Critical
Publication of JP2005525688A publication Critical patent/JP2005525688A/ja
Publication of JP2005525688A5 publication Critical patent/JP2005525688A5/ja
Application granted granted Critical
Publication of JP4309263B2 publication Critical patent/JP4309263B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2003522990A 2001-08-31 2002-08-30 半導体ツールインターフェースのフレーム Expired - Lifetime JP4309263B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US31672201P 2001-08-31 2001-08-31
US10/087,638 US7100340B2 (en) 2001-08-31 2002-03-01 Unified frame for semiconductor material handling system
PCT/US2002/030297 WO2003019630A2 (en) 2001-08-31 2002-08-30 Unified frame for semiconductor material handling system

Publications (3)

Publication Number Publication Date
JP2005525688A JP2005525688A (ja) 2005-08-25
JP2005525688A5 true JP2005525688A5 (enExample) 2006-02-02
JP4309263B2 JP4309263B2 (ja) 2009-08-05

Family

ID=26777219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003522990A Expired - Lifetime JP4309263B2 (ja) 2001-08-31 2002-08-30 半導体ツールインターフェースのフレーム

Country Status (6)

Country Link
US (2) US7100340B2 (enExample)
JP (1) JP4309263B2 (enExample)
KR (1) KR100809107B1 (enExample)
CN (1) CN100359634C (enExample)
DE (1) DE10297170T5 (enExample)
WO (1) WO2003019630A2 (enExample)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6206913B1 (en) * 1998-08-12 2001-03-27 Vascular Innovations, Inc. Method and system for attaching a graft to a blood vessel
US20030031538A1 (en) * 2001-06-30 2003-02-13 Applied Materials, Inc. Datum plate for use in installations of substrate handling systems
US7084466B1 (en) * 2002-12-09 2006-08-01 Novellus Systems, Inc. Liquid detection end effector sensor and method of using the same
TW200520049A (en) * 2003-10-21 2005-06-16 Nikon Corp Environment-controlling apparatus, device-producing apparatus, device-producing method, and exposure apparatus
GB2415291B (en) * 2004-06-15 2008-08-13 Nanobeam Ltd Charged particle beam system
US7607879B2 (en) * 2004-06-15 2009-10-27 Brooks Automation, Inc. Substrate processing apparatus with removable component module
US7578650B2 (en) * 2004-07-29 2009-08-25 Kla-Tencor Technologies Corporation Quick swap load port
US7375490B2 (en) * 2004-09-14 2008-05-20 Siemens Energy & Automation, Inc. Methods for managing electrical power
US7622884B2 (en) * 2004-09-14 2009-11-24 Siemens Industry, Inc. Methods for managing electrical power
JP4579723B2 (ja) * 2005-03-07 2010-11-10 川崎重工業株式会社 搬送系ユニットおよび分割体
US9457442B2 (en) * 2005-06-18 2016-10-04 Futrfab, Inc. Method and apparatus to support process tool modules in a cleanspace fabricator
US7604449B1 (en) * 2005-06-27 2009-10-20 Kla-Tencor Technologies Corporation Equipment front end module
US8821099B2 (en) 2005-07-11 2014-09-02 Brooks Automation, Inc. Load port module
US7637708B2 (en) * 2006-01-09 2009-12-29 Sumco Corporation Production system for wafer
KR100832772B1 (ko) * 2006-05-22 2008-05-27 주식회사 나온테크 반도체이송장비
JP4606388B2 (ja) * 2006-06-12 2011-01-05 川崎重工業株式会社 基板移載装置の搬送系ユニット
US8021513B2 (en) * 2006-08-23 2011-09-20 Tokyo Electron Limited Substrate carrying apparatus and substrate carrying method
US7690881B2 (en) * 2006-08-30 2010-04-06 Asm Japan K.K. Substrate-processing apparatus with buffer mechanism and substrate-transferring apparatus
US9117859B2 (en) 2006-08-31 2015-08-25 Brooks Automation, Inc. Compact processing apparatus
US7934898B2 (en) * 2007-07-16 2011-05-03 Semitool, Inc. High throughput semiconductor wafer processing
TWI379748B (en) * 2007-07-20 2012-12-21 Applied Materials Inc Dual-mode robot systems,substrate transfer apparatus and methods for electronic device manufacturing, and method of calibrating
JP5185853B2 (ja) * 2009-02-16 2013-04-17 アテル株式会社 基板搬送装置
JP5603030B2 (ja) * 2009-06-23 2014-10-08 Ｄｍｇ森精機株式会社 加工機械の温度制御装置
JP5445015B2 (ja) 2009-10-14 2014-03-19 シンフォニアテクノロジー株式会社 キャリア移載促進装置
JP5952526B2 (ja) * 2011-02-04 2016-07-13 株式会社ダイヘン ワーク搬送システム
US9545724B2 (en) * 2013-03-14 2017-01-17 Brooks Automation, Inc. Tray engine with slide attached to an end effector base
CN103824794B (zh) * 2014-03-07 2016-09-28 上海华虹宏力半导体制造有限公司 用于控制smif和机台的控制装置、运输装置
KR101593386B1 (ko) 2014-09-01 2016-02-15 로체 시스템즈(주) 퍼지 모듈 및 이를 포함하는 로드 포트
EP3016136B1 (en) * 2014-10-27 2021-07-21 Robert Bosch GmbH Transport system with magnetically driven transport elements and according transportation method
US10177020B2 (en) 2015-02-07 2019-01-08 Kla-Tencor Corporation System and method for high throughput work-in-process buffer
KR101852323B1 (ko) * 2016-07-05 2018-04-26 로체 시스템즈(주) 퍼지 모듈 지그 및 이를 포함한 퍼지 모듈
US10541165B2 (en) 2016-11-10 2020-01-21 Applied Materials, Inc. Systems, apparatus, and methods for an improved load port backplane
CN109065470B (zh) * 2018-06-20 2024-03-19 常州瑞赛环保科技有限公司 光伏板研磨分离装置
US10784136B2 (en) 2018-07-27 2020-09-22 Onto Innovation Inc. FOUP purge shield
US10533852B1 (en) * 2018-09-27 2020-01-14 Taiwan Semiconductor Manufacturing Company, Ltd. Leveling sensor, load port including the same, and method of leveling a load port
CN109212703B (zh) * 2018-11-06 2023-04-18 中国工程物理研究院激光聚变研究中心 用于光学元件离线精密装校的自洁净型自动化夹具库
US11527425B2 (en) * 2019-12-31 2022-12-13 Taiwan Semiconductor Manufacturing Co., Ltd. Systems and methods for tray cassette warehousing
TWI705516B (zh) * 2020-01-22 2020-09-21 迅得機械股份有限公司 晶圓盒移載裝置
CN114242632A (zh) * 2020-06-28 2022-03-25 上海果纳半导体技术有限公司 半导体设备的载入装置以及半导体设备
US12076854B2 (en) * 2021-03-18 2024-09-03 Applied Materials, Inc. Increased number of load ports on factory interface with robot that moves on track
JP2023082554A (ja) * 2021-12-02 2023-06-14 株式会社東京精密 筐体及びプローバ

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US87400A (en) * 1869-03-02 Gultivatoe
US115414A (en) * 1871-05-30 Improvement in sand-papering machines
US87092A (en) * 1869-02-23 Improvement in saw-teeth
US729463A (en) * 1902-12-31 1903-05-26 Emile F Weidig Lantern.
DE4207341C1 (enExample) * 1992-03-09 1993-07-15 Acr Automation In Cleanroom Gmbh, 7732 Niedereschach, De
JP3089153B2 (ja) * 1993-12-13 2000-09-18 信越化学工業株式会社 リソグラフィー用ペリクル
US5613821A (en) * 1995-07-06 1997-03-25 Brooks Automation, Inc. Cluster tool batchloader of substrate carrier
KR200143675Y1 (ko) * 1996-07-25 1999-06-15 윤종용 반도체 포토설비의 공기 순환장치
US6138721A (en) * 1997-09-03 2000-10-31 Asyst Technologies, Inc. Tilt and go load port interface alignment system
WO1999028952A2 (en) * 1997-11-28 1999-06-10 Fortrend Engineering Corporation Wafer-mapping load port interface
JPH11220001A (ja) 1998-01-30 1999-08-10 Hitachi Ltd 半導体基板処理装置におけるロードポート及びロードポート搬送台車
US6050891A (en) * 1998-02-06 2000-04-18 Applied Materials, Inc. Vacuum processing system with turbo-axial fan in clean-air supply system of front end environment
US6220808B1 (en) * 1998-07-13 2001-04-24 Asyst Technologies, Inc. Ergonomic, variable size, bottom opening system compatible with a vertical interface
US6281516B1 (en) * 1998-07-13 2001-08-28 Newport Corporation FIMS transport box load interface
US6502869B1 (en) * 1998-07-14 2003-01-07 Asyst Technologies, Inc. Pod door to port door retention system
US6261044B1 (en) * 1998-08-06 2001-07-17 Asyst Technologies, Inc. Pod to port door retention and evacuation system
US6188323B1 (en) * 1998-10-15 2001-02-13 Asyst Technologies, Inc. Wafer mapping system
US6520727B1 (en) * 2000-04-12 2003-02-18 Asyt Technologies, Inc. Modular sorter
US6364593B1 (en) * 2000-06-06 2002-04-02 Brooks Automation Material transport system

Similar Documents

Publication Publication Date Title
JP2005525688A5 (enExample)
USD517402S1 (en) Curtain rod support bracket
USD514764S1 (en) Drain basket retainable on sink
USD534942S1 (en) Sunglass frame
USD549414S1 (en) Mop frame
CA2458511A1 (en) Support structure of a portable keyboard
USD566678S1 (en) Mobile phone
USD470149S1 (en) Data processor support
USD572632S1 (en) Frame for support device
USD459587S1 (en) Paint roller frame with shiftable arm
USD505891S1 (en) Bicycle frame
USD525279S1 (en) Eyeglass frame
CN210424248U (zh) 一种具有减震保护功能的计算机散热底座
USD510631S1 (en) Frame of window/door shutter (II)
USD462840S1 (en) Photo frame
USD492519S1 (en) Frame structure for a high chair
USD567956S1 (en) Base structure and frame
JP2006055415A5 (enExample)
CN210779974U (zh) 踢脚线固线器
USD530119S1 (en) Bench frame
JP2001053089A5 (enExample)
CN223606510U (zh) 一种铝型材加工用输送装置
USD492567S1 (en) Saw
CN217181489U (zh) 一种计算机降噪装置
CA111816S (en) Pliers