JP2005518524A5 - - Google Patents

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Publication number
JP2005518524A5
JP2005518524A5 JP2003525244A JP2003525244A JP2005518524A5 JP 2005518524 A5 JP2005518524 A5 JP 2005518524A5 JP 2003525244 A JP2003525244 A JP 2003525244A JP 2003525244 A JP2003525244 A JP 2003525244A JP 2005518524 A5 JP2005518524 A5 JP 2005518524A5
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JP
Japan
Prior art keywords
mirror
infrared beam
scanning
spectrometer
driving device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003525244A
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English (en)
Japanese (ja)
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JP2005518524A (ja
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Publication date
Priority claimed from US10/227,135 external-priority patent/US6791086B2/en
Application filed filed Critical
Publication of JP2005518524A publication Critical patent/JP2005518524A/ja
Publication of JP2005518524A5 publication Critical patent/JP2005518524A5/ja
Pending legal-status Critical Current

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JP2003525244A 2001-08-31 2002-08-27 顕微分光気体分析装置 Pending JP2005518524A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US31676301P 2001-08-31 2001-08-31
US10/227,135 US6791086B2 (en) 2001-08-31 2002-08-23 Microspectrometer gas analyzer
PCT/US2002/027309 WO2003021211A1 (en) 2001-08-31 2002-08-27 Microspectrometer gas analyzer

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007313925A Division JP2008116469A (ja) 2001-08-31 2007-12-04 顕微分光気体分析装置

Publications (2)

Publication Number Publication Date
JP2005518524A JP2005518524A (ja) 2005-06-23
JP2005518524A5 true JP2005518524A5 (enExample) 2008-01-31

Family

ID=26921195

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2003525244A Pending JP2005518524A (ja) 2001-08-31 2002-08-27 顕微分光気体分析装置
JP2007313925A Pending JP2008116469A (ja) 2001-08-31 2007-12-04 顕微分光気体分析装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2007313925A Pending JP2008116469A (ja) 2001-08-31 2007-12-04 顕微分光気体分析装置

Country Status (5)

Country Link
US (2) US6791086B2 (enExample)
EP (1) EP1430279A4 (enExample)
JP (2) JP2005518524A (enExample)
BR (1) BR0212115A (enExample)
WO (1) WO2003021211A1 (enExample)

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US7233394B2 (en) 2005-06-20 2007-06-19 Luckoff Display Corporation Compact spectrometer
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KR101433497B1 (ko) 2010-06-09 2014-08-22 엠파이어 테크놀로지 디벨롭먼트 엘엘씨 가스 농도 모니터링
JP5803478B2 (ja) * 2011-09-20 2015-11-04 セイコーエプソン株式会社 描画装置、描画方法
CN102359949A (zh) * 2011-09-20 2012-02-22 重庆大学 一种基于mems扫描微镜的高分辨率微型红外光谱仪
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JP6166049B2 (ja) * 2013-01-25 2017-07-19 浜松ホトニクス株式会社 光検出装置および光検出方法
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CN103344335B (zh) * 2013-06-18 2014-04-02 武汉大学 一种基于mems检测器的中红外光谱仪
CN105092516A (zh) * 2014-10-24 2015-11-25 深圳莱特光电有限公司 一种基于数字光处理技术的便携式液体食物近红外光谱分析仪
CN107735135B (zh) 2015-04-02 2020-06-26 希尔－罗姆服务私人有限公司 用于呼吸装置的歧管
CN105136293B (zh) * 2015-06-09 2019-05-14 河南理工大学 一种基于透射光栅的mems微镜微型光谱仪
CN104880433B (zh) * 2015-06-09 2018-07-10 河南理工大学 基于离轴抛物反射镜的高分辨率mems微镜红外光谱仪
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JP7159823B2 (ja) * 2018-11-29 2022-10-25 株式会社リコー 光学装置
JP7324619B2 (ja) * 2019-06-04 2023-08-10 スタンレー電気株式会社 光偏向器及び光走査装置
US11692934B2 (en) * 2020-07-23 2023-07-04 Masimo Corporation Solid-state spectrometer
KR102761551B1 (ko) * 2022-05-03 2025-02-04 국방과학연구소 분광 시스템

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