JP2005509785A - 冷却式のねじ真空ポンプ - Google Patents
冷却式のねじ真空ポンプ Download PDFInfo
- Publication number
- JP2005509785A JP2005509785A JP2003544339A JP2003544339A JP2005509785A JP 2005509785 A JP2005509785 A JP 2005509785A JP 2003544339 A JP2003544339 A JP 2003544339A JP 2003544339 A JP2003544339 A JP 2003544339A JP 2005509785 A JP2005509785 A JP 2005509785A
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- vacuum pump
- screw vacuum
- casing
- pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims abstract description 33
- 239000007788 liquid Substances 0.000 claims abstract description 7
- 239000000110 cooling liquid Substances 0.000 claims description 8
- 239000002826 coolant Substances 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 10
- 238000005192 partition Methods 0.000 description 3
- 230000004308 accommodation Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/082—Details specially related to intermeshing engagement type pumps
- F04C18/086—Carter
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
- F04C29/045—Heating; Cooling; Heat insulation of the electric motor in hermetic pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/60—Shafts
- F04C2240/603—Shafts with internal channels for fluid distribution, e.g. hollow shaft
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Description
Claims (10)
- ねじ真空ポンプ(1)であって、ポンプケーシング(2,6)、該ポンプケーシング内に収容されたロータ(3,4)、該ロータのための液体冷却式冷却装置、並びに駆動モータ(9)を備えている形式のものにおいて、付加的にポンプケーシング(2,6)のための、強制的な空気流によって作動する外側の冷却装置が設けられていることを特徴とする、冷却式のねじ真空ポンプ。
- 強制的な空気流の形成のために送風機(21)を設けてあり、該送風機が駆動モータ(9)に連結されている請求項1記載のねじ真空ポンプ。
- 送風機(21)、駆動モータ(9)及びポンプケーシング(2)が、空気流の流れ方向で互いに前後に配置されている請求項1又は2記載のねじ真空ポンプ。
- 少なくともポンプケーシング(2)が外側にひれを備えている請求項3記載のねじ真空ポンプ。
- ポンプケーシング(2)及びロータ(3,4)がアルミニウムから成っている請求項1から4のいずれか1項記載のねじ真空ポンプ。
- 冷却空気の案内のために外側のケーシング(22)が設けられている請求項1から5のいずれか1項記載のねじ真空ポンプ。
- 送風機(21)が空気入口側(24)に配置されている請求項7記載のねじ真空ポンプ。
- 空気入口(24)の側に、ロータ冷却装置の冷却液体によって貫流される熱交換器(25)が配置されている請求項1から7のいずれか1項記載のねじ真空ポンプ。
- 熱交換器(25)が冷却空気の流れ方向で送風機(21)の前に設けられている請求項5記載のねじ真空ポンプ。
- 冷却機構が、液状の冷却媒体によって受け取られる熱量と直接に空気流によって受け取られる熱量とを互いにほぼ同じにするように形成されている請求項1から9のいずれか1項記載のねじ真空ポンプ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10156180.6A DE10156180B4 (de) | 2001-11-15 | 2001-11-15 | Gekühlte Schraubenvakuumpumpe |
PCT/EP2002/012086 WO2003042541A1 (de) | 2001-11-15 | 2002-10-30 | Gekühlte schraubenvakuumpumpe |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005509785A true JP2005509785A (ja) | 2005-04-14 |
JP4589001B2 JP4589001B2 (ja) | 2010-12-01 |
Family
ID=7705882
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003544339A Expired - Fee Related JP4589001B2 (ja) | 2001-11-15 | 2002-10-30 | 冷却式のねじ真空ポンプ |
Country Status (10)
Country | Link |
---|---|
US (1) | US7056108B2 (ja) |
EP (1) | EP1444440B1 (ja) |
JP (1) | JP4589001B2 (ja) |
KR (1) | KR100892530B1 (ja) |
CN (1) | CN100422561C (ja) |
CA (1) | CA2463617A1 (ja) |
DE (1) | DE10156180B4 (ja) |
HU (1) | HUP0402372A2 (ja) |
PL (1) | PL206617B1 (ja) |
WO (1) | WO2003042541A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010127119A (ja) * | 2008-11-25 | 2010-06-10 | Ebara Corp | ドライ真空ポンプユニット |
KR101869386B1 (ko) * | 2016-10-14 | 2018-06-20 | 주식회사 벡스코 | 냉각식 진공펌프 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10156179A1 (de) * | 2001-11-15 | 2003-05-28 | Leybold Vakuum Gmbh | Kühlung einer Schraubenvakuumpumpe |
CN1656316A (zh) * | 2002-05-20 | 2005-08-17 | Ts株式会社 | 真空泵 |
DE102005033084B4 (de) * | 2005-07-15 | 2007-10-11 | Knorr-Bremse Systeme für Schienenfahrzeuge GmbH | Öleingespritzter Verdichter mit Mitteln zur Öltemperaturregelung |
JP5197141B2 (ja) * | 2008-05-12 | 2013-05-15 | 株式会社神戸製鋼所 | 2段スクリュ圧縮機および冷凍装置 |
CN102280965B (zh) * | 2010-06-12 | 2013-07-24 | 中国科学院沈阳科学仪器股份有限公司 | 真空泵用屏蔽电机 |
EP2615307B1 (de) * | 2012-01-12 | 2019-08-21 | Vacuubrand Gmbh + Co Kg | Schraubenvakuumpumpe |
CN102659051B (zh) * | 2012-05-16 | 2014-04-16 | 宁波三罗机械有限公司 | 便于散热的牵引吊装工具 |
KR101712962B1 (ko) * | 2015-09-24 | 2017-03-07 | 이인철 | 냉각장치를 갖춘 진공펌프 |
CN105805007B (zh) * | 2016-01-21 | 2017-11-21 | 江西五十铃发动机有限公司 | 一种复合冷却式压力润滑电动真空泵 |
DE102016216279A1 (de) | 2016-08-30 | 2018-03-01 | Leybold Gmbh | Vakuumpumpen-Schraubenrotor |
US11293422B2 (en) | 2019-08-02 | 2022-04-05 | Thermo Finnigan Llc | Methods and systems for cooling a vacuum pump |
CN111594439A (zh) * | 2020-04-23 | 2020-08-28 | 浙江佳成机械有限公司 | 一种三级螺杆压缩机 |
KR102437094B1 (ko) * | 2022-04-25 | 2022-08-30 | ㈜글로텍 | 냉각스크린 및 냉각장치가 구비된 스크류형 진공펌프 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2013785A1 (de) * | 1970-03-23 | 1971-11-04 | Hoftmann J | Anordnung zur Auslösung einer Verriegelung, die nur bei Übereinstimmung bestimmter Voraussetzungen eintritt |
DE2217022C3 (de) * | 1972-04-08 | 1975-03-27 | Sihi Gmbh & Co Kg, 2210 Itzehoe | Flüssigkeitsring-Vakuumpumpe mit Umlaufbehälter |
GB1557296A (en) * | 1976-04-26 | 1979-12-05 | Cooper Ind Inc | Liquid injected compressors |
DE3136775A1 (de) | 1981-09-16 | 1983-03-31 | Isartaler Schraubenkompressoren GmbH, 8192 Geretsried | "kuehleranordnung fuer eine verdichteranlage" |
US4475876A (en) * | 1982-12-27 | 1984-10-09 | Allis-Chalmers Corporation | Oil purge system for cold weather shutdown of oil flooded screw compressor |
CA1279856C (en) * | 1985-10-09 | 1991-02-05 | Akira Suzuki | Oilless rotary type compressor system |
US4929161A (en) * | 1987-10-28 | 1990-05-29 | Hitachi, Ltd. | Air-cooled oil-free rotary-type compressor |
FR2637655B1 (fr) * | 1988-10-07 | 1994-01-28 | Alcatel Cit | Machine rotative du type pompe a vis |
JPH0774636B2 (ja) * | 1990-11-07 | 1995-08-09 | 株式会社日立製作所 | 空冷式パツケージ形スクリユー圧縮機 |
JPH062678A (ja) * | 1992-06-22 | 1994-01-11 | Mitsubishi Electric Corp | 密閉型回転圧縮機 |
BE1008367A3 (nl) * | 1994-01-25 | 1996-04-02 | Atlas Copco Airpower Nv | Kompressoreenheid. |
DE4417607C1 (de) * | 1994-05-19 | 1995-10-19 | Siemens Ag | Pumpenaggregat |
DE29505608U1 (de) * | 1995-03-31 | 1996-07-25 | Siemens AG, 80333 München | Verdichteraggregat |
JPH1113674A (ja) * | 1997-06-19 | 1999-01-19 | Hitachi Ltd | 無給油式スクリュー圧縮機 |
DE19745616A1 (de) * | 1997-10-10 | 1999-04-15 | Leybold Vakuum Gmbh | Gekühlte Schraubenvakuumpumpe |
AU1479199A (en) * | 1997-12-30 | 1999-07-26 | Ateliers Busch S.A. | Cooling device |
DE19820523A1 (de) * | 1998-05-08 | 1999-11-11 | Peter Frieden | Schraubenspindel-Vakuumpumpe mit Rotorkühlung |
DE19849098A1 (de) * | 1998-10-24 | 2000-04-27 | Leybold Vakuum Gmbh | Exzenterschneckenpumpe bzw. Innenspindelpumpe |
DE19945871A1 (de) * | 1999-09-24 | 2001-03-29 | Leybold Vakuum Gmbh | Schraubenpumpe, insbesondere Schraubenvakuumpumpe, mit zwei Pumpstufen |
DE19963172A1 (de) | 1999-12-27 | 2001-06-28 | Leybold Vakuum Gmbh | Schraubenpumpe mit einem Kühlmittelkreislauf |
DE19963171A1 (de) * | 1999-12-27 | 2001-06-28 | Leybold Vakuum Gmbh | Gekühlte Schraubenvakuumpumpe |
DE10019066A1 (de) * | 2000-04-18 | 2001-10-25 | Leybold Vakuum Gmbh | Vakuumpumpe mit zwei zusammenwirkenden Rotoren |
DE20013338U1 (de) | 2000-08-02 | 2000-12-28 | Werner Rietschle GmbH + Co. KG, 79650 Schopfheim | Verdichter |
KR100424795B1 (ko) * | 2001-08-09 | 2004-03-30 | 코웰정밀주식회사 | 자체순환 냉각시스템 진공펌프 |
-
2001
- 2001-11-15 DE DE10156180.6A patent/DE10156180B4/de not_active Expired - Lifetime
-
2002
- 2002-10-30 PL PL369467A patent/PL206617B1/pl not_active IP Right Cessation
- 2002-10-30 HU HU0402372A patent/HUP0402372A2/hu unknown
- 2002-10-30 EP EP02790310.3A patent/EP1444440B1/de not_active Expired - Lifetime
- 2002-10-30 US US10/495,796 patent/US7056108B2/en not_active Expired - Fee Related
- 2002-10-30 JP JP2003544339A patent/JP4589001B2/ja not_active Expired - Fee Related
- 2002-10-30 WO PCT/EP2002/012086 patent/WO2003042541A1/de active Application Filing
- 2002-10-30 CA CA002463617A patent/CA2463617A1/en not_active Abandoned
- 2002-10-30 CN CNB028225880A patent/CN100422561C/zh not_active Expired - Lifetime
- 2002-10-30 KR KR1020047007383A patent/KR100892530B1/ko not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010127119A (ja) * | 2008-11-25 | 2010-06-10 | Ebara Corp | ドライ真空ポンプユニット |
KR101869386B1 (ko) * | 2016-10-14 | 2018-06-20 | 주식회사 벡스코 | 냉각식 진공펌프 |
Also Published As
Publication number | Publication date |
---|---|
PL369467A1 (en) | 2005-04-18 |
DE10156180B4 (de) | 2015-10-15 |
KR20050042067A (ko) | 2005-05-04 |
HUP0402372A2 (hu) | 2005-03-29 |
CN100422561C (zh) | 2008-10-01 |
WO2003042541A1 (de) | 2003-05-22 |
KR100892530B1 (ko) | 2009-04-10 |
JP4589001B2 (ja) | 2010-12-01 |
EP1444440B1 (de) | 2014-06-04 |
CN1585860A (zh) | 2005-02-23 |
EP1444440A1 (de) | 2004-08-11 |
CA2463617A1 (en) | 2003-05-22 |
US20040265160A1 (en) | 2004-12-30 |
US7056108B2 (en) | 2006-06-06 |
PL206617B1 (pl) | 2010-08-31 |
DE10156180A1 (de) | 2003-05-28 |
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