JP2005354088A5 - - Google Patents

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Publication number
JP2005354088A5
JP2005354088A5 JP2005179853A JP2005179853A JP2005354088A5 JP 2005354088 A5 JP2005354088 A5 JP 2005354088A5 JP 2005179853 A JP2005179853 A JP 2005179853A JP 2005179853 A JP2005179853 A JP 2005179853A JP 2005354088 A5 JP2005354088 A5 JP 2005354088A5
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JP
Japan
Prior art keywords
target value
feedforward
transfer function
actuator
delay
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Pending
Application number
JP2005179853A
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English (en)
Japanese (ja)
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JP2005354088A (ja
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Publication date
Priority claimed from US10/852,688 external-priority patent/US7289858B2/en
Application filed filed Critical
Publication of JP2005354088A publication Critical patent/JP2005354088A/ja
Publication of JP2005354088A5 publication Critical patent/JP2005354088A5/ja
Pending legal-status Critical Current

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JP2005179853A 2004-05-25 2005-05-24 リソグラフィ運動制御システム及び方法 Pending JP2005354088A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/852,688 US7289858B2 (en) 2004-05-25 2004-05-25 Lithographic motion control system and method

Publications (2)

Publication Number Publication Date
JP2005354088A JP2005354088A (ja) 2005-12-22
JP2005354088A5 true JP2005354088A5 (https=) 2009-03-05

Family

ID=35426457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005179853A Pending JP2005354088A (ja) 2004-05-25 2005-05-24 リソグラフィ運動制御システム及び方法

Country Status (2)

Country Link
US (1) US7289858B2 (https=)
JP (1) JP2005354088A (https=)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1883914B1 (en) * 2005-05-06 2011-07-06 Omnilink Systems, Inc. System and method of tracking the movement of individuals and assets
US7657334B2 (en) * 2005-09-16 2010-02-02 Asml Netherlands B.V. Lithographic apparatus and control method
US8045134B2 (en) * 2006-03-13 2011-10-25 Asml Netherlands B.V. Lithographic apparatus, control system and device manufacturing method
US7774287B2 (en) * 2006-03-14 2010-08-10 Asml Netherlands B.V. System and method for moving a component through a setpoint profile, lithographic apparatus and device manufacturing method
US7576832B2 (en) * 2006-05-04 2009-08-18 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7630059B2 (en) * 2006-07-24 2009-12-08 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7352149B2 (en) * 2006-08-29 2008-04-01 Asml Netherlands B.V. Method for controlling the position of a movable object, a positioning system, and a lithographic apparatus
US8014881B2 (en) * 2007-02-15 2011-09-06 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
NL1036292A1 (nl) * 2007-12-19 2009-06-22 Asml Netherlands Bv Controller for a positioning device, method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device.
US20100302526A1 (en) * 2008-11-13 2010-12-02 Nikon Corporation Drive control method for moving body, exposure method, robot control method, drive control apparatus, exposure apparatus and robot apparatus
EP2290808B1 (de) * 2009-08-28 2013-01-23 Baumüller Anlagen-Systemtechnik GmbH & Co. KG Verfahren zur Bestimmung eines Skalierungsfaktors eines elektrischen Antriebssystems sowie zugehörige Einrichtung und zugehöriges elektrisches Antriebssystem
JP2011086892A (ja) * 2009-10-19 2011-04-28 Canon Inc 位置制御装置、露光装置およびデバイス製造方法
US20110257768A1 (en) * 2010-03-26 2011-10-20 International Business Machines Corporation Control of a dynamic system cross reference to related application
NL2006981A (en) * 2010-07-26 2012-01-30 Asml Netherlands Bv Position control system, lithographic apparatus, and method to control a position of a movable object.
JP5968017B2 (ja) * 2012-04-06 2016-08-10 キヤノン株式会社 制御装置、リソグラフィー装置、物品の製造方法、及びフィードフォワード操作量データ列を生成する方法
JP6106582B2 (ja) * 2013-12-09 2017-04-05 山洋電気株式会社 モータ制御装置
JP6308852B2 (ja) * 2014-04-15 2018-04-11 キヤノン株式会社 駆動装置、リソグラフィ装置、および物品の製造方法
US10078272B2 (en) 2014-12-02 2018-09-18 Asml Netherlands B.V. Lithographic method and apparatus
WO2016087388A1 (en) 2014-12-02 2016-06-09 Asml Netherlands B.V. Lithographic method and apparatus
WO2017050523A1 (en) 2015-09-24 2017-03-30 Asml Netherlands B.V. Method of reducing effects of reticle heating and/or cooling in a lithographic process
EP3379356A1 (en) 2017-03-23 2018-09-26 ASML Netherlands B.V. Method of modelling lithographic systems for performing predictive maintenance
JP6897545B2 (ja) * 2017-12-18 2021-06-30 オムロン株式会社 同期制御装置
US11048281B2 (en) * 2018-06-12 2021-06-29 Robert Bosch Gmbh Real-time capable control strategy for hydraulic systems while systematically taking into consideration control (rate) and state variable constraints
KR102698693B1 (ko) * 2019-04-17 2024-08-23 에이에스엠엘 네델란즈 비.브이. 디바이스 제조 프로세스를 위한 방법
WO2023050226A1 (zh) * 2021-09-29 2023-04-06 西门子股份公司 运动控制方法及装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5523193A (en) * 1988-05-31 1996-06-04 Texas Instruments Incorporated Method and apparatus for patterning and imaging member
EP0527166B1 (de) * 1990-05-02 1995-06-14 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Belichtungsvorrichtung
US5229872A (en) * 1992-01-21 1993-07-20 Hughes Aircraft Company Exposure device including an electrically aligned electronic mask for micropatterning
JP3217522B2 (ja) * 1992-03-02 2001-10-09 キヤノン株式会社 精密位置決め装置
WO1997033205A1 (en) * 1996-03-06 1997-09-12 Philips Electronics N.V. Differential interferometer system and lithographic step-and-scan apparatus provided with such a system
WO1998028665A1 (en) * 1996-12-24 1998-07-02 Koninklijke Philips Electronics N.V. Two-dimensionally balanced positioning device with two object holders, and lithographic device provided with such a positioning device
US6961628B2 (en) * 1999-04-16 2005-11-01 Siemens Energy & Automation, Inc. Method and apparatus for tuning compensation parameters
US6470225B1 (en) * 1999-04-16 2002-10-22 Siemens Energy & Automation, Inc. Method and apparatus for automatically tuning feedforward parameters
AU5881700A (en) * 1999-06-22 2001-01-09 Brooks Automation, Inc. Run-to-run controller for use in microelectronic fabrication
US6577908B1 (en) * 2000-06-20 2003-06-10 Fisher Rosemount Systems, Inc Adaptive feedback/feedforward PID controller
US7006900B2 (en) * 2002-11-14 2006-02-28 Asm International N.V. Hybrid cascade model-based predictive control system
US7209219B2 (en) * 2003-03-06 2007-04-24 Asml Netherlands B.V. System for controlling a position of a mass

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