JP2005350174A5 - - Google Patents
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- Publication number
- JP2005350174A5 JP2005350174A5 JP2004170647A JP2004170647A JP2005350174A5 JP 2005350174 A5 JP2005350174 A5 JP 2005350174A5 JP 2004170647 A JP2004170647 A JP 2004170647A JP 2004170647 A JP2004170647 A JP 2004170647A JP 2005350174 A5 JP2005350174 A5 JP 2005350174A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004170647A JP4608954B2 (ja) | 2004-06-09 | 2004-06-09 | 搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004170647A JP4608954B2 (ja) | 2004-06-09 | 2004-06-09 | 搬送装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005350174A JP2005350174A (ja) | 2005-12-22 |
| JP2005350174A5 true JP2005350174A5 (ko) | 2007-06-14 |
| JP4608954B2 JP4608954B2 (ja) | 2011-01-12 |
Family
ID=35584963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004170647A Expired - Fee Related JP4608954B2 (ja) | 2004-06-09 | 2004-06-09 | 搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4608954B2 (ko) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101192751B1 (ko) | 2005-12-29 | 2012-10-18 | 엘지디스플레이 주식회사 | 평판표시장치 제조 장비 및 이를 이용한 평판표시장치 제조방법 |
| JP2009196799A (ja) * | 2008-02-25 | 2009-09-03 | Tokyo Kakoki Kk | 基板材表面処理装置のコンベア |
| JP4824723B2 (ja) * | 2008-06-17 | 2011-11-30 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
| JP6033593B2 (ja) * | 2012-07-18 | 2016-11-30 | 東レエンジニアリング株式会社 | 基板搬送装置 |
| KR102351697B1 (ko) * | 2017-09-14 | 2022-01-17 | 주식회사 디엠에스 | 기판처리장치 |
| CN108687088A (zh) * | 2018-05-02 | 2018-10-23 | 江西昌浩实业有限公司 | 一种方便固定玻璃的玻璃清洗机 |
| JP6853520B2 (ja) * | 2018-09-20 | 2021-03-31 | 株式会社Ｎｓｃ | 浮上搬送装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63237421A (ja) * | 1987-03-25 | 1988-10-03 | Mitsubishi Electric Corp | 半導体装置の搬送装置 |
| CA2050381C (en) * | 1990-09-06 | 1999-02-23 | William V. Goodhue | Process and apparatus for fabricating honeycomb material |
| US5209464A (en) * | 1992-03-23 | 1993-05-11 | Eastman Kodak Company | Bottom scuff sheet feeder |
| JP2002060094A (ja) * | 2000-08-18 | 2002-02-26 | Toshiba Corp | 紙葉類搬送装置、紙葉類搬送方法、紙葉類区分装置、および紙葉類区分方法 |
| JP3851077B2 (ja) * | 2000-11-15 | 2006-11-29 | 富士写真フイルム株式会社 | 基板エア浮上搬送装置及びそれを用いた基板搬送方法 |
| JP3756402B2 (ja) * | 2000-12-08 | 2006-03-15 | 富士写真フイルム株式会社 | 基板搬送装置及び方法 |
| JP2003040421A (ja) * | 2001-07-27 | 2003-02-13 | Toyota Industries Corp | 物体搬送装置 |
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2004
- 2004-06-09 JP JP2004170647A patent/JP4608954B2/ja not_active Expired - Fee Related