JP2005342615A - 球状複合粒子の製造方法およびその製造装置 - Google Patents
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Abstract
【解決手段】プラズマ2に原材料粒子を導入しその表面を溶融・蒸発させることにより原材料粒子を球形に近づけつつ、その球状粒子の周囲に原材料蒸気が混在した場を形成し、さらに、その球状粒子と原材料蒸気の混在場22に反応・急冷ガス23を吹き込むことにより、原材料蒸気を反応・凝縮させて球状粒子よりも直径の小さな小粒子を生成させると共に、その小粒子を球状粒子の表面に分散付着させるようにする。
【選択図】図1
Description
2 プラズマ
3 プラズマ発生手段
4 原材料供給手段
5 ガス供給手段
6 回収手段
21 超微粒子が球状粒子の表面に分散付着する領域
22 球状粒子と原材料蒸気の混在場
23 反応・急冷ガス
24 加熱パラメータ
25 反応・凝縮パラメータ
26 原材料粒子の蒸発量
27 球状粒子の粒子寸法条件
28 超微粒子の粒子寸法条件
29 球状複合粒子の粒子寸法条件
Claims (12)
- プラズマに原材料粒子を導入しその表面を溶融・蒸発させることにより前記原材料粒子を球形に近づけつつ、その球状粒子の周囲に原材料蒸気が混在した場を形成し、さらに、その球状粒子と原材料蒸気の混在場に反応・急冷ガスを吹き込むことにより、前記原材料蒸気を反応・凝縮させて前記球状粒子よりも直径の小さな小粒子を生成させると共に、その小粒子を前記球状粒子の表面に分散付着させることを特徴とする球状複合粒子の製造方法。
- 前記小粒子は直径が100nm以下の超微粒子であることを特徴とする請求項1記載の球状複合粒子の製造方法。
- 前記球状粒子の粒子寸法条件と前記小粒子の粒子寸法条件の少なくともいずれか一方を制御することで、球状複合粒子の粒子寸法条件を調節することを特徴とする請求項1又は2記載の球状複合粒子の製造方法。
- 調節する前記球状複合粒子の粒子寸法条件は、前記球状複合粒子の球形度、前記球状複合粒子における前記球状粒子と前記小粒子との粒径比、前記球状複合粒子における前記球状粒子と前記小粒子との体積比のうち、少なくともいずれか1つであることを特徴とする請求項3記載の球状複合粒子の製造方法。
- 前記原材料粒子の表面を溶融・蒸発させる加熱パラメータを制御することにより、前記球状粒子の粒子寸法条件を制御することを特徴とする請求項3又は4記載の球状複合粒子の製造方法。
- 制御する前記球状粒子の粒子寸法条件は、前記球状粒子の球形度、前記球状粒子の直径のうち、少なくともいずれか1つであることを特徴とする請求項5記載の球状複合粒子の製造方法。
- 前記原材料粒子の表面を溶融・蒸発させる加熱パラメータを制御することにより、前記原材料粒子の蒸発量を制御して、前記小粒子の粒子寸法条件を制御することを特徴とする請求項3又は4記載の球状複合粒子の製造方法。
- 制御する前記加熱パラメータは、前記プラズマの温度、前記プラズマ中の前記原材料粒子の滞留時間、前記プラズマのガスの種類、前記プラズマの圧力、前記原材料粒子の種類、前記原材料粒子の粒径のうち、少なくともいずれか1つであることを特徴とする請求項5から7のいずれか1つに記載の球状複合粒子の製造方法。
- 前記原材料蒸気を反応・凝縮させる反応・凝縮パラメータを制御することにより、前記小粒子の粒子寸法条件を制御することを特徴とする請求項3又は4記載の球状複合粒子の製造方法。
- 制御する前記反応・凝縮パラメータは、前記反応・急冷ガスの種類、前記反応・急冷ガスの流量、前記反応・急冷ガスの吹き込み位置の温度、前記混在場の圧力のうち、少なくともいずれか1つであることを特徴とする請求項9記載の球状複合粒子の製造方法。
- 制御する前記小粒子の粒子寸法条件は、前記小粒子の直径、前記球状粒子1個に付着する小粒子の個数のうち、少なくともいずれか1つであることを特徴とする請求項7、9のうちいずれか1つに記載の球状複合粒子の製造方法。
- チャンバーと、前記チャンバー内にプラズマを発生させるプラズマ発生手段と、前記プラズマに原材料粒子を導入する原材料供給手段と、前記原材料粒子の表面の溶融・蒸発によって形成された球状粒子と原材料蒸気の混在場に反応・急冷ガスを吹き込んで前記原材料蒸気を反応・凝縮させて前記球状粒子よりも直径の小さな小粒子を生成させるガス供給手段を備え、前記チャンバーは前記小粒子が前記球状粒子の表面に分散付着する領域を内部に有しており、さらに、前記小粒子が分散付着した前記球状粒子を前記チャンバー内から回収する回収手段を備えることを特徴とする球状複合粒子の製造装置。
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JP2007258015A (ja) * | 2006-03-23 | 2007-10-04 | Central Res Inst Of Electric Power Ind | 絶縁材用樹脂組成物及びその製造方法 |
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JP2012040520A (ja) * | 2010-08-20 | 2012-03-01 | Toshiba Mitsubishi-Electric Industrial System Corp | 微粒子生成装置および微粒子生成方法 |
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