JP2005341788A5 - - Google Patents
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- Publication number
- JP2005341788A5 JP2005341788A5 JP2005118473A JP2005118473A JP2005341788A5 JP 2005341788 A5 JP2005341788 A5 JP 2005341788A5 JP 2005118473 A JP2005118473 A JP 2005118473A JP 2005118473 A JP2005118473 A JP 2005118473A JP 2005341788 A5 JP2005341788 A5 JP 2005341788A5
- Authority
- JP
- Japan
- Prior art keywords
- comb
- reinforcing rib
- actuator
- micro
- comb teeth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003014 reinforcing effect Effects 0.000 claims 10
- 244000126211 Hericium coralloides Species 0.000 claims 2
- 238000006073 displacement reaction Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005118473A JP4761810B2 (ja) | 2004-04-26 | 2005-04-15 | マイクロアクチュエータ |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004129281 | 2004-04-26 | ||
| JP2004129281 | 2004-04-26 | ||
| JP2005118473A JP4761810B2 (ja) | 2004-04-26 | 2005-04-15 | マイクロアクチュエータ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005341788A JP2005341788A (ja) | 2005-12-08 |
| JP2005341788A5 true JP2005341788A5 (enrdf_load_stackoverflow) | 2008-03-13 |
| JP4761810B2 JP4761810B2 (ja) | 2011-08-31 |
Family
ID=35494726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005118473A Expired - Fee Related JP4761810B2 (ja) | 2004-04-26 | 2005-04-15 | マイクロアクチュエータ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4761810B2 (enrdf_load_stackoverflow) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20130079603A (ko) | 2006-07-06 | 2013-07-10 | 가부시키가이샤 니콘 | 광학 디바이스, 노광 장치, 및 디바이스 제조 방법 |
| JP5103876B2 (ja) * | 2006-11-16 | 2012-12-19 | 株式会社デンソー | ２次元光走査装置 |
| JP5133814B2 (ja) | 2008-08-13 | 2013-01-30 | ラピスセミコンダクタ株式会社 | 可変容量素子 |
| JP5696686B2 (ja) | 2011-08-30 | 2015-04-08 | 株式会社豊田中央研究所 | 半導体装置 |
| JP5988592B2 (ja) * | 2012-01-19 | 2016-09-07 | キヤノン株式会社 | 可動ミラー、波面補正デバイスおよび眼底検査装置 |
| KR102325987B1 (ko) * | 2014-08-04 | 2021-11-12 | 세바 마이크로시스템즈 인코포레이션 | 3-dof mems 피스톤-튜브 정전 마이크로액추에이터 |
| CN112204449B (zh) * | 2018-06-14 | 2022-06-17 | 奥林巴斯株式会社 | 光偏转器及扫描型激光显微镜 |
| CN117270192B (zh) * | 2023-11-22 | 2024-04-02 | 苏州亿波达微系统技术有限公司 | 一种mems微镜结构 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5465627A (en) * | 1977-10-31 | 1979-05-26 | Kuretake Kougiyou Kk | Capillary rod appropriate as pen |
| US5986381A (en) * | 1997-03-14 | 1999-11-16 | Hewlett-Packard Company | Electrostatic actuator with spatially alternating voltage patterns |
| JPH11136961A (ja) * | 1997-10-24 | 1999-05-21 | Citizen Watch Co Ltd | 静電ウォブルモータ |
| JP2930946B1 (ja) * | 1998-08-26 | 1999-08-09 | 勲 劔持 | ゴルフ練習台 |
| JP4072743B2 (ja) * | 1998-11-13 | 2008-04-09 | 日本ビクター株式会社 | 光偏向器及びこれを用いた表示装置 |
| JP4837839B2 (ja) * | 2001-05-30 | 2011-12-14 | 三浦 秀巳 | 平行平板型静電アクチュエータ、ヘッドスライダ、ヘッド組立体及び磁気ディスク装置 |
| JP3595515B2 (ja) * | 2001-06-26 | 2004-12-02 | 三菱重工業株式会社 | 静電チャック |
| JP4409811B2 (ja) * | 2001-08-20 | 2010-02-03 | 株式会社リコー | 光走査装置、光書込装置、画像形成装置、振動ミラーチップ及び光走査モジュール |
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2005
- 2005-04-15 JP JP2005118473A patent/JP4761810B2/ja not_active Expired - Fee Related