JP4761810B2 - マイクロアクチュエータ - Google Patents

マイクロアクチュエータ Download PDF

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Publication number
JP4761810B2
JP4761810B2 JP2005118473A JP2005118473A JP4761810B2 JP 4761810 B2 JP4761810 B2 JP 4761810B2 JP 2005118473 A JP2005118473 A JP 2005118473A JP 2005118473 A JP2005118473 A JP 2005118473A JP 4761810 B2 JP4761810 B2 JP 4761810B2
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JP
Japan
Prior art keywords
comb
reinforcing rib
movable
comb electrode
height
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005118473A
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English (en)
Japanese (ja)
Other versions
JP2005341788A5 (enrdf_load_stackoverflow
JP2005341788A (ja
Inventor
章 黒塚
由浩 虫鹿
修 梶野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2005118473A priority Critical patent/JP4761810B2/ja
Publication of JP2005341788A publication Critical patent/JP2005341788A/ja
Publication of JP2005341788A5 publication Critical patent/JP2005341788A5/ja
Application granted granted Critical
Publication of JP4761810B2 publication Critical patent/JP4761810B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
JP2005118473A 2004-04-26 2005-04-15 マイクロアクチュエータ Expired - Fee Related JP4761810B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005118473A JP4761810B2 (ja) 2004-04-26 2005-04-15 マイクロアクチュエータ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004129281 2004-04-26
JP2004129281 2004-04-26
JP2005118473A JP4761810B2 (ja) 2004-04-26 2005-04-15 マイクロアクチュエータ

Publications (3)

Publication Number Publication Date
JP2005341788A JP2005341788A (ja) 2005-12-08
JP2005341788A5 JP2005341788A5 (enrdf_load_stackoverflow) 2008-03-13
JP4761810B2 true JP4761810B2 (ja) 2011-08-31

Family

ID=35494726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005118473A Expired - Fee Related JP4761810B2 (ja) 2004-04-26 2005-04-15 マイクロアクチュエータ

Country Status (1)

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JP (1) JP4761810B2 (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20130079603A (ko) 2006-07-06 2013-07-10 가부시키가이샤 니콘 광학 디바이스, 노광 장치, 및 디바이스 제조 방법
JP5103876B2 (ja) * 2006-11-16 2012-12-19 株式会社デンソー ２次元光走査装置
JP5133814B2 (ja) 2008-08-13 2013-01-30 ラピスセミコンダクタ株式会社 可変容量素子
JP5696686B2 (ja) 2011-08-30 2015-04-08 株式会社豊田中央研究所 半導体装置
JP5988592B2 (ja) * 2012-01-19 2016-09-07 キヤノン株式会社 可動ミラー、波面補正デバイスおよび眼底検査装置
KR102325987B1 (ko) * 2014-08-04 2021-11-12 세바 마이크로시스템즈 인코포레이션 3-dof mems 피스톤-튜브 정전 마이크로액추에이터
CN112204449B (zh) * 2018-06-14 2022-06-17 奥林巴斯株式会社 光偏转器及扫描型激光显微镜
CN117270192B (zh) * 2023-11-22 2024-04-02 苏州亿波达微系统技术有限公司 一种mems微镜结构

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5465627A (en) * 1977-10-31 1979-05-26 Kuretake Kougiyou Kk Capillary rod appropriate as pen
US5986381A (en) * 1997-03-14 1999-11-16 Hewlett-Packard Company Electrostatic actuator with spatially alternating voltage patterns
JPH11136961A (ja) * 1997-10-24 1999-05-21 Citizen Watch Co Ltd 静電ウォブルモータ
JP2930946B1 (ja) * 1998-08-26 1999-08-09 勲 劔持 ゴルフ練習台
JP4072743B2 (ja) * 1998-11-13 2008-04-09 日本ビクター株式会社 光偏向器及びこれを用いた表示装置
JP4837839B2 (ja) * 2001-05-30 2011-12-14 三浦 秀巳 平行平板型静電アクチュエータ、ヘッドスライダ、ヘッド組立体及び磁気ディスク装置
JP3595515B2 (ja) * 2001-06-26 2004-12-02 三菱重工業株式会社 静電チャック
JP4409811B2 (ja) * 2001-08-20 2010-02-03 株式会社リコー 光走査装置、光書込装置、画像形成装置、振動ミラーチップ及び光走査モジュール

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Publication number Publication date
JP2005341788A (ja) 2005-12-08

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