JP2005339960A - 対物レンズ、電子線装置及び欠陥検査方法 - Google Patents
対物レンズ、電子線装置及び欠陥検査方法 Download PDFInfo
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- JP2005339960A JP2005339960A JP2004156386A JP2004156386A JP2005339960A JP 2005339960 A JP2005339960 A JP 2005339960A JP 2004156386 A JP2004156386 A JP 2004156386A JP 2004156386 A JP2004156386 A JP 2004156386A JP 2005339960 A JP2005339960 A JP 2005339960A
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- sample
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- objective lens
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- electron beam
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004156386A JP2005339960A (ja) | 2004-05-26 | 2004-05-26 | 対物レンズ、電子線装置及び欠陥検査方法 |
| US11/136,668 US7420164B2 (en) | 2004-05-26 | 2005-05-25 | Objective lens, electron beam system and method of inspecting defect |
| US12/219,802 US20080315090A1 (en) | 2004-05-26 | 2008-07-29 | Objective lens, electron beam system and method of inspecting defect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004156386A JP2005339960A (ja) | 2004-05-26 | 2004-05-26 | 対物レンズ、電子線装置及び欠陥検査方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005339960A true JP2005339960A (ja) | 2005-12-08 |
| JP2005339960A5 JP2005339960A5 (enExample) | 2007-06-14 |
Family
ID=35493285
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004156386A Withdrawn JP2005339960A (ja) | 2004-05-26 | 2004-05-26 | 対物レンズ、電子線装置及び欠陥検査方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005339960A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007317467A (ja) * | 2006-05-25 | 2007-12-06 | Hitachi High-Technologies Corp | 荷電粒子線応用装置 |
| JP2017151155A (ja) * | 2016-02-22 | 2017-08-31 | 株式会社ニューフレアテクノロジー | 検査装置及び検査方法 |
-
2004
- 2004-05-26 JP JP2004156386A patent/JP2005339960A/ja not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007317467A (ja) * | 2006-05-25 | 2007-12-06 | Hitachi High-Technologies Corp | 荷電粒子線応用装置 |
| JP2017151155A (ja) * | 2016-02-22 | 2017-08-31 | 株式会社ニューフレアテクノロジー | 検査装置及び検査方法 |
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