JP2005339960A5 - - Google Patents

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Publication number
JP2005339960A5
JP2005339960A5 JP2004156386A JP2004156386A JP2005339960A5 JP 2005339960 A5 JP2005339960 A5 JP 2005339960A5 JP 2004156386 A JP2004156386 A JP 2004156386A JP 2004156386 A JP2004156386 A JP 2004156386A JP 2005339960 A5 JP2005339960 A5 JP 2005339960A5
Authority
JP
Japan
Prior art keywords
optical axis
sample
electron beam
separator
magnetic pole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004156386A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005339960A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004156386A priority Critical patent/JP2005339960A/ja
Priority claimed from JP2004156386A external-priority patent/JP2005339960A/ja
Priority to US11/136,668 priority patent/US7420164B2/en
Publication of JP2005339960A publication Critical patent/JP2005339960A/ja
Publication of JP2005339960A5 publication Critical patent/JP2005339960A5/ja
Priority to US12/219,802 priority patent/US20080315090A1/en
Withdrawn legal-status Critical Current

Links

JP2004156386A 2004-05-26 2004-05-26 対物レンズ、電子線装置及び欠陥検査方法 Withdrawn JP2005339960A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004156386A JP2005339960A (ja) 2004-05-26 2004-05-26 対物レンズ、電子線装置及び欠陥検査方法
US11/136,668 US7420164B2 (en) 2004-05-26 2005-05-25 Objective lens, electron beam system and method of inspecting defect
US12/219,802 US20080315090A1 (en) 2004-05-26 2008-07-29 Objective lens, electron beam system and method of inspecting defect

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004156386A JP2005339960A (ja) 2004-05-26 2004-05-26 対物レンズ、電子線装置及び欠陥検査方法

Publications (2)

Publication Number Publication Date
JP2005339960A JP2005339960A (ja) 2005-12-08
JP2005339960A5 true JP2005339960A5 (enExample) 2007-06-14

Family

ID=35493285

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004156386A Withdrawn JP2005339960A (ja) 2004-05-26 2004-05-26 対物レンズ、電子線装置及び欠陥検査方法

Country Status (1)

Country Link
JP (1) JP2005339960A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4878501B2 (ja) * 2006-05-25 2012-02-15 株式会社日立ハイテクノロジーズ 荷電粒子線応用装置
JP6642092B2 (ja) * 2016-02-22 2020-02-05 株式会社ニューフレアテクノロジー 検査装置及び検査方法

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