JP2005339680A - 磁気ヘッド - Google Patents
磁気ヘッド Download PDFInfo
- Publication number
- JP2005339680A JP2005339680A JP2004157375A JP2004157375A JP2005339680A JP 2005339680 A JP2005339680 A JP 2005339680A JP 2004157375 A JP2004157375 A JP 2004157375A JP 2004157375 A JP2004157375 A JP 2004157375A JP 2005339680 A JP2005339680 A JP 2005339680A
- Authority
- JP
- Japan
- Prior art keywords
- film
- bearing surface
- air bearing
- magnetic head
- protective film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001681 protective effect Effects 0.000 claims abstract description 155
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 154
- 229910003481 amorphous carbon Inorganic materials 0.000 claims abstract description 109
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 79
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 79
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 78
- 229910052710 silicon Inorganic materials 0.000 claims description 66
- 239000010703 silicon Substances 0.000 claims description 66
- 229910052739 hydrogen Inorganic materials 0.000 claims description 65
- 239000001257 hydrogen Substances 0.000 claims description 65
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 59
- 238000001069 Raman spectroscopy Methods 0.000 claims description 10
- 239000010408 film Substances 0.000 abstract description 384
- 239000010410 layer Substances 0.000 abstract description 113
- 230000007797 corrosion Effects 0.000 abstract description 48
- 238000005260 corrosion Methods 0.000 abstract description 48
- 239000010409 thin film Substances 0.000 abstract description 36
- 239000000758 substrate Substances 0.000 abstract description 9
- 239000011241 protective layer Substances 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract description 2
- 238000009413 insulation Methods 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 64
- 238000000034 method Methods 0.000 description 44
- 238000001237 Raman spectrum Methods 0.000 description 37
- 230000000052 comparative effect Effects 0.000 description 36
- 238000000151 deposition Methods 0.000 description 36
- 150000002500 ions Chemical class 0.000 description 36
- 238000004544 sputter deposition Methods 0.000 description 30
- 229910052799 carbon Inorganic materials 0.000 description 29
- 238000005011 time of flight secondary ion mass spectroscopy Methods 0.000 description 28
- 238000002042 time-of-flight secondary ion mass spectrometry Methods 0.000 description 28
- 238000012360 testing method Methods 0.000 description 27
- 238000007740 vapor deposition Methods 0.000 description 27
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 24
- 238000005259 measurement Methods 0.000 description 22
- 239000007789 gas Substances 0.000 description 18
- 238000010891 electric arc Methods 0.000 description 17
- 238000005546 reactive sputtering Methods 0.000 description 13
- 230000015572 biosynthetic process Effects 0.000 description 11
- 238000010292 electrical insulation Methods 0.000 description 11
- 230000008021 deposition Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 7
- -1 carbon ions Chemical class 0.000 description 7
- 238000010884 ion-beam technique Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 229910052719 titanium Inorganic materials 0.000 description 6
- 239000010936 titanium Substances 0.000 description 6
- 125000004429 atom Chemical group 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000000921 elemental analysis Methods 0.000 description 3
- 150000002430 hydrocarbons Chemical class 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 239000002253 acid Substances 0.000 description 2
- 239000002156 adsorbate Substances 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 238000011088 calibration curve Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 238000007737 ion beam deposition Methods 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 125000004433 nitrogen atom Chemical group N* 0.000 description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 2
- 238000005001 rutherford backscattering spectroscopy Methods 0.000 description 2
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 239000010421 standard material Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 235000013619 trace mineral Nutrition 0.000 description 1
- 239000011573 trace mineral Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B5/60—Fluid-dynamic spacing of heads from record-carriers
- G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/40—Protective measures on heads, e.g. against excessive temperature
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/56—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head support for the purpose of adjusting the position of the head relative to the record carrier, e.g. manual adjustment for azimuth correction or track centering
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/58—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head for the purpose of maintaining alignment of the head relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B5/60—Fluid-dynamic spacing of heads from record-carriers
- G11B5/6005—Specially adapted for spacing from a rotating disc using a fluid cushion
- G11B5/6082—Design of the air bearing surface
Landscapes
- Physical Vapour Deposition (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Abstract
極薄膜において良好な腐食耐性、電気的絶縁性、機械的耐摩耗性を有する浮上面保護膜を提供する。
【解決手段】
高密度、高電気抵抗、化学的安定性、基板との高密着性を有する窒化珪素薄膜を浮上面保護膜最下層に配置し、テトラヘドラルアモルファスカーボンと窒素からなる膜を浮上面保護膜最上層に配置することによって、極薄膜において、良好な腐食耐性、電気的絶縁性、機械的耐摩耗性を有する浮上面保護膜が実現される。
【選択図】 図2
Description
磁気ヘッド浮上面保護膜製造に係る比較例1に関して説明する。まず磁気ヘッド11を真空容器内に搬送し、真空排気を行う。この後、Ar或いは他の希ガスなどによる、プラズマ或いはイオンビームを用いての浮上面のエッチングが行われる。
磁気ヘッド浮上面保護膜製造に係る比較例2について説明する。
比較例3、4においては、浮上面保護膜最上層18はCVD蒸着法による水素含有アモルファスカーボン膜で構成される。比較例3においては浮上面保護膜最下層17はスパッタリング蒸着法により成膜された珪素膜、又は比較例4においては反応性スパッタリング蒸着法により成膜された窒化珪素膜により構成される。
本発明の浮上面保護膜を有する磁気ヘッドの特性について述べる。上記表1の実験例1から実験例3は、総膜厚を3.0nmから2.1nmまで変化させて作製した窒化珪素薄膜を浮上面保護膜最下層17とし、テトラヘドラルアモルファスカーボンと窒素からなる膜を浮上面保護膜最上層18とする浮上面保護膜16を有する本実施例により作成された浮上面保護膜16を有する磁気ヘッドである。腐食試験の結果、テトラヘドラルアモルファスカーボンと窒素からなる膜を浮上面保護膜最上層18として用いて、窒化珪素薄膜を浮上面保護膜最下層17として用いた場合、総膜厚2.6nmまでの腐食耐性が確認できた。
次に機械的耐摩耗性に関して述べる。図3によれば剥離点33で示される荷重において浮上面保護膜最下層17が珪素薄膜である浮上面保護膜16は剥離又は破壊することがわかる。
以上より窒化珪素膜を浮上面保護膜最下層17とした場合、膜厚が2nm以下であり、0.5nm以上であることが望ましい。
(1)式は、Nの含有量が20原子%以上であるときに有効である。(1)式に基づいて考えると、実施例3で示した緻密な窒化珪素膜は、窒素流量比が10%以上50%以下であるスパッタリングガスを用いて成膜されているので、図12の(b)より、膜中の窒素含有率は45原子%以上57原子%以下であることが分かる。この組成比は窒化珪素膜のXPS分析などによっても実証される。窒化珪素膜は化学量論的組成のとき、窒素含有率が57原子%である。窒素が57原子%より多く含まれると窒化珪素がもろくなるため、本発明に適さない。
Claims (4)
- 磁気記録再生素子の磁気記録媒体に相対する面が保護膜により覆われている磁気ヘッドであって、該保護膜が複数の膜の積層により構成されてあって、磁気記録再生素子に接する層である浮上面保護膜最下層が窒素と珪素を含む層からなり、浮上面保護膜の最表面に位置する層である浮上面保護膜最上層がテトラヘドラルアモルファスカーボンと窒素を含む層からなることを特徴とする磁気ヘッド。
- 前記浮上面保護膜の最上層を構成するテトラヘドラルアモルファスカーボンと窒素からなる膜が、磁気ヘッドの状態で膜中の水素の含有量が25原子%以下であり、かつ、ラマン分光法を用いて測定されたとき、1500〜1600cm−1に存在する一方のピーク(A)と1200〜1450cm−1に存在するもう一方のピーク(B)の強度比(B/A)が0.0以上0.4以下であることを特徴とする請求項1に記載の磁気ヘッド。
- 前記浮上面保護膜の最下層を構成する前記窒化珪素膜の膜厚が0.5nm以上であることを特徴とする請求項1又は2に記載の磁気ヘッド。
- 前記浮上面保護膜の最下層を構成する前記窒化珪素膜において、窒素の含有率が45原子%以上57原子%以下であることを特徴とする請求項1、2又は3に記載の磁気ヘッド。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004157375A JP4335744B2 (ja) | 2004-05-27 | 2004-05-27 | 磁気ヘッド |
CNB2005100743679A CN100369115C (zh) | 2004-05-27 | 2005-05-26 | 磁头 |
US11/140,557 US7286326B2 (en) | 2004-05-27 | 2005-05-27 | Magnetic head with air bearing surface protection film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004157375A JP4335744B2 (ja) | 2004-05-27 | 2004-05-27 | 磁気ヘッド |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005339680A true JP2005339680A (ja) | 2005-12-08 |
JP4335744B2 JP4335744B2 (ja) | 2009-09-30 |
Family
ID=35424907
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004157375A Expired - Fee Related JP4335744B2 (ja) | 2004-05-27 | 2004-05-27 | 磁気ヘッド |
Country Status (3)
Country | Link |
---|---|
US (1) | US7286326B2 (ja) |
JP (1) | JP4335744B2 (ja) |
CN (1) | CN100369115C (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011236116A (ja) * | 2010-04-14 | 2011-11-24 | Canon Inc | 光学素子成形用型の製造方法および光学素子成形用型 |
JP2013033585A (ja) * | 2011-08-02 | 2013-02-14 | Hgst Netherlands B V | 軟質中間膜を備えた空気ベアリング面オーバーコートおよびその製造方法 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4154220B2 (ja) * | 2002-12-06 | 2008-09-24 | 株式会社日立グローバルストレージテクノロジーズ | 磁気ヘッド及びこれを用いた磁気記録再生装置 |
JP4039678B2 (ja) * | 2005-08-22 | 2008-01-30 | アルプス電気株式会社 | 薄膜磁気ヘッド |
US7352524B2 (en) * | 2005-11-09 | 2008-04-01 | Tdk Corporation | Magnetic disk drive |
US7782569B2 (en) * | 2007-01-18 | 2010-08-24 | Sae Magnetics (Hk) Ltd. | Magnetic recording head and media comprising aluminum oxynitride underlayer and a diamond-like carbon overcoat |
US7961427B2 (en) * | 2007-05-22 | 2011-06-14 | Galleon International Corporation | High performance computer hard disk drive with a carbon overcoat and method of improving hard disk performance |
US9944356B1 (en) | 2009-03-25 | 2018-04-17 | Alexander T. Wigley | Shape shifting foils |
US20110032640A1 (en) * | 2009-08-10 | 2011-02-10 | Hitachi Global Storage Technologies Netherlands B.V. | Multi-layer, thin film overcoat for magnetic media disk |
US8213117B2 (en) * | 2010-06-04 | 2012-07-03 | Tdk Corporation | Magnetic head with protective layer and a protective film removal method for the magnetic head |
US20120012979A1 (en) * | 2010-07-15 | 2012-01-19 | International Business Machines Corporation | Semiconductor capacitor |
US10923534B2 (en) * | 2016-08-04 | 2021-02-16 | Nec Corporation | Rectifying element and switching element having the rectifying element |
US11735212B1 (en) * | 2022-04-25 | 2023-08-22 | Sae Magnetics (H.K.) Ltd. | Thermally assisted magnetic head including a record/read separate protective structure, head gimbal assembly and hard disk drive each having the thermally assisted magnetic head |
US11562766B1 (en) * | 2022-04-25 | 2023-01-24 | Sae Magnetics (H.K.) Ltd. | Thermally assisted magnetic head, head gimbal assembly and hard disk drive |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06150599A (ja) * | 1992-11-12 | 1994-05-31 | Nec Corp | 磁気ヘッドスライダ |
JPH09212814A (ja) * | 1996-01-31 | 1997-08-15 | Nec Corp | 保護被膜と保護被膜を有する磁気ヘッドスライダおよび磁気ディスク装置 |
JPH09212840A (ja) | 1996-01-31 | 1997-08-15 | Nec Corp | 磁気ヘッドスライダ及びその製造方法並びに磁気ディスク装置 |
JPH09245332A (ja) * | 1996-03-06 | 1997-09-19 | Nec Corp | 磁気ヘッド |
JPH10188506A (ja) | 1998-01-12 | 1998-07-21 | Nec Corp | 磁気ヘッドスライダ用保護層 |
JP2000123359A (ja) * | 1998-10-12 | 2000-04-28 | Nippon Telegr & Teleph Corp <Ntt> | 磁気記録媒体用あるいは磁気記録用スライダーの保護膜形成方法 |
US6236543B1 (en) * | 1999-01-29 | 2001-05-22 | Read-Rite Corporation | Durable landing pads for an air-bearing slider |
JP2001123359A (ja) | 1999-10-18 | 2001-05-08 | Kurabo Ind Ltd | 製織方法並びに筬及びその製作方法 |
JP2001297410A (ja) * | 2000-04-11 | 2001-10-26 | Matsushita Electric Ind Co Ltd | 薄膜磁気ヘッドおよびその製造方法 |
US6995948B2 (en) * | 2002-07-11 | 2006-02-07 | Tdk Corporation | Thin-film magnetic head, method for producing the same and magnetic disk device using the same |
US6793778B2 (en) * | 2002-07-15 | 2004-09-21 | Hitachi Global Storage Technologies Netherlands N.V. | Method of fabricating slider pads for a transducer operating with moving magnetic media |
US7300556B2 (en) * | 2003-08-29 | 2007-11-27 | Hitachi Global Storage Technologies Netherlands B.V. | Method for depositing a thin film adhesion layer |
-
2004
- 2004-05-27 JP JP2004157375A patent/JP4335744B2/ja not_active Expired - Fee Related
-
2005
- 2005-05-26 CN CNB2005100743679A patent/CN100369115C/zh not_active Expired - Fee Related
- 2005-05-27 US US11/140,557 patent/US7286326B2/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011236116A (ja) * | 2010-04-14 | 2011-11-24 | Canon Inc | 光学素子成形用型の製造方法および光学素子成形用型 |
JP2013033585A (ja) * | 2011-08-02 | 2013-02-14 | Hgst Netherlands B V | 軟質中間膜を備えた空気ベアリング面オーバーコートおよびその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN100369115C (zh) | 2008-02-13 |
CN1702740A (zh) | 2005-11-30 |
JP4335744B2 (ja) | 2009-09-30 |
US7286326B2 (en) | 2007-10-23 |
US20050264938A1 (en) | 2005-12-01 |
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