JP2005331048A - Vibration-proof x-y table - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vibration-proof X-Y table which can almost perfectly eliminate the sliding friction by mechanically separating the horizontal table from a driving system so as not to transmit a harmful vibration to the horizontal table without using any of steel balls and a lubricating oil, and can freely move the horizontal table in two mutually orthogonal directions in the vibration isolating state. <P>SOLUTION: The X-Y table comprises rods 21, 22 which have cylindrical outside surfaces 21a, 22a having a circular arc shape at least at a part of their cross sections, and have air jetting ports 21b, 22b provided on the cylindrical outside surfaces so as to jet compressed air from the cylindrical outside surfaces, and guides 31, 32 having circular arc grooves 31a, 32a formed so as to have the same radius of curvature as those of the cylindrical outside surfaces of the rods. The rods can float from the guides by forming the pressurized air film between the cylindrical outside surfaces and the circular arc grooves. As a result, the horizontal table 3 can move in the two mutually orthogonal directions in the vibration isolating state. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an anti-vibration XY table, and in particular, a horizontal table attached to a shaft is levitated from the guide by ejecting compressed air from the cylindrical outer peripheral surface of the shaft to the arc groove of the guide, It can be mechanically separated from the horizontal table so as not to transmit harmful vibrations, and it can eliminate sliding friction without using steel balls or lubricants at all. The present invention relates to an anti-vibration XY table that can be moved freely and in a vibration-isolating state.

  XY tables are conventionally used in various manufacturing equipment such as IC manufacturing, measuring equipment, etc., and the table is supported by linear guides such as ball guides so that they can move independently in two directions orthogonal to each other. In general, a ball screw is attached in parallel to each moving direction, and the ball screw is driven by a servo motor, a stepping motor or the like to drive the table.

  For this reason, in the conventional XY table, friction vibration generated between the linear guide and the table when the table is moved (vibration caused when the rolling element is used) or generated from the motor for driving the ball screw. At present, the vibrations transmitted to the table are transmitted to the table (for example, vibrations of about 2 to 5 Hz), and as it is, it cannot cope with today's IC technology that requires micron-order positioning accuracy and millisecond order tact time.

  For this reason, in an XY table, it is important how to prevent transmission of vibration to the table. Conventionally, vibration-proof rubber mats and vibration-damping alloy mats have been most frequently used as vibration-proof means, but vibration-proof rubber mats cannot cover all vibration frequency bands generated from a drive system, etc. There is a problem that know-how is required for the selection of anti-vibration rubber mats, and although the vibration-damping alloy mat has been in the spotlight in recent years, the table and the pedestal are mechanically joined, so from the drive system etc. There is a problem that it is basically impossible to reduce all vibrations that occur.

  On the other hand, as disclosed in Patent Document 1, many pneumatic vibration isolators have been devised, but a bearing that combines a shaft having a cylindrical outer peripheral surface and an arc groove having the same radius of curvature as the cylindrical outer peripheral surface is provided. What was used is not disclosed at all.

  Some devices have been devised to reduce vertical vibrations with pneumatic anti-vibration devices, and those that control lateral vibrations with pneumatic anti-vibration devices. There is no one that can be moved freely in the direction (for example, the X direction and the Y direction).

JP 2002-31190 A

  The present invention has been made to eliminate the above-described drawbacks of the prior art, and an object of the present invention is to provide a cylindrical outer peripheral surface of a shaft having a cylindrical outer peripheral surface in which at least a part of the cross-sectional shape is an arc shape. Provided with an air outlet for allowing compressed air to be ejected from the outer peripheral surface of the cylinder, and by forming a pneumatic layer between the outer peripheral surface of the cylinder and the circular arc groove formed at the same radius of curvature, the shaft extends from the arc groove. By being configured to be able to float, the shaft and the arc groove are mechanically separated so that harmful vibrations are not transmitted and can be completely blocked.

  Another object is to provide a shaft having a cylindrical outer peripheral surface in which at least a part of the cross-sectional shape has an arc shape, and an air outlet that allows the compressed air to be ejected from the cylindrical outer peripheral surface. And a guide having an arc groove formed at the same radius of curvature as the cylindrical outer peripheral surface of the shaft, and by forming a pneumatic layer between the cylindrical outer peripheral surface and the arc groove, the shaft floats from the guide in the axial direction. By being configured to be movable, the shaft and the guide are mechanically separated so that no harmful vibrations are transmitted and almost no sliding friction is caused.

  Still another object is to provide a bearing having the above-described configuration and a horizontal table mounted on the upper side of the shaft so that the horizontal table can be moved in a state where it floats in the axial direction of the shaft with respect to a horizontally installed guide. By configuring, it is to prevent the harmful vibration on the guide side from being transmitted to the horizontal table, and to greatly improve the positioning accuracy of the horizontal table.

  Another object is to provide a linear motor mounted to drive the horizontal table in the axial direction of the shaft at a position where the horizontal table and the guide are opposed to each other, and the horizontal table with respect to the horizontally installed guide. By configuring the table so that it can be driven by a linear motor while floating in the axial direction of the shaft, the drive system and the horizontal table can be mechanically separated from each other so that the horizontal table can be freely moved in a predetermined direction. It is to move in a state so that it can be positioned accurately.

  Still another object of the present invention is to support the floating of the horizontal table by the repulsive force of the magnet by, for example, reversing the horizontal table and the guide at opposite positions of the horizontal table and the guide. It is to be able to maintain the state where the horizontal table is levitated even when no water is ejected or when a relatively heavy object is attached to the horizontal table.

  Another object is to provide a first shaft having a cylindrical outer peripheral surface in which at least a part of the cross-sectional shape is an arc shape, and an air outlet that allows compressed air to be ejected from the outer peripheral surface of the cylinder. A first air bearing comprising a first guide having a circular groove formed in the same radius of curvature as the cylindrical outer peripheral surface of the first shaft, and a first air bearing attached to an upper side of the first shaft of the first air bearing and having a predetermined A second guide having an arc groove formed with a radius of curvature and a cylindrical outer peripheral surface in which at least a part of the cross-sectional shape has an arc shape with the same radius of curvature as the arc groove of the second guide has the cylindrical outer surface. A second air bearing configured to move in a direction orthogonal to the first air bearing, the second air bearing including a second shaft provided with an air jet port capable of ejecting compressed air from the outer peripheral surface; and on the upper side of the second shaft With a mounted horizontal table, and levitating the horizontal table By being configured to be movable in two directions perpendicular to each other in a state where the first guide and the second guide are moved, the transmission of vibration between the first guide and the second guide is cut off by the first bearing, and the second guide and the horizontal table are cut by the second bearing. The XY table is provided such that harmful vibrations from the first guide as a base are not transmitted to the horizontal table by interrupting the transmission of vibration between the horizontal guide and the horizontal table.

  Still another object of the present invention is to provide a first linear motor, a horizontal table, and a second table mounted to drive the second guide in the axial direction of the first shaft at the opposing positions of the second guide and the first guide. And a second linear motor mounted so as to drive the horizontal table in the axial direction of the second shaft at opposite positions of the two guides, and in a state where the horizontal table is levitated by the first linear motor and the second linear motor. The present invention is to provide an anti-vibration XY table that suppresses the occurrence of vibrations in the movable part and the drive part by being configured to be independently drivable in two orthogonal directions. To achieve the required micron-order positioning accuracy and millisecond order tact time.

  Another object is to set a reference axis processed to high precision roundness, radius of curvature and surface roughness in a mold, and then inject the plastic resin into the mold to cure it. By forming an arc groove on which the radius and surface roughness are transferred as they are on the guide, it is possible to form a highly accurate arc groove, which has been difficult to process, easily and inexpensively. Therefore, it is easy to introduce an air bearing using the precision guide into various devices, for example, an anti-vibration XY table.

  In short, the shaft of the present invention (Claim 1) has a cylindrical outer peripheral surface in which at least a part of the cross-sectional shape is an arc shape, and an air outlet is provided on the outer peripheral surface of the cylinder so that compressed air can be ejected from the outer peripheral surface of the cylinder. A pneumatic layer is formed between the cylindrical outer peripheral surface and the circular arc groove formed at the same curvature radius so as to be able to float from the circular arc groove.

  The air bearing of the present invention (Claim 2) has a cylindrical outer peripheral surface in which at least a part of the cross-sectional shape is an arc shape, and an air outlet that allows compressed air to be ejected from the cylindrical outer peripheral surface to the cylindrical outer peripheral surface. And a guide having an arc groove formed in the same radius of curvature as the cylindrical outer peripheral surface of the shaft, and forming a pneumatic layer between the cylindrical outer peripheral surface and the arc groove The shaft floats from the guide and is configured to be movable in the axial direction.

  Further, the vibration isolating horizontal table of the present invention (Claim 3) has a cylindrical outer peripheral surface in which at least a part of the cross-sectional shape is an arc shape, and an air jet that allows compressed air to be ejected from the cylindrical outer peripheral surface to the cylindrical outer peripheral surface. An air bearing comprising a shaft provided with an outlet and a guide having an arc groove formed in the same radius of curvature as the cylindrical outer peripheral surface of the shaft, and a horizontal table attached to the upper side of the shaft, The horizontal table is configured to be movable in a state of floating in the axial direction of the shaft with respect to the guide installed on the shaft.

  Further, the vibration isolating horizontal table of the present invention (Claim 4) has a cylindrical outer peripheral surface in which at least a part of the cross-sectional shape is an arc shape, and an air jet capable of ejecting compressed air from the cylindrical outer peripheral surface to the cylindrical outer peripheral surface. An air bearing comprising a shaft provided with an outlet and a guide having an arc groove formed in the same radius of curvature as the cylindrical outer peripheral surface of the shaft; a horizontal table mounted on the upper side of the shaft; and the horizontal table And a linear motor mounted so as to drive the horizontal table in the axial direction of the shaft at a position opposite to the guide, and the horizontal table is disposed in the axial direction of the shaft with respect to the guide installed horizontally. It is configured to be able to be driven by the linear motor in a state where it floats on the surface.

  The vibration-proof horizontal table of the present invention (Claim 5) is the vibration-proof horizontal table according to claim 3 or 4, wherein the horizontal table and the guide are opposed to each other at opposite positions. A magnet is attached to each of them.

  The vibration-proof XY table of the present invention (Claim 6) has a cylindrical outer peripheral surface in which at least a part of the cross-sectional shape is an arc shape, and allows compressed air to be ejected from the outer peripheral surface of the cylinder to the cylindrical outer peripheral surface. A first air bearing comprising a first shaft provided with an air outlet and a first guide having an arc groove formed in the same radius of curvature as the cylindrical outer peripheral surface of the first shaft; and the first air bearing A second guide having an arc groove attached to the upper side of the first shaft and having a predetermined radius of curvature and at least a part of the cross-sectional shape of the second guide have an arc shape having the same radius of curvature as the arc groove of the second guide. It has a cylindrical outer peripheral surface, and comprises a second shaft provided with an air outlet that allows the compressed air to be ejected from the cylindrical outer peripheral surface, and is configured to be movable in a direction perpendicular to the first air bearing. Second air bearing and an upper side of the second shaft And a horizontal table and is characterized by being configured to be movable in two directions perpendicular to each other while floating the horizontal table.

  The vibration-proof XY table of the present invention (Claim 7) has a cylindrical outer peripheral surface in which at least a part of the cross-sectional shape is an arc shape, and allows compressed air to be ejected from the cylindrical outer peripheral surface to the cylindrical outer peripheral surface. A first air bearing comprising a first shaft provided with an air outlet and a first guide having an arc groove formed in the same radius of curvature as the cylindrical outer peripheral surface of the first shaft; and the first air bearing A second guide having an arc groove attached to the upper side of the first shaft and having a predetermined radius of curvature and at least a part of the cross-sectional shape of the second guide have an arc shape having the same radius of curvature as the arc groove of the second guide. It has a cylindrical outer peripheral surface, and comprises a second shaft provided with an air outlet that allows the compressed air to be ejected from the cylindrical outer peripheral surface, and is configured to be movable in a direction perpendicular to the first air bearing. Second air bearing and an upper side of the second shaft A horizontal table, a first linear motor mounted to drive the second guide in the axial direction of the first shaft at a position opposite to the second guide and the first guide, the horizontal table, A second linear motor mounted to drive the horizontal table in the axial direction of the second shaft at a position opposite to the second guide, and the horizontal by the first linear motor and the second linear motor. The table is characterized in that it can be driven independently in two directions orthogonal to each other in the state of floating the table.

  Further, the present invention anti-vibration XY table (invention 8) is the anti-vibration XY table according to claim 6 or 7, wherein the horizontal table and the second guide are opposed to each other, In addition, magnets are attached to the opposing positions of the second guide and the first guide so as to repel each other.

  The precision guide manufacturing method according to the present invention (Claim 9) is a method in which a reference axis machined to high precision roundness, curvature radius and surface roughness is set in a mold, and a plastic resin is poured into the mold and cured. An arc groove in which the roundness, the radius of curvature and the surface roughness of the reference axis are directly transferred is formed on the guide.

  As described above, the present invention is provided with an air outlet that allows compressed air to be ejected from an outer peripheral surface of the cylinder on the outer peripheral surface of the shaft having a cylindrical outer peripheral surface in which at least part of the cross-sectional shape is an arc shape. Since the shaft can float from the arc groove by forming a pneumatic layer between the outer circumferential surface and the arc groove formed with the same radius of curvature, the shaft and the arc groove can be mechanically separated, There is an effect that can be completely shut off without transmitting harmful vibrations.

  A shaft having a cylindrical outer peripheral surface in which at least a part of the cross-sectional shape is an arc shape, and an air outlet for allowing compressed air to be ejected from the outer peripheral surface of the cylinder; and a cylindrical outer periphery of the shaft And a guide having an arc groove formed with the same radius of curvature as the surface, and a pneumatic layer is formed between the outer circumferential surface of the cylinder and the arc groove so that the shaft can float from the guide and move in the axial direction. Therefore, the shaft and the guide can be mechanically separated, no harmful vibration is transmitted, and the effect of eliminating almost no sliding friction is obtained.

  Furthermore, the bearing having the above configuration and a horizontal table mounted on the upper side of the shaft are provided, and the horizontal table is configured to be movable in a state where it floats in the axial direction of the shaft with respect to the horizontally installed guide. The harmful vibration on the side is not transmitted to the horizontal table, and the positioning accuracy of the horizontal table can be greatly improved.

  Further, in the above configuration, a linear motor mounted to drive the horizontal table in the axial direction of the shaft is provided at a position opposite to the horizontal table and the guide, and the horizontal table is attached to the shaft of the shaft with respect to the horizontally installed guide. Since it is configured to be able to be driven by a linear motor while floating in the direction, the horizontal table can be moved freely in a predetermined direction and in a vibration-isolating state with the drive system and the horizontal table separated mechanically. The effect that it can position to is acquired.

  Further, in the above configuration, the magnets are attached to the positions of the horizontal table and the guide so as to repel each other, so that the horizontal table is lifted by the repulsive force of the magnet, for example, no compressed air is ejected from the shaft. Even when a relatively heavy object is attached to the horizontal table, the horizontal table can be kept floating.

  The first shaft and the first shaft each having a cylindrical outer peripheral surface in which at least a part of the cross-sectional shape is an arc shape, and an air outlet that allows compressed air to be ejected from the outer peripheral surface of the cylinder. A first air bearing comprising a first guide having an arc groove formed with the same radius of curvature as the cylindrical outer peripheral surface of the first air bearing, and is attached to the upper side of the first shaft of the first air bearing and has a predetermined radius of curvature. The second guide having the circular arc groove and at least a part of the cross-sectional shape has a cylindrical outer peripheral surface having an arc shape with the same radius of curvature as the circular arc groove of the second guide, and compressed air from the cylindrical outer peripheral surface to the cylindrical outer peripheral surface A second air bearing configured to be movable in a direction orthogonal to the first air bearing, and a horizontal table attached to the upper side of the second shaft With the horizontal table floating. The first bearing is used to block vibration transmission between the first guide and the second guide, and the second bearing is used between the second guide and the horizontal table. It is possible to provide an XY table that can cut off the transmission of vibrations and that does not transmit harmful vibrations from the first guide as a base to the horizontal table.

  Further, in the above configuration, the first linear motor attached to drive the second guide in the axial direction of the first shaft at a position where the second guide and the first guide face each other, and the horizontal table and the second guide face each other. And a second linear motor mounted so as to drive the horizontal table in the axial direction of the second axis at a position in two directions orthogonal to each other while the horizontal table is levitated by the first linear motor and the second linear motor Since each can be driven independently, there is an effect that it is possible to provide an anti-vibration XY table that suppresses the occurrence of vibrations in the movable part and the drive part. As a result, the micron order that is required in today's IC technology. The effect that the positioning accuracy and the tact time of the millisecond order can be realized is obtained.

  In addition, a reference axis processed with high accuracy roundness, curvature radius and surface roughness is installed in the mold, and a plastic resin is poured into the mold and cured, and the roundness, curvature radius and surface roughness of the reference axis are set. As a result, an arc groove on which is transferred as it is is formed on the guide, so there is an effect that it is possible to form a highly accurate arc groove which has been difficult to machine, easily and inexpensively, and as a result, the precision guide is used. The effect which makes it easy to introduce the air bearing made into various apparatuses, for example, an anti-vibration XY table, is acquired.

  Hereinafter, the present invention will be described based on embodiments shown in the drawings. An anti-vibration XY table 10 according to the present invention includes a first air bearing 1, a second air bearing 2, a horizontal table 3, a first linear motor 11, and a second linear motor in FIGS. 12.

  As shown in FIGS. 1 to 3 and FIGS. 5 to 8, the first air bearing 1 has a cylindrical outer peripheral surface 21 a in which at least a part of the cross-sectional shape is an arc shape, and the cylindrical outer peripheral surface 21 a has the cylindrical outer peripheral surface. A first shaft 21 provided with an air ejection port 21b that allows compressed air to be ejected from the surface 21a, and a first arc groove 31a formed with the same radius of curvature as the cylindrical outer peripheral surface 21a of the first shaft 21. A guide 31 is included.

  For example, three grooves 21c shorter than the entire length of the first shaft 21 are formed on the cylindrical outer peripheral surface 21a of the first shaft 21, and air jets 21b are formed in the grooves 21c, respectively. Each air outlet 21b communicates with a hole 21d formed from the end face of the first shaft 21 toward the inside, and a joint 13 for connecting a hose (not shown), for example, is connected to the inlet of the hole 21d. It is attached. The number and positions of the air jets 21b, the shape of the grooves 21c, and the like are not limited to those shown in the drawings, and may be any configuration as long as they function as an air bearing.

  Flat portions 21e and 21f are formed in a part of the upper portion when the central groove 21c is directly below, and a screw hole 21g is formed in the flat portion 21e. The plane portions 21e and 21f are portions that serve as seats when the connecting members 23 and 24 are attached.

  The surface roughness (arithmetic mean roughness) of the cylindrical outer peripheral surface 21a is at least 1 μm, preferably 0.1 μm. This is because the higher the surface finish, the lower the air pressure.

  As shown in FIGS. 12 to 14, the first guide 31 is provided with a reference shaft 14 processed to have a high precision roundness, a radius of curvature, and a surface roughness in a mold 15, and the plastic resin 16 is placed in the mold 15. The arc groove 31a is formed by transferring the circularity, the radius of curvature and the surface roughness of the reference shaft 14 as they are.

  Therefore, if the surface roughness (arithmetic average roughness) of the reference shaft 14 is finished to 1 μm, the surface roughness of the arc groove 31a can be made 1 μm, and the surface roughness of the reference shaft 14 is finished to 0.1 μm. In this case, the surface roughness of the arc groove 31a can also be set to 0.1 μm.

  The cross-sectional shape of the arc groove 31a is, for example, a semicircle. This is so that the floating state of the first shaft 21 can be maintained even when a force acts in a direction perpendicular to the moving direction of the first shaft 21, and the first shaft 21 can be easily attached and detached. It is to do.

  As shown in FIG. 3, for example, two arc grooves 31 a are formed in the first guide 31. For example, the permanent magnet 25 of the first linear motor 11 is disposed between the arc grooves 31 a in parallel with the arc groove 31 a. Is embedded.

  For example, two first shafts 21 are combined per arc groove 31a, and the horizontal table 3 can be moved, for example, in the X-axis direction by a total of four first air bearings 1. The first shafts 21 are connected by, for example, connecting members 23 and 24, and are fixed to the lower surface of the second guide 32 of the second air bearing 2 by screws 18.

  The second bearing 2 includes a second guide 32 having an arc groove 32a attached to the upper side of the first shaft 21 of the first air bearing 1 and having a predetermined radius of curvature, and at least a part of the cross-sectional shape of the second bearing 2 being the second guide. A second outer circumferential surface 22a having a cylindrical outer peripheral surface 22a having an arc shape with the same radius of curvature as the circular arc groove 32a of 32 is provided on the outer peripheral surface 22a. The shaft 22 is configured to be movable in a direction orthogonal to the first air bearing 1.

  On the cylindrical outer peripheral surface 22a of the second shaft 22, for example, three grooves (not shown) shorter than the entire length of the second shaft 22 are formed, and air jets are respectively formed in the grooves.

  Flat portions 22e and 22f are formed in a part of the upper portion when the central groove is directly below, and a screw hole 22g is formed in the flat portion 22e. The flat portions 22e and 22f are portions that serve as seats when the connecting members 26 and 28 are attached.

  Since the other structure of the 2nd axis | shaft 22 is the same as that of the 1st axis | shaft 21, description is abbreviate | omitted.

  Since the manufacturing method of the second guide 32 is the same as that of the first guide 31, if the surface roughness (arithmetic average roughness) of the reference axis (not shown) is finished to 1 μm, the surface roughness of the arc groove 32a is increased. Further, if the surface roughness of the reference axis is finished to 0.1 μm, the surface roughness of the arc groove 32a can also be made 0.1 μm.

  As shown in FIG. 3, for example, two arc grooves 32a and four holes 32b are formed in the second guide 32. For example, a second arc parallel to the arc groove 32a is provided between the arc grooves 32a. The permanent magnet 29 of the linear motor 12 is embedded. The hole 32b is for allowing the screw 18 to pass therethrough.

  For example, two second shafts 22 are combined per arc groove 32a, and the horizontal table 3 can be moved, for example, in the Y-axis direction by a total of four sets of second air bearings 2. The second shafts 22 are connected by, for example, connecting members 26 and 28, and are fixed to the lower surface of the horizontal table 3 by screws 18.

  The horizontal table 3 is attached to the upper side of the second shaft 22 with, for example, a screw 19 and serves as a base on which a workpiece or the like (not shown) is attached. The horizontal table 3 is supported by the first air bearing 1 and the second air bearing 2. It is supported and driven by the first linear motor 11 and the second linear motor 12 so as to be movable in two directions orthogonal to each other (for example, the X-axis direction and the Y-axis direction). The horizontal table 3 is formed with, for example, four holes 3a through which the screws 19 are passed.

  As shown in FIGS. 1, 3, and 5, the first linear motor 11 drives the second guide 32 in the axial direction of the first shaft 21 at a position opposite to the second guide 32 and the first guide 31. The permanent magnet 25 in which the first guide 31 is embedded, the coil 30 attached to the connecting member 23, and a control unit (not shown). The attachment position of the coil 30 is not limited to the connecting member 23, and may be attached to the second guide 32, for example, as long as it operates as a linear motor.

  The second linear motor 12 is attached to the position where the horizontal table 3 and the second guide 32 face each other so as to drive the horizontal table 3 in the axial direction of the second shaft 22, and the second guide 32 is embedded in the second linear motor 12. The permanent magnet 29 is composed of a coil 33 attached to the connecting member 26 and a control unit (not shown). The attachment position of the coil 33 is not limited to the connecting member 26, and may be attached to the horizontal table 3, for example, as long as it operates as a linear motor.

  As shown in FIGS. 10 and 11, magnets 34 may be attached to the opposing positions of the horizontal table 3 and the second guide 32 so as to repel each other. This is because the horizontal table 3 can be always magnetically levitated. Similarly, a magnet (not shown) may be attached between the second guide 32 and the first guide 31.

  In the illustrated example, the second shaft 22 is directly fixed to the horizontal table 3 with the screw 19, but it may be connected via a connecting member as described above.

  In the method of the present invention (Claim 9), the reference shaft 14 processed to have high precision roundness, curvature radius and surface roughness is placed in the mold 15 and the plastic resin 16 is poured into the mold 15 and cured. In this method, arc grooves 31a and 32a, in which the roundness, curvature radius, and surface roughness of the reference shaft 14 are transferred as they are, are formed on the guides (first guide 31 and second guide 32).

  The present invention is configured as described above, and the operation thereof will be described below. In FIG. 1, FIG. 2 and FIG. 9, when compressed air is supplied from the joint 13 in the first air bearing 1 to the first shaft 21, the compressed air passes through the first shaft 21 and is an air outlet on the cylindrical outer peripheral surface 21a. A pneumatic layer 4 having a slight thickness (for example, 5 μm) is formed between the first guide 31 and the arc groove 31a.

  The thickness of the pneumatic layer 4, that is, the flying height can be changed by adjusting the pressure of the compressed air. The compressed air leaks little by little, but its consumption is such that the compressor (not shown) operates once every 30 minutes, for example.

  By forming the pneumatic layer 4, the first shaft 21 floats from the circular arc groove 31 a due to the reaction and enters a non-contact state. Here, by controlling the operation of the first linear motor 11, the second guide 32 can be freely moved in the X-axis direction, that is, the direction of the arrow B or the arrow C, and can be positioned on the micron order. At this time, the horizontal table 3 also moves with the second guide 32.

  Similarly to the first air bearing 1, the second air bearing 2 also slightly floats from the arc groove 32 a of the second guide 32 by supplying compressed air, so that the second linear motor 12. By controlling this operation, the horizontal table 3 can be freely moved in the Y-axis direction, that is, the direction of the arrow D or the arrow E, and positioned in the micron order.

  10 and 11, when the magnet 34 is used, the horizontal table 3 is lifted from the second guide 32 even when compressed air is not supplied, compared to a case where the horizontal table 3 is lifted only by compressed air. The load capacity is large.

  Thus, in the vibration-proof XY table 10, the horizontal table 3 is lifted and mechanically separated through the pneumatic layer 4, and the first linear motor 11 and the second linear motor 12 are not. Since it operates in a contact state, no harmful vibrations from the drive system occur, and even if external vibrations are transmitted to the first guide 31, they are cut off at the first air bearing 1 and the second air bearing 2, and the horizontal table 3 is not transmitted. For this reason, the positioning accuracy of the horizontal table 3 is very high on the order of microns, and the tact time can be very short on the order of milliseconds.

  Moreover, it can be used not only as an XY table but also as various movable part vibration isolators that move only in one direction.

It is a perspective view of an anti-vibration XY table. It is a partial longitudinal cross-section front view of an anti-vibration XY table. It is a disassembled perspective view of an anti-vibration XY table. It is a disassembled perspective view of a horizontal table, a connection member, and a 2nd axis | shaft. It is a disassembled perspective view of a 2nd guide, a connection member, and a 1st axis | shaft. It is a bottom view of the 1st axis. It is the longitudinal cross-sectional view seen from the radial direction of the 1st axis | shaft. It is the longitudinal cross-sectional view seen from the axial direction of the 1st axis | shaft. FIG. 6 is an enlarged longitudinal sectional view exaggeratingly showing a state in which compressed air is ejected from an air outlet of the first axis and the first axis is floating from an arc groove. It is a partial fracture perspective view of a vibration proof XY table which made a horizontal table levitate with a magnet. In the vibration-proof XY table which floated the horizontal table with the magnet, it is the fragmentary longitudinal cross-sectional view which exaggeratedly shows the state where the compressed air blows out from the air outlet of the shaft and the shaft floats from the arc groove is there. It is a fragmentary longitudinal cross-section which shows the state which has installed the reference | standard axis | shaft in the type | mold and poured the plastic resin into this type | mold. It is a fragmentary longitudinal cross-section which shows the state which the pouring of the plastic resin was completed. It is a fragmentary longitudinal cross-section which shows the state where the mold | type and the reference axis were removed and the guide in which the circular arc groove was formed was obtained after hardening of a plastic resin.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 1st air bearing which is an example of an air bearing 2 2nd air bearing which is an example of an air bearing 3 Horizontal table 4 Pneumatic layer 10 Anti-vibration XY table 11 1st linear motor 12 2nd linear motor 14 Reference shaft 15 Type 16 Plasticity Resin 20 Anti-vibration X-Y table 21 First shaft 21a as an example of the shaft 21a Cylindrical outer peripheral surface 21b Air outlet 22 Second shaft as an example of the shaft 22a Cylindrical outer peripheral surface 31 First guide 31a Arc groove 32 Second guide 32a Arc groove 34 Magnet

Claims (9)

  At least a part of the cross-sectional shape has a circular cylindrical outer peripheral surface, and an air outlet is provided on the outer peripheral surface of the cylinder so that compressed air can be ejected from the outer peripheral surface of the cylinder. An axis characterized in that a pneumatic layer is formed between the formed arcuate groove so as to float from the arcuate groove.   A shaft having a cylindrical outer peripheral surface in which at least a part of a cross-sectional shape is an arc shape, and an air outlet that allows compressed air to be ejected from the outer peripheral surface of the cylinder; and the cylindrical outer periphery of the shaft And a guide having an arc groove formed with the same radius of curvature as the surface, and by forming a pneumatic layer between the outer peripheral surface of the cylinder and the arc groove, the shaft floats from the guide and moves in the axial direction. An air bearing characterized in that it can be configured.   A shaft having a cylindrical outer peripheral surface in which at least a part of the cross-sectional shape is an arc shape, and an air outlet that allows the compressed air to be ejected from the outer peripheral surface of the cylinder, and the cylindrical outer peripheral surface of the shaft And an air bearing comprising a guide having an arc groove formed in the same radius of curvature, and a horizontal table mounted on the upper side of the shaft, the horizontal table with respect to the guide installed horizontally An anti-vibration horizontal table configured to be movable while floating in the axial direction of the shaft.   A shaft having a cylindrical outer peripheral surface in which at least a part of the cross-sectional shape is an arc shape, and an air outlet that allows the compressed air to be ejected from the outer peripheral surface of the cylinder, and the cylindrical outer peripheral surface of the shaft An air bearing comprising a guide having an arc groove formed with the same radius of curvature, a horizontal table mounted on the upper side of the shaft, and an axial direction of the shaft at a position opposite to the horizontal table and the guide A linear motor mounted to drive the horizontal table, and configured to be able to be driven by the linear motor in a state where the horizontal table floats in the axial direction of the shaft with respect to the horizontally installed guide. An anti-vibration horizontal table.   5. The anti-vibration horizontal table according to claim 3, wherein magnets are respectively attached to the positions of the horizontal table and the guide so as to repel each other.   A first shaft having a cylindrical outer peripheral surface in which at least a part of the cross-sectional shape is an arc shape, and an air outlet that allows compressed air to be ejected from the outer peripheral surface of the cylinder; A first air bearing comprising a first guide having a circular arc groove formed at the same radius of curvature as the cylindrical outer peripheral surface, and formed at a predetermined radius of curvature attached to the upper side of the first shaft of the first air bearing. A second guide having a circular arc groove and at least a part of a cross-sectional shape of the second guide has a cylindrical outer peripheral surface having an arc shape with the same radius of curvature as the circular arc groove of the second guide. A second air bearing configured to move in a direction perpendicular to the first air bearing, the second air bearing having a second shaft provided with an air jet port capable of ejecting compressed air; and attached to an upper side of the second shaft A horizontal table, and the horizontal table Vibration isolating X-Y table, characterized by being configured to be movable in two directions perpendicular to each other in a state where the above.   A first shaft having a cylindrical outer peripheral surface in which at least a part of the cross-sectional shape is an arc shape, and an air outlet that allows compressed air to be ejected from the outer peripheral surface of the cylinder; A first air bearing comprising a first guide having a circular arc groove formed at the same radius of curvature as the cylindrical outer peripheral surface, and formed at a predetermined radius of curvature attached to the upper side of the first shaft of the first air bearing. A second guide having a circular arc groove and at least a part of a cross-sectional shape of the second guide has a cylindrical outer peripheral surface having an arc shape with the same radius of curvature as the circular arc groove of the second guide. A second air bearing configured to move in a direction perpendicular to the first air bearing, the second air bearing having a second shaft provided with an air jet port capable of ejecting compressed air; and attached to an upper side of the second shaft Horizontal table, the second guide and the horizontal table A first linear motor mounted to drive the second guide in the axial direction of the first shaft at a position opposed to one guide; and the second shaft at a position opposed to the horizontal table and the second guide. A second linear motor mounted so as to drive the horizontal table in the axial direction of the horizontal table, and the horizontal table is floated by the first linear motor and the second linear motor, respectively, in two directions orthogonal to each other. An anti-vibration XY table characterized in that it can be driven independently.   The magnet according to claim 6 or claim, wherein magnets are attached to reciprocal positions of the horizontal table and the second guide, and opposite positions of the second guide and the first guide, respectively. 8. The anti-vibration XY table according to any one of 7 above.   A reference axis machined to high accuracy roundness, curvature radius and surface roughness is placed in a mold, and a plastic resin is poured into the mold and cured, and the roundness, curvature radius and surface roughness of the reference axis are set. A method of manufacturing a precision guide, characterized in that an arc groove on which the length is transferred is formed on the guide.

Images