JP2005316069A5 - - Google Patents

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Publication number
JP2005316069A5
JP2005316069A5 JP2004132995A JP2004132995A JP2005316069A5 JP 2005316069 A5 JP2005316069 A5 JP 2005316069A5 JP 2004132995 A JP2004132995 A JP 2004132995A JP 2004132995 A JP2004132995 A JP 2004132995A JP 2005316069 A5 JP2005316069 A5 JP 2005316069A5
Authority
JP
Japan
Prior art keywords
laser
optical system
condensing optical
medium
divergence point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004132995A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005316069A (ja
JP4681821B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2004132995A external-priority patent/JP4681821B2/ja
Priority to JP2004132995A priority Critical patent/JP4681821B2/ja
Priority to TW094113232A priority patent/TWI348408B/zh
Priority to CNB2005800017270A priority patent/CN100485446C/zh
Priority to KR1020067012578A priority patent/KR100789538B1/ko
Priority to EP05737135.3A priority patent/EP1684109B1/en
Priority to CN2008101498409A priority patent/CN101396764B/zh
Priority to PCT/JP2005/008003 priority patent/WO2005106564A1/ja
Priority to CN2008101498413A priority patent/CN101396765B/zh
Publication of JP2005316069A publication Critical patent/JP2005316069A/ja
Priority to US11/450,801 priority patent/US7333255B2/en
Publication of JP2005316069A5 publication Critical patent/JP2005316069A5/ja
Priority to US11/868,210 priority patent/US8022332B2/en
Publication of JP4681821B2 publication Critical patent/JP4681821B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2004132995A 2004-04-28 2004-04-28 レーザ集光光学系及びレーザ加工装置 Expired - Fee Related JP4681821B2 (ja)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP2004132995A JP4681821B2 (ja) 2004-04-28 2004-04-28 レーザ集光光学系及びレーザ加工装置
TW094113232A TWI348408B (en) 2004-04-28 2005-04-26 Laser processing device
CN2008101498409A CN101396764B (zh) 2004-04-28 2005-04-27 激光处理装置
CN2008101498413A CN101396765B (zh) 2004-04-28 2005-04-27 激光处理装置
KR1020067012578A KR100789538B1 (ko) 2004-04-28 2005-04-27 레이저 가공 장치
EP05737135.3A EP1684109B1 (en) 2004-04-28 2005-04-27 Laser processing apparatus
CNB2005800017270A CN100485446C (zh) 2004-04-28 2005-04-27 激光处理装置
PCT/JP2005/008003 WO2005106564A1 (ja) 2004-04-28 2005-04-27 レーザ加工装置
US11/450,801 US7333255B2 (en) 2004-04-28 2006-06-09 Laser processing device
US11/868,210 US8022332B2 (en) 2004-04-28 2007-10-05 Laser processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004132995A JP4681821B2 (ja) 2004-04-28 2004-04-28 レーザ集光光学系及びレーザ加工装置

Publications (3)

Publication Number Publication Date
JP2005316069A JP2005316069A (ja) 2005-11-10
JP2005316069A5 true JP2005316069A5 (enExample) 2007-06-14
JP4681821B2 JP4681821B2 (ja) 2011-05-11

Family

ID=35443587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004132995A Expired - Fee Related JP4681821B2 (ja) 2004-04-28 2004-04-28 レーザ集光光学系及びレーザ加工装置

Country Status (2)

Country Link
JP (1) JP4681821B2 (enExample)
CN (3) CN100485446C (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4141485B2 (ja) * 2006-07-19 2008-08-27 トヨタ自動車株式会社 レーザ加工システムおよびレーザ加工方法
JP5479925B2 (ja) * 2010-01-27 2014-04-23 浜松ホトニクス株式会社 レーザ加工システム
JP2016111315A (ja) * 2014-11-27 2016-06-20 株式会社東京精密 レーザー加工装置及びレーザー加工方法
JP6602207B2 (ja) * 2016-01-07 2019-11-06 株式会社ディスコ ＳｉＣウエーハの生成方法
JP6332886B2 (ja) * 2017-05-11 2018-05-30 住友大阪セメント株式会社 加工装置のオフセット量調整方法
JP6643442B1 (ja) * 2018-10-12 2020-02-12 株式会社アマダホールディングス レーザ加工機及びレーザ加工方法
JP7394299B2 (ja) * 2020-03-09 2023-12-08 株式会社東京精密 オートフォーカス光学系及び加工光学装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6267689U (enExample) * 1985-10-18 1987-04-27
JPH04327394A (ja) * 1991-04-30 1992-11-16 Amada Co Ltd 光移動型レーザ加工機
US5637244A (en) * 1993-05-13 1997-06-10 Podarok International, Inc. Method and apparatus for creating an image by a pulsed laser beam inside a transparent material
DE9407288U1 (de) * 1994-05-02 1994-08-04 Trumpf Gmbh & Co, 71254 Ditzingen Laserschneidmaschine mit Fokuslageneinstellung
US6087617A (en) * 1996-05-07 2000-07-11 Troitski; Igor Nikolaevich Computer graphics system for generating an image reproducible inside optically transparent material
US6016227A (en) * 1998-07-31 2000-01-18 The University Of Tennessee Research Corporation Apparatus and method for producing an improved laser beam
JP2000071088A (ja) * 1998-08-27 2000-03-07 Nisshinbo Ind Inc レ−ザ加工機
JP3522654B2 (ja) * 2000-06-09 2004-04-26 住友重機械工業株式会社 レーザ加工装置及び加工方法
JP3587805B2 (ja) * 2001-07-30 2004-11-10 松下電器産業株式会社 レーザ加工装置

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