CN100485446C - 激光处理装置 - Google Patents

激光处理装置 Download PDF

Info

Publication number
CN100485446C
CN100485446C CNB2005800017270A CN200580001727A CN100485446C CN 100485446 C CN100485446 C CN 100485446C CN B2005800017270 A CNB2005800017270 A CN B2005800017270A CN 200580001727 A CN200580001727 A CN 200580001727A CN 100485446 C CN100485446 C CN 100485446C
Authority
CN
China
Prior art keywords
optical system
laser
laser beam
lens
converging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2005800017270A
Other languages
English (en)
Chinese (zh)
Other versions
CN1906522A (zh
Inventor
江田幸夫
安达贞志
栗田典夫
筬岛哲也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Hednicus Co ltd
Olympus Corp
Original Assignee
Hamamatsu Hednicus Co ltd
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Hednicus Co ltd, Olympus Corp filed Critical Hamamatsu Hednicus Co ltd
Publication of CN1906522A publication Critical patent/CN1906522A/zh
Application granted granted Critical
Publication of CN100485446C publication Critical patent/CN100485446C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Lenses (AREA)
  • Laser Beam Processing (AREA)
  • Dicing (AREA)
CNB2005800017270A 2004-04-28 2005-04-27 激光处理装置 Expired - Fee Related CN100485446C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP132995/2004 2004-04-28
JP132997/2004 2004-04-28
JP2004132995A JP4681821B2 (ja) 2004-04-28 2004-04-28 レーザ集光光学系及びレーザ加工装置

Related Child Applications (2)

Application Number Title Priority Date Filing Date
CN2008101498409A Division CN101396764B (zh) 2004-04-28 2005-04-27 激光处理装置
CN2008101498413A Division CN101396765B (zh) 2004-04-28 2005-04-27 激光处理装置

Publications (2)

Publication Number Publication Date
CN1906522A CN1906522A (zh) 2007-01-31
CN100485446C true CN100485446C (zh) 2009-05-06

Family

ID=35443587

Family Applications (3)

Application Number Title Priority Date Filing Date
CN2008101498413A Expired - Fee Related CN101396765B (zh) 2004-04-28 2005-04-27 激光处理装置
CNB2005800017270A Expired - Fee Related CN100485446C (zh) 2004-04-28 2005-04-27 激光处理装置
CN2008101498409A Expired - Fee Related CN101396764B (zh) 2004-04-28 2005-04-27 激光处理装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN2008101498413A Expired - Fee Related CN101396765B (zh) 2004-04-28 2005-04-27 激光处理装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN2008101498409A Expired - Fee Related CN101396764B (zh) 2004-04-28 2005-04-27 激光处理装置

Country Status (2)

Country Link
JP (1) JP4681821B2 (enExample)
CN (3) CN101396765B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102741011A (zh) * 2010-01-27 2012-10-17 浜松光子学株式会社 激光加工系统

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4141485B2 (ja) * 2006-07-19 2008-08-27 トヨタ自動車株式会社 レーザ加工システムおよびレーザ加工方法
JP2016111315A (ja) * 2014-11-27 2016-06-20 株式会社東京精密 レーザー加工装置及びレーザー加工方法
JP6602207B2 (ja) * 2016-01-07 2019-11-06 株式会社ディスコ ＳｉＣウエーハの生成方法
JP6332886B2 (ja) * 2017-05-11 2018-05-30 住友大阪セメント株式会社 加工装置のオフセット量調整方法
JP6643442B1 (ja) * 2018-10-12 2020-02-12 株式会社アマダホールディングス レーザ加工機及びレーザ加工方法
JP7394299B2 (ja) * 2020-03-09 2023-12-08 株式会社東京精密 オートフォーカス光学系及び加工光学装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5637244A (en) * 1993-05-13 1997-06-10 Podarok International, Inc. Method and apparatus for creating an image by a pulsed laser beam inside a transparent material
US6087617A (en) * 1996-05-07 2000-07-11 Troitski; Igor Nikolaevich Computer graphics system for generating an image reproducible inside optically transparent material
CN1145541C (zh) * 2000-06-09 2004-04-14 住友重机械工业株式会社 激光加工装置及其加工方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6267689U (enExample) * 1985-10-18 1987-04-27
JPH04327394A (ja) * 1991-04-30 1992-11-16 Amada Co Ltd 光移動型レーザ加工機
DE9407288U1 (de) * 1994-05-02 1994-08-04 Trumpf Gmbh & Co, 71254 Ditzingen Laserschneidmaschine mit Fokuslageneinstellung
US6016227A (en) * 1998-07-31 2000-01-18 The University Of Tennessee Research Corporation Apparatus and method for producing an improved laser beam
JP2000071088A (ja) * 1998-08-27 2000-03-07 Nisshinbo Ind Inc レ−ザ加工機
JP3587805B2 (ja) * 2001-07-30 2004-11-10 松下電器産業株式会社 レーザ加工装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5637244A (en) * 1993-05-13 1997-06-10 Podarok International, Inc. Method and apparatus for creating an image by a pulsed laser beam inside a transparent material
US6087617A (en) * 1996-05-07 2000-07-11 Troitski; Igor Nikolaevich Computer graphics system for generating an image reproducible inside optically transparent material
CN1145541C (zh) * 2000-06-09 2004-04-14 住友重机械工业株式会社 激光加工装置及其加工方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102741011A (zh) * 2010-01-27 2012-10-17 浜松光子学株式会社 激光加工系统
US8755107B2 (en) 2010-01-27 2014-06-17 Hamamatsu Photonics K.K. Laser processing system

Also Published As

Publication number Publication date
CN101396764B (zh) 2011-01-26
CN1906522A (zh) 2007-01-31
JP2005316069A (ja) 2005-11-10
JP4681821B2 (ja) 2011-05-11
CN101396765A (zh) 2009-04-01
CN101396764A (zh) 2009-04-01
CN101396765B (zh) 2011-02-09

Similar Documents

Publication Publication Date Title
US8022332B2 (en) Laser processing device
CN100498411C (zh) 激光聚光光学系统
US11067783B2 (en) Light sheet microscope and method for imaging a sample by light sheet microscopy
JP5525136B2 (ja) シート光を発生するための光学装置
US7439477B2 (en) Laser condensing optical system
JP2002196246A (ja) 走査型光学顕微鏡
EP2333602B1 (en) Spherical aberration correction for non-descanned applications
KR19980033101A (ko) 고정밀 패턴 검사 방법 및 장치
WO2024217203A1 (zh) 一种单物镜光片三维荧光成像系统
CN100485446C (zh) 激光处理装置
US8040596B2 (en) Epi-illumination optical system for microscopes
JP4686135B2 (ja) レーザ加工装置
US11841490B2 (en) Arrangement for light sheet microscopy, immersion objective, and method for reducing aberrations
US20190113729A1 (en) Microscope apparatus
JP2008267842A (ja) 生物観察容器並びにこれを用いる生物顕微鏡及び生物観察装置
JP4528023B2 (ja) レーザ集光光学系
JP4723842B2 (ja) 走査型光学顕微鏡
JP2005345761A (ja) 走査型光学顕微鏡装置及び走査型光学顕微鏡像から物体像の復元法
JP2011242702A (ja) 結像光学系及び形状測定装置
JP2015094802A (ja) 対物光学系および画像取得装置
JP2006243273A (ja) 自動焦点顕微鏡

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20090506

Termination date: 20190427

CF01 Termination of patent right due to non-payment of annual fee