JP2005309314A - 光学ユニット光軸調整装置 - Google Patents
光学ユニット光軸調整装置 Download PDFInfo
- Publication number
- JP2005309314A JP2005309314A JP2004129781A JP2004129781A JP2005309314A JP 2005309314 A JP2005309314 A JP 2005309314A JP 2004129781 A JP2004129781 A JP 2004129781A JP 2004129781 A JP2004129781 A JP 2004129781A JP 2005309314 A JP2005309314 A JP 2005309314A
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- JP
- Japan
- Prior art keywords
- optical
- optical axis
- unit
- optical unit
- lens system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004129781A JP2005309314A (ja) | 2004-04-26 | 2004-04-26 | 光学ユニット光軸調整装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004129781A JP2005309314A (ja) | 2004-04-26 | 2004-04-26 | 光学ユニット光軸調整装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005309314A true JP2005309314A (ja) | 2005-11-04 |
| JP2005309314A5 JP2005309314A5 (enExample) | 2007-05-31 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004129781A Pending JP2005309314A (ja) | 2004-04-26 | 2004-04-26 | 光学ユニット光軸調整装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005309314A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101281627B1 (ko) | 2012-01-10 | 2013-07-03 | 엘아이지넥스원 주식회사 | 적외선 영상 탐색기의 축을 정렬하기 위한 장치 및 그 방법 |
| JP2014126726A (ja) * | 2012-12-27 | 2014-07-07 | Sharp Corp | フォーカス調整装置 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03129307A (ja) * | 1989-10-14 | 1991-06-03 | Mitsubishi Electric Corp | 赤外光学系の光軸調整方法 |
| JPH08255748A (ja) * | 1994-12-29 | 1996-10-01 | Canon Inc | 投影露光装置及びそれを用いたデバイスの製造方法 |
| JP2000121901A (ja) * | 1998-10-16 | 2000-04-28 | Canon Inc | レンズ系光軸調整方法およびレンズ系光軸調整装置 |
| JP2000352647A (ja) * | 1999-06-14 | 2000-12-19 | Matsushita Electric Ind Co Ltd | 接合レンズの調芯装置 |
| JP2002098875A (ja) * | 2000-09-26 | 2002-04-05 | Olympus Optical Co Ltd | 光学系の調整方法及び調整装置 |
| JP2003057343A (ja) * | 2001-08-17 | 2003-02-26 | Hitachi Ltd | レーザ測距装置 |
| JP2003197504A (ja) * | 2001-12-27 | 2003-07-11 | Nikon Corp | 露光方法及びデバイス製造方法 |
-
2004
- 2004-04-26 JP JP2004129781A patent/JP2005309314A/ja active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03129307A (ja) * | 1989-10-14 | 1991-06-03 | Mitsubishi Electric Corp | 赤外光学系の光軸調整方法 |
| JPH08255748A (ja) * | 1994-12-29 | 1996-10-01 | Canon Inc | 投影露光装置及びそれを用いたデバイスの製造方法 |
| JP2000121901A (ja) * | 1998-10-16 | 2000-04-28 | Canon Inc | レンズ系光軸調整方法およびレンズ系光軸調整装置 |
| JP2000352647A (ja) * | 1999-06-14 | 2000-12-19 | Matsushita Electric Ind Co Ltd | 接合レンズの調芯装置 |
| JP2002098875A (ja) * | 2000-09-26 | 2002-04-05 | Olympus Optical Co Ltd | 光学系の調整方法及び調整装置 |
| JP2003057343A (ja) * | 2001-08-17 | 2003-02-26 | Hitachi Ltd | レーザ測距装置 |
| JP2003197504A (ja) * | 2001-12-27 | 2003-07-11 | Nikon Corp | 露光方法及びデバイス製造方法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101281627B1 (ko) | 2012-01-10 | 2013-07-03 | 엘아이지넥스원 주식회사 | 적외선 영상 탐색기의 축을 정렬하기 위한 장치 및 그 방법 |
| JP2014126726A (ja) * | 2012-12-27 | 2014-07-07 | Sharp Corp | フォーカス調整装置 |
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