JP2005273844A5 - - Google Patents

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Publication number
JP2005273844A5
JP2005273844A5 JP2004090989A JP2004090989A JP2005273844A5 JP 2005273844 A5 JP2005273844 A5 JP 2005273844A5 JP 2004090989 A JP2004090989 A JP 2004090989A JP 2004090989 A JP2004090989 A JP 2004090989A JP 2005273844 A5 JP2005273844 A5 JP 2005273844A5
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JP
Japan
Prior art keywords
drive device
drive
functional fluid
viscosity
electromagnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004090989A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005273844A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004090989A priority Critical patent/JP2005273844A/ja
Priority claimed from JP2004090989A external-priority patent/JP2005273844A/ja
Publication of JP2005273844A publication Critical patent/JP2005273844A/ja
Publication of JP2005273844A5 publication Critical patent/JP2005273844A5/ja
Pending legal-status Critical Current

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JP2004090989A 2004-03-26 2004-03-26 駆動装置および露光装置 Pending JP2005273844A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004090989A JP2005273844A (ja) 2004-03-26 2004-03-26 駆動装置および露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004090989A JP2005273844A (ja) 2004-03-26 2004-03-26 駆動装置および露光装置

Publications (2)

Publication Number Publication Date
JP2005273844A JP2005273844A (ja) 2005-10-06
JP2005273844A5 true JP2005273844A5 (cg-RX-API-DMAC7.html) 2007-05-17

Family

ID=35173734

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004090989A Pending JP2005273844A (ja) 2004-03-26 2004-03-26 駆動装置および露光装置

Country Status (1)

Country Link
JP (1) JP2005273844A (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4535040B2 (ja) * 2006-07-27 2010-09-01 株式会社デンソー バルブタイミング調整装置
KR100993319B1 (ko) 2009-02-18 2010-11-09 삼성전기주식회사 렌즈 이송 모듈

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55163342A (en) * 1979-06-08 1980-12-19 Fujitsu Ltd Positioning device
US4545587A (en) * 1984-11-20 1985-10-08 Ferrofluidics Corporation Coaxial, multiple-shaft ferrofluid seal apparatus
JPH0236980Y2 (cg-RX-API-DMAC7.html) * 1985-09-28 1990-10-08
JPH0618737U (ja) * 1991-11-25 1994-03-11 エヌオーケー株式会社 調速機構
JPH11288867A (ja) * 1998-04-02 1999-10-19 Nikon Corp 位置合わせ方法、アライメントマークの形成方法、露光装置及び露光方法
JP2000055089A (ja) * 1998-08-10 2000-02-22 Toshiba Mach Co Ltd 回転軸または直線移動体の制動装置
JP2002130342A (ja) * 2000-10-23 2002-05-09 Oriental Motor Co Ltd 無励磁作動型電磁ブレーキ
JP3766866B2 (ja) * 2002-04-04 2006-04-19 独立行政法人物質・材料研究機構 磁性流体シール回転軸受け

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