JP2003179040A5 - - Google Patents

Download PDF

Info

Publication number
JP2003179040A5
JP2003179040A5 JP2001375717A JP2001375717A JP2003179040A5 JP 2003179040 A5 JP2003179040 A5 JP 2003179040A5 JP 2001375717 A JP2001375717 A JP 2001375717A JP 2001375717 A JP2001375717 A JP 2001375717A JP 2003179040 A5 JP2003179040 A5 JP 2003179040A5
Authority
JP
Japan
Prior art keywords
plate
heating
rotating
frame
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001375717A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003179040A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001375717A priority Critical patent/JP2003179040A/ja
Priority claimed from JP2001375717A external-priority patent/JP2003179040A/ja
Publication of JP2003179040A publication Critical patent/JP2003179040A/ja
Publication of JP2003179040A5 publication Critical patent/JP2003179040A5/ja
Pending legal-status Critical Current

Links

JP2001375717A 2001-12-10 2001-12-10 熱処理装置 Pending JP2003179040A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001375717A JP2003179040A (ja) 2001-12-10 2001-12-10 熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001375717A JP2003179040A (ja) 2001-12-10 2001-12-10 熱処理装置

Publications (2)

Publication Number Publication Date
JP2003179040A JP2003179040A (ja) 2003-06-27
JP2003179040A5 true JP2003179040A5 (cg-RX-API-DMAC7.html) 2004-10-28

Family

ID=19184033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001375717A Pending JP2003179040A (ja) 2001-12-10 2001-12-10 熱処理装置

Country Status (1)

Country Link
JP (1) JP2003179040A (cg-RX-API-DMAC7.html)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7347901B2 (en) 2002-11-29 2008-03-25 Tokyo Electron Limited Thermally zoned substrate holder assembly
US6992892B2 (en) * 2003-09-26 2006-01-31 Tokyo Electron Limited Method and apparatus for efficient temperature control using a contact volume
KR101118863B1 (ko) 2004-01-30 2012-03-19 도쿄엘렉트론가부시키가이샤 유체 간극을 갖는 기판 홀더 및 그 기판 홀더를 제조하는방법
DE102016119328A1 (de) 2016-10-11 2018-04-12 Osram Opto Semiconductors Gmbh Heizvorrichtung, Verfahren und System zur Herstellung von Halbleiterchips im Waferverbund
TWI766897B (zh) * 2016-11-09 2022-06-11 美商東京威力科創Ｆｓｉ股份有限公司 用於處理一微電子基板的設備及其方法
TWI765936B (zh) 2016-11-29 2022-06-01 美商東京威力科創Ｆｓｉ股份有限公司 用以對處理腔室中之微電子基板進行處理的平移與旋轉夾頭
WO2018140789A1 (en) 2017-01-27 2018-08-02 Tel Fsi, Inc. Systems and methods for rotating and translating a substrate in a process chamber
US11545387B2 (en) 2018-07-13 2023-01-03 Tel Manufacturing And Engineering Of America, Inc. Magnetic integrated lift pin system for a chemical processing chamber
CN117467962B (zh) * 2023-12-28 2024-03-08 上海陛通半导体能源科技股份有限公司 薄膜沉积设备

Similar Documents

Publication Publication Date Title
KR101996320B1 (ko) 원통 코일을 포함한 고정자를 갖춘 무철심 회전 전기 기계 및 그 냉각 방법
KR101912829B1 (ko) 원통 코일을 갖춘 고정자를 포함한 무철심 회전 전기 기계 및 그 냉각 방법
JP3448005B2 (ja) リニアモーターの冷却装置
JP5552605B2 (ja) 磁気熱量材料を備える熱流束発生装置
JP2016154440A5 (cg-RX-API-DMAC7.html)
JPS59117453A (ja) 電子的整流の直流モ−タを備えたフアン
JP2003179040A5 (cg-RX-API-DMAC7.html)
US8258658B2 (en) Electric motor
TWM243848U (en) Rotational balance structure for a motor
US20140064987A1 (en) Electromagnetic circulation pump
JP2007116854A5 (cg-RX-API-DMAC7.html)
JP2007074878A (ja) 発電装置
CN103457424A (zh) 一种双转子无铁芯永磁同步电动机
CN101707461A (zh) 空间机械臂用无通电结构电机制动器
JP2006246605A (ja) 磁力回転装置
CN209479978U (zh) 一种外缘支撑的无轴式电磁旋翼
JP2003179040A (ja) 熱処理装置
CN206135668U (zh) 阵列电机
CN207490634U (zh) 一种多轨磁电机的动力机构
TW201203806A (en) Drive system
CN201210785Y (zh) 气冷式导热模组
CN201758328U (zh) 多隙串磁嵌碟式电机
CN114234444B (zh) 热风导出装置
JP2003235213A (ja) モールドモータ
JPH09117102A (ja) 軸流フアン装置