JP2005273844A - 駆動装置および露光装置 - Google Patents

駆動装置および露光装置 Download PDF

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Publication number
JP2005273844A
JP2005273844A JP2004090989A JP2004090989A JP2005273844A JP 2005273844 A JP2005273844 A JP 2005273844A JP 2004090989 A JP2004090989 A JP 2004090989A JP 2004090989 A JP2004090989 A JP 2004090989A JP 2005273844 A JP2005273844 A JP 2005273844A
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JP
Japan
Prior art keywords
viscosity
drive
drive device
functional fluid
control means
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Pending
Application number
JP2004090989A
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English (en)
Japanese (ja)
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JP2005273844A5 (cg-RX-API-DMAC7.html
Inventor
Takashi Inoue
敬司 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
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Canon Inc
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Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2004090989A priority Critical patent/JP2005273844A/ja
Publication of JP2005273844A publication Critical patent/JP2005273844A/ja
Publication of JP2005273844A5 publication Critical patent/JP2005273844A5/ja
Pending legal-status Critical Current

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Braking Arrangements (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2004090989A 2004-03-26 2004-03-26 駆動装置および露光装置 Pending JP2005273844A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004090989A JP2005273844A (ja) 2004-03-26 2004-03-26 駆動装置および露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004090989A JP2005273844A (ja) 2004-03-26 2004-03-26 駆動装置および露光装置

Publications (2)

Publication Number Publication Date
JP2005273844A true JP2005273844A (ja) 2005-10-06
JP2005273844A5 JP2005273844A5 (cg-RX-API-DMAC7.html) 2007-05-17

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ID=35173734

Family Applications (1)

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JP2004090989A Pending JP2005273844A (ja) 2004-03-26 2004-03-26 駆動装置および露光装置

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JP (1) JP2005273844A (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008031905A (ja) * 2006-07-27 2008-02-14 Denso Corp バルブタイミング調整装置
KR100993319B1 (ko) 2009-02-18 2010-11-09 삼성전기주식회사 렌즈 이송 모듈

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55163342A (en) * 1979-06-08 1980-12-19 Fujitsu Ltd Positioning device
JPS61165072A (ja) * 1984-11-20 1986-07-25 フエロフルイデイクス・コ−ポレイシヨン 共軸の多段シヤフト磁性流体シ−ル装置
JPS6255743U (cg-RX-API-DMAC7.html) * 1985-09-28 1987-04-07
JPH0618737U (ja) * 1991-11-25 1994-03-11 エヌオーケー株式会社 調速機構
JPH11288867A (ja) * 1998-04-02 1999-10-19 Nikon Corp 位置合わせ方法、アライメントマークの形成方法、露光装置及び露光方法
JP2000055089A (ja) * 1998-08-10 2000-02-22 Toshiba Mach Co Ltd 回転軸または直線移動体の制動装置
JP2002130342A (ja) * 2000-10-23 2002-05-09 Oriental Motor Co Ltd 無励磁作動型電磁ブレーキ
JP2003294156A (ja) * 2002-04-04 2003-10-15 National Institute For Materials Science 磁性流体シール回転軸受け

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55163342A (en) * 1979-06-08 1980-12-19 Fujitsu Ltd Positioning device
JPS61165072A (ja) * 1984-11-20 1986-07-25 フエロフルイデイクス・コ−ポレイシヨン 共軸の多段シヤフト磁性流体シ−ル装置
JPS6255743U (cg-RX-API-DMAC7.html) * 1985-09-28 1987-04-07
JPH0618737U (ja) * 1991-11-25 1994-03-11 エヌオーケー株式会社 調速機構
JPH11288867A (ja) * 1998-04-02 1999-10-19 Nikon Corp 位置合わせ方法、アライメントマークの形成方法、露光装置及び露光方法
JP2000055089A (ja) * 1998-08-10 2000-02-22 Toshiba Mach Co Ltd 回転軸または直線移動体の制動装置
JP2002130342A (ja) * 2000-10-23 2002-05-09 Oriental Motor Co Ltd 無励磁作動型電磁ブレーキ
JP2003294156A (ja) * 2002-04-04 2003-10-15 National Institute For Materials Science 磁性流体シール回転軸受け

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008031905A (ja) * 2006-07-27 2008-02-14 Denso Corp バルブタイミング調整装置
KR100993319B1 (ko) 2009-02-18 2010-11-09 삼성전기주식회사 렌즈 이송 모듈

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