JP2005256845A - 真空排気装置 - Google Patents

真空排気装置 Download PDF

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Publication number
JP2005256845A
JP2005256845A JP2005165360A JP2005165360A JP2005256845A JP 2005256845 A JP2005256845 A JP 2005256845A JP 2005165360 A JP2005165360 A JP 2005165360A JP 2005165360 A JP2005165360 A JP 2005165360A JP 2005256845 A JP2005256845 A JP 2005256845A
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JP
Japan
Prior art keywords
pump
screw
booster
vacuum pump
roughing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005165360A
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English (en)
Japanese (ja)
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JP2005256845A5 (enrdf_load_stackoverflow
Inventor
Kiyoshi Ando
清 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nabtesco Corp
Original Assignee
Nabtesco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nabtesco Corp filed Critical Nabtesco Corp
Priority to JP2005165360A priority Critical patent/JP2005256845A/ja
Publication of JP2005256845A publication Critical patent/JP2005256845A/ja
Publication of JP2005256845A5 publication Critical patent/JP2005256845A5/ja
Pending legal-status Critical Current

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JP2005165360A 1999-11-17 2005-06-06 真空排気装置 Pending JP2005256845A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005165360A JP2005256845A (ja) 1999-11-17 2005-06-06 真空排気装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP32627699 1999-11-17
JP2005165360A JP2005256845A (ja) 1999-11-17 2005-06-06 真空排気装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2000213110A Division JP2001207984A (ja) 1999-11-17 2000-07-13 真空排気装置

Publications (2)

Publication Number Publication Date
JP2005256845A true JP2005256845A (ja) 2005-09-22
JP2005256845A5 JP2005256845A5 (enrdf_load_stackoverflow) 2007-06-14

Family

ID=35082788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005165360A Pending JP2005256845A (ja) 1999-11-17 2005-06-06 真空排気装置

Country Status (1)

Country Link
JP (1) JP2005256845A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007263121A (ja) * 1999-11-17 2007-10-11 Nabtesco Corp 真空排気装置
FR2971018A1 (fr) * 2011-01-27 2012-08-03 Alcatel Vacuum Technology France Pompe a vide primaire, installation pour le traitement de substrats et procede de pompage

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62102883U (enrdf_load_stackoverflow) * 1985-12-20 1987-06-30
JPH0518378A (ja) * 1990-12-12 1993-01-26 Ebara Corp ２段スクリユー真空ポンプ
JPH10159775A (ja) * 1996-11-30 1998-06-16 Aisin Seiki Co Ltd 多段式真空ポンプ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62102883U (enrdf_load_stackoverflow) * 1985-12-20 1987-06-30
JPH0518378A (ja) * 1990-12-12 1993-01-26 Ebara Corp ２段スクリユー真空ポンプ
JPH10159775A (ja) * 1996-11-30 1998-06-16 Aisin Seiki Co Ltd 多段式真空ポンプ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007263121A (ja) * 1999-11-17 2007-10-11 Nabtesco Corp 真空排気装置
FR2971018A1 (fr) * 2011-01-27 2012-08-03 Alcatel Vacuum Technology France Pompe a vide primaire, installation pour le traitement de substrats et procede de pompage

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