JP2005251997A - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- JP2005251997A JP2005251997A JP2004060617A JP2004060617A JP2005251997A JP 2005251997 A JP2005251997 A JP 2005251997A JP 2004060617 A JP2004060617 A JP 2004060617A JP 2004060617 A JP2004060617 A JP 2004060617A JP 2005251997 A JP2005251997 A JP 2005251997A
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
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- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45117—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
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- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
- H01L2224/48472—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
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- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
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- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
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- H01L2924/301—Electrical effects
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Abstract
【解決手段】 半導体素子1の表裏両面の電極1a、1bに熱拡散板3と突起電極2を接合するとともにガラス4にて封止して半導体組立5を構成し、この半導体組立5の熱拡散板3と突起電極2を回路基板6に実装して半導体装置10を構成し、半導体装置10を無機材料のみで構成することで、半導体装置10の内部の耐熱性を高め、パワー回路におけるスイッチング用の半導体装置などの信頼性を高めるようにした。
【選択図】 図1
Description
1a 第1の金属電極(アルミニウム)
1b 第2の金属電極(銅)
2 突起電極
2a アルミニウムからなる基部
2b 銅からなる頂部
3 熱拡散板
4 ガラス
5 半導体組立
6 回路基板
10 半導体装置
Claims (11)
- 表裏両面に電極を有する半導体素子を回路基板に実装して成る半導体装置であって、無機材料のみで構成されていることを特徴とする半導体装置。
- 半導体素子の一面の電極に突起電極を設け、他面の電極は、半導体素子を収納する凹部を有する熱拡散板に接合し、熱拡散板の凹部内に無機材料を封入して半導体素子を封止し、回路基板に突起電極と熱拡散板を接合したことを特徴とする請求項1記載の半導体装置。
- 半導体素子の主材料がSiCであることを特徴とする請求項1または2記載の半導体装置。
- 構成材料として少なくとも銅とアルミニウムを含むことを特徴とする請求項1〜3の何れかに記載の半導体装置。
- 機械的保護や電気的絶縁を行うためにガラスを封入したことを特徴とする請求項1〜4の何れかに記載の半導体装置。
- 構成材料の融点が400℃以上であることを特徴とする請求項1〜5の何れかに記載の半導体装置。
- 半導体素子を回路基板に実装して成る半導体装置であって、半導体素子上の電極に、2つの金属材料にて構成された突起電極を設けたことを特徴とする半導体装置。
- 突起電極を構成する2つの電極材料の1つが、半導体素子の電極材料と同じ材料であることを特徴とする請求項7記載の半導体装置。
- 突起電極を構成する2つの電極材料が、アルミニウムと銅であることを特徴とする請求項7又は8記載の半導体装置。
- 半導体素子を回路基板に実装して成る半導体装置の製造方法であって、半導体素子の金属電極上に2つの金属材料から成る突起電極を形成する工程において、半導体素子上の金属電極と同じ金属材料にて構成された突起電極の1つの金属材料とを、表面にある酸化膜及び汚染物質を除去する処理を行った後押圧し、突起電極を形成することを特徴とする半導体装置の製造方法。
- 半導体素子の金属電極はアルミニウムにて構成され、突起電極はアルミニウムと銅にて構成されていることを特徴とする請求項10記載の半導体装置の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2004060617A JP4283137B2 (ja) | 2004-03-04 | 2004-03-04 | 半導体装置 |
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JP2004060617A JP4283137B2 (ja) | 2004-03-04 | 2004-03-04 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
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JP2005251997A true JP2005251997A (ja) | 2005-09-15 |
JP4283137B2 JP4283137B2 (ja) | 2009-06-24 |
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JP2004060617A Expired - Fee Related JP4283137B2 (ja) | 2004-03-04 | 2004-03-04 | 半導体装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021040119A (ja) * | 2019-09-05 | 2021-03-11 | 朋程科技股▲ふん▼有限公司 | パワー・デバイスのパッケージ構造 |
CN112490202A (zh) * | 2019-09-12 | 2021-03-12 | 朋程科技股份有限公司 | 功率器件封装结构 |
-
2004
- 2004-03-04 JP JP2004060617A patent/JP4283137B2/ja not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021040119A (ja) * | 2019-09-05 | 2021-03-11 | 朋程科技股▲ふん▼有限公司 | パワー・デバイスのパッケージ構造 |
US11183439B2 (en) | 2019-09-05 | 2021-11-23 | Actron Technology Corporation | Package structure for power device |
CN112490202A (zh) * | 2019-09-12 | 2021-03-12 | 朋程科技股份有限公司 | 功率器件封装结构 |
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JP4283137B2 (ja) | 2009-06-24 |
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