JP2005228298A5 - - Google Patents
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- Publication number
- JP2005228298A5 JP2005228298A5 JP2004365771A JP2004365771A JP2005228298A5 JP 2005228298 A5 JP2005228298 A5 JP 2005228298A5 JP 2004365771 A JP2004365771 A JP 2004365771A JP 2004365771 A JP2004365771 A JP 2004365771A JP 2005228298 A5 JP2005228298 A5 JP 2005228298A5
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- substrate
- integrated circuit
- wiring
- antenna
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims 27
- 238000000034 method Methods 0.000 claims 25
- 239000000758 substrate Substances 0.000 claims 24
- 239000010408 film Substances 0.000 claims 22
- 239000004065 semiconductor Substances 0.000 claims 14
- 238000007599 discharging Methods 0.000 claims 12
- 239000002904 solvent Substances 0.000 claims 10
- 238000004519 manufacturing process Methods 0.000 claims 7
- 239000002184 metal Substances 0.000 claims 5
- 229910052751 metal Inorganic materials 0.000 claims 5
- 239000004020 conductor Substances 0.000 claims 4
- 239000011810 insulating material Substances 0.000 claims 4
- 229910044991 metal oxide Inorganic materials 0.000 claims 4
- 150000004706 metal oxides Chemical class 0.000 claims 4
- 239000000463 material Substances 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 238000000206 photolithography Methods 0.000 claims 1
- 238000007747 plating Methods 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 238000010248 power generation Methods 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004365771A JP4671681B2 (ja) | 2003-12-19 | 2004-12-17 | 半導体装置及びその作製方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003423061 | 2003-12-19 | ||
JP2004365771A JP4671681B2 (ja) | 2003-12-19 | 2004-12-17 | 半導体装置及びその作製方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010263413A Division JP5063770B2 (ja) | 2003-12-19 | 2010-11-26 | 半導体装置の作製方法、及び半導体装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2005228298A JP2005228298A (ja) | 2005-08-25 |
JP2005228298A5 true JP2005228298A5 (enrdf_load_stackoverflow) | 2007-12-20 |
JP4671681B2 JP4671681B2 (ja) | 2011-04-20 |
Family
ID=35002924
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004365771A Expired - Fee Related JP4671681B2 (ja) | 2003-12-19 | 2004-12-17 | 半導体装置及びその作製方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4671681B2 (enrdf_load_stackoverflow) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005311205A (ja) * | 2004-04-23 | 2005-11-04 | Nec Corp | 半導体装置 |
EP3614442A3 (en) | 2005-09-29 | 2020-03-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device having oxide semiconductor layer and manufactoring method thereof |
JP5177617B2 (ja) * | 2006-12-25 | 2013-04-03 | 独立行政法人産業技術総合研究所 | 酸化シリコン薄膜形成装置 |
WO2009049264A1 (en) * | 2007-10-10 | 2009-04-16 | Kovio, Inc. | Wireless devices including printed integrated circuitry and methods for manufacturing and using the same |
KR101596537B1 (ko) * | 2008-11-25 | 2016-02-22 | 씬 필름 일렉트로닉스 에이에스에이 | 인쇄형 안테나, 안테나 인쇄 방법, 및 인쇄형 안테나를 포함하는 디바이스 |
JP6084943B2 (ja) * | 2014-03-17 | 2017-02-22 | 富士通フロンテック株式会社 | 無線リードライタ装置、無線タグのリユース方法、及びプログラム |
WO2018150551A1 (ja) * | 2017-02-17 | 2018-08-23 | 裕久 今家 | 印刷基板製造方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003123047A (ja) * | 2001-10-15 | 2003-04-25 | Sharp Corp | 半導体装置及びその製造方法 |
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2004
- 2004-12-17 JP JP2004365771A patent/JP4671681B2/ja not_active Expired - Fee Related