JP2005203750A5 - - Google Patents

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Publication number
JP2005203750A5
JP2005203750A5 JP2004348081A JP2004348081A JP2005203750A5 JP 2005203750 A5 JP2005203750 A5 JP 2005203750A5 JP 2004348081 A JP2004348081 A JP 2004348081A JP 2004348081 A JP2004348081 A JP 2004348081A JP 2005203750 A5 JP2005203750 A5 JP 2005203750A5
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JP
Japan
Prior art keywords
thin film
piezoelectric thin
electrode
polarization vector
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004348081A
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English (en)
Japanese (ja)
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JP2005203750A (ja
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Publication date
Application filed filed Critical
Priority to JP2004348081A priority Critical patent/JP2005203750A/ja
Priority claimed from JP2004348081A external-priority patent/JP2005203750A/ja
Publication of JP2005203750A publication Critical patent/JP2005203750A/ja
Publication of JP2005203750A5 publication Critical patent/JP2005203750A5/ja
Pending legal-status Critical Current

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JP2004348081A 2003-12-16 2004-12-01 圧電体薄膜装置および圧電体薄膜装置の駆動方法 Pending JP2005203750A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004348081A JP2005203750A (ja) 2003-12-16 2004-12-01 圧電体薄膜装置および圧電体薄膜装置の駆動方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003417801 2003-12-16
JP2004348081A JP2005203750A (ja) 2003-12-16 2004-12-01 圧電体薄膜装置および圧電体薄膜装置の駆動方法

Publications (2)

Publication Number Publication Date
JP2005203750A JP2005203750A (ja) 2005-07-28
JP2005203750A5 true JP2005203750A5 (https=) 2007-11-08

Family

ID=34829163

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004348081A Pending JP2005203750A (ja) 2003-12-16 2004-12-01 圧電体薄膜装置および圧電体薄膜装置の駆動方法

Country Status (1)

Country Link
JP (1) JP2005203750A (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5168681B2 (ja) * 2005-12-12 2013-03-21 独立行政法人産業技術総合研究所 タイヤ空気圧センサおよびタイヤ空気圧監視装置
JP2007250626A (ja) * 2006-03-14 2007-09-27 Seiko Epson Corp 圧電素子の製造方法、アクチュエータ装置の製造方法、液体噴射ヘッドの製造方法、液体噴射装置の製造方法および圧電素子
JP4936909B2 (ja) * 2007-01-17 2012-05-23 日本碍子株式会社 流体特性測定装置の使用方法
JP5676216B2 (ja) * 2010-11-11 2015-02-25 日本碍子株式会社 圧電素子の製造方法
JP6154729B2 (ja) 2013-10-28 2017-06-28 富士フイルム株式会社 圧電体素子の製造方法
JP6464049B2 (ja) 2015-06-30 2019-02-06 富士フイルム株式会社 積層構造体、圧電素子および圧電素子の製造方法
GB2551803B (en) * 2016-06-30 2020-04-01 Xaar Technology Ltd Poling of a piezoelectric thin film element in a preferred electric field driving direction
JP6813453B2 (ja) * 2017-07-31 2021-01-13 日本電信電話株式会社 固体量子メモリ
JP2023150042A (ja) * 2022-03-31 2023-10-16 セイコーエプソン株式会社 液滴吐出ヘッド、プリンター

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02162782A (ja) * 1988-12-15 1990-06-22 Murata Mfg Co Ltd バイモルフ型変位素子の駆動方法
JPH05207760A (ja) * 1992-01-27 1993-08-13 Ricoh Co Ltd 静電力アクチュエータ
JPH05206535A (ja) * 1992-01-30 1993-08-13 Toyota Motor Corp 圧電アクチュエータの制御方法
JP3010896B2 (ja) * 1992-03-05 2000-02-21 日本電気株式会社 圧電磁器トランスとその駆動方法

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