JP2005203750A - 圧電体薄膜装置および圧電体薄膜装置の駆動方法 - Google Patents

圧電体薄膜装置および圧電体薄膜装置の駆動方法 Download PDF

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Publication number
JP2005203750A
JP2005203750A JP2004348081A JP2004348081A JP2005203750A JP 2005203750 A JP2005203750 A JP 2005203750A JP 2004348081 A JP2004348081 A JP 2004348081A JP 2004348081 A JP2004348081 A JP 2004348081A JP 2005203750 A JP2005203750 A JP 2005203750A
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Japan
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thin film
piezoelectric thin
electrode
polarization vector
voltage
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JP2004348081A
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Japanese (ja)
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JP2005203750A5 (https=
Inventor
Hiroyuki Kita
弘行 喜多
Hiroichi Uchiyama
博一 内山
Toshiyuki Matsunaga
利之 松永
Fumiyo Tojo
二三代 東條
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Priority to JP2004348081A priority Critical patent/JP2005203750A/ja
Publication of JP2005203750A publication Critical patent/JP2005203750A/ja
Publication of JP2005203750A5 publication Critical patent/JP2005203750A5/ja
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2004348081A 2003-12-16 2004-12-01 圧電体薄膜装置および圧電体薄膜装置の駆動方法 Pending JP2005203750A (ja)

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JP2004348081A JP2005203750A (ja) 2003-12-16 2004-12-01 圧電体薄膜装置および圧電体薄膜装置の駆動方法

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JP2003417801 2003-12-16
JP2004348081A JP2005203750A (ja) 2003-12-16 2004-12-01 圧電体薄膜装置および圧電体薄膜装置の駆動方法

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JP2005203750A true JP2005203750A (ja) 2005-07-28
JP2005203750A5 JP2005203750A5 (https=) 2007-11-08

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007163230A (ja) * 2005-12-12 2007-06-28 National Institute Of Advanced Industrial & Technology タイヤ空気圧センサおよびタイヤ空気圧監視装置
JP2007250626A (ja) * 2006-03-14 2007-09-27 Seiko Epson Corp 圧電素子の製造方法、アクチュエータ装置の製造方法、液体噴射ヘッドの製造方法、液体噴射装置の製造方法および圧電素子
JP2008175636A (ja) * 2007-01-17 2008-07-31 Ngk Insulators Ltd 流体特性測定装置
JP2012104715A (ja) * 2010-11-11 2012-05-31 Ngk Insulators Ltd 圧電素子の製造方法
GB2551803A (en) * 2016-06-30 2018-01-03 Xaar Technology Ltd Poling of a piezoelectric thin film element in a preferred electric field driving direction
JP2019029511A (ja) * 2017-07-31 2019-02-21 日本電信電話株式会社 固体量子メモリ
US11081637B2 (en) 2015-06-30 2021-08-03 Fujifilm Corporation Laminate structure, piezoelectric element, and method of manufacturing piezoelectric element
US11165011B2 (en) 2013-10-28 2021-11-02 Fujifilm Corporation Piezoelectric element and method for manufacturing piezoelectric element
JP2023150042A (ja) * 2022-03-31 2023-10-16 セイコーエプソン株式会社 液滴吐出ヘッド、プリンター

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02162782A (ja) * 1988-12-15 1990-06-22 Murata Mfg Co Ltd バイモルフ型変位素子の駆動方法
JPH05206535A (ja) * 1992-01-30 1993-08-13 Toyota Motor Corp 圧電アクチュエータの制御方法
JPH05207760A (ja) * 1992-01-27 1993-08-13 Ricoh Co Ltd 静電力アクチュエータ
JPH05251782A (ja) * 1992-03-05 1993-09-28 Nec Corp 圧電磁器トランスとその駆動方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02162782A (ja) * 1988-12-15 1990-06-22 Murata Mfg Co Ltd バイモルフ型変位素子の駆動方法
JPH05207760A (ja) * 1992-01-27 1993-08-13 Ricoh Co Ltd 静電力アクチュエータ
JPH05206535A (ja) * 1992-01-30 1993-08-13 Toyota Motor Corp 圧電アクチュエータの制御方法
JPH05251782A (ja) * 1992-03-05 1993-09-28 Nec Corp 圧電磁器トランスとその駆動方法

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007163230A (ja) * 2005-12-12 2007-06-28 National Institute Of Advanced Industrial & Technology タイヤ空気圧センサおよびタイヤ空気圧監視装置
JP2007250626A (ja) * 2006-03-14 2007-09-27 Seiko Epson Corp 圧電素子の製造方法、アクチュエータ装置の製造方法、液体噴射ヘッドの製造方法、液体噴射装置の製造方法および圧電素子
JP2008175636A (ja) * 2007-01-17 2008-07-31 Ngk Insulators Ltd 流体特性測定装置
JP2012104715A (ja) * 2010-11-11 2012-05-31 Ngk Insulators Ltd 圧電素子の製造方法
US11165011B2 (en) 2013-10-28 2021-11-02 Fujifilm Corporation Piezoelectric element and method for manufacturing piezoelectric element
US11081637B2 (en) 2015-06-30 2021-08-03 Fujifilm Corporation Laminate structure, piezoelectric element, and method of manufacturing piezoelectric element
GB2551803A (en) * 2016-06-30 2018-01-03 Xaar Technology Ltd Poling of a piezoelectric thin film element in a preferred electric field driving direction
GB2551803B (en) * 2016-06-30 2020-04-01 Xaar Technology Ltd Poling of a piezoelectric thin film element in a preferred electric field driving direction
JP2019029511A (ja) * 2017-07-31 2019-02-21 日本電信電話株式会社 固体量子メモリ
JP2023150042A (ja) * 2022-03-31 2023-10-16 セイコーエプソン株式会社 液滴吐出ヘッド、プリンター
CN116890533A (zh) * 2022-03-31 2023-10-17 精工爱普生株式会社 液滴喷出头、打印机

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