JP2005111856A - Chucking plate for screen printing - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a chucking plate for screen printing which can deal with whatever kind of a screen may be in terms of weight, thickness and size and can be manufactured in a short time and at a low cost. <P>SOLUTION: In the chucking plate 10 for screen printing used for printing a conductor paste on the wall surface of one through hole 12 or a desired through hole 12 out of a plurality of through holes formed in a ceramic green sheet 11, a thin metal sheet 14 with an insertion hole 13 formed to the hole diameter and arrangement position of the through hole 12, is provided. In addition, on the lower surface side of the thin metal sheet 14, a laminate of metal sheets 19, with honeycomb and/or mesh-like open holes, which are superposed in such a way that the center positions of the respective open holes are deviated from each other for insertion, is provided. Besides, a stage 20 is provided for holding/attaching the thin metal sheet 14 and the laminated metal sheets 19 to the main body of a printing machine and has a plurality of suction holes 22 formed in a part where the laminated metal sheets 19 are deposited. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a chuck plate that is a jig for screen printing, and more specifically, to a ceramic green sheet for forming a ceramic package or the like used for mounting an electronic component element such as a semiconductor element. And a screen printing chuck plate used when a conductor paste is formed on the wall surface of the through hole by screen printing.

  In recent years, packages for mounting electronic component elements such as semiconductor elements, crystal resonators, piezoelectric elements, multilayer substrates, etc. are downsized devices such as mobile phones and personal computers equipped with electronic component elements, In response to demands for higher reliability, there is an urgent need to respond to lighter, thinner, smaller and higher reliability. In order to cope with this, a ceramic package made of ceramic with high hermetic reliability, a ceramic multilayer substrate, and the like are used for the package and the multilayer substrate. These ceramic packages, ceramic multilayer substrates, etc. usually use multiple large ceramic green sheets, form conductor patterns, via conductors, through-hole conductors, etc. by screen printing, stack multiple sheets, and fire. In other words, it is manufactured by forming a ceramic package composed of a large number of aggregates, a ceramic multilayer substrate, etc., and finally dividing it into individual pieces. In addition, a ceramic package is usually soldered between a package or a multilayer board and a conductive pattern formed on the upper and lower surfaces of the package or a board for mounting. A castellation is formed to form a brazing pool (meniscus) to allow strong bonding. This castellation is applied to the wall surface of the through-hole formed in the ceramic green sheet by applying a screen paste using a screen printing chuck plate, laminating, firing, and dividing into individual pieces. To be formed.

  A conventional screen printing chuck plate 50 used for castellation formation and the like will be described with reference to FIGS. 3A is a plan view of the ceramic green sheet 51 placed on the screen printing chuck plate 50, and FIG. 3B is a ceramic green sheet placed on the screen printing chuck plate 50. FIG. 51 is an explanatory diagram in which screen printing is performed. As shown in FIG. 3A, a through hole 52 is formed in the ceramic green sheet 51 by a punching die, an NC machine or the like. As shown in FIG. 3 (B), the screen printing chuck plate 50 is made of a metal or resin plate by electric discharge machining in accordance with the diameter and arrangement position of the through holes 52 formed in the ceramic green sheet 51. A first suction hole 53 formed by, for example, is provided. In addition, below the first suction hole 53, the thin first suction hole 53 is provided in the entire thickness of the chuck plate 50 for screen printing in order to increase the suction force in the first suction hole 53. In order to shorten the time for forming by electrical discharge machining or the like, a second suction hole 54 having a diameter larger than that of the first suction hole 53 is provided by using a drill machine or the like so as to communicate with the first suction hole 53. . The ceramic green sheet 51 is placed on the screen printing chuck plate 50 attached to the printing machine main body 55 so that the through holes 52 and the first suction holes 53 communicate with each other. Then, on the ceramic green sheet 51, a screen printing plate 56 in which a mask matching the diameter and arrangement position of the through hole 52 formed in the ceramic green sheet 51 is abutted. Next, the conductor paste 57 placed on the screen printing plate 56 is pushed down through the mesh by the movement of the squeegee 58, and at the same time, the pushed conductor paste 57 is sucked in the suction machine 59 provided in the printing machine main body 55. Then, the air is sucked through the first suction hole 53 and the second suction hole 54. As a result, the conductor paste 57 is applied to the wall surface of the through hole 52 of the ceramic green sheet 51, and at the same time, the excess conductor paste 57 that has not been applied is removed to the printing machine main body 55 side.

In a screen printing chuck plate used in a conventional screen printing apparatus, a chuck plate corresponding to the surface of the support base is formed of a porous body in order to suck and hold the ceramic green sheet on the support base. The thing which made durability high and reduced the maintenance frequency is proposed (for example, refer patent document 1).
JP 2001-328233 A

However, the conventional screen printing chuck plate as described above has the following problems.
(1) With the downsizing of ceramic packages, ceramic multilayer substrates, etc., the through holes formed in the ceramic green sheet have a smaller hole diameter and a smaller pitch length between holes. It has become difficult to form a second suction hole that communicates with the first suction hole that is formed. Further, if the second suction hole is made smaller as the diameter of the first suction hole is reduced, the suction force in the second suction hole is reduced, and the first suction hole and the second suction hole are reduced. Since the conductive paste that has entered cannot be sucked, the through hole of the ceramic green sheet is filled with the conductive paste, and the conductive paste cannot be applied to the wall surface of the through hole. Further, the chuck plate for screen printing in which the adjacent second suction holes overlap with each other reduces the strength of the chuck plate itself, so that the chuck plate is deflected by pressurization during printing, and the printing accuracy is reduced. It has become.
(2) The conventional chuck plate for screen printing requires a first suction hole and a second suction hole that communicates with the first suction hole. Since it requires a dawn process, it is expensive, and the time required for manufacturing is increased, which increases the cost of products such as ceramic packages and ceramic multilayer substrates, and increases the delivery time of products. In addition, the conventional chuck plate for screen printing requires a chuck plate with a pattern that matches each ceramic package or product such as a ceramic multilayer substrate for each product, and there is no part that becomes versatile. The cost is up.
(3) When the conductor paste is sucked with a chuck plate made of a porous material, the conductor paste enters the complicated holes and cannot come out, so the holes are clogged and the suction force is weakened. It becomes difficult to apply the conductor paste to the wall surface of the through hole of the green sheet.
The present invention has been made in view of such circumstances, and an object of the present invention is to provide a screen printing chuck plate that can be made light and thin, can be manufactured at low cost, and has a short delivery time.

The chuck plate for screen printing according to the present invention that meets the above-mentioned object is such that a ceramic green sheet is placed and a conductor paste is printed on the wall surface of a desired through hole of one or more holes formed in the ceramic green sheet. The chuck plate for screen printing used in the present invention has a thin metal plate that is provided to contact the ceramic green sheet and has an insertion hole formed in accordance with the diameter of the through hole and the arrangement position. A plurality of metal plates provided on the lower surface side of the portion corresponding to the portion on which the ceramic green sheet is placed and having the aperture holes made of a honeycomb and / or mesh shape are inserted so that the center positions of the aperture holes are shifted. In addition, it has a laminated metal plate that is formed by superimposing, and also holds the thin metal plate and laminated metal plate and attaches it to the printer body Provided for that, it has a stage with a plurality of suction holes in a portion laminated metal plate is placed.
Here, the screen printing chuck plates may have different center lengths of the opening holes of the metal plates forming the laminated metal plates.
In addition, the screen printing chuck plate is preferably such that the length between the opening holes of each metal plate forming the laminated metal plate is larger in the lower layer side metal plate than in the upper layer side metal plate.
In addition, the screen printing chuck plate is composed of three or more metal plates forming a laminated metal plate, and the length between the opening holes of the intermediate layer metal plate is larger than that of the uppermost layer and the lowermost layer metal plate. Good.
Further, the screen printing chuck plate is made of a magnetic metal plate having an outer shape larger than that of the laminated metal plate so that the thin metal plate is detachably fixed on the stage, and is in contact with the thin metal plate of the stage. A magnet may be embedded in one or a plurality of recesses provided in the portion.

  The chuck plate for screen printing according to claim 1 and any one of claims 2 to 5 dependent thereon is a thin plate having insertion holes formed in accordance with the hole diameters and arrangement positions of the through holes of the ceramic green sheet. A plurality of metal plates having a metal plate and having an aperture hole made of a honeycomb and / or mesh shape on the lower surface side of the thin metal plate are overlapped so that the center positions of the respective aperture holes are shifted and inserted. And a stage provided with a plurality of suction holes in a portion where the laminated metal plate is placed, which is provided to hold and attach the thin metal plate and the laminated metal plate to the printer main body. Therefore, the through holes formed in the ceramic green sheet should have a strong suction force without providing the suction holes including the first and second suction holes directly on the screen printing chuck plate itself. It can, may correspond to the product to be miniaturization. In addition, a laminated metal plate and stage can be shared by simply forming an insertion hole in the thin metal plate that can be easily processed according to the diameter and arrangement position of the through hole formed in the ceramic green sheet of each product. Therefore, the screen printing chuck plate can be manufactured at a low cost with a short delivery time, and the cost of the product can be reduced and the delivery time can be shortened. In addition, since the center positions of the opening holes of each metal plate forming the laminated metal plate are shifted, all the insertion holes of the thin metal plate can be sucked, and the conductor paste can be applied to the wall surface of the through hole of the ceramic green sheet. Can be applied. Furthermore, since the suction hole can have a sufficiently large diameter, clogging due to the conductive paste does not occur.

  In particular, the screen printing chuck plate according to claim 2 is capable of reliably sucking all the insertion holes of the thin metal plate because the length between the center of the opening holes of each metal plate forming the laminated metal plate is different. A conductor paste can be applied to the wall surface of the through hole of the ceramic green sheet.

  In particular, the chuck plate for screen printing according to claim 3 is a thin metal plate because the length between the opening holes of each metal plate forming the laminated metal plate is larger in the lower metal plate than in the upper metal plate. All the insertion holes can be reliably sucked, and the conductive paste can be applied to the wall surface of the through hole of the ceramic green sheet.

  In particular, in the screen printing chuck plate according to claim 4, the metal plate forming the laminated metal plate is composed of three or more metal plates, and the center length of the opening hole of the intermediate metal plate is the uppermost layer and the uppermost layer. Because it is larger than the lower layer metal plate, even if the opening hole somewhere in the lowermost layer metal plate is removed from the suction hole of the stage, all the insertion holes of the thin metal plate can be reliably sucked by sucking from the alternative opening hole, A conductor paste can be applied to the wall surface of the through hole of the ceramic green sheet.

  Furthermore, in particular, the chuck plate for screen printing according to claim 5 is made of a magnetic metal plate having an outer shape larger than that of the laminated metal plate so that the thin metal plate is detachably fixed on the stage. Since the magnet is embedded in one or a plurality of recesses provided in the portion of the stage that contacts the thin metal plate, the thin metal plate can be easily attached and detached, and the screen printing chuck plate can be easily set in the printing machine main body. Therefore, production efficiency can be increased, and the cost of products can be reduced and the delivery time can be reduced.

Subsequently, the best mode for carrying out the present invention will be described with reference to the accompanying drawings to provide an understanding of the present invention.
Here, FIGS. 1A to 1C are respectively a plan view of a screen printing chuck plate according to an embodiment of the present invention, a longitudinal sectional view taken along line AA ′, and a partially enlarged plan view of a laminated metal plate. 2A and 2B are explanatory views of screen printing using the same screen printing chuck plate.

  As shown in FIGS. 1A to 1C, a screen printing chuck plate 10 according to an embodiment of the present invention has a ceramic green sheet 11 placed on the upper surface, and the ceramic green sheet 11 is previously perforated. The conductive paste is applied to the wall surface of a desired through hole 12 in one or a plurality of holes formed by screen printing. In order to place the ceramic green sheet 11 directly in contact with the screen printing chuck plate 10, the size of the through hole 12 of the ceramic green sheet 11 and the size of the through hole 12 are positioned so as to be on the uppermost layer side. A thin metal plate 14 made of stainless steel or the like having an insertion hole 13 formed in accordance with the position where the hole 12 is arranged is provided. The thin metal plate 14 may have a thickness that allows the insertion hole 13 to be formed with high accuracy by etching, laser processing, or the like, and does not cause large distortion during use.

  In addition, the screen printing chuck plate 10 has, for example, a hexagonal shape, a triangular shape, etc. in plan view, below the portion corresponding to the portion on which the ceramic green sheet 11 of the thin metal plate 14 is placed. It has a plurality of metal plates provided with a honeycomb made of a core material in which cells are combined in a honeycomb shape or an opening formed in a mesh shape made of a core material in which wires are combined in a net shape. In the case where the plurality of metal plates are, for example, a metal plate composed of two layers, each of the first metal plates 15 includes a first opening hole 16 and each of the second metal plates 17 includes a second plate. The laminated metal plate 19 is formed by providing the opening holes 18 and superimposing them so that the center positions of the first opening hole 16 and the second opening hole 18 are shifted from each other. Each of the plurality of metal plates, for example, the first and second metal plates 15 and 17 is provided with an opening hole, for example, the first and second opening holes 16 and 18 in the thickness direction. Therefore, even if there is a vertical pressing from the thin metal plate 14, the strength against the pressing is large, so the thickness of the metal plate can be reduced.

  Further, the chuck plate 10 for screen printing has a stage 20 provided to hold the thin metal plate 14 and the laminated metal plate 19 and to be attached to the screen printing machine main body 25 (see FIG. 2B). Yes. The stage 20 is made of a thick metal plate, and is provided with a notch 21 for placing the laminated metal plate 19 by machining the metal plate by machining or the like. A plurality of suction holes 22 penetrating from the portion 21 to the bottom surface are provided.

  First, the screen printing chuck plate 10 is a first metal plate in the cutout portion 21 of the stage 20 where the laminated metal plate 19 is an upper metal plate, for example, the laminated metal plate 19 is composed of two layers. 15 is placed so that the upper surface of the surface 15 is substantially flush with the upper surface of the stage 20, and then the knock pin in which the thin metal plate 14 is provided on the upper surface of the laminated metal plate 19 and the stage 20 and the thin metal plate 14. It is formed by being aligned and placed so as to be inserted into the head 23.

  Each metal plate forming the laminated metal plate 19, for example, in the case where the laminated metal plate 19 is composed of two layers, the first metal plate 15 and the second metal plate 17 are located between the opening hole centers of the respective metal plates. For example, when the laminated metal plate 19 is composed of two layers, the length a between the centers of the first opening holes 16 of the first metal plate 15 and the second opening holes 17 of the second metal plate 17 are used. It is preferable that the center-to-center length b is different. Moreover, the length between the opening hole centers of each metal plate forming the laminated metal plate 19 is preferably larger than the length between the opening hole centers of the lower metal plate than the upper metal plate. Furthermore, when each metal plate forming the laminated metal plate 19 is composed of three or more layers, the length between the opening holes of the intermediate layer metal plate is larger than that of the uppermost layer and the lowermost layer metal plate. It is good. The screen printing chuck plate 10 is overlapped by shifting the center positions of the respective metal plates forming the laminated metal plate 19, or the lengths between the opening holes of the respective metal plates forming the laminated metal plate 19 are made different. Thus, all the through holes 13 of the thin metal plate 14 can be sucked from the suction holes 22 of the stage 20.

  In order to detachably fix the thin metal plate 14 on the stage 20 including the laminated metal plate 19, the outer size of the thin metal plate 14 is larger than the outer shape of the laminated metal plate 19, for example, a ferromagnetic material such as SUS430. It is good to be comprised with the magnetic body metal plate which consists of stainless steel etc. And the part which contacts the thin metal plate 14 of the stage 20 is provided with 1 or several recessed part, and the magnet 24 is embed | buried under this recessed part. The thin metal plate 14 made of a magnetic metal plate can be detachably fixed on the stage 20 with the magnet 24. Further, the insertion pin 13 of the thin metal plate 14 can be reliably formed by using the knock pin 23 together. It can be placed and fixed in alignment with the laminated metal plate 14.

  Next, with reference to FIGS. 2A and 2B, a mode in which screen printing is performed on the ceramic green sheet 11 using the screen printing chuck plate 10 according to an embodiment of the present invention will be described. As shown in FIG. 2A, the ceramic base material for forming the ceramic green sheet 11 includes alumina, aluminum nitride, low-temperature fired ceramic, and the like, and the material is not particularly limited. For example, when alumina is used as the ceramic base material for forming the ceramic green sheet 11, first, a powder obtained by adding an appropriate amount of a sintering aid such as magnesia, silica, calcia to aluminum oxide powder is added to a powder such as dioctiphthalate. A plasticizer, a binder such as an acrylic resin, and a solvent such as toluene, xylene, and alcohols are added, and the mixture is thoroughly kneaded and defoamed to prepare a slurry having a viscosity of 2000 to 40000 cps, and a desired thickness is obtained by a doctor blade method or the like. For example, the sheet is formed into a sheet of 0.12 mm, dried, and cut into a rectangular shape having a desired size. The ceramic green sheet 11 is perforated by using a punching die, a punching machine, an NC machine or the like. This hole is an alignment hole (not shown) for screen printing on the ceramic green sheet, or a via hole for electrically connecting the upper and lower wiring patterns of the ceramic green sheet of multiple layers. (Not shown) or for castellation for forming a braided reservoir (meniscus) for firmly joining a board or the like by dividing the conductor film provided on the wall surface of the hole by a dividing line passing through the center of the hole It is provided as a through hole 12 or the like.

  As shown in FIG. 2B, the screen printing chuck plate 10 is fixed to the screen printing machine main body 25 with screws 26 or the like. A ceramic green sheet 11 is formed in advance on the thin metal plate 14 of the screen printing chuck plate 10 by laser, etching, or the like in accordance with the diameter and arrangement position of the through holes 12 of the ceramic green sheet 11. On the thin metal plate 14 provided with the insertion hole 13, it mounts so that the through-hole 12 and the insertion hole 13 may connect. Next, a screen printing plate 27 formed on the ceramic green sheet 11 so as to open a pattern in accordance with the hole diameter of the through hole 12 and the arrangement position of the ceramic green sheet 11 from the mask is a screen printing machine main body 25. So as to be connected to each other. Next, the conductive paste 28 is supplied onto the screen printing plate 27. When the conductor paste 28 is used for the ceramic green sheet 11 that is fired at a high temperature such as alumina or aluminum nitride, for example, a refractory metal such as W or Mo or a low-temperature fired ceramic is used. When what is baked at a low temperature is used, one made of a low melting point metal such as Ag or Cu is used. The conductor paste 28 is pushed into the through hole 12 of the ceramic green sheet 11 through the pattern of the screen printing plate 27 by a squeegee 29 that moves on the screen printing plate 27. Simultaneously with the movement of the squeegee 29 on the screen printing plate 27, the suction machine 30 formed in the main body of the screen printing machine operates, so that the conductor paste 28 in the through hole 12 of the ceramic green sheet 11 is used for screen printing. The chuck plate 10 is sucked through the suction hole 22 of the stage 20, the opening hole of the laminated metal plate 19, and the insertion hole 13 of the thin metal plate 14. By this suction, the conductive paste 28 is attached and applied to the wall surface of the through hole 12 of the ceramic green sheet 11, and at the same time, the excess conductive paste 28 in the through hole 12 is sucked to the screen printing machine main body 25 side. The screen printing machine main body 25 is provided with a filter 31 in the middle so that excess conductor paste 28 sucked from the through hole 12 by suction is not sucked into the suction machine 30.

  A chuck plate 10 for screen printing according to an embodiment of the present invention is formed on a thin metal plate 14 having a thickness that can be easily processed, and a ceramic green sheet 11 that is used for each product that can be made light and thin. The insertion hole 13 can be formed by an easy processing means such as a racer or etching process according to the diameter and arrangement position of the through hole 12, and the laminated metal plate 19 and the stage 20 are shared by all products. Therefore, the screen printing chuck plate 10 itself can be manufactured at a low cost with a short delivery time, and the cost of the product can be reduced and the delivery time can be reduced.

  The chuck plate for screen printing of the present invention is a screen printing machine that is required to perform precise printing on a ceramic green sheet in order to produce a ceramic package on which electronic component elements such as semiconductor elements are mounted and a multilayer wiring board. Can be used. The screen printing chuck plate of the present invention can be applied not only to printing on a ceramic green sheet but also to all printed materials.

(A)-(C) are the top view of the screen-printing chuck board which concerns on one embodiment of this invention, A-A 'line longitudinal cross-sectional view, and the partial expanded plan view of a laminated metal plate, respectively. (A) and (B) are explanatory drawings of screen printing using the same screen printing chuck plate, respectively. (A), (B) is explanatory drawing of the conventional chuck plate for screen printing, respectively.

Explanation of symbols

  10: chuck plate for screen printing, 11: ceramic green sheet, 12: through hole, 13: insertion hole, 14: thin metal plate, 15: first metal plate, 16: first opening hole, 17: second 18: second opening hole, 19: laminated metal plate, 20: stage, 21: notch, 22: suction hole, 23: knock pin, 24: magnet, 25: screen printing machine body, 26: Screw: 27: Screen printing plate, 28: Conductive paste, 29: Squeegee, 30: Suction machine, 31: Filter

Claims (5)

In a chuck plate for screen printing used to print a conductive paste on a wall surface of a desired through hole of one or more holes formed on the ceramic green sheet,
The ceramic green sheet is provided to contact the ceramic green sheet, and has a thin metal plate having an insertion hole formed in accordance with a hole diameter and an arrangement position of the through hole, and the ceramic green sheet of the thin metal plate is placed A plurality of metal plates that are provided on the lower surface side of the portion corresponding to the portion to be formed and are provided with opening holes made of honeycomb and / or mesh shape are overlapped so that the center positions of the respective opening holes are shifted and inserted. A plurality of suction holes provided in a portion on which the laminated metal plate is mounted, the laminated metal plate being formed, and provided to hold and attach the thin metal plate and the laminated metal plate to the printer body A chuck for screen printing, comprising: a stage comprising:   2. The screen printing chuck plate according to claim 1, wherein the center lengths of the opening holes of the metal plates forming the laminated metal plate are different from each other.   The chuck plate for screen printing according to claim 1 or 2, wherein the length between the opening holes of each metal plate forming the laminated metal plate is larger in the lower metal plate than in the upper metal plate. Chuck plate for screen printing.   The chuck plate for screen printing according to claim 1 or 2, wherein the metal plate forming the laminated metal plate is composed of three or more metal plates, and the length of the center of the opening hole of the intermediate layer metal plate is the uppermost layer and the uppermost layer. A chuck plate for screen printing, which is larger than the lower metal plate.   5. The screen printing chuck plate according to claim 1, wherein the thin metal plate has a larger outer shape than the laminated metal plate in order to detachably fix the thin metal plate on the stage. A chuck plate for screen printing, comprising a magnetic metal plate, wherein magnets are embedded in one or a plurality of recesses provided in a portion of the stage that contacts the thin metal plate.

Images