JP2005082875A5 - - Google Patents

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Publication number
JP2005082875A5
JP2005082875A5 JP2003319055A JP2003319055A JP2005082875A5 JP 2005082875 A5 JP2005082875 A5 JP 2005082875A5 JP 2003319055 A JP2003319055 A JP 2003319055A JP 2003319055 A JP2003319055 A JP 2003319055A JP 2005082875 A5 JP2005082875 A5 JP 2005082875A5
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JP
Japan
Prior art keywords
substrate
porous body
plated
anode
plating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003319055A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005082875A (ja
JP4166131B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003319055A priority Critical patent/JP4166131B2/ja
Priority claimed from JP2003319055A external-priority patent/JP4166131B2/ja
Priority to US10/932,126 priority patent/US20050051437A1/en
Publication of JP2005082875A publication Critical patent/JP2005082875A/ja
Publication of JP2005082875A5 publication Critical patent/JP2005082875A5/ja
Application granted granted Critical
Publication of JP4166131B2 publication Critical patent/JP4166131B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003319055A 2003-09-04 2003-09-10 めっき装置及びめっき方法 Expired - Fee Related JP4166131B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003319055A JP4166131B2 (ja) 2003-09-10 2003-09-10 めっき装置及びめっき方法
US10/932,126 US20050051437A1 (en) 2003-09-04 2004-09-02 Plating apparatus and plating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003319055A JP4166131B2 (ja) 2003-09-10 2003-09-10 めっき装置及びめっき方法

Publications (3)

Publication Number Publication Date
JP2005082875A JP2005082875A (ja) 2005-03-31
JP2005082875A5 true JP2005082875A5 (enExample) 2006-03-23
JP4166131B2 JP4166131B2 (ja) 2008-10-15

Family

ID=34418114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003319055A Expired - Fee Related JP4166131B2 (ja) 2003-09-04 2003-09-10 めっき装置及びめっき方法

Country Status (1)

Country Link
JP (1) JP4166131B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6799395B2 (ja) * 2016-06-30 2020-12-16 株式会社荏原製作所 基板ホルダ、電子デバイス製造装置において基板を搬送する搬送システム、および電子デバイス製造装置
JP6937974B1 (ja) * 2021-03-10 2021-09-22 株式会社荏原製作所 めっき装置、およびめっき方法
JP7081058B1 (ja) * 2021-06-11 2022-06-06 株式会社荏原製作所 めっき装置
JP7708824B2 (ja) * 2023-09-14 2025-07-15 株式会社Ｓｃｒｅｅｎホールディングス めっき装置およびめっき方法

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