JP2005082875A5 - - Google Patents

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Publication number
JP2005082875A5
JP2005082875A5 JP2003319055A JP2003319055A JP2005082875A5 JP 2005082875 A5 JP2005082875 A5 JP 2005082875A5 JP 2003319055 A JP2003319055 A JP 2003319055A JP 2003319055 A JP2003319055 A JP 2003319055A JP 2005082875 A5 JP2005082875 A5 JP 2005082875A5
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JP
Japan
Prior art keywords
substrate
porous body
plated
anode
plating
Prior art date
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Application number
JP2003319055A
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English (en)
Japanese (ja)
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JP2005082875A (ja
JP4166131B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2003319055A priority Critical patent/JP4166131B2/ja
Priority claimed from JP2003319055A external-priority patent/JP4166131B2/ja
Priority to US10/932,126 priority patent/US20050051437A1/en
Publication of JP2005082875A publication Critical patent/JP2005082875A/ja
Publication of JP2005082875A5 publication Critical patent/JP2005082875A5/ja
Application granted granted Critical
Publication of JP4166131B2 publication Critical patent/JP4166131B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003319055A 2003-09-04 2003-09-10 めっき装置及びめっき方法 Expired - Fee Related JP4166131B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003319055A JP4166131B2 (ja) 2003-09-10 2003-09-10 めっき装置及びめっき方法
US10/932,126 US20050051437A1 (en) 2003-09-04 2004-09-02 Plating apparatus and plating method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003319055A JP4166131B2 (ja) 2003-09-10 2003-09-10 めっき装置及びめっき方法

Publications (3)

Publication Number Publication Date
JP2005082875A JP2005082875A (ja) 2005-03-31
JP2005082875A5 true JP2005082875A5 (enrdf_load_stackoverflow) 2006-03-23
JP4166131B2 JP4166131B2 (ja) 2008-10-15

Family

ID=34418114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003319055A Expired - Fee Related JP4166131B2 (ja) 2003-09-04 2003-09-10 めっき装置及びめっき方法

Country Status (1)

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JP (1) JP4166131B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6799395B2 (ja) * 2016-06-30 2020-12-16 株式会社荏原製作所 基板ホルダ、電子デバイス製造装置において基板を搬送する搬送システム、および電子デバイス製造装置
WO2022190243A1 (ja) * 2021-03-10 2022-09-15 株式会社荏原製作所 めっき装置、およびめっき方法
CN115210413B (zh) * 2021-06-11 2025-04-01 株式会社荏原制作所 镀覆装置
JP7708824B2 (ja) * 2023-09-14 2025-07-15 株式会社Ｓｃｒｅｅｎホールディングス めっき装置およびめっき方法

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