JP2005007748A - Film sticking device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a film sticking device having a mechanism which can prevent the occurrence of a scratch on a film surface. <P>SOLUTION: A polarizing plate set table 310, with a clearance (C) formed between it and a polarizing plate 20, supports the polarizing plate 20 in a non-contact support state. As a polarizing plate non-contact support device, an ejection nozzle 310A for ejecting air from a polarizing plate-facing surface 310S and a suction nozzle 310B for sucking air from the polarizing plate-facing surface 310S are set. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a structure of a film sticking apparatus for sticking a film to a substrate.
[0002]
[Prior art]
Various apparatuses are mentioned as a film sticking apparatus for sticking a film to a board | substrate. Among them, a polarizing plate attaching apparatus for attaching a polarizing plate (film) to a liquid crystal cell substrate (glass substrate) used for a liquid crystal panel will be described with reference to FIGS. In addition, the “roller sticking method” and the “plate sticking method” are representative of the polarizing plate sticking methods in the polarizing plate sticking apparatus. "Roller sticking method" is a method of attaching a polarizing plate to a liquid crystal cell substrate while feeding the liquid crystal cell substrate and the polarizing plate while holding the substrate set table holding the liquid crystal cell substrate and the polarizing plate set table holding the polarizing plate. This is a method. The “plate sticking method” is a method in which the polarizing plate is attached to the liquid crystal cell substrate while the polarizing plate set table is stationary and the substrate set table is sent together with the polarizing plate. In the following description, a polarizing plate sticking apparatus 1B adopting a “roller sticking method” will be described as an example.
[0003]
<Configuration of polarizing plate pasting apparatus 1B>
FIG. 8 is an overall side view schematically showing a line of the polarizing plate pasting apparatus 1B. The cleaning stage 100, the alignment (positioning) stage 200, the polarizing plate pasting stage 300, the substrate reversing stage 400, and the substrate accommodation stage 500 are shown. I have.
[0004]
The cleaning stage 100 is provided with a transport roller 110 and a cleaning roller 120 for placing the liquid crystal cell substrate 10 and transporting it in a predetermined direction. The alignment stage 200 is provided with a transport roller 110, a temporary alignment roller 220, an alignment table 210 that can be moved up and down, and on which the liquid crystal cell substrate 10 can be sucked and fixed, and a CCD camera 270. Further, a substrate transport set table 250 provided with a plurality of suction cups 260 for sucking and fixing the liquid crystal cell substrate 10 is provided above the transport roller 110. The substrate transfer set table 250 is provided with a transfer mechanism that can move between the polarizing plate pasting stage 300.
[0005]
The polarizing plate pasting stage 300 is provided with a free roller 350 for placing and transporting the liquid crystal cell substrate 10, and an upper / lower mechanism is provided on the upstream side of the free roller 350 in the transport direction (substrate reversing stage 400 side). An affixing roller 320 is provided. Further, below the free roller 350, a polarizing plate set table 360 including a suction nozzle 360a for positioning and fixing the polarizing plate 20 is provided. The polarizing plate set table 360 employs a mechanism in which the upstream side in the transport direction (the substrate reversing stage 400 side) tilts up. Further, on the upstream side in the conveyance direction of the polarizing plate set table 360 (on the substrate reversing stage 400 side), a lower sticking roller 330 having an elevating mechanism is provided.
[0006]
The substrate reversing stage 400 is provided with a transport roller 110 and a reversing arm 410 for reversing the upper and lower surfaces of the liquid crystal cell substrate 10. In addition, the substrate storage stage 500 is provided with a chuck bar 510 for receiving the liquid crystal cell substrate 10 from the reversing arm 410, a transport roller 110, and a substrate cassette 520 for storing the liquid crystal cell substrate 10.
[0007]
<Paste step>
Next, with reference to FIGS. 8-10, the sticking step of the polarizing plate 20 to the liquid crystal cell substrate 10 in the said polarizing plate sticking apparatus 1B is demonstrated.
[0008]
First, referring to FIG. 8, liquid crystal cell substrate 10 carried into cleaning stage 100 is cleaned by cleaning roller 120 on the surface to which polarizing plate 20 is attached (for example, the CF surface) while being transported by transport roller 110. . Thereafter, the liquid crystal cell substrate 10 is transported to the alignment stage 200 by the transport roller 110.
[0009]
In the alignment stage 200, the liquid crystal cell substrate 10 is temporarily aligned by the temporary alignment roller 220. After the temporary alignment is completed, the alignment table 210 is moved up by one stage, and the liquid crystal cell substrate 10 is sucked and fixed by the alignment table 210. Thereafter, the position information of the liquid crystal cell substrate 10 is read by the CCD camera 270, and the main alignment of the liquid crystal cell substrate 10 is performed by the alignment table 210.
[0010]
Next, after the main alignment of the liquid crystal cell substrate 10 is completed, the alignment table 210 to which the liquid crystal cell substrate 10 is fixed by suction is further raised by one stage, and the liquid crystal cell substrate 10 is delivered to the substrate transport set table 250. In the substrate transfer set table 250, the liquid crystal cell substrate 10 is sucked and fixed using a suction cup 260. At this time, the liquid crystal cell substrate 10 is sucked and fixed so that the tip of the liquid crystal cell substrate 10 protrudes from the substrate transport set table 250 to the polarizing plate pasting stage 300 side by about 50 mm.
[0011]
Next, referring to FIG. 9, after the substrate transfer set table 250 is moved to a predetermined position of the polarizing plate pasting stage 300 with the liquid crystal cell substrate 10 being sucked and fixed, the substrate transfer set table 250 is lowered by several millimeters. Then, the liquid crystal cell substrate 10 is placed on the panel receiving free roller 350. The descending amount of the substrate transfer set table 250 can be adjusted according to the thickness of the liquid crystal cell substrate 10.
[0012]
On the other hand, by tilting up one end side (substrate reversing stage 400) of the polarizing plate set table 360 having the polarizing plate 20 that is disposed and fixed to the liquid crystal cell substrate 10, the tip of the polarizing plate 20 is liquid crystal. It will be in the state which adjoins the front-end | tip of the cell substrate 10. FIG.
[0013]
Here, with reference to FIG. 10, the sticking of the polarizing plate 20 to the liquid crystal cell substrate 10 will be described in detail. The upper application roller 320 is lowered and the upper application roller 320 comes into contact with the tip of the liquid crystal cell substrate 10. Further, the lower sticking roller 330 rises and the lower sticking roller 330 comes into contact with the tip of the polarizing plate 20. Thereby, the front-end | tip part of the liquid crystal cell substrate 10 and the front-end | tip part of the polarizing plate 20 will be in the state press-contacted by the upper sticking roller 320 and the lower sticking roller 330. FIG.
[0014]
Next, the suction of the liquid crystal cell substrate 10 by the suction cup 260 of the substrate transfer set table 250 is released, and the substrate transfer set table 250 is raised to retract. Further, the suction of the polarizing plate 20 by the suction nozzle 360a of the polarizing plate set table 360 is also released.
[0015]
Next, when the upper application roller 320 and the lower application roller 330 rotate, the polarizing plate 20 is sequentially attached to the surface of the liquid crystal cell substrate 10 while the liquid crystal cell substrate 10 and the polarizing plate 20 are sent together. .
[0016]
Referring to FIG. 9 again, the liquid crystal cell substrate 10 to which the polarizing plate 20 is attached is received by the reversing arm 410 of the substrate reversing stage 400, and the upper and lower surfaces of the liquid crystal cell substrate 10 are reversed. Thereafter, the liquid crystal cell substrate 10 is stored in the substrate cassette 520 by the chuck bar 510 of the substrate accommodation stage 500. Thereafter, the liquid crystal cell substrate 10 (the polarizing plate 20 is attached only to one surface (CF surface)) stored in the cassette 520 is applied to the other surface (TFT surface) by the attaching step similar to the above. Will be pasted. Further, a cleaning stage 100, an alignment stage 200, and a polarizing plate attaching stage 300 are further provided between the substrate reversing stage 400 and the substrate housing stage 500 in order to attach the polarizing plate 20 to the other surface side of the liquid crystal cell substrate 10. As a configuration, it is also possible to adopt a line configuration in which the liquid crystal cell substrate 10 having the polarizing plates 20 attached on both sides is stored in the cassette 520.
[0017]
In addition, although the prior art about the invention which concerns on this application was demonstrated based on the general technical information which the applicant knew, in the range which an applicant memorize | stores, as prior art document information before filing this application, The applicant does not have the information to be disclosed, and is not aware of the applicant's own patent application or the like prior to the present application.
[0018]
[Problems to be solved by the invention]
In the polarizing plate sticking apparatus 1B mentioned above, it is thought that it has the problem shown below.
[0019]
First, in the polarizing plate pasting stage 300, the upper pasting roller 320 and the lower pasting roller 330 rotate, so that the liquid crystal cell substrate 10 and the polarizing plate 20 are both sent to the surface of the liquid crystal cell substrate 10. 20 are sequentially attached. At this time, since the polarizing plate 20 is sent while being in contact with the polarizing plate set table 360, there is a possibility that scratches (hairline scratches) may enter the surface of the polarizing plate 20.
[0020]
Second, in the alignment stage 200 and the polarizing plate pasting stage 300, the liquid crystal cell substrate 10 is sucked and fixed and transported by a suction cup 260 provided on the substrate transport set table 250. When the weight of the substrate 10 is increased (about 10 kg), the suction force by the suction cup 260 is increased, so that the strain (stress) applied to the liquid crystal cell substrate 10 is increased, which causes the liquid crystal cell substrate 10 to be distorted.
[0021]
Thirdly, in the polarizing plate pasting stage 300, when the polarizing plate 20 is stuck on the surface of the liquid crystal cell substrate 10, the crossing angle (θ2 in FIG. 9) between the liquid crystal cell substrate 10 and the polarizing plate 20 is preferably small. . As the crossing angle (θ2) increases, the amount of winding of the polarizing plate 20 around the lower application roller 330 (the amount by which the polarizing plate 20 is bent by the lower application roller 330) increases. As a result, the polarizing plate 20 curls and adversely affects the sticking to the liquid crystal cell substrate 10.
[0022]
The problems as described above are not limited to the polarizing plate sticking apparatus, and in order to stick the film to the surface of the substrate sequentially while feeding the substrate and the film in a predetermined direction, It arises as a common problem.
[0023]
Therefore, this invention is made in order to solve the said subject, and the 1st objective is to provide a film sticking apparatus provided with the mechanism which can prevent that the scratch to a film surface enters. .
[0024]
A second object of the present invention is to provide a film sticking apparatus provided with a mechanism that makes it possible to reduce the application of strain when the substrate is supported.
[0025]
A third object of the present invention is to provide a film sticking device having a mechanism that prevents curling of the film and allows the film to be favorably stuck to a substrate.
[0026]
[Means for Solving the Problems]
In order to solve the above problems, in the film sticking device according to the present invention, a substrate holding device for holding the substrate, and a film for holding the film in a state where the film is disposed opposite to the surface of the substrate A film sticking device for sequentially sticking the film to the surface of the substrate while holding the substrate and the film relatively close to each other and feeding the substrate and the film in a predetermined direction. And it is characterized by having the following composition.
[0027]
The film holding device is in a non-contact state between the film facing surface facing the film and the film, and a film non-contact support device for supporting the film, adsorbing to the film, and facing the film A film position holding device capable of selecting a suction state in which the initial positioning state of the film with respect to the surface is held and an open state in which the suction state is released;
[0028]
In this way, since the film can be supported without using the film non-contact support device without being brought into contact with the film facing surface, it is possible to prevent the film surface from being scratched by the film facing surface. Moreover, in the positioning of the film, the film can be fixed in the suction state by the film position holding device, so that unnecessary movement of the film can be prevented. Further, when the film is moved, the suction state is canceled, so that the film transport is not affected.
[0029]
In the film sticking apparatus, preferably, the film non-contact support device includes a first discharge nozzle for blowing gas into a gap between the film and the film facing surface, and the film and the film facing surface. And a first suction nozzle for sucking gas from the gap. For example, when the film is supported on the upper surface side of the film holding device, the film is floated by blowing gas from the first discharge nozzle toward the lower surface side of the film, and the film is brought into contact with the film facing surface. It can support without. Furthermore, by using the first suction nozzle to suck in the gas between the film and the film facing surface, it is possible to further stabilize the floating state of the film (the gap (gap) between the film and the film facing surface). Become.
[0030]
Preferably, in the film sticking apparatus, the substrate holding device includes a substrate non-contact support device for supporting the substrate in a non-contact state between a substrate facing surface facing the substrate and the substrate. And a substrate position holding device capable of selecting an adsorption state for adsorbing to the substrate and maintaining the initial positioning state of the substrate with respect to the substrate facing surface and an open state for releasing the adsorption state.
[0031]
As described above, since the substrate can be supported over the entire surface of the substrate without bringing the substrate into contact with the substrate-facing surface by using the substrate non-contact support device, it is possible to reduce the strain applied when the substrate is supported.
[0032]
Further, in the positioning of the substrate, the substrate can be fixed in the suction state by the substrate position holding device, so that unnecessary movement of the substrate can be prevented. Further, when the substrate is moved, the suction state is canceled, so that the substrate transfer is not affected.
[0033]
Furthermore, for example, when the substrate is supported on the lower surface side of the substrate holding device, it is not necessary to provide a roller for supporting the lower surface side of the substrate as in the prior art. As a result, since the distance between the substrate holding device and the film sticking device can be made as small as possible, curling of the film when the film is stuck on the substrate is prevented, and the film is favorably stuck to the substrate. Is possible.
[0034]
In the film sticking device, preferably, the substrate non-contact support device includes a second discharge nozzle for blowing gas into a gap between the substrate and the substrate facing surface, and the substrate and the substrate facing surface. A second suction nozzle for sucking gas from the gap. For example, when the substrate is supported on the lower surface side of the substrate non-contact support device, the substrate is sucked into a floating state by sucking the gas on the upper surface side of the substrate from the second suction nozzle, and the substrate is placed on the substrate facing surface. Can be supported without contact. Furthermore, the floating state of the substrate (the gap (gap) between the substrate and the substrate facing surface) can be further stabilized by blowing the body between the substrate and the substrate facing surface using the second discharge nozzle. It becomes.
[0035]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, as an example of a film sticking apparatus according to an embodiment of the present invention, a polarizing plate sticking apparatus will be described with reference to the drawings.
[0036]
The polarizing plate sticking apparatus 1A based on the present invention employs a “roller sticking method”, similarly to the polarizing plate sticking apparatus 1B described above. Moreover, since the whole basic structure is the same, in the following description, the same reference number is attached | subjected about the same or equivalent part as polarizing plate sticking apparatus 1B, and the overlapping description is not repeated.
[0037]
<Polarizing plate pasting device 1A>
First, with reference to FIG. 1 and FIG. 2, the outline of the whole structure of the polarizing plate sticking apparatus 1A in this Embodiment is demonstrated. 1 and 2 are first and second overall side views showing the overall configuration of polarizing plate attaching apparatus 1A in the present embodiment.
[0038]
This polarizing plate sticking apparatus 1A includes a cleaning stage 100, an alignment (positioning) stage 200, a polarizing plate sticking stage 300, a substrate reversing stage 400, and a substrate housing stage 500, similarly to the polarizing plate sticking apparatus 1B.
[0039]
The characteristic configuration of the polarizing plate pasting apparatus 1A includes a configuration of a substrate transport set table 230 as a substrate holding device that is movably provided between the alignment stage 200 and the polarizing plate pasting stage 300, and a polarizing plate pasting stage. 300 has a configuration of a polarizing plate set table 310 as a film holding device.
[0040]
<Configuration of Substrate Transport Set Table 230>
Next, the configuration of the substrate transfer set table 230 will be described in detail with reference to FIGS. FIG. 3 is a side view showing a state where the substrate transport set table 230 is positioned on the polarizing plate pasting stage 300. 4 is a cross-sectional view showing a holding state of the liquid crystal cell substrate 10 in the substrate transfer set table 230, and FIG. 5 is a cross-sectional view showing a support state of the liquid crystal cell substrate 10 in the substrate transfer set table 230.
[0041]
As shown in FIGS. 4 and 5, the substrate transport set table 230 is characterized in that a gap (C) is provided between the substrate transport set table 230 and the liquid crystal cell substrate 10 to support the liquid crystal cell substrate 10 in a non-contact support state. For this purpose, a substrate non-contact support device is provided.
[0042]
The substrate transfer set table 230 is a flat table and has a substrate facing surface 230 </ b> S that faces the liquid crystal cell substrate 10. Further, as a substrate non-contact support device, a discharge nozzle (second discharge nozzle) 230A for blowing air from the substrate facing surface 230S and a suction nozzle (second suction nozzle) 230B for sucking air from the substrate facing surface 230S. And are provided. Since a known technique can be applied to a mechanism for sending air to the discharge nozzle 230A and a mechanism for sucking air from the suction nozzle 230B, detailed illustration of the structure is omitted.
[0043]
The total number of discharge nozzles 230A and suction nozzles 230B provided on the substrate-facing surface 230S of the substrate transfer set table 230 is about 2000 / m. ² ~ 6000 pieces / m ² The gap (C) between the liquid crystal cell substrate 10 and the substrate facing surface 230S is about 30 μm to about 100 μm, the air operating positive pressure at the discharge nozzle 230A is about 30 mbar to 130 mbar, and the air operating negative pressure at the suction nozzle 230B is It is about 110 mbar to 200 mbar. Each parameter is appropriately set according to the size, weight, and distance of the gap (C) of the liquid crystal cell substrate 10.
[0044]
Here, it is possible to support the liquid crystal cell substrate 10 on the lower surface side of the substrate transfer set table 230 only by the negative pressure from the suction nozzle 230B, but the negative pressure from the suction nozzle 230B and the discharge nozzle 230A By appropriately combining the positive pressure, not only the suction force of the liquid crystal cell substrate 10 but also the repulsive force (air spring) can be generated in the air existing between the liquid crystal cell substrate 10 and the substrate facing surface 230S. Thus, the gap (C) between the substrate 10 and the substrate facing surface 230S can be stabilized from the combination of the suction force and the repulsive force.
[0045]
Further, in order to fix the alignment position of the liquid crystal cell substrate 10 while supporting the liquid crystal cell substrate 10 with respect to the substrate facing surface 230S of the substrate transfer set table 230, the substrate transfer set table 230 includes a substrate position holding device. Is provided. The substrate position holding device protrudes from the substrate facing surface 230S to the liquid crystal cell substrate 10 side (at the state shown in FIG. 4) at the time of suction to the liquid crystal cell substrate 10 (at the suction state in which the initial positioning state is held). When the suction to the liquid crystal cell substrate 10 is released, in order to avoid interference with the liquid crystal cell substrate 10 due to the movement of the liquid crystal cell substrate 10, the suction cup is accommodated inward from the substrate facing surface 230S (state shown in FIG. 5). A mechanism 240 is provided. For the protrusion and storage mechanism of the suction cup mechanism 240 from the substrate transfer set table 230 and the movement mechanism between the alignment stage 200 and the polarizing plate pasting stage 300 of the substrate transfer set table 230, known techniques are used. The detailed structure is not shown in FIG.
[0046]
<Configuration of Polarizing Plate Set Table 310>
Next, the configuration of the polarizing plate set table 310 will be described in detail with reference to FIG. 3, FIG. 6, and FIG. 6 is a cross-sectional view showing a holding state of the polarizing plate 20 in the polarizing plate set table 310, and FIG. 7 is a cross-sectional view showing a supporting state of the polarizing plate 20 in the polarizing plate set table 310.
[0047]
As shown in FIGS. 6 and 7, the polarizing plate set table 310 is characterized by providing a gap (C) between the polarizing plate 20 and supporting the polarizing plate 20 in a non-contact support state. It has a polarizing plate (film) non-contact support device.
[0048]
The polarizing plate set table 310 is formed of a flat table and has a polarizing plate facing surface 310 </ b> S that faces the polarizing plate 20. Further, as a substrate non-contact support device, a discharge nozzle (first discharge nozzle) 310A for blowing air from the polarizing plate facing surface 310S and a suction nozzle (first suction nozzle) for sucking air from the polarizing plate facing surface 310S ) 310B. Since a known technique can be applied to the mechanism for sending air to the discharge nozzle 310A and the mechanism for sucking air from the suction nozzle 310B, detailed illustration of the structure is omitted.
[0049]
The total number of discharge nozzles 310A and suction nozzles 310B provided on the polarizing plate facing surface 310S of the polarizing plate set table 310 is about 2000 / m. ² ~ 6000 pieces / m ² The gap (C) between the polarizing plate 20 and the polarizing plate facing surface 310S is about 30 μm to about 100 μm, the air operating positive pressure in the discharge nozzle 3100A is about 110 mbar to 200 mbar, and the air operating negative pressure in the suction nozzle 230B is It is about 30 mbar to 130 mbar. Each parameter is appropriately set according to the size, weight, and distance of the gap (C) of the polarizing plate 20.
[0050]
Here, it is possible to support the polarizing plate 20 on the upper surface side of the polarizing plate set table 310 only by the positive pressure from the discharge nozzle 310A, but the positive pressure from the discharge nozzle 310A and the negative pressure from the suction nozzle 230B. By appropriately combining the above, it is possible to cause not only the buoyancy of the polarizing plate 20 but also the action of repulsive force (air spring) accompanying suction to the air existing between the polarizing plate 20 and the polarizing plate facing surface 310S. Thus, the combination of the attractive force and the repulsive force (buoyancy) makes it possible to stabilize the gap (C) between the substrate 10 and the polarizing plate facing surface 310S.
[0051]
In order to fix the alignment position of the polarizing plate 20 while supporting the polarizing plate 20 with respect to the polarizing plate facing surface 310S of the polarizing plate set table 310, the polarizing plate set table 310 includes a polarizing plate (film). A position holding device is provided. The polarizing plate position holding device protrudes from the polarizing plate facing surface 310S to the polarizing plate 20 side (at the state shown in FIG. 6) at the time of suction to the polarizing plate 20 (at the suction state in which the initial positioning state is held). When releasing the adsorption to the polarizing plate 20, in order to avoid interference with the polarizing plate 20 due to the movement of the polarizing plate 20, the suction cup mechanism accommodated inward from the polarizing plate facing surface 310S (state shown in FIG. 7). 37 is provided. Note that the protrusion / storage mechanism of the suction plate mechanism 370 from the polarizing plate set table 310 and the tilt-up mechanism of the polarizing plate set table 310 can be realized by using a known technique, so that the detailed structure is illustrated. Is omitted.
[0052]
<Paste step>
Next, with reference to FIGS. 1-3, the sticking step of the polarizing plate 20 to the liquid crystal cell board | substrate 10 in the said polarizing plate sticking apparatus 1A is demonstrated.
[0053]
First, referring to FIG. 1, liquid crystal cell substrate 10 carried into cleaning stage 100 is cleaned by cleaning roller 120 on the surface (for example, CF surface) to which polarizing plate 20 is attached while being transported by transport roller 110. . Thereafter, the liquid crystal cell substrate 10 is transported to the alignment stage 200 by the transport roller 110.
[0054]
In the alignment stage 200, the liquid crystal cell substrate 10 is temporarily aligned by the temporary alignment roller 220. After the temporary alignment is completed, the alignment table 210 is moved up by one stage, and the liquid crystal cell substrate 10 is sucked and fixed by the alignment table 210. Thereafter, the position information of the liquid crystal cell substrate 10 is read by the CCD camera 270, and the main alignment of the liquid crystal cell substrate 10 is performed by the alignment table 210.
[0055]
Next, after the main alignment of the liquid crystal cell substrate 10 is completed, the alignment table 210 to which the liquid crystal cell substrate 10 is fixed by suction is further raised by one stage, and the liquid crystal cell substrate 10 is delivered to the substrate transport set table 230. As described above, the substrate transport set table 230 supports the liquid crystal cell substrate 10 in a non-contact support state. Note that the position of the liquid crystal cell substrate 10 is fixed by a suction cup mechanism 240 as a substrate position holding device so as not to disturb the alignment position of the liquid crystal cell substrate 10. At this time, the liquid crystal cell substrate 10 is sucked and fixed so that the tip of the liquid crystal cell substrate 10 protrudes from the substrate transport set table 230 to the polarizing plate pasting stage 300 side by about 50 mm.
[0056]
Next, referring to FIG. 2, the substrate transport set table 230 moves to a predetermined position of the polarizing plate pasting stage 300 in a state where the liquid crystal cell substrate 10 is supported and fixed. At this time, it is not necessary to place the liquid crystal cell substrate 10 on a free roller or the like as in the prior art.
[0057]
On the other hand, by tilting up one end side (substrate reversal stage 400) of the polarizing plate set table 310 having the polarizing plate 20 that is disposed opposite to the liquid crystal cell substrate 10 and positioned and fixed in a non-contact support state, the polarizing plate The tip of 20 is in a state close to the tip of the liquid crystal cell substrate 10.
[0058]
Here, with reference to FIG. 3, the sticking of the polarizing plate 20 to the liquid crystal cell substrate 10 will be described in detail. The upper application roller 320 is lowered and the upper application roller 320 comes into contact with the tip of the liquid crystal cell substrate 10. Further, the lower sticking roller 330 rises and the lower sticking roller 330 comes into contact with the tip of the polarizing plate 20. Thereby, the front-end | tip part of the liquid crystal cell substrate 10 and the front-end | tip part of the polarizing plate 20 will be in the state press-contacted by the upper sticking roller 320 and the lower sticking roller 330. FIG.
[0059]
Next, the suction of the liquid crystal cell substrate 10 by the suction cup mechanism 240 of the substrate transfer set table 250 is released, and the suction cup mechanism 240 is accommodated in the substrate transfer set table 250. Further, the suction of the polarizing plate 20 by the suction cup mechanism 370 of the polarizing plate set table 310 is also released, and the suction cup mechanism 370 is accommodated in the polarizing plate set table 310.
[0060]
Next, by rotating the upper application roller 320 and the lower application roller 330, the liquid crystal cell substrate 10 and the polarizing plate 20 are both kept in a non-contact state with respect to the substrate transport set table 250 and the polarizing plate set table 360. Then, the polarizing plates 20 are sequentially attached to the surface of the liquid crystal cell substrate 10.
[0061]
The subsequent operations on the substrate reversing stage 400 and the substrate housing stage 500 are the same as those of the polarizing plate pasting apparatus 1B described above.
[0062]
(Action / Effect)
As described above, according to the polarizing plate pasting apparatus 1A in the present embodiment, since the polarizing plate 20 can be supported without being brought into contact with the polarizing plate facing surface 310S using the polarizing plate non-contact support device, It is possible to avoid scratches on the surface of the polarizing plate 20.
[0063]
In addition, since the liquid crystal cell substrate 10 can be supported over the entire surface of the liquid crystal cell substrate 10 without bringing the liquid crystal cell substrate 10 into contact with the substrate facing surface 230S by using the substrate non-contact support device, the distortion at the time of supporting the liquid crystal cell substrate 10 It is possible to suppress the reduction of the application.
[0064]
In addition, since the configuration for supporting the liquid crystal cell substrate 10 on the lower surface side of the substrate transport set table 230 is adopted, it is not necessary to provide a roller for supporting the lower surface side of the liquid crystal cell substrate 10 as in the prior art. As a result, the crossing angle between the substrate transport set table 230 and the polarizing plate set table 310 (θ1: in FIG. 2, about 5 ° in the present embodiment) can be made as small as possible. It is possible to prevent the polarizing plate 20 from curling at the time of application to the liquid crystal cell substrate 10 and to attach the polarizing plate 20 to the liquid crystal cell substrate 10 satisfactorily.
[0065]
In addition, a cleaning stage 100, an alignment stage 200, and a polarizing plate attaching stage 300 are further provided between the substrate reversing stage 400 and the substrate housing stage 500 in order to attach the polarizing plate 20 to the other surface side of the liquid crystal cell substrate 10. As a configuration, it is also possible to adopt a line configuration in which the liquid crystal cell substrate 10 having the polarizing plates 20 attached on both sides is stored in the cassette 520.
[0066]
The polarizing plate pasting apparatus 1A stops the substrate set table 230 that holds the liquid crystal cell substrate 10 and the polarizing plate set table 310 that holds the polarizing plate 20, and sends the liquid crystal cell substrate 10 and the polarizing plate 20 to each other. While the description has been given of the case where the “roller sticking method” in which the polarizing plate 20 is attached to the liquid crystal cell substrate 10, the polarizing plate set table 310 is stopped and the liquid crystal cell substrate 10 is sent while feeding the substrate set table 230 together with the polarizing plate 20. It is also possible to apply the above configuration to a “plate pasting method” in which the polarizing plate 20 is pasted on. Further, a configuration in which a non-contact support mechanism for the polarizing plate 20 is adopted only for the polarizing plate set table 310 is also possible.
[0067]
Moreover, in the adoption of the non-contact support mechanism, the case where air is used as the gas has been described. However, not only air but also an inert gas can be used.
[0068]
In addition to the polarizing plate sticking apparatus, the above configuration can also be adopted for the polarizing plate sticking apparatus for sequentially sticking the film to the surface of the substrate while feeding the substrate and the film in a predetermined direction. .
[0069]
Therefore, the technical scope of the present invention is not interpreted only by the above-described embodiments, but is defined based on the description of the claims. Further, all modifications within the meaning and scope equivalent to the scope of the claims are included.
[0070]
【The invention's effect】
According to the film sticking apparatus of the present invention, it is possible to prevent the film surface from being scratched, to reduce the strain imparted when the substrate is supported, to further prevent the film from curling, and to attach the film to the substrate. It is possible to paste well against.
[Brief description of the drawings]
FIG. 1 is a first overall side view showing an overall configuration of a polarizing plate pasting apparatus according to the present embodiment.
FIG. 2 is a second overall side view showing the overall configuration of the polarizing plate pasting apparatus according to the present embodiment.
FIG. 3 is a side view showing a state in which the substrate transport set table in the present embodiment is positioned on a polarizing plate pasting stage.
FIG. 4 is a cross-sectional view showing a holding state of a liquid crystal cell substrate of a substrate transfer set table in the present embodiment.
FIG. 5 is a cross-sectional view showing a support state of a liquid crystal cell substrate of a substrate transfer set table in the present embodiment.
FIG. 6 is a cross-sectional view showing a holding state of a polarizing plate of a polarizing plate set table in the present embodiment.
FIG. 7 is a cross-sectional view showing a support state of a polarizing plate of a polarizing plate set table in the present embodiment.
FIG. 8 is a first overall side view showing an overall configuration of a polarizing plate pasting apparatus according to a conventional technique.
FIG. 9 is a second overall side view showing the overall configuration of a polarizing plate pasting apparatus according to the prior art.
FIG. 10 is a side view showing a state in which a substrate transfer set table in the conventional technique is positioned on a polarizing plate pasting stage.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1A Polarizing plate sticking apparatus, 100 cleaning stage, 110 conveyance roller, 120 cleaning roller, 200 alignment (positioning) stage, 210 alignment table, 220 temporary alignment roller, 230 substrate conveyance set table, 230A discharge nozzle (second discharge nozzle), 230B suction nozzle (second suction nozzle), 230S substrate facing surface, 240, 370 suction cup mechanism, 270 CCD camera, 300 polarizing plate pasting stage, 310 polarizing plate set table, 310A discharge nozzle (first discharge nozzle), 310B suction nozzle (First suction nozzle), 310S polarizing plate facing surface, 320 upper application roller, 330 lower application roller, 400 substrate inversion stage, 410 inversion arm, 500 substrate accommodation stage, 510 chuck bar, 520 substrate cassette.

Claims (5)

A substrate holding device (230) for holding the substrate (10) and a film holding device (230) for holding the film (20) in a state where the film (20) is disposed opposite to the surface of the substrate (10). 310), a predetermined region of the substrate (10) and the film (20) are relatively brought close to each other, and the substrate (10) and the film (20) are fed in a predetermined direction while the substrate ( 10) a film sticking device for sequentially sticking the film (20) to the surface of
The film holding device (310)
Film non-contact support device (310A, 310B) for supporting the film (20) by bringing the film facing surface (310S) facing the film (20) and the film (20) into a non-contact state. When,
Film position holding that can be selected between an adsorbing state that adsorbs to the film (20) and holds the initial positioning state of the film (20) with respect to the film facing surface (310S) and an open state that releases the adsorbing state. A device (370);
A film sticking apparatus. The film non-contact support device is:
A first discharge nozzle (310A) for blowing gas into a gap between the film (20) and the facing surface (310S);
A first suction nozzle (310B) for sucking gas from a gap between the film (20) and the facing surface (310S);
The film sticking apparatus of Claim 1 containing this. The substrate holding device (230)
Substrate non-contact support device (230A, 230B) for supporting the substrate (10) in a non-contact state between the substrate facing surface (230S) facing the substrate (10) and the substrate (10). When,
Substrate position holding that allows selection between an adsorbed state that adsorbs to the substrate (10) and maintains the initial positioning state of the substrate (10) with respect to the substrate facing surface (230S) and an open state that releases the adsorbed state. A device (240);
The film sticking apparatus of Claim 2 which has these. The substrate non-contact support device is
A second discharge nozzle (230A) for blowing gas into a gap between the substrate (10) and the substrate facing surface (230S);
A second suction nozzle (230) for sucking gas from a gap between the substrate (10) and the substrate facing surface (230S);
The film sticking apparatus of Claim 3 containing this. The substrate (10) is a liquid crystal cell substrate used for a liquid crystal panel,
The film sticking apparatus according to claim 1, wherein the film is a polarizing plate used for a liquid crystal panel.

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