JP2019075509A - Adhesive sheet processing method and adhesive sheet processing apparatus - Google Patents

Abstract

To provide a technique capable of peeling an adhesive sheet which has become unnecessary from an adherend after adhering the adhesive sheet to the adherend if necessary.SOLUTION: An adhesive sheet processing method includes a step of supporting an adherend WK by adhering support means 20, a step of bonding an adhesive sheet AS to the adherend WK to form an already-adhered adherend WK1, a step of carrying the adherend WK in or out an adhering loading/unloading unit 40, a step of transporting the adherend WK or the already-adhered adherend WK1 between the adhering support means 20 and the adhering loading/unloading unit 40, a step of supporting the already-adhered adherend WK1 by peeling supporting means 60, a step of peeling the adhesive sheet AS from the already-adhered adherend WK1 to form an already-peeled adherend WK2, a step of carrying the already-adhered adherend WK1 in or out a peeling loading/unloading unit 80, and a step of transporting the already-adhered adherend WK1 or the already-peeled adherend WK2 between the peeling supporting means 60 and the peeling loading/unloading unit 80.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an adhesive sheet processing method and an adhesive sheet processing apparatus.

  DESCRIPTION OF RELATED ART Conventionally, the adhesive sheet processing method which sticks an adhesive sheet to a to-be-adhered body, or peels an adhesive sheet from a to-be-adhered body is known (for example, refer patent document 1).

JP 2017-73428 A

  However, in the processing method (adhesive sheet processing method) using the conventional processing apparatus described in Patent Document 1, the object to be peeled in the peeling step by the sheet peeling means 60 is the wafer WF in the sticking step by the sheet sticking means 40. Because it is not the second adhesive sheet AS2 (adhesive sheet) attached to the (adherend), even if the adhesive sheet becomes unnecessary after attaching the adhesive sheet to the adherend if necessary, the adhesive sheet The problem arises that it can not be peeled off from the adherend.

  An object of the present invention is to provide an adhesive sheet processing method and an adhesive sheet processing apparatus capable of peeling the adhesive sheet which has become unnecessary from the adherend after adhering the adhesive sheet to the adherend if necessary. It is.

  The present invention adopts the configuration described in the claims.

According to the present invention, since the target of peeling in the peeling step is the adhesive sheet stuck to the adherend in the sticking step, the adhesive sheet becomes unnecessary after sticking the adhesive sheet to the adherend if necessary. Can be peeled off from the adherend.
Moreover, if a support member sticking process is implemented and an adhesive sheet is peeled from an adherend with a support member at a peeling process, processing of an adhesive sheet can be arranged variously.
Furthermore, if the processing step is carried out, the adhesive sheet which has become unnecessary can be peeled off from the adherend after performing the predetermined processing on the already adhered adherend.
Moreover, if an energy provision process is implemented, the adhesive sheet of the structure from which an adhesive force falls with predetermined energy can be peeled from an adherend easily.

(A)-(C) is an explanatory view of an adhesive sheet processing device concerning an embodiment of the present invention. (A)-(C) are explanatory drawings of the adhesive sheet processing apparatus which concerns on the modification of this invention.

Hereinafter, an embodiment of the present invention will be described based on the drawings.
In the present embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. Do. Furthermore, in the present embodiment, when referring to a YD direction parallel to the Y axis as a reference and showing a direction without specifying a figure, “upper” is the arrow direction of the Z axis and “lower” is the reverse thereof. The direction “left” is the arrow direction of the X axis, “right” is the opposite direction, and “front” is the arrow direction of the Y axis, “rear” is the opposite direction.

In the adhesive sheet processing apparatus 10 of the present invention, one surface ASU of the adhesive sheet AS is brought into contact with the sticking support means 20 for supporting the adherend WK and the adherend WK supported by the sticking support means 20. Affixing means 30 for pasting and forming a pasted adherend WK1 and affixing means for carrying in the adherend WK to the adhesive sheet processing apparatus 10 or carrying out the pasted adherend WK1 from the adhesive sheet processing apparatus 10 The sticking and conveying unit 50 for conveying the loading / unloading unit 40, the adherend WK or the pasted adherend WK1 between the sticking support unit 20 and the sticking / loading unit 40, and the pasting adherend WK1 In the peeling support means 60, the peeling means 70 for peeling the adhesive sheet AS from the pasted adherend WK1 supported by the peeling support means 60 to form the already peeled adherend WK2, and the adhesion sheet processing apparatus 10 Pre-adhered adherend A peeling loading / unloading section 80 for carrying in K1 or carrying out the already peeled adherend WK2 from the adhesive sheet processing apparatus 10, an energy applying means 90 for applying ultraviolet rays as a predetermined energy to the adhesive sheet AS, and an already adhered adherend A peeling conveying means 100 is provided for conveying the adherend WK1 or the already peeled adherend WK2 between the peeling supporting means 60 and the peeling in / out unit 80.
In addition, as the adhesive sheet AS, a sheet whose adhesion to the adherend WK is lowered is adopted by applying ultraviolet rays as predetermined energy, and specifically, the adhesive sheet AS is hardened by applying ultraviolet rays. An adhesive layer AL having a reduced adhesive force and a base sheet BS laminated on the adhesive layer AL, and a strip-like release sheet RL is temporarily attached to the adhesive layer AL to constitute a raw fabric RS ing.

  The sticking support means 20 includes a sticking support table 21 having a support surface 21A which can be held by suction by a pressure reducing means (holding means) (not shown) such as a pressure reducing pump or a vacuum ejector.

  The sticking means 30 includes a support shaft 31 for supporting the raw sheet RS, a plurality of guide rollers 32, and a peeling plate 33 as a peeling member for peeling the adhesive sheet AS from the peeling sheet RL by turning the peeling sheet RL back, The pressing roller 34 as pressing means for pressing and sticking the adhesive sheet AS to the body WK, and the driving roller 35 driven by the rotation motor 35A as driving device and sandwiching the peeling sheet RL with the pinch roller 36, not shown The recovery roller 37 is driven by a drive device and always applies a predetermined tension to the release sheet RL existing between the pinch roller 36 and the release sheet RL, and the slider 38A supports the sticking support table 21. And a linear motor 38 as a driving device for relatively moving the adherend WK and the pressing roller 34 and the like.

  The application loading / unloading unit 40 includes an attachment stage 41 on which a right side surface is opened, and a storage case SC capable of accommodating a plurality of adherends WK at predetermined intervals in the vertical direction is placed. In addition, storage case SC can also accommodate already stuck to-be-adhered body WK1 and already-peeling to-be-adhered body WK2.

  The pasting conveyance means 50 is constituted by a plurality of arms, and within the working range, a so-called driving device capable of displacing the one supported by the arm 51A at the tip of the working part at any position and any angle. The robot is provided with an articulated robot 51, and a transport arm 52 supported by an arm 51A at the tip end and capable of being adsorbed and held by decompression means (not shown) such as a decompression pump and a vacuum ejector.

  The peeling support means 60 is provided with a peeling support table 61 having a support surface 61A which can be held by suction by a pressure reducing means (holding means) (not shown) such as a pressure reducing pump or a vacuum ejector.

  The peeling means 70 includes a support roller 71 for supporting the strip-like peeling adhesive sheet ASR as holding means, a guide roller 72 for guiding the peeling adhesive sheet ASR, and an output shaft 73A of the linear motor 73 as a driving device. Drive roller 75 which is driven by a rotatably supported peeling roller 74 and a rotation motor 75A as a driving device and holds the peeling adhesive sheet ASR with a pinch roller 76, and driven by a driving device (not shown), pinch roller 76. A recovery roller 77 which always applies a predetermined tension to the release adhesive sheet ASR existing between 76 and recovers the release adhesive sheet ASR, and the slider 78A supports the release support table 61 and adheres it. A linear motor 78 is provided as a drive device for moving the body WK relative to the peeling roller 74 and the like.

  The peeling loading / unloading unit 80 has a configuration equivalent to that of the sticking loading / unloading unit 40, and includes a peeling placement table 81 on which the storage case SC is placed.

  The energy applying means 90 includes a light source case 91 and a light emitting source 92 supported by the light source case 91 and emitting ultraviolet light.

  The peeling conveyance means 100 is configured to double as the sticking conveyance means 50.

The operation of the adhesive sheet processing apparatus 10 described above will be described.
First, with respect to the adhesive sheet processing apparatus 10 in which each member is disposed at an initial position shown by a solid line in FIG. 1A, a user of the adhesive sheet processing apparatus 10 (hereinafter simply referred to as "user") After setting the RS and the adhesive sheet for peeling ASR as shown in FIG. 1B and FIG. 1C, a signal for starting the automatic operation is input through an operation means (not shown) such as an operation panel or a personal computer. Then, when the attaching means 30 drives the rotation motor 35A, the original sheet RS is drawn out and the leading adhesive sheet AS is peeled off from the peeling sheet RL by the peeling edge 33A of the peeling plate 33 by a predetermined length, the sticking means 30 The driving of the rotation motor 35A is stopped to be in the standby state.

Next, when the user or transport means (not shown) such as an articulated robot or a belt conveyor places the storage case SC containing the plurality of adherends WK on the mounting table 41, the adhesive sheet processing apparatus 10 Perform the following paste cycle operation.
That is, the sticking conveyance means 50 drives the articulated robot 51 and the decompression means (not shown), and the adherend WK stored in the storage case SC is attracted and held by the conveyance arm 52 and taken out. The body WK is placed on the support surface 21 A of the sticking support table 21. Thereafter, when the sticking support means 20 drives the pressure reducing means (not shown) to start suction holding of the adherend WK on the support surface 21A, the sticking conveyance means 50 stops driving the pressure reducing means (not shown). The joint robot 51 is driven to return the transfer arm 52 to the initial position.

  Next, the sticking means 30 drives the linear motor 38 to move the sticking support table 21 to the right, and when the adherend WK reaches a predetermined position, the rotation motor 35A is driven, the adherend WK Feed out the original fabric RS according to the moving speed of. Thereby, as shown by the two-dot chain line in FIG. 1B, the adhesive sheet AS is pressed from the release sheet RL at the release edge 33A of the release plate 33 and pressed against the upper surface of the adherend WK by the pressing roller 34 And attached to form an already adhered adherend WK1. Then, when the pasted adherend WK1 is formed, and the next adhesive sheet AS is peeled off from the peeling sheet RL by a predetermined length at the peeling edge 33A of the peeling plate 33, the sticking unit 30 stops the driving of the rotation motor 35A. And stand by again.

  Next, when the pasting support table 21 supporting the pasted adherend WK1 reaches a predetermined position, the pasting means 30 stops the driving of the linear motor 38, and then drives the linear motor 38 again, and the pasting support table 21 is returned to the initial position. After that, the sticking conveyance means 50 drives the articulated robot 51 and the decompression means (not shown), and the pasting adherend WK1 is adsorbed and held by the conveyance arm 52, and then the sticking support means 20 drives the decompression means (not shown) Stop. Next, the sticking conveyance means 50 drives the articulated robot 51, and the pasted adherend WK1 sucked and held by the conveyance arm 52 is accommodated in the storage case SC, and the driving of the decompression means (not shown) is stopped. , The above-mentioned pasting cycle operation is repeated. Then, when all adherends WK in the storage case SC are replaced with the adhered adherend WK1, the user or a transport means (not shown) performs predetermined processing on the adhered adherend WK1. The storage case SC is transported to the storage case SC, and the attached adherend WK1 subjected to the predetermined processing by the processing means is stored again in the storage case SC.

Next, when the user or the transport means (not shown) places the storage case SC containing a plurality of pasted adherends WK1 on the release mounting table 81, the adhesive sheet processing apparatus 10 performs the following release cycle operation. Do.
That is, the peeling conveyance means 100 drives the articulated robot 51 and the decompression means (not shown) to suck and hold out the pasted adherend WK1 stored in the storage case SC by the conveyance arm 52, and then the adhesion adherend WK1 is removed. The pasted adherend WK1 is placed on the support surface 61A of the peeling support table 61. Thereafter, when the peeling support means 60 drives the decompression means (not shown) to start adsorption and holding of the adhered adherend WK1 on the support surface 61A, the peeling conveyance means 100 stops driving the decompression means (not shown). The articulated robot 51 is driven to return the transfer arm 52 to the initial position.

  Next, the peeling means 70 and the energy applying means 90 drive the linear motor 78 and the light emitting source 92 to move the peeling support table 61 to the right as shown by the two-dot chain line in FIG. The adhesive sheet AS in the pasted adherend WK1 is irradiated with ultraviolet light to reduce the adhesion of the adhesive sheet AS to the adherend WK. Thereafter, driving of the linear motor 78 is continued, and as shown in FIG. 1C, when the right end of the adhesive sheet AS of the adhered adherend WK1 reaches just below the lowermost end of the peeling roller 74, the peeling means 70 After stopping the driving of the linear motor 78, the linear motion motor 73 is driven to lower the peeling roller 74, and the peeling adhesive sheet ASR is attached to the right end portion of the adhesive sheet AS. Then, the peeling means 70 drives the linear motor 78 and the rotation motor 75A, and the peeling adhesive sheet ASR is wound around the collecting roller 77 in accordance with the moving speed to move the peeling support table 61 to the right. 1 (C), the adhesive sheet AS is peeled off from the adhered adherend WK1 as shown by the two-dot chain line in middle (C) to form the already peeled adherend WK2.

  Next, when the peeling support table 61 supporting the peeled adherend WK2 from which the entire adhesive sheet AS has been peeled reaches a predetermined position, the peeling means 70 stops driving the linear motor 78 and the linear motor 73 After the peeling roller 74 is returned to the initial position and driving of the rotation motor 75A is stopped, the linear motor 78 is driven again to return the peeling support table 61 to the initial position. Thereafter, the peeling conveyance means 100 drives the articulated robot 51 and the decompression means (not shown), and the exfoliation adherend WK2 is adsorbed and held by the conveyance arm 52, and then the peeling support means 60 drives the decompression means (not shown). Stop. Next, the peeling conveyance means 100 drives the articulated robot 51 to store the already peeled adherend WK2 adsorbed and held by the conveyance arm 52 in the storage case SC and stop the driving of the decompression means (not shown). , The above peeling cycle operation is repeated. Then, when all the pasted adherends WK1 in the storage case SC are replaced with the already peeled adherend WK2, the user or the transport means (not shown) transports the storage case SC to another process.

  According to the embodiment as described above, since the target of peeling in the peeling step is the adhesive sheet AS stuck in the sticking step, it becomes unnecessary after sticking the adhesive sheet AS to the adherend WK as necessary. The adhesive sheet AS can be peeled off from the adherend WK.

  The means and steps in the present invention are not limited in any way as long as the operations, functions or steps described in the means and steps can be performed, and it is needless to say that the constitutions of only one embodiment shown in the above embodiment or There is no limitation to the process. For example, if the sticking support step is a step of supporting the adherend by the sticking support means, it will not be limited at all within the technical scope in light of the technical common sense at the time of the application. The same applies to the other means and steps).

The adhesive sheet processing apparatus of the present invention adopts double-sided adhesive type adhesive sheet AS1 having adhesive surfaces on both sides, and as shown in each drawing of FIG. 2, the other side AST of adhesive sheet AS1 in pasted adherend WK1. The support member SM is attached to the support member SM to form the pasted adherend WK1 with the support member SM, and instead of the peeling means 70, the pasted adherend WK1 with the support member SM is attached to the support member SM. At the same time, the peeling means 7A for peeling the adhesive sheet AS1 to form the already peeled adherend WK2 is adopted, and instead of the energy giving means 90, the energy giving means 9A for giving infrared rays as the predetermined energy to the adhesive sheet AS The adopted adhesive sheet processing apparatus 10A may be adopted.
In addition, as the adhesive sheet AS1, an adhesive sheet to which the adhesive force to the adherend WK is lowered is adopted by applying infrared rays as predetermined energy, and specifically, the first adhesive layer AL1 and the first adhesive layer AL1, 1 base sheet BS including expandable fine particles which are laminated on adhesive layer AL1 and expanded by application of infrared rays, and laminated on base sheet BS and subjected to easy adhesion processing, for example, adhesion A release sheet RL is temporarily attached to the first adhesive layer AL1 to constitute a raw fabric RS, including a barrier layer BL such as PET and a second adhesive layer AL2 laminated on the barrier layer BL. .

  The support member attaching unit 110 is a linear motor 112 as a drive device including a support member accommodation unit 111 that stacks and accommodates a plurality of support members SM in the vertical direction, and a slider 112A that moves in the longitudinal direction, and a slider 112A. A linear motion motor 113 as a driving device supported by the motor, a holding plate 114 as a holding means supported by the output shaft 113A and capable of suction holding, and a decompression pump or vacuum ejector for applying a suction force to the holding plate 114 And the like (not shown).

  The structure of the peeling means 7A is the same as that of the support member sticking means 110 except that the linear motor 78 supporting the peeling support table 61 with the slider 78A is provided. The description can be made by setting 11 as the first two digits of the number to 7A, so a detailed description will be omitted.

  The energy applying means 9A includes a light source case 9A1 and a light emitting source 9A2 supported by the light source case 9A1 and emitting infrared light.

Such an operation of the adhesive sheet processing apparatus 10A performs the following second pasting cycle operation.
That is, by the adhesive sheet processing apparatus 10A in which each member is disposed at the initial position shown by the solid line in FIG. 2 (A), the pasting cycle operation similar to that of the adhesive sheet processing apparatus 10 is performed, and two points in FIG. As indicated by the chain line, the adhesive sheet AS1 is attached to the adherend WK by the attaching means 30 to form the already attached adherend WK1. Next, when the pasted adherend WK1 supported by the pasting support table 21 reaches the action position of the holding plate 114, the pasting means 30 stops driving the linear motor 38, and then the support member pasting means 110 takes the linear motor 112 The linear motion motor 113 and the pressure reducing means (not shown) are driven, and the holding member 114 is held by suction by the holding plate 114 and taken out from the holding member holding means 111 as shown in FIG. 2 (B). Thereafter, the support member attaching unit 110 drives the linear motor 112 and the linear motion motor 113, and as shown by a two-dot chain line in FIG. 2B, a second adhesive layer constituting the other surface AST of the adhesive sheet AS1. The support member SM suctioned and held by the holding plate 114 is pressed and attached to the AL 2 to form the pasted adherend WK1 with the support member SM, and then the driving of the decompression unit (not shown) is stopped and the holding plate 114 is at the initial position Return to

  Next, after the sticking means 30 drives the linear motor 38 to return the sticking support table 21 to the initial position, the sticking cycle operation similar to that of the adhesive sheet processing apparatus 10 is performed, and thereafter, the second sticking described above The cycle operation is repeated. Then, when all adherends WK in the storage case SC are replaced with the adhered adherend WK1 with the support member SM, the user or the transport means (not shown) applies predetermined processing to the adhered adherend WK1. The storage case SC is transported to processing means (not shown), and the pasted adherend WK1 with the support member SM, which has been subjected to predetermined processing by the processing means, is stored again in the storage case SC.

Next, when the user or the transport means (not shown) places the storage case SC containing a plurality of the pasted adherends WK1 with the support member SM on the release mounting table 81, the adhesive sheet processing apparatus 10A The second peeling cycle operation is performed.
That is, the peeling cycle operation similar to that of the adhesive sheet processing apparatus 10 is performed, and when the pasted adherend WK1 with the support member SM supported by the peeling support table 61 reaches directly below the energy applying means 9A, the peeling means 7A After the drive of the linear motor 78 is stopped, as shown by the two-dot chain line in FIG. 2C, the energy applying means 9A drives the light emission source 9A2 to irradiate the adhesive sheet AS1 with infrared rays.

  When the adhesive sheet AS1 is irradiated with infrared rays, the expansive fine particles contained in the base material BS expand, and innumerable convex portions CV begin to be formed on the base material BS, and the diagram in FIG. As shown, the convex portion CV also deforms the first adhesive layer AL1. Thereby, air intrudes from the interface between the outer edge of the adhesive sheet AS and the adherend WK, and a space CR is formed between the first adhesive layer AL1 and the adherend WK, and the first for the adherend WK The adhesion area of the adhesive layer AL1 starts to decrease. At this time, the space CR is not formed at the interface between the base material BS and the barrier layer BL due to the good adhesion of the barrier layer BL. Thereafter, when the space CR reaches the central portion of the adhesive sheet AS1, the adhesion area of the first adhesive layer AL1 to the adherend WK is significantly reduced, and the adhesive sheet AS1 can be easily removed from the adherend WK It will be.

  When the space CR reaches the central portion of the adhesive sheet AS, the energy giving means 9A stops the drive of the light emitting source 9A2, and then the peeling means 7A drives the linear motor 78 to move the peeling support table 61 to the right Let Next, when the pasting adherend WK1 with the support member SM reaches the action position of the holding plate 7A4, the peeling means 7A stops the drive of the linear motor 78, and then the linear motor 7A2, the linear motor 7A3 and the pressure reduction not shown The driving means drives the holding member 7A4 to hold the supporting member SM of the pasted adherend WK1 with the supporting member SM by suction as indicated by a two-dot chain line in FIG. 2C. After that, the peeling means 7A drives the linear motor 7A2 and the linear motion motor 7A3, raises the holding plate 7A4, and peels the adhesive sheet AS1 together with the supporting member SM from the pasted adherend WK1 with the supporting member SM. As shown in (C), the already peeled adherend WK2 is formed.

  Then, the peeling means 7A drives the linear motor 7A2 and the linear motion motor 7A3 to store the support member SM with the adhesive sheet AS1 in the support member housing means 7A1 and stop the driving of the decompression means (not shown). To the initial position. Next, after the peeling means 7A drives the linear motor 78 to return the peeling support table 61 to the initial position, the peeling cycle operation similar to that of the adhesive sheet processing apparatus 10 is performed, and thereafter, the above-mentioned second peeling cycle The operation is repeated. Thereafter, when all the pasted adherends WK1 with the support members SM in the storage case SC are replaced with the already peeled adherend WK2, the user or the transport means (not shown) transports the storage case SC to another process.

  Such an adhesive sheet processing apparatus 10A can achieve the same effects as the adhesive sheet processing apparatus 10.

  The sticking support means 20 may not have holding means such as pressure reducing means for forcibly holding the adherend WK and the pasted adherend WK1.

The sticking means 30 may move the pressing roller 34 or the like without moving the sticking support means 20 or while moving the adhesive sheet AS, AS1 on the adherend WK, or may be wound. Instead of supporting the original RS folded in a fanfold, the support RS can be supported from below and supported so as to be able to be drawn out, and the release sheet RL may be recovered by making a fanfold, and it is rolled up or folded. It may be recovered without forming a cut in the entire closed loop shape or short width direction in the band-like adhesive sheet temporarily attached to the release sheet RL, thereby bonding the area partitioned by the cut. The sheet AS may be configured to support the raw fabric RS as AS1, or when the raw fabric RS in which the strip-like adhesive sheet is temporarily attached to the release sheet RL is employed, the strip-like adhesive sheet is closed. Others may form a notch for the entire part length width direction, equipped with cutting means for the regions partitioned by the cut and the adhesive sheet AS, AS1.
The sticking means 30 includes a drive device as a pressing member contacting / separating means for moving the pressing roller 34 away from and close to the adherend WK so as to prevent the adherend WK from being stressed or damaged. As such a pressing member contacting / separating means, the pressing roller 34 may be moved manually in addition to the driving device.

  The attachment / detachment unit 40 may be configured to place only one adherend WK or one pasted adherend WK1, or one adherend WK or one pasted adherend WK1 without the storage case SC. A plurality of storage cases SC may be mounted, or a plurality of storage cases SC may be mounted, or a configuration in which the storage case SC, the adherend WK, or the pasted adherend WK1 may be positioned and supported.

  As the sticking conveying means 50, an I-type conveying arm 52 may be adopted, or a conveying arm 52 which adsorbs the adherend WK on the entire surface may be adopted.

  The peeling support means 60 may not have a holding means such as a pressure reducing means for forcibly holding the pasted adherend WK1 and the already peeled adherend WK2.

The peeling means 70 may move the peeling roller 74 etc. without moving the peeling support means 60 or while moving it, and may peel off the adhesive sheet AS from the pasted adherend WK1 as a holding means A sheet-by-sheet peeling adhesive sheet ASR may be adopted, and the sheet-by-sheet peeling adhesive sheet ASR may be attached to the adhesive sheet AS to peel the adhesive sheet AS.
The peeling means 7A may peel off the adhesive sheet AS1 together with the support member SM while moving the peeling support means 60, the holding plate 7A4 and the like, or the support member housing means 7A1 containing only one support member SM. The support member storage means 7A1 may be adopted, in which only one support member SM is vertically arranged and a plurality of support members SM are accommodated in the left and right direction. It may be composed of different ones.

  The peeling loading / unloading unit 80 may have a configuration in which only one pasted adherend WK1 or one pasted adherend WK2 may be placed, or the pasted adherend WK1 or the pasted adherend WK2 without the storage case SC. One or more of them may be placed, or a plurality of storage cases SC may be placed, or the storage case SC, the pasted adherend WK1 or the pasted adherend WK2 may be positioned and supported. May be.

The energy applying means 90 may move the light emitting source 92 to apply ultraviolet light to the adhesive sheet AS without moving or moving the already adhered adherend WK1, or the already adhered adherend WK1 and light emission The ultraviolet ray may be applied to the adhesive sheet AS without moving the source 92, or the ultraviolet ray may be applied to the adhesive sheet AS collectively or partially.
The energy applying means 9A may move the light emission source 9A2 to transfer the infrared ray to the adhesive sheet AS1 without moving or moving the pasting adherend WK1 with the support member SM, or the light emission source 9A2 The pasting adherend WK1 with the support member SM may be moved without moving, and infrared rays may be applied to the adhesive sheet AS1, or infrared rays may be collectively or partially applied to the adhesive sheet AS1.
The light emitting sources 92 and 9A2 of the energy applying means 90 and 9A may be any of LED (Light Emitting Diode) lamps, high pressure mercury lamps, low pressure mercury lamps, metal halide lamps, xenon lamps, halogen lamps, etc. And the combination of them may be adopted.
The energy applying means 90, 9A should arbitrarily determine the time for irradiating the adhesive sheet AS, AS1 with ultraviolet light or infrared light in consideration of the characteristics, characteristics, properties, material, composition, configuration, etc. of the adhesive sheet AS, AS1. In addition to ultraviolet rays and infrared rays, electromagnetic waves such as visible light, sound waves, X-rays or gamma rays, or heat such as hot water or hot air may be used as predetermined energy, and the characteristics of adhesive sheets AS, AS1 It can be arbitrarily determined in consideration of the characteristics, properties, materials, compositions, configurations and the like, and may not be provided in the adhesive sheet processing apparatus 10, 10A of the present application.

  The peeling conveyance means 100 may not be combined with the sticking conveyance means 50, and may have a configuration independent of the sticking conveyance means 50, or may be configured with the same configuration or shape with respect to the sticking conveyance means 50. Or may be configured differently.

  The supporting member attaching means 110 may adopt the supporting member accommodating means 111 which accommodates only one supporting member SM, or the supporting member accommodating means which accommodates only one supporting member SM vertically and plural in the lateral direction. 111 may be employed, or may not be included in the adhesive sheet processing apparatus 10, 10A of the present invention.

In the adhesive sheet processing apparatus 10, 10A, even when the peeling cycle operation or the second peeling cycle operation is performed, if the storage case SC is placed on the sticking table 41, the sticking cycle operation or the second sticking cycle is performed. The operation may be carried out in parallel, or if the storage case SC is placed on the peeling mounting base 81 even during the sticking cycle operation or the second sticking cycle operation, the peeling cycle operation or the second (2) The peeling cycle operation may be carried out in parallel, or may be placed upside down or placed sideways so that the adhesive sheet AS, AS1 is attached to the adherend WK, or from the adherend WK The adhesive sheets AS, AS1 may be peeled off.
The adhesive sheet processing apparatus 10, 10A peels off the adhesive sheet AS from the adhered adherend WK1 which has not been subjected to processing, that is, the adhered adherend WK1 which has not been subjected to the processing step to form an adhered adherend WK2. You may

In the adhesive sheet AS, at least one of the adhesive layer AL and the base sheet BS may include expandable microparticles that expand when a predetermined energy is applied.
In the adhesive sheet AS1, at least one of the first adhesive layer AL1 and the base sheet BS may include intumescent particles that expand when given energy is applied, or the barrier layer BL may not be provided. .
The first adhesive layer AL1 of the adhesive sheet AS1 may be cured by application of a predetermined energy to reduce the adhesive force.
Examples of the adhesive sheets AS and AS1 in which the adhesive force is reduced by the application of a predetermined energy can be exemplified by, for example, JP-A-10-233373 and JP-A-2000-104026, and the predetermined energy is applied. For example, Japanese Patent Application No. 2017-73236, etc. can be exemplified as the adhesive sheet AS, AS1 having the base sheet BS containing the expandable fine particles which expand due to the expansion, and the expandable fine particles expand by the application of a predetermined energy. Examples of the adhesive sheet AS having an adhesive layer AL (AL1, AL2) containing an adhesive include, for example, JP-A-11-302610 and JP-A-2004-266179, but as the adhesive sheet AS, AS1, predetermined energy Is applied to cause chemical change, composition change, density change, contact area change, viscosity change, hardness change, etc. Any adhesive may be used as long as the adhesive strength is reduced, provided that the energy applying means 90, 9A is selected according to the characteristics, characteristics, properties, material, composition, configuration, etc. of the adhesive sheet AS, AS1. Good.
The adhesive sheets AS and AS1 do not have to be of a type in which the adhesive force is reduced by the application of predetermined energy, and the cover sheet is temporarily attached to the base sheet BS side and the second adhesive layer AL2 side. In this case, the attaching unit 30 may include a peeling unit from the base sheet BS and the second adhesive layer AL2 to the cover sheet CS.

The support member SM may be an elastic member such as rubber or resin, an inelastic member such as metal or ceramic, or wood, paper, cloth or the like, and its shape is not plate-like, for example, spherical or the like There is no limitation on the prismatic shape and the like.
The storage case SC may be configured to store only one adherend WK, already adhered adherend WK1, and already peeled adherend WK2, or may be exclusively used to store them, or at least 2 of them. The seeds may be stored, or the opening may be provided with a lid, and when such a lid is provided, the sticking in / out unit 40 and the peeling out / out unit 80 are configured to be opened. It is good.
A storage case SC for storing the adherend WK, a storage case SC for storing the already adhered adherend WK1, and a storage case SC for storing the already peeled adherend WK2 are at least two of them may be the same. It may be of the same type, or all of them may be different types.
The processing means for applying predetermined processing to the already adhered adherend WK1 may apply predetermined processing to the adhesive sheets AS, AS1, or may apply predetermined processing to the adherend WK. The adhesive sheet processing apparatus 10 or 10A may or may not be provided, and in the case where the adhesive sheet processing apparatus 10 or 10A is not provided, predetermined processing may be performed using an apparatus other than the adhesive sheet processing apparatus 10 or 10A of the present invention. As predetermined processing given to pasting to-be-adhered body WK1, for example, processing which cuts and grinds the pasting pasted adherend WK1 may be sufficient, heat is applied to the pasting pasting adherend WK1, or other members It may be processing to laminate or any processing.

  The material, type, shape and the like of the adhesive sheet AS, AS1, adhesive sheet for peeling ASR and adherend WK in the present invention are not particularly limited. For example, the adhesive sheet AS, AS1 and the peeling adhesive sheet ASR may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangle, or any other shape, or an adhesive form such as pressure sensitive adhesive or heat sensitive adhesive. In the case where the heat-sensitive adhesive adhesive sheet AS and the peeling adhesive sheet ASR are adopted, it is appropriate to provide heating means such as an appropriate coil heater for heating them or the heating side of a heat pipe. It may be adhered by a method. Further, such an adhesive sheet AS and an adhesive sheet for peeling ASR are, for example, those of a single layer consisting only of an adhesive layer, those having an intermediate layer between the base sheet BS or the barrier layer BL and the adhesive layer, etc. And three or more layers may be used. The adherend WK includes, for example, food, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit substrates, information recording substrates such as optical disks, glass plates, steel plates, ceramics, wood plates, resins, etc. It may be a single substance or a composite formed of two or more of them, and members or articles of any form may be targeted. The adhesive sheets AS and AS1 are changed to functional and practical reading, for example, labels for information description, labels for decoration, protective sheets, dicing tapes, die attach films, die bonding tapes, resin layer forming resin sheets, etc. Or any sheet, film, tape or the like.

  In the embodiment, in the case where a rotating member such as a roller is employed, a drive device may be provided to rotate the rotating member, or the surface of the rotating member or the rotating member itself may be deformed by rubber or resin. It may be constituted by a member, or the surface of the rotating member or the rotating member itself may be constituted by a member which does not deform, or one which presses an object to be pressed such as pressing means or pressing member such as pressing roller or pressing head. When employed, instead of or in combination with those exemplified above, a member such as a roller, a round bar, a blade, rubber, resin, sponge or the like is adopted, or pressure is applied by spraying a gas such as the atmosphere or gas. May be adopted, or those to be pressed may be constituted by a deformable member such as rubber or resin, or may be constituted by a member which is not deformed, a peeling plate, a peeling roller, etc. Means of peeling off When a member that peels off a material to be peeled off is employed, a member such as a plate-like member, a round bar, a roller or the like may be employed instead of or in combination with the members exemplified above. It may be composed of a deformable member such as rubber or resin, or may be composed of a non-deformable member, or support or hold a supported member such as a supporting (holding) means or a supporting (holding) member. If something is adopted, holding means such as mechanical chuck or chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, You may employ | adopt the structure which supports (supports) a to-be-supported member by drive apparatus etc. FIG.

10, 10A: adhesive sheet processing apparatus 20: support means for attachment 30: attachment means 40: attachment means for attachment 50: conveyance means for attachment 60: support means for peeling 70, 7A: peeling means 80: extraction portion for peeling 90 9A: Energy application means 100: Peeling conveyance means 110: Support member attachment means AS, AS1: Adhesive sheet ASU: One side AST: Other side SM: Support member WK: Adherend WK1: Already adhered adherend WK2 ... Peeled adherend

Claims (8)

In an adhesive sheet processing method of sticking an adhesive sheet on an adherend and peeling off the adhesive sheet,
A sticking support step of supporting the adherend by a sticking support means;
A sticking step of forming a pasted adherend by attaching one surface of the adhesive sheet to the adherend supported in the sticking support step and bringing the adhesive sheet into contact with the adherend;
A sticking and taking-in and taking-out step of carrying in the adherend to the sticking and taking-in and taking-out part, or taking out the pasted adherend from the sticking and taking-in and taking-out part;
A sticking conveying step of conveying the adherend or the pasted adherend between the sticking support means and the sticking in / out unit;
A peeling supporting step of supporting the pasting adherend by the peeling supporting means;
A peeling step of peeling the adhesive sheet from the pasted adherend to be supported in the peeling support step to form a peeled adherend;
A peeling loading and unloading step of carrying in the already adhered adherend to the peeling loading and unloading part, or carrying out the already peeled adherend from the peeling loading and unloading part;
And a peeling and conveying step of conveying the already adhered adherend or the already peeled adherend between the peeling support means and the peeling in / out unit.   The adhesive sheet is a double-sided adhesive type adhesive sheet having adhesive surfaces on both sides, and a support member is attached to the other surface of the adhesive sheet in the pasted adherend after the attachment step, and a support member is attached. A supporting member pasting step of forming a pasted adherend is carried out, and in the peeling step, the adhesive sheet is peeled off together with the support member from the pasted adherend with the supporting member to form a pasted adherend The adhesive sheet processing method according to claim 1, characterized in that:   The adhesive sheet processing method according to claim 1 or 2, wherein a processing step of performing predetermined processing on the already adhered adherend is performed.   The adhesive sheet is configured to reduce the adhesive force to the adherend by applying a predetermined energy, and an energy applying process for applying the predetermined energy to the adhesive sheet at a stage prior to the peeling process The adhesive sheet processing method according to any one of claims 1 to 3, which is performed. In an adhesive sheet processing apparatus for sticking an adhesive sheet to an adherend and peeling off the adhesive sheet,
A sticking support unit for supporting the adherend;
Affixing means for forming a pasted adherend by attaching one side of the adhesive sheet to the adherend supported by the sticking support means while bringing one surface of the adhesive sheet into contact with the adherend;
A loading / unloading unit that carries the adherend into the adhesive sheet processing apparatus or unloads the pasted adherend from the adhesive sheet processing apparatus;
A sticking conveying means for conveying the adherend or the pasted adherend between the sticking support means and the sticking in / out unit;
A peeling supporting means for supporting the pasted adherend;
A peeling means for peeling the adhesive sheet from the pasted adherend to be supported by the peeling support means to form a already peeled adherend;
A peeling loading / unloading unit that carries the already adhered adherend into the adhesive sheet processing apparatus or carries out the already peeled adherend from the adhesive sheet processing apparatus;
An adhesive sheet processing apparatus comprising: a peeling conveying means for conveying the already adhered adherend or the already peeled adherend between the peeling support means and the peeling in / out unit.   The adhesive sheet is a double-sided adhesive type adhesive sheet having adhesive surfaces on both sides, and a support member is adhered to the other surface of the adhesive sheet in the already adhered adherend to obtain an adhered adherend with a support member. The adhesive sheet processing apparatus according to claim 5, further comprising: a support member sticking unit to be formed, wherein the peeling unit peels the adhesive sheet together with the support member from the adhered adherend with the support member.   The adhesive sheet processing apparatus according to claim 5 or 6, further comprising processing means for performing predetermined processing on the already adhered adherend.   The adhesive sheet is configured to have a reduced adhesion to the adherend by applying a predetermined energy, and the adhesive sheet includes energy applying means for applying the predetermined energy to the adhesive sheet. The adhesive sheet processing apparatus according to any one of claims 5 to 7, wherein