JP2018181896A - Device and method for sticking sheet - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device and method for sticking a sheet capable of preventing a device from being increased in size even when being configured to inform inspection results of inspection means to others.SOLUTION: A device for sticking a sheet includes: sticking means 20 of sticking an adhesive sheet AS to an adhesive surface WF1 of an adherend WF to form an integrated product WK; inspection means 30 of inspecting the state of at least one of an adherend WF and an adhesive sheet AS in the integrated product WK to determine whether the integrated product WK is a good product or an inferior product; housing means 40 of housing the integrated product WK; and transport means 50 of transporting the integrated product WK inspected by the inspection means 30 to the housing means 40. On the basis of inspection results of the inspection means 30, the transport means 50 houses the integrated product WK determined as a good product into the housing means 40 in a first posture, and houses the integrated product WK determined as an inferior product into the housing means 40 in a second posture different from the first posture.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a sheet sticking apparatus and method.

  2. Description of the Related Art Conventionally, a sheet sticking apparatus has been known in which an integrated sheet is formed by attaching an adhesive sheet to an adherend surface of an adherend to form an integrated article (see, for example, Patent Document 1).

JP, 2011-166172, A

  However, in the conventional sheet sticking apparatus as described in Patent Document 1, the second information storage processing means is adopted as a configuration to notify another of the inspection result of the inspection means which detects the surface state of the integral object. Therefore, a read / write device or the like for writing the inspection result of the inspection means is required in the second information storage processing means, and there is a disadvantage that the apparatus becomes larger.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a sheet sticking apparatus and method capable of preventing an increase in size of the apparatus even in a configuration in which the inspection result of the inspection means is notified to another.

  The present invention adopts the configuration described in the claims.

According to the present invention, the integrated object determined to be non-defective is stored in the storage means in the first posture, and the integrated object determined to be defective is stored in the storage means in the second posture. Even if it is the structure which notifies other things, it can prevent that an apparatus enlarges.
Further, by setting the second posture to a posture obtained by reversing the front and back with respect to the first posture, the one-piece determined to be a good product and the one-piece determined to be a defect in the one-piece product stored in the storage means You can easily tell others.
Further, by setting the second posture to be a posture in which the position of the reference portion of the one piece is displaced by a predetermined angle with respect to the first posture, the one piece judged to be a good product in one piece stored in the storage means It is possible to easily notify another one of the ones judged to be non-defective.

BRIEF DESCRIPTION OF THE DRAWINGS The side view of the sheet sticking apparatus which concerns on one Embodiment of this invention. (A), (B) is explanatory drawing of a modification.

Hereinafter, an embodiment of the present invention will be described based on the drawings.
In the present embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis orthogonal to the predetermined plane. Do. Furthermore, in the present embodiment, when the direction is indicated on the basis of a front direction in FIG. 1 parallel to the Y axis, “upper” is the arrow direction of the Z axis, “lower” is the opposite direction, “Left” is the arrow direction of the X axis, “right” is the opposite direction, and “front” is the front direction in FIG. 1 parallel to the Y axis, “rear” is the opposite direction.

  In FIG. 1, the sheet sticking apparatus 10 sticks an adhesive sheet AS to an adherend surface WF1 of a semiconductor wafer (hereinafter may be simply referred to as a “wafer”) WF as an adherend to form an integral product WK. Means 20, an imaging means such as a camera or a projector which inspects the state of at least one of the wafer WF and the adhesive sheet AS in the integrated object WK to determine whether the integrated object WK is good or defective. It has inspection means 30 such as various sensors such as an optical sensor and an ultrasonic sensor, storage means 40 for storing the integrated object WK, and transport means 50 for conveying the integrated object WK inspected by the inspection means 30 to the storage means 40. ing.

The attaching means 20 comprises: supplying means 21 for supplying a strip-like adhesive sheet AS having an adhesive AD layer on one surface of a base sheet BS; and pressing means 22 for pressing and adhering the adhesive sheet AS to the wafer WF. A support means 23 for supporting the wafer WF and a cutting means 24 for cutting the adhesive sheet AS are provided.
The supply means 21 includes an adhesive sheet AS between a support roller 21A for supporting the adhesive sheet AS, a guide roller 21B for guiding the adhesive sheet AS, and a drive roller 21D driven by a rotation motor 21C as a drive device. A pinch roller 21E for sandwiching, a rotation motor 21H as a drive device supported by the first slider 21G of the linear motor 21F as a drive device, a drive roller 21J driven by the rotation motor 21H, and a drive roller 21J A pinch roller 21K sandwiching the adhesive sheet AS between them, a guide roller 21L guiding an unnecessary sheet US generated by cutting the adhesive sheet AS, and a rotation motor 21M as a driving device recover the collection of the unnecessary sheet US And a roller 21N.
The pressing means 22 includes a linear motor 22A as a driving device supported by the second slider 21P of the linear motor 21F, and a pressing roller 22C supported by the slider 22B of the linear motor 22A.
The support means 23 includes an outer table 23A having a recess 23B and an inner table 23C provided in the recess 23B and having a support surface 23D which can be held by suction by a pressure reducing means (not shown) such as a pressure reducing pump or vacuum ejector. There is.
The cutting means 24 comprises a cutter tool 24B having a cutter blade 24A.

  The storage means 40 includes a storage member 41, and a plurality of support shelves 41A for supporting the outer edge portion of the one-piece object WK from below. Each support shelf 41A is provided with the mounting surface 41B parallel to the XY plane as a predetermined plane.

  The transport means 50 is detachably provided at the distal end portion of the articulated robot 51 as a drive device and the articulated robot 51, and communicates with a decompression unit (not shown) such as a decompression pump or a vacuum ejector to adsorb and hold the integrated object WK. And the integrated member WK determined to be non-defective based on the inspection result of the inspection means 30 in the first position in the storage member 41, and the integrated object WK determined to be non-defective It is stored in the storage member 41 in the second position. In the case of the present embodiment, the first posture is a posture in which the wafer WF is on the upper side and the adhesive sheet AS is on the lower side, and the second posture is a posture in which the wafer WF is upside down with respect to the first posture. At the lower side, the adhesive sheet AS is in the upper position. The articulated robot 51 supports the cutting means 24 at its tip end instead of the transfer arm 52, and within the working range, it is possible to displace those mounted at the tip end at any position and at any angle. It is a 6-axis robot.

The operation of the above sheet sticking apparatus 10 will be described.
First, a user of the sheet sticking apparatus 10 (hereinafter simply referred to as a "user") applies the adhesive sheet AS to the sheet sticking apparatus 10 in which each member is disposed at the initial position shown by the solid line in FIG. As shown in FIG. 2, the automatic operation start signal is input through an operation unit (not shown) such as an operation panel or a personal computer. Then, the transfer means 50 drives the articulated robot 51 and the decompression means (not shown), the wafer WF arranged at the wafer arrangement position (not shown) is held by suction by the transfer arm 52, and the wafer WF is supported by the support surface of the inner table 23C. Place on 23D. Next, when the sticking unit 20 drives the decompression unit (not shown) to start suction holding of the wafer WF, the transfer unit 50 stops driving the decompression unit (not shown), and the suction holding of the wafer WF by the transfer arm 52 is released. Thereafter, the articulated robot 51 is driven to return the transfer arm 52 to the initial position.

  Next, the sticking means 20 drives the linear motors 22A and 21F to lower the pressing roller 22C, and then the second slider 21P is moved to the position shown by the two-dot chain line in FIG. 1 to adhere the wafer WF. The adhesive sheet AS is pressed against the WF 1 and attached. During sticking of the adhesive sheet AS by the sticking means 20, the conveying means 50 drives the articulated robot 51, detaches the conveying arm 52 supported at the tip end, and supports the cutting means 24 at the tip end. Thereafter, the transport means 50 drives the articulated robot 51, moves the cutter blade 24A along the outer edge of the wafer WF, and cuts the adhesive sheet AS along the outer edge of the wafer WF to form the integral object WK.

  Next, the inspection unit 30 drives the imaging unit and the like to inspect the integrated object WK. That is, the inspection means 30 may, for example, when air bubbles AB (see FIG. 2B) or foreign matter are mixed between the wafer WF and the adhesive sheet AS in the integral object WK, or when the adhesive sheet AS is wrinkled or bent. Is judged to be defective if it is formed and attached to the wafer WF, if the adhesive sheet AS is torn or damaged, or if the wafer WF is cracked or damaged, etc. Judged as good product and stored. During the inspection of the one-piece object WK by the inspection means 30, the transport means 50 drives the articulated robot 51, disengages the cutting means 24 supported at the tip end, and supports the transport arm 52 at the tip end.

  When the inspection of the one-piece WK by the inspection means 30 is completed, the conveying means 50 drives the articulated robot 51 and the decompression means (not shown), and the one-piece WK is attracted and held by the conveyance arm 52. Next, the sticking unit 20 stops the driving of the decompression unit (not shown) and releases the suction holding of the wafer WF on the support surface 23 D, and then the transport unit 50 drives the articulated robot 51 to store the integrated object WK Store in At this time, the transport means 50 places the one-piece WK judged to be non-defective by the inspection means 30 on the mounting surface 41 B in the first posture and stores it, while the inspection means 30 judges it to be defective. The one-piece object WK is placed and stored on the placement surface 41B in the second posture.

  Thereafter, the sticking means 20 drives the linear motors 21F and 22A to return the pressure roller 22C to the initial position, and then drives the rotation motor 21H and the linear motor 21F to rotate the drive roller 21J while the first slider 21G is rotated. Is moved to the position shown by the two-dot chain line in FIG. 1, and the unnecessary sheet US is peeled off from the outer table 23A. Then, the attaching unit 20 drives the linear motor 21F and the rotation motors 21C and 21M to return the first slider 21G to the initial position in a state in which the rotation of the drive roller 21J is stopped. As a result, while the unused portion of the adhesive sheet AS is supplied above the support surface 23D of the inner table 23C, the unnecessary sheet US is wound up by the collection roller 21N, and thereafter the same operation as described above is repeated. When a predetermined number of integrated objects WK are stored in the storage member 41, a storage member transport means (not shown) such as an articulated robot or a belt conveyor transports the storage member 41 to the next process, and a new storage member 41 is stored. Place in the initial position.

  According to the embodiment as described above, the integrated object WK determined to be non-defective is stored in the storage member 41 in the first posture, and the integrated object WK determined to be defective is stored in the storage member 41 in the second posture. Therefore, it is possible to prevent the integrated product WK judged to be non-defective from being efficiently transported to the next process to reduce the production efficiency of the product.

  The means in the present invention are not limited in any way as long as the operations, functions or steps described for the means can be performed, and it is entirely limited to the constitutions and steps of only one embodiment shown in the above embodiment. It will not be done. For example, as long as the sticking means can stick the adhesive sheet on the adherend surface of the adherend to form an integral product, it will be in light of the technical common sense at the beginning of the application and anything within the technical range. There is no limitation (the same applies to the other means and steps).

  The sticking means 20 may have a configuration in which the adhesive sheet AS is peeled off by a peeling means from a raw fabric in which a plurality of adhesive sheets AS having a predetermined shape are temporarily attached to a strip-shaped peeling sheet, and pressed by a pressing means The adhesive sheet AS may not be temporarily attached, but may be cut in a closed loop shape or in a short width direction in a band-like adhesive sheet substrate temporarily attached to the release sheet. Thus, the adhesive sheet AS may be peeled off by the peeling means and pressed by the pushing means from the raw fabric in which the inner predetermined area partitioned by the incision is made the adhesive sheet AS, or the support may be used. The adhesive sheet AS may be supported or guided by a plate-like member, a shaft member or the like instead of each roller such as the roller 21A and the guide roller 21B, or without winding the adhesive sheet AS. It may be folded and supported, or it may be folded, for example, by fan-fold folding, shredded with a shredder or the like without winding the unnecessary sheet US, or it may be cut into a strip of adhesive sheet May be provided with means for forming incisions.

  The support means 23 may be configured as a single table having a support surface which does not have a recess 23B and can be held by suction and decompression means (not shown), or a drive for moving the outer table 23A and the inner table 23C relative to each other. A device may be provided, and when the wafer WF is supported by another device, the device may not be provided in the sheet sticking device 10 of the present invention.

  The cutting means 24 may adopt a rotary cutter blade, laser cutter, ion beam, thermal power, heat, water pressure, heating wire, spraying of gas or liquid, etc., instead of or in combination with the cutter blade 24A. , Or may be capable of forming a cut penetrating the adhesive sheet AS, or may be capable of forming a cut not penetrating the adhesive sheet AS, for example, the adhesive sheet AS with a perforation rotary cutter blade or the like. The adhesive sheet AS may be artificially cut such that a cut that does not penetrate or penetrate continuously continues intermittently, or the composition, characteristics, properties, materials, etc. of the adhesive sheet AS with a laser or an ion beam. A modified layer having a changed shape, structure, etc. may be formed, and the cutting means 24 may be an independent structure separate from the conveying means 50, or an adhesive system before being attached to the wafer WF. It may be intended to cut the door AS, if not cut or when the adhesive sheet AS to cut the adhesive sheet AS by another apparatus, may not be provided in the sheet sticking apparatus 10 of the present invention.

  The inspection means 30 may adopt a non-contact type sensor such as an echo sensor, a laser sensor, a pressure sensor, a metal detector or the like instead of or in combination with the above, or a contact member such as a roller or shaft The contact type sensor such as limit switch to check the pasting state by contacting with may be adopted, the state of only the wafer WF in the one body WK may be inspected, or the state of only the adhesive sheet AS in the one body WK The state of the wafer WF and the adhesive sheet AS in the integrated object WK may be inspected to determine whether the integrated object WK is a good product or a defective product, or the wafer WF or the adhesive sheet The condition of the upper surface, lower surface, or side surface of the AS may be inspected to determine whether the integrated object WK is a good product or a defective product, or may be visually checked by an operator. When the inspection means is visual inspection of the worker, when the worker detects the integrated object WK which is a defective product, the worker outputs a predetermined signal through the signal output means such as a switch or a push button, and the conveyance means 50 A single object WK determined to be a defective product may be stored in the storage member 41 in the second position. In addition, the inspection means may be provided with an inspection auxiliary means for making it easy to inspect the pasting state, and such an inspection auxiliary means is a pressure adjustment means for enlarging air bubbles, heating of a coil heater or heat pipe A heating means on the side or the like, an illumination means for improving the imaging condition, or the like may be employed.

The storage means 40 may store the integrated object WK in a state of standing vertically or obliquely, may open upward, and may store the integrated object WK from above, or may directly output the integrated object WK Alternatively, it may be stacked and housed with an interlayer material interposed therebetween.
The mounting surface 41B of the support shelf 41A may be an inclined surface that is not parallel to the X-Y plane, and in this case, the storage means 40 mounts the integrated object WK on the inclined surface and stores it. It is also good.

The transport means 50 has the first posture in which the wafer WF is at the bottom and the adhesion sheet AS at the top, and the second posture in which the wafer WF is at the top and the adhesion sheet AS at the bottom. It may be stored in the storage member 41, or may be stored in the storage member 41 in a state in which the one-piece object WK is erected vertically or obliquely, or is opened upward and the one-piece object WK is stored from above When the integrated product WK is stored in the storage member 41 in a state where the integrated product WK is erected, the wafer WF is on the front side, and the adhesive sheet AS is on the rear side. The posture of the integrated object WK in which the wafer WF is on the back side and the adhesive sheet AS is on the front side may be the second attitude, or the attitude of the integrated object WK on which the wafer WF is behind and the adhesive sheet AS is on the front side The first position, the wafer F is the front side, the posture of the monolith WK adhesive sheet AS is located behind or the second position.
When the one-piece object WK includes the V-shaped notch VN as the predetermined reference portion, as shown in FIG. 2A, the transport means 50 has the notch VN as the predetermined direction, as shown in FIG. The second posture is set to a predetermined angle within the attachment surface WF1 with the direction of the notch VN as a predetermined plane with respect to the first posture, as shown in FIG. It is good also as a posture displaced. The predetermined direction of the notch VN in the first posture may be any direction such as the front side, the right side, the left side, and the middle side thereof, and the second posture is 10 degrees as a predetermined angle with respect to the first posture. It is possible to adopt an attitude that is displaced by an arbitrary angle such as 90 degrees, 130 degrees, and the second attitude does not have to be an attitude that is displaced by the same angle with respect to the first attitude. When oriented in the same direction, the first orientation may not be the same angular displacement with respect to the second orientation. Further, when the integrated object WK is stored in the storage member 41 in a state of standing up, as the predetermined direction of the notch VN in the first posture, any direction such as upper side, lower side, right side, left side, intermediate side thereof Alternatively, the second posture may be a posture displaced at an arbitrary angle on the attachment surface WF1 with respect to the first posture. The direction of the reference part in the first posture and the direction of the reference part in the second posture may be any directions facing different directions in a predetermined plane, and the direction is not limited at all. Further, in this case, the attachment surface WF1 may face the same direction in the first orientation and the second orientation, or the attachment surface WF1 may be turned upside down in the first orientation and the second orientation. . The predetermined surface may be the surface opposite to the adhesion surface WF1 of the wafer WF, or the other surface of the base sheet BS constituting the integral object WK, or it may be a surface parallel to the adhesion surface WF1. It is not limited at all.
The reference part of the integrated product WK may be an orientation flat formed on the wafer WF, a print written on the wafer WF, a serial number, a circuit pattern, a kerf or a street, etc. or the adhesive sheet. There is no limitation insofar as the position of the one-piece WK can be specified with a predetermined rule such as a notch, a line, a print, a pattern or an unevenness.

  The sheet sticking apparatus 10 may be placed upside down or placed sideways so that the adhesive sheet AS may be stuck to the lower surface or the side surface of the wafer WF, or bonded to the wafer WF and another wafer WF. The sheet AS may be attached to form an integral object WK, or the adhesive sheet AS may be attached to an adherend and another member such as a frame member or a plate-like member to form an integral object WK.

  The material, type, shape, etc. of the adhesive sheet AS and the adherend in the present invention are not particularly limited. For example, the adhesive sheet AS may have a circular shape, an elliptical shape, a polygonal shape such as a triangle or a quadrangle, or any other shape, or may have an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When a heat-sensitive adhesive adhesive sheet is employed, the adhesive sheet may be adhered by an appropriate method such as providing an appropriate coil heater for heating the adhesive sheet or heating means such as the heating side of a heat pipe. In addition, such an adhesive sheet may be, for example, a single-layer adhesive sheet only, an adhesive sheet comprising only a base sheet and an adhesive layer, and an intermediate layer between the base sheet and the adhesive layer. It may be one or two or more layers such as one having one or more layers including an intermediate layer between adhesive layers. The adherends include, for example, food, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit substrates, information recording substrates such as optical disks, glass plates, steel plates, steel plates, ceramics, wood plates, paper, rubber, or A single substance such as a resin may be used, or a composite formed of two or more of them may be used, and a member, an article, or the like of any form can be targeted. In addition, the adhesive sheet is changed to functional and practical reading, for example, any shape such as a label for information description, a label for decoration, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet, etc. Any sheet, film, tape or the like may be affixed to any adherend as described above.

Further, the drive device in the above-described embodiment includes a rotary motor, a linear motion motor, a linear motor, an electric device such as a single-axis robot and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder and a rotary cylinder. Besides being adoptable, it is also possible to adopt a combination of them directly or indirectly (some overlap with those exemplified in the embodiment).
In the above embodiment, when the rollers are employed, drive devices may be provided to drive the respective rollers to rotate, or the surfaces of the respective rollers may be made of a member capable of elastic deformation such as rubber or resin. When each roller is made of a member that does not elastically deform, or when a pressing means such as a pressing roller or a pressing head or a pressing member is adopted, the roller may be used instead of or in combination with the one exemplified above. A pressing member such as a round bar, a blade material, rubber, resin, sponge or the like may be employed, or a configuration in which pressing is performed by blowing air such as air or gas may be employed. The part may be made of a member that can be elastically deformed, such as rubber or resin, or it may be made of a member that does not elastically deform, and when a peeling means or a peeling member is employed, a plate-like member Consists of a round bar, a roller, etc. In the case where a member supporting or holding a supported member such as a supporting (holding) means or a supporting (holding) member is employed, a gripping means such as a mechanical chuck or a chuck cylinder, coulomb force, adhesive, A configuration may be adopted in which the support member is supported (held) by an adhesive, magnetic force, Bernoulli adsorption, a drive device, or the like.

10: Sheet sticking device 20: sticking means 30: camera (inspection means)
40: Storage means 50: Transport means AS: Adhesive sheet VN: Notch (reference part)
WF: Wafer (adherend)
WK ... one thing

Claims (4)

A sticking means for sticking an adhesive sheet on the adherend surface of the adherend to form an integral product;
An inspection unit that inspects a state of at least one of an adherend and an adhesive sheet in the one-piece, and determines whether the one-piece is a good product or a bad product;
Storage means for storing the one-piece object;
And conveying means for conveying the one-piece object inspected by the inspection means to the storage means;
The transport means stores the integrated object determined to be non-defective in the first posture based on the inspection result of the inspection means in the first posture, and the integrated object determined to be non-defective as the first posture A sheet sticking apparatus, which is stored in the storage means in a second posture different from the second posture.   The sheet sticking apparatus according to claim 1, wherein the second posture is a posture in which the front and back sides are reversed with respect to the first posture. The one piece has a predetermined reference portion,
The first attitude is an attitude in which the reference portion is directed in a predetermined direction, and the second attitude is such that the direction of the reference portion is displaced at a predetermined angle in the predetermined plane with respect to the first attitude. The sheet sticking apparatus according to claim 1 or 2, wherein the sheet sticking apparatus has a posture. Applying an adhesive sheet on the adherend surface of the adherend to form an integral product;
An inspection step of inspecting a state of at least one of an adherend and an adhesive sheet in the one-piece, and determining whether the one-piece is a good product or a bad product;
Conveying the unitary object inspected in the inspection step, and storing the unitary object in a storage unit;
The storage step stores the integrated object determined to be non-defective in the first posture based on the inspection result of the inspection step into the storage means in the first posture, and the integrated object determined to be defective is the first posture A sheet sticking method, wherein the sheet is stored in the storage means in a second posture different from the second posture.

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