JP2004527721A5 - - Google Patents
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- Publication number
- JP2004527721A5 JP2004527721A5 JP2002591740A JP2002591740A JP2004527721A5 JP 2004527721 A5 JP2004527721 A5 JP 2004527721A5 JP 2002591740 A JP2002591740 A JP 2002591740A JP 2002591740 A JP2002591740 A JP 2002591740A JP 2004527721 A5 JP2004527721 A5 JP 2004527721A5
- Authority
- JP
- Japan
- Prior art keywords
- heat exchanger
- compressor
- cooling device
- gas
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims 28
- 238000001816 cooling Methods 0.000 claims 27
- 238000000034 method Methods 0.000 claims 13
- 239000012530 fluid Substances 0.000 claims 5
- 239000007788 liquid Substances 0.000 claims 3
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 239000000203 mixture Substances 0.000 claims 2
- 239000003507 refrigerant Substances 0.000 claims 2
- 230000003213 activating effect Effects 0.000 claims 1
- 239000000112 cooling gas Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 231100000252 nontoxic Toxicity 0.000 claims 1
- 230000003000 nontoxic effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US27114001P | 2001-02-23 | 2001-02-23 | |
| PCT/US2002/005801 WO2002095308A2 (en) | 2001-02-23 | 2002-02-25 | Ultra-low temperature closed-loop recirculating gas chilling system |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004527721A JP2004527721A (ja) | 2004-09-09 |
| JP2004527721A5 true JP2004527721A5 (https=) | 2005-12-22 |
| JP4487233B2 JP4487233B2 (ja) | 2010-06-23 |
Family
ID=23034361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002591740A Expired - Lifetime JP4487233B2 (ja) | 2001-02-23 | 2002-02-25 | 閉ループの超低温再循環ガス冷却装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7111467B2 (https=) |
| EP (1) | EP1362211A4 (https=) |
| JP (1) | JP4487233B2 (https=) |
| KR (1) | KR100852645B1 (https=) |
| CN (2) | CN102200356B (https=) |
| WO (1) | WO2002095308A2 (https=) |
Families Citing this family (54)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6505475B1 (en) | 1999-08-20 | 2003-01-14 | Hudson Technologies Inc. | Method and apparatus for measuring and improving efficiency in refrigeration systems |
| CN100483040C (zh) | 2000-06-28 | 2009-04-29 | 布鲁克斯自动化公司 | 用于深度低温的制冷系统的混合制冷剂 |
| US7478540B2 (en) | 2001-10-26 | 2009-01-20 | Brooks Automation, Inc. | Methods of freezeout prevention and temperature control for very low temperature mixed refrigerant systems |
| DE10216786C5 (de) * | 2002-04-15 | 2009-10-15 | Ers Electronic Gmbh | Verfahren und Vorrichtung zur Konditionierung von Halbleiterwafern und/oder Hybriden |
| EP2818530B1 (en) | 2004-01-28 | 2020-01-01 | Edwards Vacuum, LLC | Refrigeration cycle utilizing a mixed inert component refrigerant |
| US7349896B2 (en) * | 2004-12-29 | 2008-03-25 | Aol Llc | Query routing |
| JP2007303794A (ja) * | 2006-05-15 | 2007-11-22 | Sanyo Electric Co Ltd | 冷凍装置 |
| US7603871B2 (en) * | 2006-06-29 | 2009-10-20 | Test Enterprises, Inc. | High-flow cold air chiller |
| US20080121821A1 (en) * | 2006-11-27 | 2008-05-29 | Varian Semiconductor Equipment Associates Inc. | Techniques for low-temperature ion implantation |
| US7528392B2 (en) * | 2006-11-27 | 2009-05-05 | Varian Semiconductor Equipment Associates, Inc. | Techniques for low-temperature ion implantation |
| JP4626609B2 (ja) * | 2006-12-12 | 2011-02-09 | トヨタ自動車株式会社 | 流体供給装置 |
| US20080245086A1 (en) * | 2007-03-02 | 2008-10-09 | Polar King International, Inc. | Multi-zone low temperature freezer |
| JP5196452B2 (ja) * | 2007-04-24 | 2013-05-15 | キャリア コーポレイション | 充填量管理を備えた遷臨界冷媒蒸気圧縮システム |
| JP2010525294A (ja) | 2007-04-24 | 2010-07-22 | キャリア コーポレイション | 2系統エコノマイザ回路を備えた冷媒蒸気圧縮システム |
| DK2147264T3 (en) * | 2007-04-24 | 2019-03-04 | Carrier Corp | Refrigerant vapor compression system |
| US8671703B2 (en) * | 2007-05-14 | 2014-03-18 | Carrier Corporation | Refrigerant vapor compression system with flash tank economizer |
| US9989280B2 (en) * | 2008-05-02 | 2018-06-05 | Heatcraft Refrigeration Products Llc | Cascade cooling system with intercycle cooling or additional vapor condensation cycle |
| CN105650947A (zh) | 2009-07-28 | 2016-06-08 | 东芝开利株式会社 | 热源单元 |
| US8011191B2 (en) * | 2009-09-30 | 2011-09-06 | Thermo Fisher Scientific (Asheville) Llc | Refrigeration system having a variable speed compressor |
| US11047389B2 (en) | 2010-04-16 | 2021-06-29 | Air Squared, Inc. | Multi-stage scroll vacuum pumps and related scroll devices |
| EP2569583B1 (en) * | 2010-05-12 | 2016-03-02 | Brooks Automation, Inc. | System for cryogenic cooling |
| CN101852504B (zh) * | 2010-05-14 | 2012-08-22 | 东南大学 | 用于油气回收的双级复叠制冷方法 |
| TWI551803B (zh) | 2010-06-15 | 2016-10-01 | 拜歐菲樂Ip有限責任公司 | 低溫熱力閥裝置、含有該低溫熱力閥裝置之系統及使用該低溫熱力閥裝置之方法 |
| CN101865589B (zh) * | 2010-07-14 | 2012-03-28 | 天津商业大学 | 环保、无氟超低温库 |
| TWI575062B (zh) | 2011-12-16 | 2017-03-21 | 拜歐菲樂Ip有限責任公司 | 低溫注射組成物,用於低溫調節導管中流量之系統及方法 |
| US9310104B2 (en) * | 2012-02-08 | 2016-04-12 | Quantum Design International, Inc. | Modular architecture for helium compressors |
| CN102679617B (zh) * | 2012-06-21 | 2014-07-02 | 山东大学 | 一种压缩驱动吸附制冷方法及热泵系统 |
| JP5575191B2 (ja) * | 2012-08-06 | 2014-08-20 | 三菱電機株式会社 | 二元冷凍装置 |
| US9454158B2 (en) | 2013-03-15 | 2016-09-27 | Bhushan Somani | Real time diagnostics for flow controller systems and methods |
| CN105445046B (zh) * | 2014-08-06 | 2018-06-26 | 天津航天瑞莱科技有限公司 | 一种用于管路结构环境模拟的制冷及增压系统 |
| JP6714696B2 (ja) * | 2016-06-01 | 2020-06-24 | 株式会社アドテックス | 半導体検査装置用の冷却装置 |
| US11384962B2 (en) | 2016-06-13 | 2022-07-12 | Geoff ROWE | System, method and apparatus for the regeneration of nitrogen energy within a closed loop cryogenic system |
| US10865793B2 (en) | 2016-12-06 | 2020-12-15 | Air Squared, Inc. | Scroll type device having liquid cooling through idler shafts |
| CN106766297B (zh) * | 2016-12-22 | 2019-08-16 | 广州协义自动化科技有限公司 | 一种能快速恢复平衡压力的超低温水汽捕集泵系统 |
| US10983538B2 (en) | 2017-02-27 | 2021-04-20 | Flow Devices And Systems Inc. | Systems and methods for flow sensor back pressure adjustment for mass flow controller |
| CN106918524B (zh) * | 2017-03-25 | 2023-07-14 | 吴江市海拓仪器设备有限公司 | 一种冷热冲击系统及其具有该系统的冷热冲击机 |
| CN106951001A (zh) * | 2017-05-12 | 2017-07-14 | 成都市惠家胶粘制品有限公司 | 一种制造保护膜用流量稳定系统 |
| US11156394B2 (en) * | 2018-02-27 | 2021-10-26 | Johnson Controls Technology Company | Systems and methods for pressure control in a heating, ventilation, and air conditioning (HVAC) system |
| US11454241B2 (en) | 2018-05-04 | 2022-09-27 | Air Squared, Inc. | Liquid cooling of fixed and orbiting scroll compressor, expander or vacuum pump |
| US11067080B2 (en) | 2018-07-17 | 2021-07-20 | Air Squared, Inc. | Low cost scroll compressor or vacuum pump |
| US20200025199A1 (en) | 2018-07-17 | 2020-01-23 | Air Squared, Inc. | Dual drive co-rotating spinning scroll compressor or expander |
| US11530703B2 (en) | 2018-07-18 | 2022-12-20 | Air Squared, Inc. | Orbiting scroll device lubrication |
| GB201815815D0 (en) * | 2018-09-28 | 2018-11-14 | Metryx Ltd | Method and apparatus for controlling the temperature of a semiconductor wafer |
| US11473572B2 (en) | 2019-06-25 | 2022-10-18 | Air Squared, Inc. | Aftercooler for cooling compressed working fluid |
| CN110696314A (zh) * | 2019-11-06 | 2020-01-17 | 苏州斯泰姆克工业智能科技有限公司 | 一种基于低温高压气体的模具局部冷却系统 |
| GB2592189B (en) * | 2020-02-12 | 2022-06-08 | Edwards Vacuum Llc | A semiconductor wafer temperature control apparatus |
| KR102905600B1 (ko) * | 2020-05-20 | 2026-01-02 | 레르 리키드 쏘시에떼 아노님 뿌르 레드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드 | 120k 내지 200k 온도 범위에서 비활성이고 비-가압된 극저온 액체로 액상의 극저온 유체 사용 장치를 냉각시키기 위한 시스템 및 방법 |
| CN112032112A (zh) * | 2020-07-02 | 2020-12-04 | 杭州制氧机集团股份有限公司 | 一种闭式循环耦合的装置及其使用方法 |
| US11898557B2 (en) | 2020-11-30 | 2024-02-13 | Air Squared, Inc. | Liquid cooling of a scroll type compressor with liquid supply through the crankshaft |
| KR102493453B1 (ko) * | 2021-05-11 | 2023-01-31 | 한국원자력연구원 | 열전도관 성능검증용 고온고압 가스냉각장치 |
| US11885328B2 (en) | 2021-07-19 | 2024-01-30 | Air Squared, Inc. | Scroll device with an integrated cooling loop |
| KR102722768B1 (ko) | 2022-04-18 | 2024-10-28 | 주식회사 프라임텍 | 양자 소자 평가용 극저온 냉각장치 |
| CN116430919B (zh) * | 2023-03-10 | 2025-08-12 | 长沙翼望半导体有限公司 | 一种用于探针台的气冷式温控系统 |
| CN119289585A (zh) * | 2023-07-10 | 2025-01-10 | 开利公司 | 用于冷柜装置的室外机组和冷柜装置 |
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-
2002
- 2002-02-25 CN CN201110071107.1A patent/CN102200356B/zh not_active Expired - Fee Related
- 2002-02-25 KR KR1020037010958A patent/KR100852645B1/ko not_active Expired - Fee Related
- 2002-02-25 CN CNA028052021A patent/CN1492987A/zh active Pending
- 2002-02-25 JP JP2002591740A patent/JP4487233B2/ja not_active Expired - Lifetime
- 2002-02-25 WO PCT/US2002/005801 patent/WO2002095308A2/en not_active Ceased
- 2002-02-25 US US10/470,123 patent/US7111467B2/en not_active Expired - Lifetime
- 2002-02-25 EP EP02739089A patent/EP1362211A4/en not_active Withdrawn
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