KR100852645B1 - 극저온 폐쇄 루프형 재순환 가스 냉각 장치 - Google Patents

극저온 폐쇄 루프형 재순환 가스 냉각 장치 Download PDF

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Publication number
KR100852645B1
KR100852645B1 KR1020037010958A KR20037010958A KR100852645B1 KR 100852645 B1 KR100852645 B1 KR 100852645B1 KR 1020037010958 A KR1020037010958 A KR 1020037010958A KR 20037010958 A KR20037010958 A KR 20037010958A KR 100852645 B1 KR100852645 B1 KR 100852645B1
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South Korea
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gas
heat exchanger
cooling
compressor
closed loop
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Expired - Fee Related
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English (en)
Korean (ko)
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KR20030077639A (ko
Inventor
태미리사브이.브이.알. 아파라오
오레그 포트체니아에브
켈빈 피. 프린
폴 홀
로저 라첸브루스
미그헤일 보이아르스키
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브룩스 오토메이션 인코퍼레이티드
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Assigned to 에드워즈 배큠 엘엘시 reassignment 에드워즈 배큠 엘엘시 권리의 전부이전등록 Assignors: 브룩스 오토메이션 인코퍼레이티드
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B7/00—Compression machines, plants or systems, with cascade operation, i.e. with two or more circuits, the heat from the condenser of one circuit being absorbed by the evaporator of the next circuit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/002—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
    • F25B9/006—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant the refrigerant containing more than one component
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D2400/00—General features of, or devices for refrigerators, cold rooms, ice-boxes, or for cooling or freezing apparatus not covered by any other subclass
    • F25D2400/28—Quick cooling

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020037010958A 2001-02-23 2002-02-25 극저온 폐쇄 루프형 재순환 가스 냉각 장치 Expired - Fee Related KR100852645B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US27114001P 2001-02-23 2001-02-23
US60/271,140 2001-02-23
PCT/US2002/005801 WO2002095308A2 (en) 2001-02-23 2002-02-25 Ultra-low temperature closed-loop recirculating gas chilling system

Publications (2)

Publication Number Publication Date
KR20030077639A KR20030077639A (ko) 2003-10-01
KR100852645B1 true KR100852645B1 (ko) 2008-08-18

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020037010958A Expired - Fee Related KR100852645B1 (ko) 2001-02-23 2002-02-25 극저온 폐쇄 루프형 재순환 가스 냉각 장치

Country Status (6)

Country Link
US (1) US7111467B2 (https=)
EP (1) EP1362211A4 (https=)
JP (1) JP4487233B2 (https=)
KR (1) KR100852645B1 (https=)
CN (2) CN102200356B (https=)
WO (1) WO2002095308A2 (https=)

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CN100483040C (zh) 2000-06-28 2009-04-29 布鲁克斯自动化公司 用于深度低温的制冷系统的混合制冷剂
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DE10216786C5 (de) * 2002-04-15 2009-10-15 Ers Electronic Gmbh Verfahren und Vorrichtung zur Konditionierung von Halbleiterwafern und/oder Hybriden
EP2818530B1 (en) 2004-01-28 2020-01-01 Edwards Vacuum, LLC Refrigeration cycle utilizing a mixed inert component refrigerant
US7349896B2 (en) * 2004-12-29 2008-03-25 Aol Llc Query routing
JP2007303794A (ja) * 2006-05-15 2007-11-22 Sanyo Electric Co Ltd 冷凍装置
US7603871B2 (en) * 2006-06-29 2009-10-20 Test Enterprises, Inc. High-flow cold air chiller
US20080121821A1 (en) * 2006-11-27 2008-05-29 Varian Semiconductor Equipment Associates Inc. Techniques for low-temperature ion implantation
US7528392B2 (en) * 2006-11-27 2009-05-05 Varian Semiconductor Equipment Associates, Inc. Techniques for low-temperature ion implantation
JP4626609B2 (ja) * 2006-12-12 2011-02-09 トヨタ自動車株式会社 流体供給装置
US20080245086A1 (en) * 2007-03-02 2008-10-09 Polar King International, Inc. Multi-zone low temperature freezer
JP5196452B2 (ja) * 2007-04-24 2013-05-15 キャリア コーポレイション 充填量管理を備えた遷臨界冷媒蒸気圧縮システム
JP2010525294A (ja) 2007-04-24 2010-07-22 キャリア コーポレイション ２系統エコノマイザ回路を備えた冷媒蒸気圧縮システム
DK2147264T3 (en) * 2007-04-24 2019-03-04 Carrier Corp Refrigerant vapor compression system
US8671703B2 (en) * 2007-05-14 2014-03-18 Carrier Corporation Refrigerant vapor compression system with flash tank economizer
US9989280B2 (en) * 2008-05-02 2018-06-05 Heatcraft Refrigeration Products Llc Cascade cooling system with intercycle cooling or additional vapor condensation cycle
CN105650947A (zh) 2009-07-28 2016-06-08 东芝开利株式会社 热源单元
US8011191B2 (en) * 2009-09-30 2011-09-06 Thermo Fisher Scientific (Asheville) Llc Refrigeration system having a variable speed compressor
US11047389B2 (en) 2010-04-16 2021-06-29 Air Squared, Inc. Multi-stage scroll vacuum pumps and related scroll devices
EP2569583B1 (en) * 2010-05-12 2016-03-02 Brooks Automation, Inc. System for cryogenic cooling
CN101852504B (zh) * 2010-05-14 2012-08-22 东南大学 用于油气回收的双级复叠制冷方法
TWI551803B (zh) 2010-06-15 2016-10-01 拜歐菲樂Ｉｐ有限責任公司 低溫熱力閥裝置、含有該低溫熱力閥裝置之系統及使用該低溫熱力閥裝置之方法
CN101865589B (zh) * 2010-07-14 2012-03-28 天津商业大学 环保、无氟超低温库
TWI575062B (zh) 2011-12-16 2017-03-21 拜歐菲樂Ｉｐ有限責任公司 低溫注射組成物，用於低溫調節導管中流量之系統及方法
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JP5575191B2 (ja) * 2012-08-06 2014-08-20 三菱電機株式会社 二元冷凍装置
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
CN105445046B (zh) * 2014-08-06 2018-06-26 天津航天瑞莱科技有限公司 一种用于管路结构环境模拟的制冷及增压系统
JP6714696B2 (ja) * 2016-06-01 2020-06-24 株式会社アドテックス 半導体検査装置用の冷却装置
US11384962B2 (en) 2016-06-13 2022-07-12 Geoff ROWE System, method and apparatus for the regeneration of nitrogen energy within a closed loop cryogenic system
US10865793B2 (en) 2016-12-06 2020-12-15 Air Squared, Inc. Scroll type device having liquid cooling through idler shafts
CN106766297B (zh) * 2016-12-22 2019-08-16 广州协义自动化科技有限公司 一种能快速恢复平衡压力的超低温水汽捕集泵系统
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
CN106918524B (zh) * 2017-03-25 2023-07-14 吴江市海拓仪器设备有限公司 一种冷热冲击系统及其具有该系统的冷热冲击机
CN106951001A (zh) * 2017-05-12 2017-07-14 成都市惠家胶粘制品有限公司 一种制造保护膜用流量稳定系统
US11156394B2 (en) * 2018-02-27 2021-10-26 Johnson Controls Technology Company Systems and methods for pressure control in a heating, ventilation, and air conditioning (HVAC) system
US11454241B2 (en) 2018-05-04 2022-09-27 Air Squared, Inc. Liquid cooling of fixed and orbiting scroll compressor, expander or vacuum pump
US11067080B2 (en) 2018-07-17 2021-07-20 Air Squared, Inc. Low cost scroll compressor or vacuum pump
US20200025199A1 (en) 2018-07-17 2020-01-23 Air Squared, Inc. Dual drive co-rotating spinning scroll compressor or expander
US11530703B2 (en) 2018-07-18 2022-12-20 Air Squared, Inc. Orbiting scroll device lubrication
GB201815815D0 (en) * 2018-09-28 2018-11-14 Metryx Ltd Method and apparatus for controlling the temperature of a semiconductor wafer
US11473572B2 (en) 2019-06-25 2022-10-18 Air Squared, Inc. Aftercooler for cooling compressed working fluid
CN110696314A (zh) * 2019-11-06 2020-01-17 苏州斯泰姆克工业智能科技有限公司 一种基于低温高压气体的模具局部冷却系统
GB2592189B (en) * 2020-02-12 2022-06-08 Edwards Vacuum Llc A semiconductor wafer temperature control apparatus
KR102905600B1 (ko) * 2020-05-20 2026-01-02 레르 리키드 쏘시에떼 아노님 뿌르 레드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드 120k 내지 200k 온도 범위에서 비활성이고 비-가압된 극저온 액체로 액상의 극저온 유체 사용 장치를 냉각시키기 위한 시스템 및 방법
CN112032112A (zh) * 2020-07-02 2020-12-04 杭州制氧机集团股份有限公司 一种闭式循环耦合的装置及其使用方法
US11898557B2 (en) 2020-11-30 2024-02-13 Air Squared, Inc. Liquid cooling of a scroll type compressor with liquid supply through the crankshaft
KR102493453B1 (ko) * 2021-05-11 2023-01-31 한국원자력연구원 열전도관 성능검증용 고온고압 가스냉각장치
US11885328B2 (en) 2021-07-19 2024-01-30 Air Squared, Inc. Scroll device with an integrated cooling loop
KR102722768B1 (ko) 2022-04-18 2024-10-28 주식회사 프라임텍 양자 소자 평가용 극저온 냉각장치
CN116430919B (zh) * 2023-03-10 2025-08-12 长沙翼望半导体有限公司 一种用于探针台的气冷式温控系统
CN119289585A (zh) * 2023-07-10 2025-01-10 开利公司 用于冷柜装置的室外机组和冷柜装置

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Also Published As

Publication number Publication date
CN102200356A (zh) 2011-09-28
EP1362211A4 (en) 2005-12-21
WO2002095308A2 (en) 2002-11-28
WO2002095308A3 (en) 2003-03-06
KR20030077639A (ko) 2003-10-01
JP4487233B2 (ja) 2010-06-23
CN102200356B (zh) 2014-03-26
CN1492987A (zh) 2004-04-28
EP1362211A2 (en) 2003-11-19
JP2004527721A (ja) 2004-09-09
US20040129015A1 (en) 2004-07-08
US7111467B2 (en) 2006-09-26

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