CN102200356B - 超低温闭环再循环气体冷却系统 - Google Patents

超低温闭环再循环气体冷却系统 Download PDF

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Publication number
CN102200356B
CN102200356B CN201110071107.1A CN201110071107A CN102200356B CN 102200356 B CN102200356 B CN 102200356B CN 201110071107 A CN201110071107 A CN 201110071107A CN 102200356 B CN102200356 B CN 102200356B
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China
Prior art keywords
heat exchanger
refrigeration system
flow
temperature
refrigeration
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Expired - Fee Related
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CN201110071107.1A
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Chinese (zh)
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CN102200356A (zh
Inventor
T·V·V·R·阿帕劳
O·波德切尔尼亚夫
K·P·弗林
P·哈尔
R·拉岑布鲁克
M·波伊尔斯基
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Edwards Vacuum LLC
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Brooks Automation Inc
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B7/00—Compression machines, plants or systems, with cascade operation, i.e. with two or more circuits, the heat from the condenser of one circuit being absorbed by the evaporator of the next circuit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/002—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
    • F25B9/006—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant the refrigerant containing more than one component
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D2400/00—General features of, or devices for refrigerators, cold rooms, ice-boxes, or for cooling or freezing apparatus not covered by any other subclass
    • F25D2400/28—Quick cooling

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN201110071107.1A 2001-02-23 2002-02-25 超低温闭环再循环气体冷却系统 Expired - Fee Related CN102200356B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US27114001P 2001-02-23 2001-02-23
US60/271140 2001-02-23

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CNA028052021A Division CN1492987A (zh) 2001-02-23 2002-02-25 超低温闭环再循环气体冷却系统

Publications (2)

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CN102200356A CN102200356A (zh) 2011-09-28
CN102200356B true CN102200356B (zh) 2014-03-26

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CN201110071107.1A Expired - Fee Related CN102200356B (zh) 2001-02-23 2002-02-25 超低温闭环再循环气体冷却系统
CNA028052021A Pending CN1492987A (zh) 2001-02-23 2002-02-25 超低温闭环再循环气体冷却系统

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Application Number Title Priority Date Filing Date
CNA028052021A Pending CN1492987A (zh) 2001-02-23 2002-02-25 超低温闭环再循环气体冷却系统

Country Status (6)

Country Link
US (1) US7111467B2 (https=)
EP (1) EP1362211A4 (https=)
JP (1) JP4487233B2 (https=)
KR (1) KR100852645B1 (https=)
CN (2) CN102200356B (https=)
WO (1) WO2002095308A2 (https=)

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JP5196452B2 (ja) * 2007-04-24 2013-05-15 キャリア コーポレイション 充填量管理を備えた遷臨界冷媒蒸気圧縮システム
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US11067080B2 (en) 2018-07-17 2021-07-20 Air Squared, Inc. Low cost scroll compressor or vacuum pump
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CN110696314A (zh) * 2019-11-06 2020-01-17 苏州斯泰姆克工业智能科技有限公司 一种基于低温高压气体的模具局部冷却系统
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KR102905600B1 (ko) * 2020-05-20 2026-01-02 레르 리키드 쏘시에떼 아노님 뿌르 레드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드 120k 내지 200k 온도 범위에서 비활성이고 비-가압된 극저온 액체로 액상의 극저온 유체 사용 장치를 냉각시키기 위한 시스템 및 방법
CN112032112A (zh) * 2020-07-02 2020-12-04 杭州制氧机集团股份有限公司 一种闭式循环耦合的装置及其使用方法
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KR102493453B1 (ko) * 2021-05-11 2023-01-31 한국원자력연구원 열전도관 성능검증용 고온고압 가스냉각장치
US11885328B2 (en) 2021-07-19 2024-01-30 Air Squared, Inc. Scroll device with an integrated cooling loop
KR102722768B1 (ko) 2022-04-18 2024-10-28 주식회사 프라임텍 양자 소자 평가용 극저온 냉각장치
CN116430919B (zh) * 2023-03-10 2025-08-12 长沙翼望半导体有限公司 一种用于探针台的气冷式温控系统
CN119289585A (zh) * 2023-07-10 2025-01-10 开利公司 用于冷柜装置的室外机组和冷柜装置

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Publication number Publication date
CN102200356A (zh) 2011-09-28
EP1362211A4 (en) 2005-12-21
WO2002095308A2 (en) 2002-11-28
WO2002095308A3 (en) 2003-03-06
KR20030077639A (ko) 2003-10-01
JP4487233B2 (ja) 2010-06-23
CN1492987A (zh) 2004-04-28
EP1362211A2 (en) 2003-11-19
JP2004527721A (ja) 2004-09-09
KR100852645B1 (ko) 2008-08-18
US20040129015A1 (en) 2004-07-08
US7111467B2 (en) 2006-09-26

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