JP4487233B2 - 閉ループの超低温再循環ガス冷却装置 - Google Patents

閉ループの超低温再循環ガス冷却装置 Download PDF

Info

Publication number
JP4487233B2
JP4487233B2 JP2002591740A JP2002591740A JP4487233B2 JP 4487233 B2 JP4487233 B2 JP 4487233B2 JP 2002591740 A JP2002591740 A JP 2002591740A JP 2002591740 A JP2002591740 A JP 2002591740A JP 4487233 B2 JP4487233 B2 JP 4487233B2
Authority
JP
Japan
Prior art keywords
gas
heat exchanger
cooling device
temperature
compressor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2002591740A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004527721A5 (https=
JP2004527721A (ja
Inventor
タミリサ ヴィ. ヴィ. アール. アパラオ、
オレグ ポチェルニエフ、
ケヴィン ピー. フリン、
ポール ホール、
ロジャー ロチンブルク、
ミハイル ボイアルスキー、
Original Assignee
ブルックス オートメイション インコーポレーテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ブルックス オートメイション インコーポレーテッド filed Critical ブルックス オートメイション インコーポレーテッド
Publication of JP2004527721A publication Critical patent/JP2004527721A/ja
Publication of JP2004527721A5 publication Critical patent/JP2004527721A5/ja
Application granted granted Critical
Publication of JP4487233B2 publication Critical patent/JP4487233B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B7/00Compression machines, plants or systems, with cascade operation, i.e. with two or more circuits, the heat from the condenser of one circuit being absorbed by the evaporator of the next circuit
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/002Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
    • F25B9/006Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant the refrigerant containing more than one component
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25DREFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D2400/00General features of, or devices for refrigerators, cold rooms, ice-boxes, or for cooling or freezing apparatus not covered by any other subclass
    • F25D2400/28Quick cooling

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Devices That Are Associated With Refrigeration Equipment (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2002591740A 2001-02-23 2002-02-25 閉ループの超低温再循環ガス冷却装置 Expired - Lifetime JP4487233B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US27114001P 2001-02-23 2001-02-23
PCT/US2002/005801 WO2002095308A2 (en) 2001-02-23 2002-02-25 Ultra-low temperature closed-loop recirculating gas chilling system

Publications (3)

Publication Number Publication Date
JP2004527721A JP2004527721A (ja) 2004-09-09
JP2004527721A5 JP2004527721A5 (https=) 2005-12-22
JP4487233B2 true JP4487233B2 (ja) 2010-06-23

Family

ID=23034361

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002591740A Expired - Lifetime JP4487233B2 (ja) 2001-02-23 2002-02-25 閉ループの超低温再循環ガス冷却装置

Country Status (6)

Country Link
US (1) US7111467B2 (https=)
EP (1) EP1362211A4 (https=)
JP (1) JP4487233B2 (https=)
KR (1) KR100852645B1 (https=)
CN (2) CN102200356B (https=)
WO (1) WO2002095308A2 (https=)

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6505475B1 (en) 1999-08-20 2003-01-14 Hudson Technologies Inc. Method and apparatus for measuring and improving efficiency in refrigeration systems
CN100483040C (zh) 2000-06-28 2009-04-29 布鲁克斯自动化公司 用于深度低温的制冷系统的混合制冷剂
US7478540B2 (en) 2001-10-26 2009-01-20 Brooks Automation, Inc. Methods of freezeout prevention and temperature control for very low temperature mixed refrigerant systems
DE10216786C5 (de) * 2002-04-15 2009-10-15 Ers Electronic Gmbh Verfahren und Vorrichtung zur Konditionierung von Halbleiterwafern und/oder Hybriden
EP2818530B1 (en) 2004-01-28 2020-01-01 Edwards Vacuum, LLC Refrigeration cycle utilizing a mixed inert component refrigerant
US7349896B2 (en) * 2004-12-29 2008-03-25 Aol Llc Query routing
JP2007303794A (ja) * 2006-05-15 2007-11-22 Sanyo Electric Co Ltd 冷凍装置
US7603871B2 (en) * 2006-06-29 2009-10-20 Test Enterprises, Inc. High-flow cold air chiller
US20080121821A1 (en) * 2006-11-27 2008-05-29 Varian Semiconductor Equipment Associates Inc. Techniques for low-temperature ion implantation
US7528392B2 (en) * 2006-11-27 2009-05-05 Varian Semiconductor Equipment Associates, Inc. Techniques for low-temperature ion implantation
JP4626609B2 (ja) * 2006-12-12 2011-02-09 トヨタ自動車株式会社 流体供給装置
US20080245086A1 (en) * 2007-03-02 2008-10-09 Polar King International, Inc. Multi-zone low temperature freezer
JP5196452B2 (ja) * 2007-04-24 2013-05-15 キャリア コーポレイション 充填量管理を備えた遷臨界冷媒蒸気圧縮システム
JP2010525294A (ja) 2007-04-24 2010-07-22 キャリア コーポレイション 2系統エコノマイザ回路を備えた冷媒蒸気圧縮システム
DK2147264T3 (en) * 2007-04-24 2019-03-04 Carrier Corp Refrigerant vapor compression system
US8671703B2 (en) * 2007-05-14 2014-03-18 Carrier Corporation Refrigerant vapor compression system with flash tank economizer
US9989280B2 (en) * 2008-05-02 2018-06-05 Heatcraft Refrigeration Products Llc Cascade cooling system with intercycle cooling or additional vapor condensation cycle
CN105650947A (zh) 2009-07-28 2016-06-08 东芝开利株式会社 热源单元
US8011191B2 (en) * 2009-09-30 2011-09-06 Thermo Fisher Scientific (Asheville) Llc Refrigeration system having a variable speed compressor
US11047389B2 (en) 2010-04-16 2021-06-29 Air Squared, Inc. Multi-stage scroll vacuum pumps and related scroll devices
EP2569583B1 (en) * 2010-05-12 2016-03-02 Brooks Automation, Inc. System for cryogenic cooling
CN101852504B (zh) * 2010-05-14 2012-08-22 东南大学 用于油气回收的双级复叠制冷方法
TWI551803B (zh) 2010-06-15 2016-10-01 拜歐菲樂Ip有限責任公司 低溫熱力閥裝置、含有該低溫熱力閥裝置之系統及使用該低溫熱力閥裝置之方法
CN101865589B (zh) * 2010-07-14 2012-03-28 天津商业大学 环保、无氟超低温库
TWI575062B (zh) 2011-12-16 2017-03-21 拜歐菲樂Ip有限責任公司 低溫注射組成物,用於低溫調節導管中流量之系統及方法
US9310104B2 (en) * 2012-02-08 2016-04-12 Quantum Design International, Inc. Modular architecture for helium compressors
CN102679617B (zh) * 2012-06-21 2014-07-02 山东大学 一种压缩驱动吸附制冷方法及热泵系统
JP5575191B2 (ja) * 2012-08-06 2014-08-20 三菱電機株式会社 二元冷凍装置
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
CN105445046B (zh) * 2014-08-06 2018-06-26 天津航天瑞莱科技有限公司 一种用于管路结构环境模拟的制冷及增压系统
JP6714696B2 (ja) * 2016-06-01 2020-06-24 株式会社アドテックス 半導体検査装置用の冷却装置
US11384962B2 (en) 2016-06-13 2022-07-12 Geoff ROWE System, method and apparatus for the regeneration of nitrogen energy within a closed loop cryogenic system
US10865793B2 (en) 2016-12-06 2020-12-15 Air Squared, Inc. Scroll type device having liquid cooling through idler shafts
CN106766297B (zh) * 2016-12-22 2019-08-16 广州协义自动化科技有限公司 一种能快速恢复平衡压力的超低温水汽捕集泵系统
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
CN106918524B (zh) * 2017-03-25 2023-07-14 吴江市海拓仪器设备有限公司 一种冷热冲击系统及其具有该系统的冷热冲击机
CN106951001A (zh) * 2017-05-12 2017-07-14 成都市惠家胶粘制品有限公司 一种制造保护膜用流量稳定系统
US11156394B2 (en) * 2018-02-27 2021-10-26 Johnson Controls Technology Company Systems and methods for pressure control in a heating, ventilation, and air conditioning (HVAC) system
US11454241B2 (en) 2018-05-04 2022-09-27 Air Squared, Inc. Liquid cooling of fixed and orbiting scroll compressor, expander or vacuum pump
US11067080B2 (en) 2018-07-17 2021-07-20 Air Squared, Inc. Low cost scroll compressor or vacuum pump
US20200025199A1 (en) 2018-07-17 2020-01-23 Air Squared, Inc. Dual drive co-rotating spinning scroll compressor or expander
US11530703B2 (en) 2018-07-18 2022-12-20 Air Squared, Inc. Orbiting scroll device lubrication
GB201815815D0 (en) * 2018-09-28 2018-11-14 Metryx Ltd Method and apparatus for controlling the temperature of a semiconductor wafer
US11473572B2 (en) 2019-06-25 2022-10-18 Air Squared, Inc. Aftercooler for cooling compressed working fluid
CN110696314A (zh) * 2019-11-06 2020-01-17 苏州斯泰姆克工业智能科技有限公司 一种基于低温高压气体的模具局部冷却系统
GB2592189B (en) * 2020-02-12 2022-06-08 Edwards Vacuum Llc A semiconductor wafer temperature control apparatus
KR102905600B1 (ko) * 2020-05-20 2026-01-02 레르 리키드 쏘시에떼 아노님 뿌르 레드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드 120k 내지 200k 온도 범위에서 비활성이고 비-가압된 극저온 액체로 액상의 극저온 유체 사용 장치를 냉각시키기 위한 시스템 및 방법
CN112032112A (zh) * 2020-07-02 2020-12-04 杭州制氧机集团股份有限公司 一种闭式循环耦合的装置及其使用方法
US11898557B2 (en) 2020-11-30 2024-02-13 Air Squared, Inc. Liquid cooling of a scroll type compressor with liquid supply through the crankshaft
KR102493453B1 (ko) * 2021-05-11 2023-01-31 한국원자력연구원 열전도관 성능검증용 고온고압 가스냉각장치
US11885328B2 (en) 2021-07-19 2024-01-30 Air Squared, Inc. Scroll device with an integrated cooling loop
KR102722768B1 (ko) 2022-04-18 2024-10-28 주식회사 프라임텍 양자 소자 평가용 극저온 냉각장치
CN116430919B (zh) * 2023-03-10 2025-08-12 长沙翼望半导体有限公司 一种用于探针台的气冷式温控系统
CN119289585A (zh) * 2023-07-10 2025-01-10 开利公司 用于冷柜装置的室外机组和冷柜装置

Family Cites Families (67)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3590595A (en) 1969-06-03 1971-07-06 Thermotron Corp Cascade refrigeration system with refrigerant bypass
US4122688A (en) * 1976-07-30 1978-10-31 Hitachi, Ltd. Refrigerating system
US4506521A (en) * 1981-12-22 1985-03-26 Mitsubishi Denki Kabushiki Kaisha Cooling and heating device
US4535597A (en) * 1984-01-25 1985-08-20 Marin Tek, Inc. Fast cycle water vapor cryopump
SE459883B (sv) * 1984-02-14 1989-08-14 Andersson Bengt O K Saett och anordning foer tryckluftkylning
US4535598A (en) * 1984-05-14 1985-08-20 Carrier Corporation Method and control system for verifying sensor operation in a refrigeration system
US4597267A (en) * 1985-06-28 1986-07-01 Marin Tek, Inc. Fast cycle water vapor cryopump
GB2180921B (en) 1985-09-25 1990-01-24 Sanyo Electric Co Refrigeration system
US4763486A (en) * 1987-05-06 1988-08-16 Marin Tek, Inc. Condensate diversion in a refrigeration system
JPH01108292A (ja) * 1987-10-19 1989-04-25 Daikin Ind Ltd 冷媒
US4850199A (en) * 1988-03-21 1989-07-25 Guild Associates, Inc. Cryo-refrigeration system
US4831835A (en) * 1988-04-21 1989-05-23 Tyler Refrigeration Corporation Refrigeration system
US4926658A (en) * 1989-04-14 1990-05-22 Lennox Industries, Inc. Two way flow control device
US5067330A (en) * 1990-02-09 1991-11-26 Columbia Gas System Service Corporation Heat transfer apparatus for heat pumps
US5076067A (en) * 1990-07-31 1991-12-31 Copeland Corporation Compressor with liquid injection
US5313787A (en) * 1990-10-01 1994-05-24 General Cryogenics Incorporated Refrigeration trailer
JP2537314B2 (ja) * 1991-07-15 1996-09-25 三菱電機株式会社 冷凍サイクル装置
JP2764489B2 (ja) 1991-10-29 1998-06-11 株式会社荏原製作所 冷凍装置用冷媒及び該冷媒を用いる冷凍装置
US5170639A (en) * 1991-12-10 1992-12-15 Chander Datta Cascade refrigeration system
US5337572A (en) * 1993-05-04 1994-08-16 Apd Cryogenics, Inc. Cryogenic refrigerator with single stage compressor
US5441658A (en) * 1993-11-09 1995-08-15 Apd Cryogenics, Inc. Cryogenic mixed gas refrigerant for operation within temperature ranges of 80°K- 100°K
US5425890A (en) * 1994-01-11 1995-06-20 Apd Cryogenics, Inc. Substitute refrigerant for dichlorodifluoromethane refrigeration systems
US5408848A (en) * 1994-02-25 1995-04-25 General Signal Corporation Non-CFC autocascade refrigeration system
US5524442A (en) * 1994-06-27 1996-06-11 Praxair Technology, Inc. Cooling system employing a primary, high pressure closed refrigeration loop and a secondary refrigeration loop
US5910161A (en) 1994-09-20 1999-06-08 Fujita; Makoto Refrigerating apparatus
JP3275559B2 (ja) * 1994-09-20 2002-04-15 株式会社日立製作所 冷凍装置
US5606870A (en) * 1995-02-10 1997-03-04 Redstone Engineering Low-temperature refrigeration system with precise temperature control
US5724832A (en) * 1995-03-29 1998-03-10 Mmr Technologies, Inc. Self-cleaning cryogenic refrigeration system
US5644502A (en) * 1995-05-04 1997-07-01 Mmr Technologies, Inc. Method for efficient counter-current heat exchange using optimized mixtures
US5715694A (en) * 1995-05-26 1998-02-10 Matsushita Electric Industrial Co., Ltd. Refrigerator controller
US5640854A (en) * 1995-06-07 1997-06-24 Copeland Corporation Scroll machine having liquid injection controlled by internal valve
US5579654A (en) * 1995-06-29 1996-12-03 Apd Cryogenics, Inc. Cryostat refrigeration system using mixed refrigerants in a closed vapor compression cycle having a fixed flow restrictor
US5730216A (en) * 1995-07-12 1998-03-24 Thermo King Corporation Air conditioning and refrigeration units utilizing a cryogen
CA2233874A1 (en) * 1995-10-20 1997-04-24 Gregory J. Sherwood Hydrofluoroethers as low temperature refrigerants
US6017205A (en) * 1996-08-02 2000-01-25 Copeland Corporation Scroll compressor
EP0946667A1 (en) * 1996-08-08 1999-10-06 Donald E. Turner Alternative refrigerant including hexafluoropropylene
US6076368A (en) * 1997-02-05 2000-06-20 Emerson Electric Co. Electrically operated fluid control device
JP3627467B2 (ja) * 1997-09-11 2005-03-09 株式会社日立製作所 冷媒圧縮機および冷凍装置
US6206652B1 (en) * 1998-08-25 2001-03-27 Copeland Corporation Compressor capacity modulation
JPH11248264A (ja) * 1998-03-04 1999-09-14 Hitachi Ltd 冷凍装置
US6076366A (en) * 1998-04-03 2000-06-20 Denso Corporation Refrigerating cycle system with hot-gas bypass passage
KR200208166Y1 (ko) * 1998-04-07 2001-02-01 조병우 모자(帽子)의 챙 성형장치
DE19821308A1 (de) * 1998-05-13 1999-11-18 Messer Griesheim Gmbh Verfahren und Vorrichtung zur Kälteerzeugung
US6112547A (en) * 1998-07-10 2000-09-05 Spauschus Associates, Inc. Reduced pressure carbon dioxide-based refrigeration system
US6073454A (en) * 1998-07-10 2000-06-13 Spauschus Associates, Inc. Reduced pressure carbon dioxide-based refrigeration system
US6112534A (en) * 1998-07-31 2000-09-05 Carrier Corporation Refrigeration and heating cycle system and method
JP3150117B2 (ja) * 1998-11-27 2001-03-26 エスエムシー株式会社 恒温冷媒液循環装置
US6041621A (en) * 1998-12-30 2000-03-28 Praxair Technology, Inc. Single circuit cryogenic liquefaction of industrial gas
US6176102B1 (en) * 1998-12-30 2001-01-23 Praxair Technology, Inc. Method for providing refrigeration
US6076372A (en) * 1998-12-30 2000-06-20 Praxair Technology, Inc. Variable load refrigeration system particularly for cryogenic temperatures
US6105388A (en) * 1998-12-30 2000-08-22 Praxair Technology, Inc. Multiple circuit cryogenic liquefaction of industrial gas
US6089033A (en) * 1999-02-26 2000-07-18 Dube; Serge High-speed evaporator defrost system
US6148634A (en) * 1999-04-26 2000-11-21 3M Innovative Properties Company Multistage rapid product refrigeration apparatus and method
JP2000337716A (ja) * 1999-05-27 2000-12-08 Mitsubishi Electric Corp 複合型冷媒回路設備
TW574368B (en) * 1999-06-21 2004-02-01 Idemitsu Kosan Co Refrigerator oil for carbon dioxide refrigerant
US6293335B1 (en) * 1999-06-24 2001-09-25 Aquacal, Inc. Method and apparatus for optimizing heat transfer in a tube and shell heat exchanger
US6481223B2 (en) * 1999-12-03 2002-11-19 Intermagnetics General Corporation-Polycold Systems, Inc. Refrigerant blend free of R-22 for use in ultralow temperature refrigeration
US6189329B1 (en) 2000-04-04 2001-02-20 Venturedyne Limited Cascade refrigeration system
US6301923B1 (en) * 2000-05-01 2001-10-16 Praxair Technology, Inc. Method for generating a cold gas
US6843065B2 (en) * 2000-05-30 2005-01-18 Icc-Polycold System Inc. Very low temperature refrigeration system with controlled cool down and warm up rates and long term heating capabilities
AU6662501A (en) * 2000-05-30 2001-12-11 Igc Polycold Systems, Inc. A low temperature refrigeration system
WO2002001096A2 (en) * 2000-06-27 2002-01-03 Igc Polycold Systems, Inc. Very low temperature flow switch apparatus
US20020023447A1 (en) * 2000-06-28 2002-02-28 Oleg Podtchereniaev High efficiency very-low temperature mixed refrigerant system with rapid cool down
CN100483040C (zh) * 2000-06-28 2009-04-29 布鲁克斯自动化公司 用于深度低温的制冷系统的混合制冷剂
WO2002001121A1 (en) * 2000-06-28 2002-01-03 Igc Polycold Systems, Inc. Mixed refrigerant temperature control using a pressure regulating valve
US6330811B1 (en) * 2000-06-29 2001-12-18 Praxair Technology, Inc. Compression system for cryogenic refrigeration with multicomponent refrigerant
US6644067B2 (en) * 2000-11-10 2003-11-11 Telmark Cryogenics Limited Discontinuous cryogenic mixed gas refrigeration system and method

Also Published As

Publication number Publication date
CN102200356A (zh) 2011-09-28
EP1362211A4 (en) 2005-12-21
WO2002095308A2 (en) 2002-11-28
WO2002095308A3 (en) 2003-03-06
KR20030077639A (ko) 2003-10-01
CN102200356B (zh) 2014-03-26
CN1492987A (zh) 2004-04-28
EP1362211A2 (en) 2003-11-19
JP2004527721A (ja) 2004-09-09
KR100852645B1 (ko) 2008-08-18
US20040129015A1 (en) 2004-07-08
US7111467B2 (en) 2006-09-26

Similar Documents

Publication Publication Date Title
JP4487233B2 (ja) 閉ループの超低温再循環ガス冷却装置
US6574978B2 (en) Very low temperature refrigeration system with controlled cool down and warm up rates and long term heating capabilities
US6843065B2 (en) Very low temperature refrigeration system with controlled cool down and warm up rates and long term heating capabilities
EP1982126B1 (en) Methods of freezeout prevention and temperature control for very low temperature mixed refrigerant systems
US7059144B2 (en) Methods of freezeout prevention for very low temperature mixed refrigerant systems
US20030115894A1 (en) High efficiency very-low temperature mixed refrigerant system with rapid cool down
AU2002311764A1 (en) Ultra-low temperature closed-loop recirculating gas chilling system

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050224

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050224

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20051025

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070214

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20070514

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20070521

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070607

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20070711

RD13 Notification of appointment of power of sub attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7433

Effective date: 20071220

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20071221

RD14 Notification of resignation of power of sub attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7434

Effective date: 20080704

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20090716

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20090722

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20091027

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20100318

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100318

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130409

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4487233

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140409

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350