JP4487233B2 - 閉ループの超低温再循環ガス冷却装置 - Google Patents
閉ループの超低温再循環ガス冷却装置 Download PDFInfo
- Publication number
- JP4487233B2 JP4487233B2 JP2002591740A JP2002591740A JP4487233B2 JP 4487233 B2 JP4487233 B2 JP 4487233B2 JP 2002591740 A JP2002591740 A JP 2002591740A JP 2002591740 A JP2002591740 A JP 2002591740A JP 4487233 B2 JP4487233 B2 JP 4487233B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- heat exchanger
- cooling device
- temperature
- compressor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001816 cooling Methods 0.000 title claims description 243
- 239000007789 gas Substances 0.000 claims description 295
- 238000000034 method Methods 0.000 claims description 105
- 239000003507 refrigerant Substances 0.000 claims description 85
- 230000008569 process Effects 0.000 claims description 84
- 238000012546 transfer Methods 0.000 claims description 61
- 239000012530 fluid Substances 0.000 claims description 31
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 17
- 239000004065 semiconductor Substances 0.000 claims description 16
- 239000007788 liquid Substances 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 8
- 229910052757 nitrogen Inorganic materials 0.000 claims description 8
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 239000001307 helium Substances 0.000 claims description 7
- 229910052734 helium Inorganic materials 0.000 claims description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 7
- 239000000112 cooling gas Substances 0.000 claims description 5
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 4
- 239000000460 chlorine Substances 0.000 claims description 4
- 229910052801 chlorine Inorganic materials 0.000 claims description 4
- 230000003247 decreasing effect Effects 0.000 claims description 2
- 231100000956 nontoxicity Toxicity 0.000 claims 2
- 230000003213 activating effect Effects 0.000 claims 1
- 239000012071 phase Substances 0.000 description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000001179 sorption measurement Methods 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000011144 upstream manufacturing Methods 0.000 description 5
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 4
- 230000009471 action Effects 0.000 description 4
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 239000002826 coolant Substances 0.000 description 4
- 239000012809 cooling fluid Substances 0.000 description 4
- 238000005191 phase separation Methods 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 238000009835 boiling Methods 0.000 description 3
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000005057 refrigeration Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000003610 charcoal Substances 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000002808 molecular sieve Substances 0.000 description 2
- 231100000252 nontoxic Toxicity 0.000 description 2
- 230000003000 nontoxic effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000000750 progressive effect Effects 0.000 description 2
- 230000003134 recirculating effect Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B7/00—Compression machines, plants or systems, with cascade operation, i.e. with two or more circuits, the heat from the condenser of one circuit being absorbed by the evaporator of the next circuit
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/002—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant
- F25B9/006—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the refrigerant the refrigerant containing more than one component
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D2400/00—General features of, or devices for refrigerators, cold rooms, ice-boxes, or for cooling or freezing apparatus not covered by any other subclass
- F25D2400/28—Quick cooling
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Devices That Are Associated With Refrigeration Equipment (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US27114001P | 2001-02-23 | 2001-02-23 | |
| PCT/US2002/005801 WO2002095308A2 (en) | 2001-02-23 | 2002-02-25 | Ultra-low temperature closed-loop recirculating gas chilling system |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004527721A JP2004527721A (ja) | 2004-09-09 |
| JP2004527721A5 JP2004527721A5 (https=) | 2005-12-22 |
| JP4487233B2 true JP4487233B2 (ja) | 2010-06-23 |
Family
ID=23034361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002591740A Expired - Lifetime JP4487233B2 (ja) | 2001-02-23 | 2002-02-25 | 閉ループの超低温再循環ガス冷却装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7111467B2 (https=) |
| EP (1) | EP1362211A4 (https=) |
| JP (1) | JP4487233B2 (https=) |
| KR (1) | KR100852645B1 (https=) |
| CN (2) | CN102200356B (https=) |
| WO (1) | WO2002095308A2 (https=) |
Families Citing this family (54)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6505475B1 (en) | 1999-08-20 | 2003-01-14 | Hudson Technologies Inc. | Method and apparatus for measuring and improving efficiency in refrigeration systems |
| CN100483040C (zh) | 2000-06-28 | 2009-04-29 | 布鲁克斯自动化公司 | 用于深度低温的制冷系统的混合制冷剂 |
| US7478540B2 (en) | 2001-10-26 | 2009-01-20 | Brooks Automation, Inc. | Methods of freezeout prevention and temperature control for very low temperature mixed refrigerant systems |
| DE10216786C5 (de) * | 2002-04-15 | 2009-10-15 | Ers Electronic Gmbh | Verfahren und Vorrichtung zur Konditionierung von Halbleiterwafern und/oder Hybriden |
| EP2818530B1 (en) | 2004-01-28 | 2020-01-01 | Edwards Vacuum, LLC | Refrigeration cycle utilizing a mixed inert component refrigerant |
| US7349896B2 (en) * | 2004-12-29 | 2008-03-25 | Aol Llc | Query routing |
| JP2007303794A (ja) * | 2006-05-15 | 2007-11-22 | Sanyo Electric Co Ltd | 冷凍装置 |
| US7603871B2 (en) * | 2006-06-29 | 2009-10-20 | Test Enterprises, Inc. | High-flow cold air chiller |
| US20080121821A1 (en) * | 2006-11-27 | 2008-05-29 | Varian Semiconductor Equipment Associates Inc. | Techniques for low-temperature ion implantation |
| US7528392B2 (en) * | 2006-11-27 | 2009-05-05 | Varian Semiconductor Equipment Associates, Inc. | Techniques for low-temperature ion implantation |
| JP4626609B2 (ja) * | 2006-12-12 | 2011-02-09 | トヨタ自動車株式会社 | 流体供給装置 |
| US20080245086A1 (en) * | 2007-03-02 | 2008-10-09 | Polar King International, Inc. | Multi-zone low temperature freezer |
| JP5196452B2 (ja) * | 2007-04-24 | 2013-05-15 | キャリア コーポレイション | 充填量管理を備えた遷臨界冷媒蒸気圧縮システム |
| JP2010525294A (ja) | 2007-04-24 | 2010-07-22 | キャリア コーポレイション | 2系統エコノマイザ回路を備えた冷媒蒸気圧縮システム |
| DK2147264T3 (en) * | 2007-04-24 | 2019-03-04 | Carrier Corp | Refrigerant vapor compression system |
| US8671703B2 (en) * | 2007-05-14 | 2014-03-18 | Carrier Corporation | Refrigerant vapor compression system with flash tank economizer |
| US9989280B2 (en) * | 2008-05-02 | 2018-06-05 | Heatcraft Refrigeration Products Llc | Cascade cooling system with intercycle cooling or additional vapor condensation cycle |
| CN105650947A (zh) | 2009-07-28 | 2016-06-08 | 东芝开利株式会社 | 热源单元 |
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| CN101865589B (zh) * | 2010-07-14 | 2012-03-28 | 天津商业大学 | 环保、无氟超低温库 |
| TWI575062B (zh) | 2011-12-16 | 2017-03-21 | 拜歐菲樂Ip有限責任公司 | 低溫注射組成物,用於低溫調節導管中流量之系統及方法 |
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| CN102679617B (zh) * | 2012-06-21 | 2014-07-02 | 山东大学 | 一种压缩驱动吸附制冷方法及热泵系统 |
| JP5575191B2 (ja) * | 2012-08-06 | 2014-08-20 | 三菱電機株式会社 | 二元冷凍装置 |
| US9454158B2 (en) | 2013-03-15 | 2016-09-27 | Bhushan Somani | Real time diagnostics for flow controller systems and methods |
| CN105445046B (zh) * | 2014-08-06 | 2018-06-26 | 天津航天瑞莱科技有限公司 | 一种用于管路结构环境模拟的制冷及增压系统 |
| JP6714696B2 (ja) * | 2016-06-01 | 2020-06-24 | 株式会社アドテックス | 半導体検査装置用の冷却装置 |
| US11384962B2 (en) | 2016-06-13 | 2022-07-12 | Geoff ROWE | System, method and apparatus for the regeneration of nitrogen energy within a closed loop cryogenic system |
| US10865793B2 (en) | 2016-12-06 | 2020-12-15 | Air Squared, Inc. | Scroll type device having liquid cooling through idler shafts |
| CN106766297B (zh) * | 2016-12-22 | 2019-08-16 | 广州协义自动化科技有限公司 | 一种能快速恢复平衡压力的超低温水汽捕集泵系统 |
| US10983538B2 (en) | 2017-02-27 | 2021-04-20 | Flow Devices And Systems Inc. | Systems and methods for flow sensor back pressure adjustment for mass flow controller |
| CN106918524B (zh) * | 2017-03-25 | 2023-07-14 | 吴江市海拓仪器设备有限公司 | 一种冷热冲击系统及其具有该系统的冷热冲击机 |
| CN106951001A (zh) * | 2017-05-12 | 2017-07-14 | 成都市惠家胶粘制品有限公司 | 一种制造保护膜用流量稳定系统 |
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| CN110696314A (zh) * | 2019-11-06 | 2020-01-17 | 苏州斯泰姆克工业智能科技有限公司 | 一种基于低温高压气体的模具局部冷却系统 |
| GB2592189B (en) * | 2020-02-12 | 2022-06-08 | Edwards Vacuum Llc | A semiconductor wafer temperature control apparatus |
| KR102905600B1 (ko) * | 2020-05-20 | 2026-01-02 | 레르 리키드 쏘시에떼 아노님 뿌르 레드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드 | 120k 내지 200k 온도 범위에서 비활성이고 비-가압된 극저온 액체로 액상의 극저온 유체 사용 장치를 냉각시키기 위한 시스템 및 방법 |
| CN112032112A (zh) * | 2020-07-02 | 2020-12-04 | 杭州制氧机集团股份有限公司 | 一种闭式循环耦合的装置及其使用方法 |
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| KR102493453B1 (ko) * | 2021-05-11 | 2023-01-31 | 한국원자력연구원 | 열전도관 성능검증용 고온고압 가스냉각장치 |
| US11885328B2 (en) | 2021-07-19 | 2024-01-30 | Air Squared, Inc. | Scroll device with an integrated cooling loop |
| KR102722768B1 (ko) | 2022-04-18 | 2024-10-28 | 주식회사 프라임텍 | 양자 소자 평가용 극저온 냉각장치 |
| CN116430919B (zh) * | 2023-03-10 | 2025-08-12 | 长沙翼望半导体有限公司 | 一种用于探针台的气冷式温控系统 |
| CN119289585A (zh) * | 2023-07-10 | 2025-01-10 | 开利公司 | 用于冷柜装置的室外机组和冷柜装置 |
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-
2002
- 2002-02-25 CN CN201110071107.1A patent/CN102200356B/zh not_active Expired - Fee Related
- 2002-02-25 KR KR1020037010958A patent/KR100852645B1/ko not_active Expired - Fee Related
- 2002-02-25 CN CNA028052021A patent/CN1492987A/zh active Pending
- 2002-02-25 JP JP2002591740A patent/JP4487233B2/ja not_active Expired - Lifetime
- 2002-02-25 WO PCT/US2002/005801 patent/WO2002095308A2/en not_active Ceased
- 2002-02-25 US US10/470,123 patent/US7111467B2/en not_active Expired - Lifetime
- 2002-02-25 EP EP02739089A patent/EP1362211A4/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| CN102200356A (zh) | 2011-09-28 |
| EP1362211A4 (en) | 2005-12-21 |
| WO2002095308A2 (en) | 2002-11-28 |
| WO2002095308A3 (en) | 2003-03-06 |
| KR20030077639A (ko) | 2003-10-01 |
| CN102200356B (zh) | 2014-03-26 |
| CN1492987A (zh) | 2004-04-28 |
| EP1362211A2 (en) | 2003-11-19 |
| JP2004527721A (ja) | 2004-09-09 |
| KR100852645B1 (ko) | 2008-08-18 |
| US20040129015A1 (en) | 2004-07-08 |
| US7111467B2 (en) | 2006-09-26 |
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