JP2004521496A - 干渉遮蔽を有する集積回路ダイ - Google Patents
干渉遮蔽を有する集積回路ダイ Download PDFInfo
- Publication number
- JP2004521496A JP2004521496A JP2002566551A JP2002566551A JP2004521496A JP 2004521496 A JP2004521496 A JP 2004521496A JP 2002566551 A JP2002566551 A JP 2002566551A JP 2002566551 A JP2002566551 A JP 2002566551A JP 2004521496 A JP2004521496 A JP 2004521496A
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- package
- circuit
- substrate
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W42/00—Arrangements for protection of devices
- H10W42/60—Arrangements for protection of devices protecting against electrostatic charges or discharges, e.g. Faraday shields
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W20/00—Interconnections in chips, wafers or substrates
- H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
- H10W20/497—Inductive arrangements or effects of, or between, wiring layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W42/00—Arrangements for protection of devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W42/00—Arrangements for protection of devices
- H10W42/20—Arrangements for protection of devices protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W42/00—Arrangements for protection of devices
- H10W42/20—Arrangements for protection of devices protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons
- H10W42/261—Arrangements for protection of devices protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons characterised by their shapes or dispositions
- H10W42/263—Shielding bumps
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F2017/008—Electric or magnetic shielding of printed inductances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F2017/0086—Printed inductances on semiconductor substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/072—Connecting or disconnecting of bump connectors
- H10W72/07251—Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
Landscapes
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Semiconductor Integrated Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/785,620 US6486534B1 (en) | 2001-02-16 | 2001-02-16 | Integrated circuit die having an interference shield |
| PCT/US2002/004193 WO2002067326A2 (en) | 2001-02-16 | 2002-02-13 | Integrated circuit die having an electromagnetic interference shield |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004521496A true JP2004521496A (ja) | 2004-07-15 |
| JP2004521496A5 JP2004521496A5 (https=) | 2005-12-22 |
Family
ID=25136069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002566551A Pending JP2004521496A (ja) | 2001-02-16 | 2002-02-13 | 干渉遮蔽を有する集積回路ダイ |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US6486534B1 (https=) |
| EP (1) | EP1393372A2 (https=) |
| JP (1) | JP2004521496A (https=) |
| AU (1) | AU2002306475A1 (https=) |
| WO (1) | WO2002067326A2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019244487A1 (ja) * | 2018-06-22 | 2019-12-26 | 日本電産株式会社 | モータ |
Families Citing this family (66)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US6400015B1 (en) * | 2000-03-31 | 2002-06-04 | Intel Corporation | Method of creating shielded structures to protect semiconductor devices |
| US6844236B2 (en) * | 2001-07-23 | 2005-01-18 | Agere Systems Inc. | Method and structure for DC and RF shielding of integrated circuits |
| US7310039B1 (en) | 2001-11-30 | 2007-12-18 | Silicon Laboratories Inc. | Surface inductor |
| SG104291A1 (en) * | 2001-12-08 | 2004-06-21 | Micron Technology Inc | Die package |
| US7161240B2 (en) * | 2002-06-27 | 2007-01-09 | Eastman Kodak Company | Insitu-cooled electrical assemblage |
| US7087977B2 (en) * | 2002-09-27 | 2006-08-08 | Renesas Technology Corp. | Semiconductor device including multiple wiring layers and circuits operating in different frequency bands |
| US20040222511A1 (en) * | 2002-10-15 | 2004-11-11 | Silicon Laboratories, Inc. | Method and apparatus for electromagnetic shielding of a circuit element |
| US7141883B2 (en) * | 2002-10-15 | 2006-11-28 | Silicon Laboratories Inc. | Integrated circuit package configuration incorporating shielded circuit element structure |
| JP3938742B2 (ja) * | 2002-11-18 | 2007-06-27 | Necエレクトロニクス株式会社 | 電子部品装置及びその製造方法 |
| US6836022B2 (en) * | 2003-02-13 | 2004-12-28 | Medtronic, Inc. | High voltage flip-chip component package and method for forming the same |
| DE10309614A1 (de) * | 2003-03-05 | 2004-09-23 | Infineon Technologies Ag | Halbleiterstruktur und Verfahren zur Herstellung derselben |
| DE502004008576D1 (de) | 2003-07-02 | 2009-01-15 | Siemens Home & Office Comm | Abschirmung für emi-gefährdete elektronische bauelemente und/oder schaltungen von elektronischen geräten |
| US7813876B2 (en) * | 2003-08-05 | 2010-10-12 | Northrop Grumman Corporation | Dismount tablet computer assembly for wireless communication applications |
| US7805243B2 (en) * | 2003-08-05 | 2010-09-28 | Northrop Grumman Corporation | Personal digital assistant having satellite communications capacity |
| TWI226693B (en) * | 2003-10-03 | 2005-01-11 | Via Tech Inc | BAG package and printed circuit board for supporting the package |
| EP1553812A3 (fr) * | 2003-12-11 | 2013-04-03 | STMicroelectronics S.A. | Puce à semiconducteur et circuit comprenant une inductance blindée |
| US20050206015A1 (en) * | 2004-03-16 | 2005-09-22 | Texas Instruments Incorporated | System and method for attenuating electromagnetic interference |
| US7375411B2 (en) * | 2004-06-03 | 2008-05-20 | Silicon Laboratories Inc. | Method and structure for forming relatively dense conductive layers |
| US20050274970A1 (en) * | 2004-06-14 | 2005-12-15 | Lumileds Lighting U.S., Llc | Light emitting device with transparent substrate having backside vias |
| JP4559163B2 (ja) * | 2004-08-31 | 2010-10-06 | ルネサスエレクトロニクス株式会社 | 半導体装置用パッケージ基板およびその製造方法と半導体装置 |
| US7135766B1 (en) * | 2004-11-30 | 2006-11-14 | Rf Micro Devices, Inc. | Integrated power devices and signal isolation structure |
| JP2006173145A (ja) * | 2004-12-10 | 2006-06-29 | Sharp Corp | インダクタ、共振回路、半導体集積回路、発振器、通信装置 |
| US7323948B2 (en) * | 2005-08-23 | 2008-01-29 | International Business Machines Corporation | Vertical LC tank device |
| WO2007023327A1 (en) * | 2005-08-24 | 2007-03-01 | Infineon Technologies Ag | Magnetically alignable semiconductor chip and rewiring substrate and a method for magnetically aligning the semiconductor chip and the rewiring substrate |
| US7501924B2 (en) * | 2005-09-30 | 2009-03-10 | Silicon Laboratories Inc. | Self-shielding inductor |
| US7514765B2 (en) * | 2006-04-25 | 2009-04-07 | Dell Products L.P. | Solution of power consumption reduction for inverter covered by metal case |
| DE102006062844B4 (de) * | 2006-05-12 | 2016-11-17 | Infineon Technologies Ag | Abschirmvorrichtung zum Abschirmen von elektromagnetischer Strahlung |
| DE102006022360B4 (de) * | 2006-05-12 | 2009-07-09 | Infineon Technologies Ag | Abschirmvorrichtung |
| TWI316748B (en) * | 2006-07-17 | 2009-11-01 | Via Tech Inc | Cooling module against esd and electronic package, assembly, and system using the same |
| US7514774B2 (en) * | 2006-09-15 | 2009-04-07 | Hong Kong Applied Science Technology Research Institute Company Limited | Stacked multi-chip package with EMI shielding |
| DE102006047203B4 (de) * | 2006-10-05 | 2013-01-31 | Austriamicrosystems Ag | Mikrophonanordnung und Verfahren zu deren Herstellung |
| US7936052B2 (en) | 2008-09-30 | 2011-05-03 | Infineon Technologies Ag | On-chip RF shields with backside redistribution lines |
| US7948064B2 (en) * | 2008-09-30 | 2011-05-24 | Infineon Technologies Ag | System on a chip with on-chip RF shield |
| US8169059B2 (en) * | 2008-09-30 | 2012-05-01 | Infineon Technologies Ag | On-chip RF shields with through substrate conductors |
| US8889548B2 (en) | 2008-09-30 | 2014-11-18 | Infineon Technologies Ag | On-chip RF shields with backside redistribution lines |
| US8063469B2 (en) * | 2008-09-30 | 2011-11-22 | Infineon Technologies Ag | On-chip radio frequency shield with interconnect metallization |
| US8178953B2 (en) * | 2008-09-30 | 2012-05-15 | Infineon Technologies Ag | On-chip RF shields with front side redistribution lines |
| US8749032B2 (en) * | 2008-12-05 | 2014-06-10 | Sige Semiconductor, Inc. | Integrated circuit with improved transmission line structure and electromagnetic shielding between radio frequency circuit paths |
| DE102009009442A1 (de) * | 2009-02-18 | 2010-09-09 | Polylc Gmbh & Co. Kg | Organische Elektronikschaltung |
| TWI381306B (zh) | 2009-04-23 | 2013-01-01 | Htc Corp | 可攜式電子裝置及其影像資料通訊方法 |
| US8072056B2 (en) | 2009-06-10 | 2011-12-06 | Medtronic, Inc. | Apparatus for restricting moisture ingress |
| US8172760B2 (en) | 2009-06-18 | 2012-05-08 | Medtronic, Inc. | Medical device encapsulated within bonded dies |
| US8502735B1 (en) * | 2009-11-18 | 2013-08-06 | Ball Aerospace & Technologies Corp. | Antenna system with integrated circuit package integrated radiators |
| JP6009139B2 (ja) * | 2010-06-22 | 2016-10-19 | ルネサスエレクトロニクス株式会社 | 半導体装置及び半導体装置の製造方法 |
| US8619435B2 (en) * | 2010-07-06 | 2013-12-31 | Honeywell International Inc. | Electromagnetic interference (EMI) diverter |
| US20120074559A1 (en) * | 2010-09-24 | 2012-03-29 | International Business Machines Corporation | Integrated circuit package using through substrate vias to ground lid |
| US8666505B2 (en) | 2010-10-26 | 2014-03-04 | Medtronic, Inc. | Wafer-scale package including power source |
| US8424388B2 (en) | 2011-01-28 | 2013-04-23 | Medtronic, Inc. | Implantable capacitive pressure sensor apparatus and methods regarding same |
| TWI499011B (zh) * | 2011-02-10 | 2015-09-01 | 國立清華大學 | 封裝結構及其製作方法 |
| US9693492B2 (en) | 2011-04-14 | 2017-06-27 | Mitsubishi Electric Corporation | High-frequency package |
| US8648664B2 (en) | 2011-09-30 | 2014-02-11 | Silicon Laboratories Inc. | Mutual inductance circuits |
| US8948712B2 (en) | 2012-05-31 | 2015-02-03 | Skyworks Solutions, Inc. | Via density and placement in radio frequency shielding applications |
| WO2014011808A1 (en) | 2012-07-13 | 2014-01-16 | Skyworks Solutions, Inc. | Racetrack design in radio frequency shielding applications |
| US9054096B2 (en) * | 2012-09-25 | 2015-06-09 | Xilinx, Inc. | Noise attenuation wall |
| EP2757374A1 (en) * | 2013-01-17 | 2014-07-23 | F. Hoffmann-La Roche AG | Method for preparing an outer surface of a planar waveguide to be capable of binding target samples along a plurality of predetermined lines and a planar waveguide |
| US8952504B2 (en) * | 2013-02-08 | 2015-02-10 | Qualcomm Incorporated | Small form factor magnetic shield for magnetorestrictive random access memory (MRAM) |
| US9478507B2 (en) | 2013-03-27 | 2016-10-25 | Qualcomm Incorporated | Integrated circuit assembly with faraday cage |
| US8748245B1 (en) | 2013-03-27 | 2014-06-10 | Io Semiconductor, Inc. | Semiconductor-on-insulator integrated circuit with interconnect below the insulator |
| US9466536B2 (en) | 2013-03-27 | 2016-10-11 | Qualcomm Incorporated | Semiconductor-on-insulator integrated circuit with back side gate |
| WO2016114941A1 (en) * | 2015-01-14 | 2016-07-21 | Qualcomm Switch Corp. | Integrated circuit assembly with faraday cage |
| CN112168146B (zh) * | 2015-12-22 | 2024-06-21 | 京瓷株式会社 | 测量传感器用封装体以及测量传感器 |
| US11694970B2 (en) | 2021-03-19 | 2023-07-04 | Nxp B.V. | Plated pillar dies having integrated electromagnetic shield layers |
| CN115602666A (zh) * | 2021-06-28 | 2023-01-13 | 深圳市中兴微电子技术有限公司(Cn) | 芯片组件 |
| US20230014046A1 (en) * | 2021-07-13 | 2023-01-19 | Mediatek Inc. | Semiconductor devices with in-package PGS for coupling noise suppression |
| US20240021353A1 (en) * | 2022-07-15 | 2024-01-18 | Qualcomm Incorporated | Three-dimensional vertical co-spiral inductors |
| US12518908B2 (en) * | 2024-01-31 | 2026-01-06 | Avago Technologies International Sales Pte. Limited | Systems and methods for integrating inductors within printed circuit boards |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4551747A (en) * | 1982-10-05 | 1985-11-05 | Mayo Foundation | Leadless chip carrier apparatus providing for a transmission line environment and improved heat dissipation |
| US5256590A (en) * | 1989-11-24 | 1993-10-26 | Mitsubishi Denki Kabushiki Kaisha | Method of making a shielded semiconductor device |
| US5475606A (en) * | 1993-03-05 | 1995-12-12 | International Business Machines Corporation | Faraday cage for a printed circuit card |
| US5446311A (en) * | 1994-09-16 | 1995-08-29 | International Business Machines Corporation | High-Q inductors in silicon technology without expensive metalization |
| US6472723B1 (en) * | 1996-03-22 | 2002-10-29 | Telefonaktiebolaget Lm Ericsson (Publ) | Substrate contacts and shielding devices in a semiconductor component |
| US5986340A (en) | 1996-05-02 | 1999-11-16 | National Semiconductor Corporation | Ball grid array package with enhanced thermal and electrical characteristics and electronic device incorporating same |
| JPH10112517A (ja) * | 1996-10-03 | 1998-04-28 | Ngk Spark Plug Co Ltd | 電子部品収納用パッケージ |
| US6130483A (en) * | 1997-03-05 | 2000-10-10 | Kabushiki Kaisha Toshiba | MMIC module using flip-chip mounting |
| GB2324649A (en) | 1997-04-16 | 1998-10-28 | Ibm | Shielded semiconductor package |
| US6166403A (en) * | 1997-11-12 | 2000-12-26 | Lsi Logic Corporation | Integrated circuit having embedded memory with electromagnetic shield |
| US6181279B1 (en) * | 1998-05-08 | 2001-01-30 | Northrop Grumman Corporation | Patch antenna with an electrically small ground plate using peripheral parasitic stubs |
| US6229404B1 (en) * | 1998-08-31 | 2001-05-08 | Kyocera Corporation | Crystal oscillator |
-
2001
- 2001-02-16 US US09/785,620 patent/US6486534B1/en not_active Expired - Fee Related
-
2002
- 2002-02-13 WO PCT/US2002/004193 patent/WO2002067326A2/en not_active Ceased
- 2002-02-13 JP JP2002566551A patent/JP2004521496A/ja active Pending
- 2002-02-13 AU AU2002306475A patent/AU2002306475A1/en not_active Abandoned
- 2002-02-13 EP EP02742469A patent/EP1393372A2/en not_active Withdrawn
- 2002-09-13 US US10/243,487 patent/US7151011B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019244487A1 (ja) * | 2018-06-22 | 2019-12-26 | 日本電産株式会社 | モータ |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2002067326A3 (en) | 2003-12-18 |
| AU2002306475A1 (en) | 2002-09-04 |
| WO2002067326A9 (en) | 2004-04-01 |
| US20030017646A1 (en) | 2003-01-23 |
| US6486534B1 (en) | 2002-11-26 |
| US7151011B2 (en) | 2006-12-19 |
| WO2002067326A2 (en) | 2002-08-29 |
| EP1393372A2 (en) | 2004-03-03 |
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