JP2004521398A5 - - Google Patents
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- Publication number
- JP2004521398A5 JP2004521398A5 JP2003521410A JP2003521410A JP2004521398A5 JP 2004521398 A5 JP2004521398 A5 JP 2004521398A5 JP 2003521410 A JP2003521410 A JP 2003521410A JP 2003521410 A JP2003521410 A JP 2003521410A JP 2004521398 A5 JP2004521398 A5 JP 2004521398A5
- Authority
- JP
- Japan
- Prior art keywords
- exit surface
- portions
- optically
- convex
- concave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007704 transition Effects 0.000 claims 2
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10139355A DE10139355A1 (de) | 2001-08-17 | 2001-08-17 | Anordnung und Vorrichtung zur optischen Strahlhomogenisierung |
| PCT/EP2002/006042 WO2003016963A2 (de) | 2001-08-17 | 2002-06-03 | Anordnung und vorrichtung zur optischen strahlhomogenisierung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004521398A JP2004521398A (ja) | 2004-07-15 |
| JP2004521398A5 true JP2004521398A5 (enExample) | 2005-05-26 |
Family
ID=7695049
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003521410A Pending JP2004521398A (ja) | 2001-08-17 | 2002-06-03 | 光線を光学的に均質化するための配置および装置 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US20040223225A1 (enExample) |
| EP (1) | EP1421415B1 (enExample) |
| JP (1) | JP2004521398A (enExample) |
| KR (1) | KR20040032928A (enExample) |
| CN (1) | CN100414322C (enExample) |
| AT (1) | ATE549655T1 (enExample) |
| AU (1) | AU2002319192A1 (enExample) |
| DE (1) | DE10139355A1 (enExample) |
| WO (1) | WO2003016963A2 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10327733C5 (de) * | 2003-06-18 | 2012-04-19 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Formung eines Lichtstrahls |
| DE102004020250A1 (de) * | 2004-04-26 | 2005-11-10 | Hentze-Lissotschenko Patentverwaltungs Gmbh & Co. Kg | Vorrichtung und Verfahren zur optischen Strahlhomogenisierung |
| JP4579575B2 (ja) | 2004-05-14 | 2010-11-10 | 株式会社半導体エネルギー研究所 | レーザ照射方法及びレーザ照射装置 |
| JP3963275B2 (ja) * | 2004-07-16 | 2007-08-22 | 株式会社エンプラス | 面光源装置、照明ユニット及び光束制御部材 |
| DE102004039936A1 (de) * | 2004-08-17 | 2006-02-23 | Hentze-Lissotschenko Patentverwaltungs Gmbh & Co. Kg | Vorrichtung zur Homogenisierung von Licht sowie Verfahren zur Herstellung der Vorrichtung |
| US7400456B2 (en) | 2004-09-21 | 2008-07-15 | Avago Technologies Ecbu Ip Pte Ltd | Lens having seamless profile defined by cubic polynomial function |
| KR101098338B1 (ko) | 2005-04-22 | 2011-12-26 | 삼성전자주식회사 | 광학 패키지, 광학 렌즈 및 이를 갖는 백라이트 어셈블리및 표시장치 |
| WO2007038954A1 (de) * | 2005-09-30 | 2007-04-12 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur homogenisierung von licht |
| WO2007048622A1 (de) * | 2005-10-27 | 2007-05-03 | Limo Patentverwaltung Gmbh & Co. Kg. | Vorrichtung zur homogenisierung von licht |
| US7907341B2 (en) * | 2006-09-28 | 2011-03-15 | Sumitomo Electric Industries, Ltd. | Laser processing method and laser processing apparatus |
| DE102008017947A1 (de) | 2008-04-09 | 2009-10-15 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung, Anordnung und Verfahren zur Homogenisierung zumindest teilweise kohärenten Laserlichts |
| DE102008024697B4 (de) | 2008-05-21 | 2014-02-27 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Homogenisierung zumindest teilweise kohärenten Laserlichts |
| DE102008027231B4 (de) * | 2008-06-06 | 2016-03-03 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Strahlformung |
| DE102009010693A1 (de) | 2009-02-26 | 2010-09-02 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Homogenisierung von Laserstrahlung |
| US9046500B2 (en) * | 2012-12-20 | 2015-06-02 | Kla-Tencor Corporation | Adaptable illuminating apparatus, system, and method for extreme ultra-violet light |
| NL2017493B1 (en) * | 2016-09-19 | 2018-03-27 | Kulicke & Soffa Liteq B V | Optical beam homogenizer based on a lens array |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3476463A (en) * | 1965-05-11 | 1969-11-04 | Perkin Elmer Corp | Coherent light optical system yielding an output beam of desired intensity distribution at a desired equiphase surface |
| JPS49114434A (enExample) * | 1973-02-12 | 1974-10-31 | ||
| US4560259A (en) * | 1980-10-31 | 1985-12-24 | Humphrey Instruments, Inc. | Objective refractor for the eye |
| AU553164B2 (en) * | 1980-10-31 | 1986-07-03 | Allergan Humphrey | Objective refractor for the eye |
| US4605282A (en) * | 1983-12-22 | 1986-08-12 | Pyramid Optical, Inc. | Line lens and method of design therefor |
| US5400114A (en) * | 1991-09-05 | 1995-03-21 | Hitachi, Ltd. | Rear-projection screen and a rear projection image display employing the rear-projection screen |
| DE19635942A1 (de) * | 1996-09-05 | 1998-03-12 | Vitaly Dr Lissotschenko | Optisches Strahlformungssystem |
| US6115181A (en) * | 1996-11-22 | 2000-09-05 | 3M Innovative Properties Company | Variable beam splitter having opposed alternating convex and concave lens structures |
| JPH10253916A (ja) * | 1997-03-10 | 1998-09-25 | Semiconductor Energy Lab Co Ltd | レーザー光学装置 |
| JP2000111714A (ja) * | 1998-09-30 | 2000-04-21 | Konica Corp | ソフトフォーカスフィルタおよびソフトフォーカスフィルタユニット |
| JP2000321404A (ja) * | 1999-05-12 | 2000-11-24 | Keiwa Inc | 光拡散シート |
-
2001
- 2001-08-17 DE DE10139355A patent/DE10139355A1/de not_active Withdrawn
-
2002
- 2002-06-03 EP EP02748729A patent/EP1421415B1/de not_active Expired - Lifetime
- 2002-06-03 US US10/275,157 patent/US20040223225A1/en not_active Abandoned
- 2002-06-03 KR KR10-2004-7002338A patent/KR20040032928A/ko not_active Ceased
- 2002-06-03 AT AT02748729T patent/ATE549655T1/de active
- 2002-06-03 JP JP2003521410A patent/JP2004521398A/ja active Pending
- 2002-06-03 AU AU2002319192A patent/AU2002319192A1/en not_active Abandoned
- 2002-06-03 CN CNB028161394A patent/CN100414322C/zh not_active Expired - Fee Related
- 2002-06-03 WO PCT/EP2002/006042 patent/WO2003016963A2/de not_active Ceased
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