JP2004520946A - ジェットによる基板表面の仕上げ - Google Patents
ジェットによる基板表面の仕上げ Download PDFInfo
- Publication number
- JP2004520946A JP2004520946A JP2002551129A JP2002551129A JP2004520946A JP 2004520946 A JP2004520946 A JP 2004520946A JP 2002551129 A JP2002551129 A JP 2002551129A JP 2002551129 A JP2002551129 A JP 2002551129A JP 2004520946 A JP2004520946 A JP 2004520946A
- Authority
- JP
- Japan
- Prior art keywords
- slurry
- nozzle
- jet
- substrate
- substrate surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 47
- 239000002002 slurry Substances 0.000 claims abstract description 50
- 239000012530 fluid Substances 0.000 claims abstract description 21
- 238000000034 method Methods 0.000 claims abstract description 20
- 239000007788 liquid Substances 0.000 claims abstract description 16
- 239000011248 coating agent Substances 0.000 claims abstract description 5
- 238000000576 coating method Methods 0.000 claims abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 238000012545 processing Methods 0.000 abstract description 6
- 230000008859 change Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 abstract description 2
- 239000002245 particle Substances 0.000 description 17
- 239000000463 material Substances 0.000 description 11
- 238000005498 polishing Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000003116 impacting effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/0025—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor for contact lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C3/00—Abrasive blasting machines or devices; Plants
- B24C3/18—Abrasive blasting machines or devices; Plants essentially provided with means for moving workpieces into different working positions
- B24C3/20—Abrasive blasting machines or devices; Plants essentially provided with means for moving workpieces into different working positions the work being supported by turntables
- B24C3/22—Apparatus using nozzles
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US25784300P | 2000-12-21 | 2000-12-21 | |
| PCT/US2001/049842 WO2002049804A1 (en) | 2000-12-21 | 2001-12-20 | Jet-induced finishing of a substrate surface |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008102079A Division JP2008207333A (ja) | 2000-12-21 | 2008-04-10 | ジェットによる基板表面の仕上げ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004520946A true JP2004520946A (ja) | 2004-07-15 |
| JP2004520946A5 JP2004520946A5 (enExample) | 2005-05-26 |
Family
ID=22977998
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002551129A Pending JP2004520946A (ja) | 2000-12-21 | 2001-12-20 | ジェットによる基板表面の仕上げ |
| JP2008102079A Pending JP2008207333A (ja) | 2000-12-21 | 2008-04-10 | ジェットによる基板表面の仕上げ |
| JP2009287496A Expired - Fee Related JP5009356B2 (ja) | 2000-12-21 | 2009-12-18 | ジェットによる基板表面の仕上げ装置 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008102079A Pending JP2008207333A (ja) | 2000-12-21 | 2008-04-10 | ジェットによる基板表面の仕上げ |
| JP2009287496A Expired - Fee Related JP5009356B2 (ja) | 2000-12-21 | 2009-12-18 | ジェットによる基板表面の仕上げ装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6719611B2 (enExample) |
| EP (1) | EP1349701B1 (enExample) |
| JP (3) | JP2004520946A (enExample) |
| AT (1) | ATE528107T1 (enExample) |
| AU (1) | AU2002232735A1 (enExample) |
| WO (1) | WO2002049804A1 (enExample) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4623710B2 (ja) * | 2003-09-05 | 2011-02-02 | 衛 光石 | 曲面加工方法 |
| US20050117232A1 (en) * | 2003-10-09 | 2005-06-02 | Forsberg Steven J. | Rheologic mirror |
| US6960116B2 (en) * | 2004-02-20 | 2005-11-01 | Roto-Finish Company, Inc. | Wheel polishing device |
| US7371685B2 (en) * | 2004-03-03 | 2008-05-13 | Intel Corporation | Low stress barrier layer removal |
| JP2006192536A (ja) * | 2005-01-14 | 2006-07-27 | Nhk Spring Co Ltd | 表面仕上げ装置及び方法、ディンプル・ダイ、ヘッド・サスペンション |
| US7959490B2 (en) | 2005-10-31 | 2011-06-14 | Depuy Products, Inc. | Orthopaedic component manufacturing method and equipment |
| DE102005060698A1 (de) * | 2005-12-19 | 2007-08-02 | Rolls-Royce Deutschland Ltd & Co Kg | Sekundärfluidkanalherstellungsverfahren |
| US7749049B2 (en) * | 2006-05-25 | 2010-07-06 | Lightmachinery Inc. | Submerged fluid jet polishing |
| US7521980B2 (en) * | 2006-08-25 | 2009-04-21 | Texas Instruments Incorporated | Process and temperature-independent voltage controlled attenuator and method |
| US7455573B2 (en) * | 2006-09-06 | 2008-11-25 | Lightmachinery Inc. | Fluid jet polishing with constant pressure pump |
| US7892071B2 (en) * | 2006-09-29 | 2011-02-22 | Depuy Products, Inc. | Orthopaedic component manufacturing method and equipment |
| US7544112B1 (en) * | 2006-12-13 | 2009-06-09 | Huffman Corporation | Method and apparatus for removing coatings from a substrate using multiple sequential steps |
| EP1977860B1 (de) * | 2007-04-04 | 2010-12-15 | Fisba Optik Ag | Verfahren und Vorrichtung zum Herstellen von optischen Elementen |
| US20110300779A1 (en) * | 2010-06-08 | 2011-12-08 | Talarico Ronald A | Abrasive blast contour machining to remove surface and near-surface crack initiation |
| US8894468B2 (en) | 2012-05-16 | 2014-11-25 | Flow International Corporation | Fluid jet receptacle with rotatable inlet feed component and related fluid jet cutting system and method |
| US9358668B2 (en) * | 2012-07-19 | 2016-06-07 | Ascent Aerospace, Llc | Fluid jet receiving receptacles and related fluid jet cutting systems |
| US9573289B2 (en) | 2013-10-28 | 2017-02-21 | Flow International Corporation | Fluid jet cutting systems |
| WO2015187135A1 (en) | 2014-06-04 | 2015-12-10 | Halliburton Energy Services, Inc. | High pressure jets for leaching catalysts from a polycrystalline diamond compact |
| US9463548B2 (en) * | 2015-03-05 | 2016-10-11 | Hamilton Sundstrand Corporation | Method and system for finishing component using abrasive media |
| TR201600898A2 (tr) * | 2016-01-21 | 2016-07-21 | Kartal Fuat | Su jeti̇ i̇le uyumlu tornalama düzeneği̇ |
| ES2604830B1 (es) * | 2016-04-28 | 2017-12-18 | Drylyte, S.L. | Proceso para alisado y pulido de metales por transporte iónico mediante cuerpos sólidos libres, y cuerpos sólidos para llevar a cabo dicho proceso. |
| US10471623B2 (en) * | 2016-10-18 | 2019-11-12 | Hmcc Acquireco2, Llc | Waterjet cutting system with variable liquid level |
| CN108356712B (zh) * | 2018-03-07 | 2020-01-07 | 中国工程物理研究院机械制造工艺研究所 | 一种形成高斯型去除函数的射流抛光加工方法 |
| CN108818321B (zh) * | 2018-07-03 | 2019-05-24 | 中国人民解放军国防科技大学 | 一种自清洗式纳米胶体射流抛光装置 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2714428B2 (ja) * | 1989-03-31 | 1998-02-16 | 株式会社芝浦製作所 | 円筒内面研掃装置 |
| JPH0761604B2 (ja) * | 1989-07-11 | 1995-07-05 | 日本板硝子株式会社 | 非接触型球面加工方法 |
| JPH071398A (ja) * | 1991-06-18 | 1995-01-06 | Kiyoyuki Horii | 切削・切断方法とその装置 |
| JP2808501B2 (ja) * | 1991-08-30 | 1998-10-08 | 三菱重工業株式会社 | 放電加工変質層の除去方法 |
| US5700181A (en) * | 1993-09-24 | 1997-12-23 | Eastman Kodak Company | Abrasive-liquid polishing and compensating nozzle |
| US5573446A (en) * | 1995-02-16 | 1996-11-12 | Eastman Kodak Company | Abrasive air spray shaping of optical surfaces |
| US5591068A (en) * | 1995-03-13 | 1997-01-07 | Regents Of The University Of California | Precision non-contact polishing tool |
| US5795212A (en) * | 1995-10-16 | 1998-08-18 | Byelocorp Scientific, Inc. | Deterministic magnetorheological finishing |
| JP3032182B2 (ja) * | 1997-10-24 | 2000-04-10 | 鹿島建設株式会社 | アブレシブジェットによる切削装置 |
| JP2000169993A (ja) * | 1998-09-28 | 2000-06-20 | Nippon Mining & Metals Co Ltd | 銅電解用チタン母板及びチタン母板の研磨装置 |
| JP3557582B2 (ja) * | 1999-01-29 | 2004-08-25 | 株式会社Neomax | ワーク切断装置およびワーク切断方法 |
-
2001
- 2001-12-20 JP JP2002551129A patent/JP2004520946A/ja active Pending
- 2001-12-20 US US10/033,856 patent/US6719611B2/en not_active Expired - Fee Related
- 2001-12-20 EP EP01992273A patent/EP1349701B1/en not_active Expired - Lifetime
- 2001-12-20 AT AT01992273T patent/ATE528107T1/de not_active IP Right Cessation
- 2001-12-20 AU AU2002232735A patent/AU2002232735A1/en not_active Abandoned
- 2001-12-20 WO PCT/US2001/049842 patent/WO2002049804A1/en not_active Ceased
-
2008
- 2008-04-10 JP JP2008102079A patent/JP2008207333A/ja active Pending
-
2009
- 2009-12-18 JP JP2009287496A patent/JP5009356B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP1349701B1 (en) | 2011-10-12 |
| US20020173238A1 (en) | 2002-11-21 |
| ATE528107T1 (de) | 2011-10-15 |
| EP1349701A1 (en) | 2003-10-08 |
| AU2002232735A1 (en) | 2002-07-01 |
| US6719611B2 (en) | 2004-04-13 |
| JP2010110889A (ja) | 2010-05-20 |
| JP5009356B2 (ja) | 2012-08-22 |
| WO2002049804A1 (en) | 2002-06-27 |
| JP2008207333A (ja) | 2008-09-11 |
| EP1349701A4 (en) | 2004-10-27 |
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