JP2004363304A5 - - Google Patents
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- Publication number
- JP2004363304A5 JP2004363304A5 JP2003159576A JP2003159576A JP2004363304A5 JP 2004363304 A5 JP2004363304 A5 JP 2004363304A5 JP 2003159576 A JP2003159576 A JP 2003159576A JP 2003159576 A JP2003159576 A JP 2003159576A JP 2004363304 A5 JP2004363304 A5 JP 2004363304A5
- Authority
- JP
- Japan
- Prior art keywords
- chip
- defect
- inspection
- respect
- chips
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000004065 semiconductor Substances 0.000 claims 14
- 230000007547 defect Effects 0.000 claims 10
- 238000007689 inspection Methods 0.000 claims 9
- 238000000034 method Methods 0.000 claims 7
- 238000001514 detection method Methods 0.000 claims 5
- 230000002950 deficient Effects 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003159576A JP2004363304A (ja) | 2003-06-04 | 2003-06-04 | 半導体装置の検査方法及び検査装置 |
| US10/859,189 US6992499B2 (en) | 2003-06-04 | 2004-06-03 | Test method and test apparatus for semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003159576A JP2004363304A (ja) | 2003-06-04 | 2003-06-04 | 半導体装置の検査方法及び検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004363304A JP2004363304A (ja) | 2004-12-24 |
| JP2004363304A5 true JP2004363304A5 (OSRAM) | 2005-06-23 |
Family
ID=33562194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003159576A Abandoned JP2004363304A (ja) | 2003-06-04 | 2003-06-04 | 半導体装置の検査方法及び検査装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US6992499B2 (OSRAM) |
| JP (1) | JP2004363304A (OSRAM) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040082859A1 (en) | 2002-07-01 | 2004-04-29 | Alan Schaer | Method and apparatus employing ultrasound energy to treat body sphincters |
| JP5768056B2 (ja) | 2009-10-30 | 2015-08-26 | リコール メディカル インコーポレイテッドReCor Medical, Inc. | 経皮的超音波腎神経除去による高血圧症を治療するための方法及び装置 |
| JP2017062263A (ja) * | 2012-03-16 | 2017-03-30 | 株式会社堀場製作所 | 試料分析装置及び試料分析プログラム |
| US10156512B2 (en) * | 2013-03-01 | 2018-12-18 | Futurewei Technologies, Inc. | System and method for measuring thermal reliability of multi-chip modules |
| WO2014159273A1 (en) | 2013-03-14 | 2014-10-02 | Recor Medical, Inc. | Methods of plating or coating ultrasound transducers |
| US10456605B2 (en) | 2013-03-14 | 2019-10-29 | Recor Medical, Inc. | Ultrasound-based neuromodulation system |
| JP2014229635A (ja) * | 2013-05-17 | 2014-12-08 | 株式会社東芝 | 半導体検査方法および半導体検査装置 |
| CN108169651B (zh) * | 2017-11-22 | 2021-05-11 | 北京无线电计量测试研究所 | 一种时钟晶体振荡器检测方法 |
| KR101972745B1 (ko) * | 2017-12-15 | 2019-04-25 | 남정훈 | 반도체칩 카운팅 방법 |
| CN109712912B (zh) * | 2018-12-06 | 2023-07-18 | 通富微电子股份有限公司 | 一种芯片倒装设备及方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996020412A1 (en) | 1994-12-23 | 1996-07-04 | Digirad | Semiconductor gamma-ray camera and medical imaging system |
| US5793650A (en) * | 1995-10-19 | 1998-08-11 | Analog Devices, Inc. | System and method of identifying the number of chip failures on a wafer attributed to cluster failures |
| JPH10214870A (ja) | 1997-01-29 | 1998-08-11 | Hitachi Ltd | 半導体装置の製造方法 |
| JPH10313026A (ja) | 1997-05-13 | 1998-11-24 | Seiko Epson Corp | 半導体装置の異物検査装置および異物検査方法 |
| JP2000243795A (ja) * | 1999-02-22 | 2000-09-08 | Ando Electric Co Ltd | バーンインテスタにおける電源電流測定回路 |
| JP3802716B2 (ja) | 1999-09-17 | 2006-07-26 | 株式会社日立製作所 | 試料の検査方法及びその装置 |
| JP2002026102A (ja) | 2000-06-30 | 2002-01-25 | Hitachi Ltd | 検査情報処理方法及びその検査システム |
| US6657453B2 (en) * | 2002-03-15 | 2003-12-02 | Infineon Technologies Ag | Semiconductor wafer testing system and method |
-
2003
- 2003-06-04 JP JP2003159576A patent/JP2004363304A/ja not_active Abandoned
-
2004
- 2004-06-03 US US10/859,189 patent/US6992499B2/en not_active Expired - Fee Related
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