JP2004356095A - 平板表示装置及びその製造方法 - Google Patents
平板表示装置及びその製造方法 Download PDFInfo
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- JP2004356095A JP2004356095A JP2004145436A JP2004145436A JP2004356095A JP 2004356095 A JP2004356095 A JP 2004356095A JP 2004145436 A JP2004145436 A JP 2004145436A JP 2004145436 A JP2004145436 A JP 2004145436A JP 2004356095 A JP2004356095 A JP 2004356095A
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- thin film
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 239000010409 thin film Substances 0.000 claims abstract description 119
- 239000010408 film Substances 0.000 claims abstract description 29
- 238000002161 passivation Methods 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 22
- 238000007789 sealing Methods 0.000 claims description 12
- 230000003746 surface roughness Effects 0.000 claims description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- 239000001301 oxygen Substances 0.000 claims description 8
- 238000002207 thermal evaporation Methods 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 4
- 238000007737 ion beam deposition Methods 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 230000035515 penetration Effects 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052782 aluminium Inorganic materials 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 2
- 150000002500 ions Chemical class 0.000 description 6
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 230000005525 hole transport Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000004840 adhesive resin Substances 0.000 description 1
- 229920006223 adhesive resin Polymers 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000007735 ion beam assisted deposition Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/841—Self-supporting sealing arrangements
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/26—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/82—Cathodes
- H10K50/822—Cathodes characterised by their shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/87—Passivation; Containers; Encapsulations
- H10K59/871—Self-supporting sealing arrangements
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
【解決手段】本発明の有機電界発光表示装置は、基板210上に順次形成されたアノード電極220、有機薄膜層230及びカソード電極240を有するが、前記カソード電極240は、同一物質でできて互いに違う緻密度またはグレインサイズを有する、少なくとも二層薄膜で成り立つ。前記カソード電極240の少なくとも二層薄膜中、下部膜は緻密度が低くて、グレーンサイズが大きい第1Al薄膜241で成り立ち、上部膜は前記第1Al薄膜241よりは相対的に緻密度が高く、グレーンサイズが小さい第2Al薄膜242で成り立つ。本発明はカソード電極を緻密度が互いに違う二層構造のAl薄膜に形成させることで、酸素または水分に対するパッシベーション機能を向上させ、表示装置の長寿命化できる。
【選択図】図1
Description
本発明の他の目的は、寿命を延長できる平板表示装置及びその製造方法を提供することである。
210 ガラス基板
220 アノード電極
230 有機薄膜層
240 カソード電極
241、242 Al薄膜
Claims (20)
- 基板上に順次形成された上部電極、少なくとも一つの有機薄膜層及び下部電極を含み、
前記上部電極は、互いに違う緻密度を持つ少なくとも二層薄膜で成ることを特徴とする有機電界発光表示装置。 - 請求項1において、前記上部電極を構成する少なくとも二層薄膜層中、緻密度が一番高い薄膜を最上部膜に形成させ、前記緻密度が一番高い最上部膜は、湿気または酸素の浸透を防ぐパッシベーションの役割をすることを特徴とする有機電界発光表示装置。
- 請求項2において、前記上部電極を構成する少なくとも二層薄膜は、前記二層薄膜の緻密度の差異により薄膜間の境界面が存在するか、または前記二層薄膜の緻密度が漸進的に変化して薄膜間の境界面が存在しないことを特徴とする有機電界発光表示装置。
- 請求項1において、前記上部電極の少なくとも二層薄膜は、同一な導電性物質であることを特徴とする有機電界発光表示装置。
- 請求項1において、前記上部電極は、有機薄膜層上に順次的に形成された、緻密度が低い第1導電性薄膜と前記第1薄膜よりは相対的に緻密度が大きい第2導電性薄膜を具備することを特徴とする有機電界発光表示装置。
- 請求項1において、前記上部電極の少なくとも二層薄膜は、Alであることを特徴とする有機電界発光表示装置。
- 基板上に順次形成された下部電極、少なくとも一つの有機薄膜層及び上部電極を含め、
前記上部電極は、互いに違うグレーンサイズを持つ少なくとも二層薄膜であることを特徴とする有機電界発光表示装置。 - 請求項7において、前記上部電極を構成する少なくとも二層薄膜中、グレーンサイズがもっとも小さい薄膜を最上部膜に形成させ、前記グレーンサイズがもっとも小さい最上部膜は、湿気または酸素の浸透を防ぐパッシベーションの役割をすることを特徴とする有機電界発光表示装置。
- 請求項7において、前記上部電極を構成する少なくとも二層薄膜は、前記二層薄膜のグレーンサイズの差異により薄膜間の境界面が存在するか、または前記二層薄膜のグレーンサイズが漸進的に変化して薄膜間の境界面が存在しないことを特徴とする有機電界発光表示装置。
- 請求項7において、前記上部電極の少なくとも二層薄膜は、同一な導電性物質であることを特徴とする有機電界発光表示装置。
- 請求項7において、前記上部電極は、前記有機薄膜層に順次的に形成され、グレーンサイズが大きい第1薄膜と前記第1薄膜よりは相対的にグレーンサイズが小さい第2薄膜を具備することを特徴とする有機電界発光表示装置。
- 請求項11において、前記第1薄膜は、グレーンサイズが10nmないし1μmであり、グレーン間の間隔は、1ないし100nmであり、第2薄膜はグレーンサイズが100nm以下でグレーン間の間隔は5nm以下であることを特徴とする有機電界発光表示装置。
- 請求項11において、前記第1薄膜の表面荒さは60ないし70Åであり、前記第2薄膜の表面荒さは10ないし50Åであることを特徴とする有機電界発光表示装置。
- 請求項11において、前記第1薄膜と前記第2薄膜は、Al薄膜であることを特徴とする有機電界発光表示装置。
- 基板上に順次形成された下部電極、少なくとも一つの有機薄膜層及び上部電極を具備する発光素子を含め、
前記上部電極は、基板から遠くなるほど緻密度が高くなりグレーンサイズが小さくなる導電性物質であり、前記有機薄膜層に所定の電圧を入力するための電極としての役割及び酸素または湿気が前記有機薄膜層に浸透するのを防ぐ保護膜の役割をすることを特徴とする有機電界発光表示装置。 - 請求項15において、前記発光素子を封じるための封止基板を更に含むことを特徴とする有機電界発光表示装置。
- 請求項15において、前記上部電極は、Al薄膜であることを特徴とする有機電界発光表示装置。
- 絶縁基板上に下部電極を形成する段階と、
前記下部電極形成後に下部電極上に有機薄膜層を形成する段階と、
前記有機薄膜層形成後に有機薄膜層上に互いに違う緻密度を持つ、少なくとも二層の薄膜を順次形成して上部電極を形成する段階と、
を有することを特徴とする有機電界発光表示装置の製造方法。 - 請求項18において、前記上部電極は、熱的イバポレーションまたはイオンビーム蒸着法中、一つを利用して蒸着された緻密度が低い第1薄膜と、補助ビームを利用した蒸着方法を利用して蒸着された緻密度が高い第2薄膜とを具備することを特徴とする有機電界発光装置の製造方法。
- 請求項19において、前記第1薄膜は、グレーンサイズが10nmないし1μmで、グレーン間の間隔は1ないし100nmであり、表面荒さが60ないし70ÅであるAl薄膜と、第2薄膜はグレーンサイズが100nm以下であり、グレーン間の間隔は5nmであり、表面荒さが10ないし50ÅであるAl薄膜とから形成されることを特徴とする有機電界発光表示装置の製造方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2003-0034181A KR100527189B1 (ko) | 2003-05-28 | 2003-05-28 | 평판표시장치 및 그의 제조방법 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008178110A Division JP2008282818A (ja) | 2003-05-28 | 2008-07-08 | 平板表示装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004356095A true JP2004356095A (ja) | 2004-12-16 |
JP4185020B2 JP4185020B2 (ja) | 2008-11-19 |
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JP2004145436A Expired - Lifetime JP4185020B2 (ja) | 2003-05-28 | 2004-05-14 | 平板表示装置の製造方法 |
JP2008178110A Pending JP2008282818A (ja) | 2003-05-28 | 2008-07-08 | 平板表示装置 |
Family Applications After (1)
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JP2008178110A Pending JP2008282818A (ja) | 2003-05-28 | 2008-07-08 | 平板表示装置 |
Country Status (4)
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US (2) | US7038236B2 (ja) |
JP (2) | JP4185020B2 (ja) |
KR (1) | KR100527189B1 (ja) |
CN (1) | CN100568580C (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007037358A1 (ja) * | 2005-09-29 | 2007-04-05 | Matsushita Electric Industrial Co., Ltd. | 有機elディスプレイおよびその製造方法 |
WO2009017024A1 (ja) * | 2007-07-31 | 2009-02-05 | Sumitomo Chemical Company, Limited | 有機エレクトロルミネッセンス装置の製造方法 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3486900B2 (ja) * | 2000-02-15 | 2004-01-13 | ソニー株式会社 | 発光装置およびそれを用いた光装置 |
KR100527189B1 (ko) * | 2003-05-28 | 2005-11-08 | 삼성에스디아이 주식회사 | 평판표시장치 및 그의 제조방법 |
CN1725521B (zh) * | 2004-07-16 | 2010-10-27 | 国际商业机器公司 | 光电子器件及其制造方法 |
KR100996227B1 (ko) * | 2008-08-01 | 2010-11-23 | 한국표준과학연구원 | 에스피엠 나노탐침 및 그 제조방법 |
KR101348408B1 (ko) * | 2008-12-02 | 2014-01-07 | 엘지디스플레이 주식회사 | 상부발광 방식 유기전계 발광소자 및 이의 제조 방법 |
KR101114350B1 (ko) * | 2011-03-08 | 2012-02-13 | 주식회사 엘지화학 | 유기발광소자의 봉지 구조 |
KR101114348B1 (ko) * | 2011-03-08 | 2012-02-13 | 주식회사 엘지화학 | 유기발광소자의 봉지 구조 |
KR101114351B1 (ko) * | 2011-03-08 | 2012-02-13 | 주식회사 엘지화학 | 유기발광소자의 봉지 구조 |
JP6021020B2 (ja) * | 2011-07-27 | 2016-11-02 | パナソニックIpマネジメント株式会社 | 有機エレクトロルミネッセンス素子 |
KR101935365B1 (ko) | 2012-12-14 | 2019-01-04 | 삼성전자주식회사 | 플렉서블 고체전해질, 이를 포함하는 전고체형 리튬전지, 및 이의 제조방법 |
WO2014130453A1 (en) * | 2013-02-19 | 2014-08-28 | Alumiplate, Inc. | Methods for improving adhesion of aluminum films |
KR101634135B1 (ko) | 2013-05-21 | 2016-06-29 | 삼성디스플레이 주식회사 | 발광 소자 및 그 제조방법 |
KR102470044B1 (ko) * | 2016-05-13 | 2022-11-24 | 삼성디스플레이 주식회사 | 플렉서블 표시 장치 및 이의 제조 방법 |
KR20230101325A (ko) * | 2021-12-29 | 2023-07-06 | 엘지디스플레이 주식회사 | 전계 발광 표시장치 |
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JPH03187193A (ja) * | 1989-12-18 | 1991-08-15 | Nikon Corp | 薄膜el素子 |
JP2846503B2 (ja) | 1990-06-14 | 1999-01-13 | 出光興産株式会社 | 素子用薄膜電極及びそれを有するエレクトロルミネッセンス素子並びにそれらの製造方法 |
US5364654A (en) * | 1990-06-14 | 1994-11-15 | Idemitsu Kosan Co., Ltd. | Process for production of a thin film electrode and an electroluminescence device |
US5110760A (en) * | 1990-09-28 | 1992-05-05 | The United States Of America As Represented By The Secretary Of The Navy | Method of nanometer lithography |
JPH04334895A (ja) | 1991-05-10 | 1992-11-20 | Toppan Printing Co Ltd | 有機薄膜el素子 |
JP3187193B2 (ja) | 1993-03-09 | 2001-07-11 | 帝人株式会社 | サポニン含有繊維 |
JPH07235281A (ja) | 1994-02-23 | 1995-09-05 | Toshiba Lighting & Technol Corp | 直流放電灯および該放電灯を用いた半導体露光装置並びに映写装置 |
JPH0922782A (ja) | 1995-07-10 | 1997-01-21 | Oki Electric Ind Co Ltd | 有機el素子およびその製造方法 |
JP3813990B2 (ja) * | 1996-09-04 | 2006-08-23 | ケンブリッジ ディスプレイ テクノロジー リミテッド | 有機発光デバイスおよびその製造方法 |
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-
2003
- 2003-05-28 KR KR10-2003-0034181A patent/KR100527189B1/ko active IP Right Grant
-
2004
- 2004-03-11 US US10/796,980 patent/US7038236B2/en not_active Expired - Lifetime
- 2004-04-22 CN CNB2004100353419A patent/CN100568580C/zh not_active Expired - Lifetime
- 2004-05-14 JP JP2004145436A patent/JP4185020B2/ja not_active Expired - Lifetime
-
2006
- 2006-03-02 US US11/365,498 patent/US7388223B2/en not_active Expired - Lifetime
-
2008
- 2008-07-08 JP JP2008178110A patent/JP2008282818A/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007037358A1 (ja) * | 2005-09-29 | 2007-04-05 | Matsushita Electric Industrial Co., Ltd. | 有機elディスプレイおよびその製造方法 |
US8080935B2 (en) | 2005-09-29 | 2011-12-20 | Panasonic Corporation | Organic EL display and method for manufacturing same |
WO2009017024A1 (ja) * | 2007-07-31 | 2009-02-05 | Sumitomo Chemical Company, Limited | 有機エレクトロルミネッセンス装置の製造方法 |
JP2009037811A (ja) * | 2007-07-31 | 2009-02-19 | Sumitomo Chemical Co Ltd | 有機el装置の製造方法 |
US8278126B2 (en) | 2007-07-31 | 2012-10-02 | Sumitomo Chemical Company, Limited | Method for manufacturing organic electroluminescence device |
Also Published As
Publication number | Publication date |
---|---|
CN1575076A (zh) | 2005-02-02 |
CN100568580C (zh) | 2009-12-09 |
KR100527189B1 (ko) | 2005-11-08 |
US7038236B2 (en) | 2006-05-02 |
JP4185020B2 (ja) | 2008-11-19 |
KR20040102653A (ko) | 2004-12-08 |
US7388223B2 (en) | 2008-06-17 |
US20040238815A1 (en) | 2004-12-02 |
JP2008282818A (ja) | 2008-11-20 |
US20060145150A1 (en) | 2006-07-06 |
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