JP2004311975A5 - - Google Patents

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Publication number
JP2004311975A5
JP2004311975A5 JP2004076958A JP2004076958A JP2004311975A5 JP 2004311975 A5 JP2004311975 A5 JP 2004311975A5 JP 2004076958 A JP2004076958 A JP 2004076958A JP 2004076958 A JP2004076958 A JP 2004076958A JP 2004311975 A5 JP2004311975 A5 JP 2004311975A5
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JP
Japan
Prior art keywords
plasma
microwave
planar antenna
antenna member
less
Prior art date
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Granted
Application number
JP2004076958A
Other languages
English (en)
Japanese (ja)
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JP4369264B2 (ja
JP2004311975A (ja
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Publication date
Application filed filed Critical
Priority claimed from JP2004076958A external-priority patent/JP4369264B2/ja
Priority to JP2004076958A priority Critical patent/JP4369264B2/ja
Priority to US10/549,859 priority patent/US20060251828A1/en
Priority to TW093107994A priority patent/TW200423213A/zh
Priority to PCT/JP2004/004070 priority patent/WO2004086483A1/ja
Priority to KR1020057017916A priority patent/KR100767492B1/ko
Priority to EP04722947A priority patent/EP1610369A4/en
Publication of JP2004311975A publication Critical patent/JP2004311975A/ja
Publication of JP2004311975A5 publication Critical patent/JP2004311975A5/ja
Publication of JP4369264B2 publication Critical patent/JP4369264B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004076958A 2003-03-25 2004-03-17 プラズマ成膜方法 Expired - Fee Related JP4369264B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2004076958A JP4369264B2 (ja) 2003-03-25 2004-03-17 プラズマ成膜方法
KR1020057017916A KR100767492B1 (ko) 2003-03-25 2004-03-24 플라즈마 성막방법 및 플라즈마 성막장치
TW093107994A TW200423213A (en) 2003-03-25 2004-03-24 Plasma filming method and plasma filming device
PCT/JP2004/004070 WO2004086483A1 (ja) 2003-03-25 2004-03-24 プラズマ成膜方法及びプラズマ成膜装置
US10/549,859 US20060251828A1 (en) 2003-03-25 2004-03-24 Plasma film-forming method and plasma film-forming apparatus
EP04722947A EP1610369A4 (en) 2003-03-25 2004-03-24 PLASMA FILM GENERATING METHOD AND PLASMA FILM GENERATING DEVICE

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003083292 2003-03-25
JP2004076958A JP4369264B2 (ja) 2003-03-25 2004-03-17 プラズマ成膜方法

Publications (3)

Publication Number Publication Date
JP2004311975A JP2004311975A (ja) 2004-11-04
JP2004311975A5 true JP2004311975A5 (cg-RX-API-DMAC7.html) 2006-09-21
JP4369264B2 JP4369264B2 (ja) 2009-11-18

Family

ID=33100373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004076958A Expired - Fee Related JP4369264B2 (ja) 2003-03-25 2004-03-17 プラズマ成膜方法

Country Status (6)

Country Link
US (1) US20060251828A1 (cg-RX-API-DMAC7.html)
EP (1) EP1610369A4 (cg-RX-API-DMAC7.html)
JP (1) JP4369264B2 (cg-RX-API-DMAC7.html)
KR (1) KR100767492B1 (cg-RX-API-DMAC7.html)
TW (1) TW200423213A (cg-RX-API-DMAC7.html)
WO (1) WO2004086483A1 (cg-RX-API-DMAC7.html)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3384795B2 (ja) * 1999-05-26 2003-03-10 忠弘 大見 プラズマプロセス装置
JP2006135303A (ja) * 2004-10-05 2006-05-25 Tokyo Electron Ltd プラズマ成膜方法及びプラズマ成膜装置、並びにプラズマ成膜装置に用いられる記憶媒体
JP4664119B2 (ja) * 2005-05-17 2011-04-06 東京エレクトロン株式会社 プラズマ処理装置
JP5162108B2 (ja) 2005-10-28 2013-03-13 日新電機株式会社 プラズマ生成方法及び装置並びにプラズマ処理装置
WO2007108394A1 (ja) * 2006-03-17 2007-09-27 National Institute Of Advanced Industrial Science And Technology 積層体及び炭素膜堆積方法
US8006640B2 (en) * 2006-03-27 2011-08-30 Tokyo Electron Limited Plasma processing apparatus and plasma processing method
JP5082411B2 (ja) * 2006-12-01 2012-11-28 東京エレクトロン株式会社 成膜方法
KR100898128B1 (ko) * 2007-07-30 2009-05-18 한국생산기술연구원 잉크젯 프린팅과 플라즈마 표면처리법을 이용한 미세패턴제작방법
JP2009088267A (ja) * 2007-09-28 2009-04-23 Tokyo Electron Ltd 成膜方法、成膜装置、記憶媒体及び半導体装置
US8800483B2 (en) 2009-05-08 2014-08-12 Peter F. Vandermeulen Methods and systems for plasma deposition and treatment
KR101772723B1 (ko) * 2010-06-28 2017-08-29 도쿄엘렉트론가부시키가이샤 플라즈마 처리 방법
US9530621B2 (en) * 2014-05-28 2016-12-27 Tokyo Electron Limited Integrated induction coil and microwave antenna as an all-planar source
TWI745318B (zh) * 2015-12-02 2021-11-11 德商巴斯夫歐洲公司 產生薄無機膜的方法
JP6664047B2 (ja) * 2016-03-31 2020-03-13 株式会社昭和真空 成膜装置及び成膜方法
JP6899693B2 (ja) * 2017-04-14 2021-07-07 東京エレクトロン株式会社 プラズマ処理装置及び制御方法
US10546724B2 (en) * 2017-05-10 2020-01-28 Mks Instruments, Inc. Pulsed, bidirectional radio frequency source/load
CN111033689B (zh) 2017-06-27 2023-07-28 彼得·F·范德莫伊伦 用于等离子体沉积和处理的方法及系统
US10861667B2 (en) 2017-06-27 2020-12-08 Peter F. Vandermeulen Methods and systems for plasma deposition and treatment
WO2021183373A1 (en) 2020-03-13 2021-09-16 Vandermeulen Peter F Methods and systems for medical plasma treatment and generation of plasma activated media
WO2023248347A1 (ja) * 2022-06-21 2023-12-28 株式会社日立ハイテク プラズマ処理装置および加熱装置

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Publication number Priority date Publication date Assignee Title
US5134965A (en) * 1989-06-16 1992-08-04 Hitachi, Ltd. Processing apparatus and method for plasma processing
US5698036A (en) * 1995-05-26 1997-12-16 Tokyo Electron Limited Plasma processing apparatus
US5803975A (en) * 1996-03-01 1998-09-08 Canon Kabushiki Kaisha Microwave plasma processing apparatus and method therefor
US6357385B1 (en) * 1997-01-29 2002-03-19 Tadahiro Ohmi Plasma device
US5800621A (en) * 1997-02-10 1998-09-01 Applied Materials, Inc. Plasma source for HDP-CVD chamber
TW376547B (en) * 1997-03-27 1999-12-11 Matsushita Electric Industrial Co Ltd Method and apparatus for plasma processing
KR100382388B1 (ko) * 1997-11-27 2003-05-09 동경 엘렉트론 주식회사 플라즈마 박막증착 방법 및 반도체 디바이스
JP3515347B2 (ja) * 1997-11-27 2004-04-05 東京エレクトロン株式会社 半導体デバイスの製造方法及び半導体デバイス
JP3189781B2 (ja) * 1998-04-08 2001-07-16 日本電気株式会社 半導体装置の製造方法
JP4361625B2 (ja) * 1998-10-05 2009-11-11 東京エレクトロン株式会社 半導体装置及びその製造方法
US6870123B2 (en) * 1998-10-29 2005-03-22 Canon Kabushiki Kaisha Microwave applicator, plasma processing apparatus having same, and plasma processing method
JP2001308071A (ja) * 2000-04-26 2001-11-02 Canon Inc Ｅ面分岐を有する導波管を用いたプラズマ処理装置及びプラズマ処理方法
US6652709B1 (en) * 1999-11-02 2003-11-25 Canon Kabushiki Kaisha Plasma processing apparatus having circular waveguide, and plasma processing method
JP4478352B2 (ja) * 2000-03-29 2010-06-09 キヤノン株式会社 プラズマ処理装置及びプラズマ処理方法並びに構造体の製造方法
JP2002220668A (ja) * 2000-11-08 2002-08-09 Daikin Ind Ltd 成膜ガスおよびプラズマ成膜方法
JP5010781B2 (ja) * 2001-03-28 2012-08-29 忠弘 大見 プラズマ処理装置

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