JP2004264767A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2004264767A5 JP2004264767A5 JP2003057343A JP2003057343A JP2004264767A5 JP 2004264767 A5 JP2004264767 A5 JP 2004264767A5 JP 2003057343 A JP2003057343 A JP 2003057343A JP 2003057343 A JP2003057343 A JP 2003057343A JP 2004264767 A5 JP2004264767 A5 JP 2004264767A5
- Authority
- JP
- Japan
- Prior art keywords
- general formula
- group
- alkyl group
- represented
- group represented
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003057343A JP4225806B2 (ja) | 2003-03-04 | 2003-03-04 | ポジ型レジスト組成物 |
| EP04004962A EP1457822A3 (en) | 2003-03-04 | 2004-03-03 | Positive resist composition |
| US10/792,306 US6969577B2 (en) | 2003-03-04 | 2004-03-04 | Positive resist composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003057343A JP4225806B2 (ja) | 2003-03-04 | 2003-03-04 | ポジ型レジスト組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004264767A JP2004264767A (ja) | 2004-09-24 |
| JP2004264767A5 true JP2004264767A5 (enExample) | 2005-09-22 |
| JP4225806B2 JP4225806B2 (ja) | 2009-02-18 |
Family
ID=32767875
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003057343A Expired - Fee Related JP4225806B2 (ja) | 2003-03-04 | 2003-03-04 | ポジ型レジスト組成物 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6969577B2 (enExample) |
| EP (1) | EP1457822A3 (enExample) |
| JP (1) | JP4225806B2 (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100785585B1 (ko) * | 2004-03-08 | 2007-12-13 | 미츠비시 레이온 가부시키가이샤 | 레지스트용 중합체, 레지스트 조성물 및 패턴 제조방법, 및레지스트용 중합체용 원료 화합물 |
| JP4494060B2 (ja) * | 2004-03-30 | 2010-06-30 | 東京応化工業株式会社 | ポジ型レジスト組成物 |
| DE102004037527A1 (de) * | 2004-07-29 | 2006-03-23 | Infineon Technologies Ag | Siliziumhaltiges Resistsystem für Lithographieverfahren |
| US7399581B2 (en) * | 2005-02-24 | 2008-07-15 | International Business Machines Corporation | Photoresist topcoat for a photolithographic process |
| JP4496434B2 (ja) * | 2005-11-24 | 2010-07-07 | 信越化学工業株式会社 | 多官能（メタ）アクリレート化合物、光硬化性樹脂組成物及び物品 |
| JP4705897B2 (ja) * | 2006-03-17 | 2011-06-22 | 富士フイルム株式会社 | ポジ型レジスト組成物及び該ポジ型レジスト組成物を用いたパターン形成方法 |
| US7838198B2 (en) * | 2007-12-13 | 2010-11-23 | International Business Machines Corporation | Photoresist compositions and method for multiple exposures with multiple layer resist systems |
| US7838200B2 (en) * | 2007-12-13 | 2010-11-23 | International Business Machines Corporation | Photoresist compositions and method for multiple exposures with multiple layer resist systems |
| US8236476B2 (en) | 2008-01-08 | 2012-08-07 | International Business Machines Corporation | Multiple exposure photolithography methods and photoresist compositions |
| JP5573356B2 (ja) * | 2009-05-26 | 2014-08-20 | 信越化学工業株式会社 | レジスト材料及びパターン形成方法 |
| US8394573B2 (en) | 2010-09-16 | 2013-03-12 | International Business Machines Corporation | Photoresist compositions and methods for shrinking a photoresist critical dimension |
| KR20140007801A (ko) * | 2010-12-01 | 2014-01-20 | 제이에스알 가부시끼가이샤 | 감방사선성 수지 조성물, 이것을 이용한 패턴 형성 방법, 중합체 및 화합물 |
| US10442823B2 (en) | 2014-10-07 | 2019-10-15 | Nbd Nanotechnologies, Inc. | Functionalized F-POSS monomer compositions and uses thereof |
| US10174059B2 (en) * | 2015-03-09 | 2019-01-08 | Nbd Nanotechnologies, Inc. | Functionalized F-POSS monomer compositions and uses thereof |
| TWI712860B (zh) * | 2015-02-26 | 2020-12-11 | 日商富士軟片股份有限公司 | 圖案形成方法、電子元件的製造方法及有機溶劑顯影用感光化射線性或感放射線性樹脂組成物 |
| US10281770B2 (en) * | 2016-03-11 | 2019-05-07 | Lg Display Co., Ltd. | Liquid crystal display device and method of fabricating the same |
| JP7056024B2 (ja) * | 2016-07-29 | 2022-04-19 | 住友化学株式会社 | 化合物、樹脂、レジスト組成物及びレジストパターンの製造方法 |
| CN109942741A (zh) * | 2019-02-22 | 2019-06-28 | 江苏南大光电材料股份有限公司 | 一种光刻胶用树脂的制备方法 |
| KR20240124379A (ko) * | 2021-12-24 | 2024-08-16 | 다우 도레이 캄파니 리미티드 | 비닐 변성 오가노폴리실록산, 이를 원료로 하는 라디칼 중합성 폴리머 또는 라디칼 중합성 코폴리머 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4481049A (en) | 1984-03-02 | 1984-11-06 | At&T Bell Laboratories | Bilevel resist |
| JP2980149B2 (ja) | 1993-09-24 | 1999-11-22 | 富士通株式会社 | レジスト材料およびパターン形成方法 |
| JPH10186669A (ja) * | 1996-12-25 | 1998-07-14 | Nippon Telegr & Teleph Corp <Ntt> | パターン形成方法 |
| JP3940546B2 (ja) * | 1999-06-07 | 2007-07-04 | 株式会社東芝 | パターン形成方法およびパターン形成材料 |
| JP3965547B2 (ja) * | 1999-12-01 | 2007-08-29 | 信越化学工業株式会社 | 高分子化合物、レジスト材料及びパターン形成方法 |
| JP3410707B2 (ja) | 2000-04-19 | 2003-05-26 | 松下電器産業株式会社 | パターン形成材料及びパターン形成方法 |
| JP3874070B2 (ja) * | 2001-03-01 | 2007-01-31 | 信越化学工業株式会社 | 珪素含有高分子化合物、レジスト材料及びパターン形成方法 |
| US7008749B2 (en) * | 2001-03-12 | 2006-03-07 | The University Of North Carolina At Charlotte | High resolution resists for next generation lithographies |
| EP1299773A4 (en) * | 2001-04-04 | 2006-06-21 | Fujifilm Electronic Materials | SILICLE-CONTAINING ACETAL PROTECTIVE POLYMERS AND PHOTORESISTAL COMPOSITIONS THEREOF |
| TWI307819B (en) * | 2002-05-28 | 2009-03-21 | Arch Spec Chem Inc | Acetal protected polymers and photoresist compositions thereof |
| TW200413417A (en) * | 2002-10-31 | 2004-08-01 | Arch Spec Chem Inc | Novel copolymer, photoresist compositions thereof and deep UV bilayer system thereof |
-
2003
- 2003-03-04 JP JP2003057343A patent/JP4225806B2/ja not_active Expired - Fee Related
-
2004
- 2004-03-03 EP EP04004962A patent/EP1457822A3/en not_active Withdrawn
- 2004-03-04 US US10/792,306 patent/US6969577B2/en not_active Expired - Lifetime