JP2004251915A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2004251915A5 JP2004251915A5 JP2004155475A JP2004155475A JP2004251915A5 JP 2004251915 A5 JP2004251915 A5 JP 2004251915A5 JP 2004155475 A JP2004155475 A JP 2004155475A JP 2004155475 A JP2004155475 A JP 2004155475A JP 2004251915 A5 JP2004251915 A5 JP 2004251915A5
- Authority
- JP
- Japan
- Prior art keywords
- sample
- probe
- display
- sample preparation
- input
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims 69
- 238000002360 preparation method Methods 0.000 claims 19
- 239000011163 secondary particle Substances 0.000 claims 11
- 239000002245 particle Substances 0.000 claims 9
- 230000001678 irradiating effect Effects 0.000 claims 5
- 238000001514 detection method Methods 0.000 claims 4
- 230000003287 optical effect Effects 0.000 claims 2
- 238000000605 extraction Methods 0.000 claims 1
- 238000003384 imaging method Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004155475A JP4604554B2 (ja) | 2004-05-26 | 2004-05-26 | プローブ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004155475A JP4604554B2 (ja) | 2004-05-26 | 2004-05-26 | プローブ装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32632898A Division JP3624721B2 (ja) | 1998-11-17 | 1998-11-17 | プローブ装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004251915A JP2004251915A (ja) | 2004-09-09 |
| JP2004251915A5 true JP2004251915A5 (enrdf_load_stackoverflow) | 2006-01-05 |
| JP4604554B2 JP4604554B2 (ja) | 2011-01-05 |
Family
ID=33028698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004155475A Expired - Lifetime JP4604554B2 (ja) | 2004-05-26 | 2004-05-26 | プローブ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4604554B2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007018935A (ja) * | 2005-07-08 | 2007-01-25 | Hitachi High-Technologies Corp | プローブ付き顕微鏡及びプローブ接触方法 |
| KR20110008017A (ko) * | 2008-02-25 | 2011-01-25 | 더 유니버시티 오브 멜버른 | 단일 광자 소스의 제조 방법 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2774884B2 (ja) * | 1991-08-22 | 1998-07-09 | 株式会社日立製作所 | 試料の分離方法及びこの分離方法で得た分離試料の分析方法 |
| JPH0580853A (ja) * | 1991-09-18 | 1993-04-02 | Fujitsu Ltd | ステージシステム及びステージ制御方法 |
| JPH063417A (ja) * | 1992-06-23 | 1994-01-11 | Graphtec Corp | 回路基板検査装置 |
| JP2506304B2 (ja) * | 1993-03-01 | 1996-06-12 | エキスパートマグネティックス株式会社 | 回路基板の試験装置 |
| JP3401316B2 (ja) * | 1994-01-21 | 2003-04-28 | 日置電機株式会社 | Ｘ−ｙ方式インサーキットテスタの実装部品の高さに対応するプローブ位置調整装置 |
| JPH0997585A (ja) * | 1995-10-02 | 1997-04-08 | Hitachi Ltd | 画像取り込み方法および装置ならびにそれを用いた半導体製造装置 |
| JP3577839B2 (ja) * | 1996-06-04 | 2004-10-20 | 株式会社日立製作所 | 不良検査方法および装置 |
-
2004
- 2004-05-26 JP JP2004155475A patent/JP4604554B2/ja not_active Expired - Lifetime