JP2004250318A5 - - Google Patents

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Publication number
JP2004250318A5
JP2004250318A5 JP2003199987A JP2003199987A JP2004250318A5 JP 2004250318 A5 JP2004250318 A5 JP 2004250318A5 JP 2003199987 A JP2003199987 A JP 2003199987A JP 2003199987 A JP2003199987 A JP 2003199987A JP 2004250318 A5 JP2004250318 A5 JP 2004250318A5
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JP
Japan
Prior art keywords
sintering
sintered body
aln
pressure
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003199987A
Other languages
English (en)
Japanese (ja)
Other versions
JP4402387B2 (ja
JP2004250318A (ja
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Publication date
Application filed filed Critical
Priority to JP2003199987A priority Critical patent/JP4402387B2/ja
Priority claimed from JP2003199987A external-priority patent/JP4402387B2/ja
Publication of JP2004250318A publication Critical patent/JP2004250318A/ja
Publication of JP2004250318A5 publication Critical patent/JP2004250318A5/ja
Application granted granted Critical
Publication of JP4402387B2 publication Critical patent/JP4402387B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003199987A 2002-12-27 2003-07-22 ＡｌＮ焼結体の製造方法 Expired - Fee Related JP4402387B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003199987A JP4402387B2 (ja) 2002-12-27 2003-07-22 ＡｌＮ焼結体の製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002381630 2002-12-27
JP2003199987A JP4402387B2 (ja) 2002-12-27 2003-07-22 ＡｌＮ焼結体の製造方法

Publications (3)

Publication Number Publication Date
JP2004250318A JP2004250318A (ja) 2004-09-09
JP2004250318A5 true JP2004250318A5 (enExample) 2005-08-25
JP4402387B2 JP4402387B2 (ja) 2010-01-20

Family

ID=33031872

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003199987A Expired - Fee Related JP4402387B2 (ja) 2002-12-27 2003-07-22 ＡｌＮ焼結体の製造方法

Country Status (1)

Country Link
JP (1) JP4402387B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015107812A1 (ja) * 2014-01-14 2015-07-23 株式会社アライドマテリアル ＡｌＮ基板

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