JP2004235549A5 - - Google Patents
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- JP2004235549A5 JP2004235549A5 JP2003024299A JP2003024299A JP2004235549A5 JP 2004235549 A5 JP2004235549 A5 JP 2004235549A5 JP 2003024299 A JP2003024299 A JP 2003024299A JP 2003024299 A JP2003024299 A JP 2003024299A JP 2004235549 A5 JP2004235549 A5 JP 2004235549A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003024299A JP2004235549A (ja) | 2003-01-31 | 2003-01-31 | 薄板状物搬送ロボット及び薄板状物処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003024299A JP2004235549A (ja) | 2003-01-31 | 2003-01-31 | 薄板状物搬送ロボット及び薄板状物処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004235549A JP2004235549A (ja) | 2004-08-19 |
| JP2004235549A5 true JP2004235549A5 (ja) | 2005-06-09 |
Family
ID=32952867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003024299A Pending JP2004235549A (ja) | 2003-01-31 | 2003-01-31 | 薄板状物搬送ロボット及び薄板状物処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004235549A (ja) |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0590381A (ja) * | 1991-09-26 | 1993-04-09 | Tokyo Electron Ltd | 搬送装置 |
| JPH0492446A (ja) * | 1990-08-07 | 1992-03-25 | Plasma Syst:Kk | 基板搬送ロボット |
| JPH07122620A (ja) * | 1993-10-25 | 1995-05-12 | Tokyo Electron Ltd | 動力伝達機構 |
| JPH106267A (ja) * | 1996-06-20 | 1998-01-13 | Tokico Ltd | 工業用ロボット |
| JPH1133948A (ja) * | 1997-07-23 | 1999-02-09 | Nikon Corp | 搬送ロボット及びその使用方法 |
| JP3539537B2 (ja) * | 1997-11-06 | 2004-07-07 | 株式会社三協精機製作所 | 多関節ロボット |
| JPH11265924A (ja) * | 1998-03-18 | 1999-09-28 | Mecs Corp | 薄型基板搬送多関節ロボット |
| JP2000133690A (ja) * | 1998-10-26 | 2000-05-12 | Rorze Corp | ウエハ搬送装置 |
| JP2002166376A (ja) * | 2000-11-30 | 2002-06-11 | Hirata Corp | 基板搬送用ロボット |
| JP3565177B2 (ja) * | 2001-03-19 | 2004-09-15 | ダイキン工業株式会社 | 真空搬送装置 |
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2003
- 2003-01-31 JP JP2003024299A patent/JP2004235549A/ja active Pending