JP2004226112A5 - - Google Patents

Download PDF

Info

Publication number
JP2004226112A5
JP2004226112A5 JP2003011368A JP2003011368A JP2004226112A5 JP 2004226112 A5 JP2004226112 A5 JP 2004226112A5 JP 2003011368 A JP2003011368 A JP 2003011368A JP 2003011368 A JP2003011368 A JP 2003011368A JP 2004226112 A5 JP2004226112 A5 JP 2004226112A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003011368A
Other versions
JP4062606B2 (ja
JP2004226112A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2003011368A priority Critical patent/JP4062606B2/ja
Priority claimed from JP2003011368A external-priority patent/JP4062606B2/ja
Priority to US10/745,707 priority patent/US6992779B2/en
Priority to CNB2004100024799A priority patent/CN1243951C/zh
Publication of JP2004226112A publication Critical patent/JP2004226112A/ja
Publication of JP2004226112A5 publication Critical patent/JP2004226112A5/ja
Application granted granted Critical
Publication of JP4062606B2 publication Critical patent/JP4062606B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2003011368A 2003-01-20 2003-01-20 低可干渉測定／高可干渉測定共用干渉計装置およびその測定方法 Expired - Fee Related JP4062606B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2003011368A JP4062606B2 (ja) 2003-01-20 2003-01-20 低可干渉測定／高可干渉測定共用干渉計装置およびその測定方法
US10/745,707 US6992779B2 (en) 2003-01-20 2003-12-29 Interferometer apparatus for both low and high coherence measurement and method thereof
CNB2004100024799A CN1243951C (zh) 2003-01-20 2004-01-20 干涉仪设备以及干涉仪设备中的测量方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003011368A JP4062606B2 (ja) 2003-01-20 2003-01-20 低可干渉測定／高可干渉測定共用干渉計装置およびその測定方法

Publications (3)

Publication Number Publication Date
JP2004226112A JP2004226112A (ja) 2004-08-12
JP2004226112A5 true JP2004226112A5 (ja) 2006-01-12
JP4062606B2 JP4062606B2 (ja) 2008-03-19

Family

ID=32709219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003011368A Expired - Fee Related JP4062606B2 (ja) 2003-01-20 2003-01-20 低可干渉測定／高可干渉測定共用干渉計装置およびその測定方法

Country Status (3)

Country Link
US (1) US6992779B2 (ja)
JP (1) JP4062606B2 (ja)
CN (1) CN1243951C (ja)

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10328412B4 (de) * 2003-06-19 2005-11-17 Medizinisches Laserzentrum Lübeck GmbH Verfahren zur interferometrischen Bestimmmung optischer Ebenenabstände mit Subnanometer-Genauigkeit
US7492463B2 (en) 2004-04-15 2009-02-17 Davidson Instruments Inc. Method and apparatus for continuous readout of Fabry-Perot fiber optic sensor
US7538890B2 (en) * 2004-06-07 2009-05-26 Fujinon Corporation Wavefront-measuring interferometer apparatus, and light beam measurement apparatus and method thereof
JP4311739B2 (ja) * 2004-09-24 2009-08-12 フジノン株式会社 干渉計装置用光量比調整フィルタ、干渉計装置および光干渉測定方法
JP4526921B2 (ja) * 2004-10-25 2010-08-18 フジノン株式会社 被検体保持方法および装置ならびに該被検体保持装置を備えた被検面形状測定装置
JP4556169B2 (ja) * 2004-10-29 2010-10-06 富士フイルム株式会社 保持歪み測定方法および装置
JP4566722B2 (ja) * 2004-12-08 2010-10-20 キヤノン株式会社 測定方法及び測定装置
EP1674833A3 (en) 2004-12-21 2007-05-30 Davidson Instruments, Inc. Fiber optic sensor system
US7835598B2 (en) 2004-12-21 2010-11-16 Halliburton Energy Services, Inc. Multi-channel array processor
EP1869737B1 (en) 2005-03-16 2021-05-12 Davidson Instruments, Inc. High intensity fabry-perot sensor
WO2006102997A1 (en) * 2005-03-30 2006-10-05 Carl Zeiss Smt Ag Method of manufacturing an optical element
US20070019210A1 (en) * 2005-07-19 2007-01-25 Kuhn William P Time-delayed source and interferometric measurement of windows and domes
JP4804058B2 (ja) * 2005-07-28 2011-10-26 キヤノン株式会社 干渉測定装置
JP4914040B2 (ja) * 2005-07-28 2012-04-11 キヤノン株式会社 干渉測定装置
US7684051B2 (en) 2006-04-18 2010-03-23 Halliburton Energy Services, Inc. Fiber optic seismic sensor based on MEMS cantilever
WO2007126475A2 (en) 2006-04-26 2007-11-08 Davidson Instruments, Inc. Fiber optic mems seismic sensor with mass supported by hinged beams
US7970199B2 (en) * 2006-06-05 2011-06-28 Hitachi High-Technologies Corporation Method and apparatus for detecting defect on a surface of a specimen
EP1890105A1 (en) * 2006-08-14 2008-02-20 Carl Zeiss SMT AG Interferometer apparatus and interferometric method
US8115937B2 (en) 2006-08-16 2012-02-14 Davidson Instruments Methods and apparatus for measuring multiple Fabry-Perot gaps
US7787128B2 (en) 2007-01-24 2010-08-31 Halliburton Energy Services, Inc. Transducer for measuring environmental parameters
KR100978600B1 (ko) * 2007-10-23 2010-08-27 연세대학교 산학협력단 초고분해능 주사 광학 측정 장치
JP5305741B2 (ja) * 2008-05-29 2013-10-02 キヤノン株式会社 測定方法
TWI384195B (zh) * 2008-10-08 2013-02-01 Ind Tech Res Inst 振動位移與振動頻率決定方法與其裝置
US8200731B1 (en) 2008-11-20 2012-06-12 The United States Of America As Represented By The Director, National Security Agency Device for determining a coherence measurement for a digital signal that does not require spectral estimation
WO2010131339A1 (ja) * 2009-05-13 2010-11-18 Koyama Naoyuki レーザ測距方法及びレーザ測距装置
JP5322783B2 (ja) * 2009-06-05 2013-10-23 キヤノン株式会社 撮像装置及び該撮像装置の制御方法
US8675205B2 (en) * 2009-06-15 2014-03-18 Artur G. Olszak Optical coherence tomography using spectrally controlled interferometry
EP2454554B1 (en) * 2009-06-19 2015-08-12 Zygo Corporation Equal-path interferometer
CN101587012B (zh) * 2009-06-30 2011-06-08 成都光明光电股份有限公司 光学玻璃光学均匀性测试装置及其测试方法
EP2668465A1 (en) 2011-01-25 2013-12-04 Massachusetts Institute Of Technology Single-shot full-field reflection phase microscopy
JP5376000B2 (ja) * 2012-03-29 2013-12-25 富士ゼロックス株式会社 画像読取装置および画像形成装置
US9683841B2 (en) 2012-09-07 2017-06-20 Apple Inc. Imaging range finder fabrication
JP6186215B2 (ja) * 2013-09-04 2017-08-23 株式会社日立エルジーデータストレージ 光計測装置及び光断層観察方法
DE102014007106A1 (de) * 2014-05-12 2015-11-12 Friedrich-Schiller-Universität Jena Verfahren und Vorrichtung zur Bestimmung der ein- oder mehrdimensionalen Struktur von Objekten mittels Strahlung kurzer Wellenlänge
CN104296678B (zh) * 2014-09-29 2017-02-22 中国科学院光电研究院 基于低频差声光移频器移相的外差干涉仪
CN104296677B (zh) * 2014-09-29 2017-10-13 中国科学院光电研究院 基于低频差声光移频器移相的共光路外差干涉仪
CN104296676B (zh) * 2014-09-29 2017-04-26 中国科学院光电研究院 基于低频差声光移频器移相的外差点衍射干涉仪
CN104330021B (zh) * 2014-11-25 2017-06-09 中国科学院光电研究院 基于声光外差移相的平晶自标定共光路干涉仪
JP5981045B1 (ja) * 2015-03-10 2016-08-31 技術研究組合次世代３Ｄ積層造形技術総合開発機構 高出力光用減衰器、測定装置および３次元造形装置
DE102015222366A1 (de) * 2015-11-12 2017-05-18 Universität Stuttgart Verkippte Objektwellen nutzendes und ein Fizeau-Interferometerobjektiv aufweisendes Interferometer
CN106197258B (zh) * 2016-07-14 2019-06-18 中国科学院上海光学精密机械研究所 双通道双波长干涉检测装置
WO2018102356A1 (en) * 2016-11-30 2018-06-07 Apre Instruments, Llc True heterodyne spectrally controlled interferometry
KR101926405B1 (ko) * 2017-05-23 2018-12-07 (주) 루리텍 거리 측정 카메라 거리의 측정 오차 보정 장치
EP3543760A1 (en) * 2018-03-22 2019-09-25 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Refocusing device
US11499813B2 (en) 2017-10-09 2022-11-15 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Refocusing device
US11262191B1 (en) * 2018-07-12 2022-03-01 Onto Innovation Inc. On-axis dynamic interferometer and optical imaging systems employing the same
CN111562215A (zh) * 2020-04-30 2020-08-21 南京理工大学 基于偏振的动态干涉仪中的复合控制光源系统及实验方法
US11307367B2 (en) * 2020-08-17 2022-04-19 X Development Llc Method of precision beam collimation using fiber-optic circulator and wavelength tunable source

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0921606A (ja) 1995-07-07 1997-01-21 Fuji Photo Optical Co Ltd 透明薄板測定用干渉計
US6781700B2 (en) * 2001-06-20 2004-08-24 Kuechel Michael Scanning interferometer for aspheric surfaces and wavefronts
EP1444482B1 (en) * 2001-11-16 2010-05-26 Zygo Corporation Scanning interferometer for aspheric surfaces and wavefronts
JP3621693B2 (ja) 2002-07-01 2005-02-16 フジノン株式会社 干渉計装置

Similar Documents

Publication Publication Date Title
BE2015C007I2 (ja)
BE2014C055I2 (ja)
BE2014C027I2 (ja)
BE2014C003I2 (ja)
BE2013C075I2 (ja)
BE2013C069I2 (ja)
BE2013C067I2 (ja)
BE2013C038I2 (ja)
BE2013C036I2 (ja)
BE2011C030I2 (ja)
JP2004032725A5 (ja)
JP2004130133A5 (ja)
BE2015C005I2 (ja)
JP2004057827A5 (ja)
BE2012C053I2 (ja)
JP2003273753A5 (ja)
JP2004003486A5 (ja)
JP2004141641A5 (ja)
DE602004021087D1 (ja)
JP2004072086A5 (ja)
JP2004029013A5 (ja)
JP2004072730A5 (ja)
JP2004216005A5 (ja)
JP2004046135A5 (ja)
BE2015C024I2 (ja)